• 제목/요약/키워드: Science and engineering

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Deposition of Fine Linewidth Silver Layer using a Modified Laser-induced Forward Transfer Technique

  • Cheon, Jonggyu;Nguyen, Manh-Cuong;Nguyen, An Hoang-Thuy;Choi, Sujin;Ji, Hyung-Min;Kim, Sang-Woo;Yu, Kyoung-Moon;Kim, Jin-Hyun;Cho, Seong-Yong;Choi, Rino
    • Journal of the Korean Physical Society
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    • 제73권9호
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    • pp.1279-1282
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    • 2018

  • This paper reports the deposition of a metal line using a multilayer stack and laser-induced forward transfer (LIFT) using a low cost continuous wave blue laser with a wavelength of 450 nm. The donor structure was composed of a light-to-heat (LTH) layer, a release layer, and a transfer layer in series. Amorphous silicon as the LTH layer absorbs photon energy and converts it to heat. A release layer was melted so that a silver transfer layer would be transferred to the receiver substrate. The transferred silver layer showed reasonable physical and electrical characteristics. A low cost fine linewidth metal layer could be achieved using this modified LIFT technique and blue laser.

  • https://doi.org/10.3938/jkps.73.1279 인용 KSCI