• Journal of the Korea Academia-Industrial cooperation Society
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• v.4 no.1
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• pp.22-26
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• 2003

Overlap Errors and side-lobes have been simultaneously solved by the rule-based correction using the rules extracted from test patterns. Lithography process parameters affecting attPSM lithography process have been determined by the fitting method to the real process data. The correction using scattering bars has been compared to the Cr shield method. The optimal insertion rule of the scattering bal's has made it possible to suppress the side-lobes and to enhance DOF at the same time. Therefore, in this paper, the solution to both side-lobe and overlap Error has been proposed using rule-based confection. Compared to the existing Cr shield method, the proposed rule-based correction with scattering bars can reduce the process complexity and time for mask production.

• 한국정보디스플레이학회:학술대회논문집
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• 2009.10a
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• pp.655-656
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• 2009

Here we report a nano-sized polymer-dispersed liquid crystal (NPDLC) with an excellent scattering effect due to the maximized Mie scattering. We used a modified emulsification method combined with a limited coalescence mechanism. The fabrication process is simpler to obtain uniform nano-sized droplets rather than the conventional polymerizationinduced phase separation method.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.21 no.3
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• pp.43-48
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• 2022

A scattering dust collector in automobile brake pads was investigated in this study. The dust scattering was measured by mounting a booth with a particle counter for both the vehicle-induced wind and brake caliper locations. In addition, the collection effect of the dust scattering was analyzed using the designed dust collector. The results of this study can be used to develop an advanced dust collector and the field test modes for dust scattering in an automotive brake system.

• International Journal of Concrete Structures and Materials
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• v.8 no.4
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• pp.309-313
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• 2014

The volume fraction of the coarse aggregate in the conventional plastic concrete is controlled relatively low to ensure a required workability. In this paper, a new type of coarse aggregate interlocking concrete with strength ranging from C30 to C80 was prepared with scattering-filling aggregate process. The strength of concrete prepared with this method increases obviously whereas the shrinkage decreases significantly, the cement dosage in the concrete decreased 20 % at the same time. The microhardness of the ITZ between the cement paste and scattering-filling aggregate is higher than that of the original aggregate, the ITZ become narrower and tighter also. The interlocking and more even distribution of the coarse aggregate and the water absorption of the addition of extra amount of coarse aggregates contribute to the strength and performance improvement of the concrete prepared with scattering-filling aggregate process.

• Laser Solutions
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• v.15 no.4
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• pp.6-11
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• 2012

Laser beam can be either absorbed or scattered in porous ceramic material and its optical characteristics need to be understood. Electro-magnetic multiphysics software was used to simulate and understand the actual scattering phenomena in porous materials. 785nm femtosecond laser was irradiated on the surface of ceramic material and strong scattering occurred in drilling process. The computer results showed the scattering and absorption phenomena of Aluminum oxide were a mixture of dielectric and metallic material. The computer simulation showed the laser beam was almost extinct at the aspect rate of 5 approximately.

• Proceedings of the KAIS Fall Conference
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• 2002.11a
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• pp.201-204
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• 2002

Overlay margin 확보를 위한 oversizing과, design rule checking, jog filtering를 통하여 side-lobe를 추출하였다. 이렇게 추출한 side-lobe를 extent하고, Cr pattern을 정의하여 side-lobe 현상을 해결할 수 있었다. 하지만 이 방법은 mask제조 공정이 복잡하므로 Cr shield방식의 단점인 복잡한 mask제작공정과 구조를 단순화하기 위하여 scattering bar를 이용하였다. 따라서, scattering bar를 삽입하기 위한 rule을 생성하여 metal layer에 적용하고 aerial image simulation을 통해 side-lobe 현상이 억제되었음을 확인하였다. 그리고 앞에서와는 반대로 background clear의 경우에 발생하는 side-lobe에 scattering bar를 적용하여 억제됨을 확인하였다.

• Transactions of the Korean Society of Mechanical Engineers
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• v.16 no.2
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• pp.267-280
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• 1992

This paper describes a numerical analysis of the light scattering patterns of roughness profiles. This analysis was based upon the light scattering theory developed by Beckmann. In the analysis, the roughness profile was regarded as a profile whose irregularities depend on the production process and the shape of cutting tool. Generally, waviness of an actual surface seriously distorts the scattered pattern of roughness profile. In order to avoid the effects of waviness of actual surfaces, several theoretically calculated scattering patterns, instead of actual scattering patterns, were used to analyze the scattering patterns of typical engineering roughness profiles. The characteristics of the light scattering patterns for five model surfaces were studied.

• Bulletin of the Korean Chemical Society
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• v.22 no.8
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• pp.883-888
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• 2001

We describe an ion-surface scattering apparatus newly developed to investigate the reactive scattering process of low-energy alkali-metal ions at surfaces. The apparatus consists of an alkali-metal ion gun that is rotatable by 360°, a quadrupole mass spectrometer (QMS) with an ion energy analyzer, a sample manipulator with a heating-and-cooling stage, and an ultrahigh vacuum (UHV) chamber that houses these components. Preliminary experimental results obtained from the apparatus are presented on angular and energy distributions of the ions scattered from clean Pt(111) and water-adsorbed Pt surfaces.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.23 no.6 s.165
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• pp.968-978
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• 1999

The effective elastic properties of materials containing spherical inclusions were calculated by the elastic wave scattering theory. In the formulation additional scattering fields by the presence of random multiple scatterers that affects the effective properties were found by the single scattering approximation. In calculating the scattering fields the ensemble average on the displacements and strains inside the scatterer was found from the static approximation at long wavelength limit. The displacements were assumed to be equal to the incident field, while the strains were calculated by Eshelby's equivalent inclusion principle on the single inclusion problem. Four different models were considered and they reflected different degrees of multiple scattering effects based on the approximation introduced in the process of embedding the inclusion in the matrix. The expressions for the effective elastic constants were given in each model, and their relations to the results obtained from other scattering theory and elasticity theory were discussed. The theoretical predictions were compared with experimental results on the epoxy matrix composites containing tungsten particles of different sizes and volume fractions

• Nuclear Engineering and Technology
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• v.10 no.3
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• pp.145-151
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• 1978

Based on the Butler scattering kernel for D$_2$O, a computer code DEUKEB has been developed to compute the scattering laws, differential scattering cross sections and total scattering cross sections. Interference scattering between ally two atoms of a D$_2$O molecule is important in resolving the distribution of scattered neutrons in thermal energy region. Energy-transfer scattering cross sections are, therefore, studied in the various incident neutron energies. This study may be put in practice to utilize the kernel in determining the neutron spectrum in a reactor system. The study also shows that the scattering process in D$_2$O is somewhat different from that in $H_2O$.