• 한국산학기술학회논문지
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• 제4권1호
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• pp.22-26
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• 2003

Attenuated PSM lithography 공정에서 overlay margin 확보 및 side-lobe 제거를 위해 기존의 Cr shield 방식의 단점인 복잡한 mask 제작공정과 구조를 단순화하기 위한 방법으로 scattering bar 방식을 제안하였다. Scattering bar는 Cr 보조패턴처럼 완전히 빛을 차단하는 것이 아니라 약간의 빛을 투과시켜 보강된 intensity를 상쇄하므로 side-lobe를 억제하는 방법으로 metal pattern을 생성할 때 scattering bar도 동시에 만들어 mask제작에 필요한 공정횟수를 줄이고 mask구조 역시 단순하게 한다 그리고 동시에 DOF(depth of focus)를 향상시킨다. Background clear pattern의 경우에 발생하는 side-lobe도 scattering bar를 이용하여 효율적으로 제거되었다.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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• pp.655-656
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• 2009

Here we report a nano-sized polymer-dispersed liquid crystal (NPDLC) with an excellent scattering effect due to the maximized Mie scattering. We used a modified emulsification method combined with a limited coalescence mechanism. The fabrication process is simpler to obtain uniform nano-sized droplets rather than the conventional polymerizationinduced phase separation method.

• 한국기계가공학회지
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• 제21권3호
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• pp.43-48
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• 2022

A scattering dust collector in automobile brake pads was investigated in this study. The dust scattering was measured by mounting a booth with a particle counter for both the vehicle-induced wind and brake caliper locations. In addition, the collection effect of the dust scattering was analyzed using the designed dust collector. The results of this study can be used to develop an advanced dust collector and the field test modes for dust scattering in an automotive brake system.

• International Journal of Concrete Structures and Materials
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• 제8권4호
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• pp.309-313
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• 2014

The volume fraction of the coarse aggregate in the conventional plastic concrete is controlled relatively low to ensure a required workability. In this paper, a new type of coarse aggregate interlocking concrete with strength ranging from C30 to C80 was prepared with scattering-filling aggregate process. The strength of concrete prepared with this method increases obviously whereas the shrinkage decreases significantly, the cement dosage in the concrete decreased 20 % at the same time. The microhardness of the ITZ between the cement paste and scattering-filling aggregate is higher than that of the original aggregate, the ITZ become narrower and tighter also. The interlocking and more even distribution of the coarse aggregate and the water absorption of the addition of extra amount of coarse aggregates contribute to the strength and performance improvement of the concrete prepared with scattering-filling aggregate process.

• 한국레이저가공학회지
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• 제15권4호
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• pp.6-11
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• 2012

Laser beam can be either absorbed or scattered in porous ceramic material and its optical characteristics need to be understood. Electro-magnetic multiphysics software was used to simulate and understand the actual scattering phenomena in porous materials. 785nm femtosecond laser was irradiated on the surface of ceramic material and strong scattering occurred in drilling process. The computer results showed the scattering and absorption phenomena of Aluminum oxide were a mixture of dielectric and metallic material. The computer simulation showed the laser beam was almost extinct at the aspect rate of 5 approximately.

• 한국산학기술학회:학술대회논문집
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• 한국산학기술학회 2002년도 추계학술발표논문집
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• pp.201-204
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• 2002

Overlay margin 확보를 위한 oversizing과, design rule checking, jog filtering를 통하여 side-lobe를 추출하였다. 이렇게 추출한 side-lobe를 extent하고, Cr pattern을 정의하여 side-lobe 현상을 해결할 수 있었다. 하지만 이 방법은 mask제조 공정이 복잡하므로 Cr shield방식의 단점인 복잡한 mask제작공정과 구조를 단순화하기 위하여 scattering bar를 이용하였다. 따라서, scattering bar를 삽입하기 위한 rule을 생성하여 metal layer에 적용하고 aerial image simulation을 통해 side-lobe 현상이 억제되었음을 확인하였다. 그리고 앞에서와는 반대로 background clear의 경우에 발생하는 side-lobe에 scattering bar를 적용하여 억제됨을 확인하였다.

• 대한기계학회논문집
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• 제16권2호
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• pp.267-280
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• 1992

This paper describes a numerical analysis of the light scattering patterns of roughness profiles. This analysis was based upon the light scattering theory developed by Beckmann. In the analysis, the roughness profile was regarded as a profile whose irregularities depend on the production process and the shape of cutting tool. Generally, waviness of an actual surface seriously distorts the scattered pattern of roughness profile. In order to avoid the effects of waviness of actual surfaces, several theoretically calculated scattering patterns, instead of actual scattering patterns, were used to analyze the scattering patterns of typical engineering roughness profiles. The characteristics of the light scattering patterns for five model surfaces were studied.

• Bulletin of the Korean Chemical Society
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• 제22권8호
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• pp.883-888
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• 2001

We describe an ion-surface scattering apparatus newly developed to investigate the reactive scattering process of low-energy alkali-metal ions at surfaces. The apparatus consists of an alkali-metal ion gun that is rotatable by 360°, a quadrupole mass spectrometer (QMS) with an ion energy analyzer, a sample manipulator with a heating-and-cooling stage, and an ultrahigh vacuum (UHV) chamber that houses these components. Preliminary experimental results obtained from the apparatus are presented on angular and energy distributions of the ions scattered from clean Pt(111) and water-adsorbed Pt surfaces.

• 대한기계학회논문집A
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• 제23권6호
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• pp.968-978
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• 1999

The effective elastic properties of materials containing spherical inclusions were calculated by the elastic wave scattering theory. In the formulation additional scattering fields by the presence of random multiple scatterers that affects the effective properties were found by the single scattering approximation. In calculating the scattering fields the ensemble average on the displacements and strains inside the scatterer was found from the static approximation at long wavelength limit. The displacements were assumed to be equal to the incident field, while the strains were calculated by Eshelby's equivalent inclusion principle on the single inclusion problem. Four different models were considered and they reflected different degrees of multiple scattering effects based on the approximation introduced in the process of embedding the inclusion in the matrix. The expressions for the effective elastic constants were given in each model, and their relations to the results obtained from other scattering theory and elasticity theory were discussed. The theoretical predictions were compared with experimental results on the epoxy matrix composites containing tungsten particles of different sizes and volume fractions

• Nuclear Engineering and Technology
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• 제10권3호
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• pp.145-151
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• 1978

D$_2$O에 대한 Butler의 scattering kernel에 관해 조사하였다. 이 kernel을 사용한 전자계산 코드 DEUKER를 개발하였으며 이를 이용하여 산란법칙, 미분산란 단면적 및 전산란 단면적을 계산하였다. D$_2$O 분자내의 어떤 두개 원자간의 산란 영향은 열에너지 영역에서의 산란 중성자 분포를 결정하는데 있어서 중요한 인자가 된다. 따라서 여러 입사 중성자 에너지에 따른 에너지 전달 산란 단면적에 관해 조사하여 이 kernel의 원자로 내의 중성자 분포 계산을 위한 사용 가능성을 연구하였다. 또한 본 연구를 통하여 D$_2$O와 $H_2O$에서의 중성자 산란 과장의 차이점을 밝혔다.