• Title/Summary/Keyword: Scattering Bar

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Scattering Bar Optical Proximity Correction to Suppress Overlap Error and Side-lobe in Semiconductor Lithography Process (Overlap Margin 확보 및 Side-lobe 억제를 위한 Scattering Bar Optical Proximity Correction)

  • 이흥주
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.4 no.1
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    • pp.22-26
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    • 2003
  • Overlap Errors and side-lobes have been simultaneously solved by the rule-based correction using the rules extracted from test patterns. Lithography process parameters affecting attPSM lithography process have been determined by the fitting method to the real process data. The correction using scattering bars has been compared to the Cr shield method. The optimal insertion rule of the scattering bal's has made it possible to suppress the side-lobes and to enhance DOF at the same time. Therefore, in this paper, the solution to both side-lobe and overlap Error has been proposed using rule-based confection. Compared to the existing Cr shield method, the proposed rule-based correction with scattering bars can reduce the process complexity and time for mask production.

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OPC Technique in The AttPSM Lithography Process Using Scattering Bars (Scattering Bar를 이용한 AttPSM Lithography 공정에서의 OPC)

  • 이미영;이홍주
    • Proceedings of the KAIS Fall Conference
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    • 2002.11a
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    • pp.201-204
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    • 2002
  • Overlay margin 확보를 위한 oversizing과, design rule checking, jog filtering를 통하여 side-lobe를 추출하였다. 이렇게 추출한 side-lobe를 extent하고, Cr pattern을 정의하여 side-lobe 현상을 해결할 수 있었다. 하지만 이 방법은 mask제조 공정이 복잡하므로 Cr shield방식의 단점인 복잡한 mask제작공정과 구조를 단순화하기 위하여 scattering bar를 이용하였다. 따라서, scattering bar를 삽입하기 위한 rule을 생성하여 metal layer에 적용하고 aerial image simulation을 통해 side-lobe 현상이 억제되었음을 확인하였다. 그리고 앞에서와는 반대로 background clear의 경우에 발생하는 side-lobe에 scattering bar를 적용하여 억제됨을 확인하였다.

Effect of Reinforcing Bar on Rayleigh Wave Propagation on Concrete Structures

  • Kim, Jae-Hong;Lee, Kang-Wook
    • Journal of the Korean Recycled Construction Resources Institute
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    • v.3 no.2
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    • pp.159-164
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    • 2015
  • This paper presents results on a study of the Rayleigh wave scattering in concrete with a steel bar using transient elastic waves. To study the characteristics of the scattered waves induced by a steel bar in concrete, a three-dimensional finite element method was adopted. A case for elastic wave propagation parallel to the steel bar is discussed. The effect of the cover thickness and steel bar diameter on the Rayleigh wave was studied. To confirm the numerical investigations, a concrete specimen containing a steel bar was made, and corresponding transient elastic wave experiments were conducted. It is believed that the result of this study can serve as an important reference in a nondestructive evaluation of concrete with a steel bar.

A Experimental/Numerical Study of Behaviors of Spray Impinging on the Diesel Combustion Chamber Wall (디젤 연소실 벽면에 충돌하는 분무거동에 관한 실험적/수치적 연구)

  • 박정규;원석규;원영호
    • Transactions of the Korean Society of Automotive Engineers
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    • v.8 no.5
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    • pp.86-95
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    • 2000
  • A modified spray impingement model has been developed, which is assessed against experiments for the impinging sprays on the small combustion chamber at various gas pressures. To investigate spray behaviors in the diesel combustion chamber, a transparent constant-volume chamber is made which is similar to the combustion chamber of the real diesel engine. The chamber is pressurized by N2 gas from 0 bar to 20 bar to find the effects of ambient pressures. The behaviors of spray injected into this chamber and dispersed after impingement on the cylinder wall is measured two-dimensionally using laser sheet Mie scattering method. The physical submodels have been properly modified to improve the prediction capability of original KIVA code to describe the spray behaviors after impingement on the curved cylinder wall. In terms of spray dynamics and evolution. numerical results give qualitatively good agreements with experimental data.

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Spray and Atomization Characteristics of an Agricultural Nozzle by Changing the Injection Pressures (분사 압력 변화에 따른 농업용 노즐의 분무 및 미립화 특성)

  • Chang, Mengzhao;Park, Suhan
    • Journal of ILASS-Korea
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    • v.26 no.4
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    • pp.189-196
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    • 2021
  • Spray drift of agricultural nozzles has become a big issue because it causes low precision targeting and environmental pollution. In order to reduce the spray drift, study spray characteristics of agricultural nozzles is virtually important. In this study, shadowgraph and Mie-scattering visualization techniques were used to study the macroscopic spray and atomization characteristics of an agricultural nozzle. PDPA was used to measure the atomization characteristics of spray. The injection pressure is set to 1 bar, 3 bar and 5 bar, which covers the working range of the nozzle. For the PDPA experiment, 75 points were measured in an area of 160 mm × 120 mm at 10 mm intervals directly below the nozzle to grasp the overall atomization characteristics of the spray. It was found that the spray width and sheet width showed a linear correlation. As the injection pressure increased, the sheet expansion in the 0-degree direction and the sheet swing in the 90-degree direction jointly promoted the breakup of the sheet. In addition, the area close to the central axis had a large droplet velocity, and since a large droplet velocity promoted atomization of spray, the area close to the central axis had a smaller spray droplet diameter than the left and right regions.

Improvement of Color and Luminance Uniformity of the Edge-Lit Backlight Using the RGB LEDs

  • Son, Chang-Gyun;Yi, Jong-Hoon;Gwag, Jin-Seog;Kwon, Jin-Hyuk;Park, Gyeung-Ju
    • Journal of the Optical Society of Korea
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    • v.15 no.3
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    • pp.272-277
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    • 2011
  • The effect of the M-window color mixing bar on the characteristics of color mixing and hot spots in the edge-lit backlight employing red (R), green (G), blue (G) light emitting diodes (LED) were studied in terms of the structure of the M-window color mixing bar. The rays from RGB LEDs entering the M-window bar were mixed by internal reflection and scattering inside the M-window bar so that the hot spots and color separation were minimized. The M-window bar was designed and fabricated and the simulation results are matched quite well to experimental data.

Equivalence Ratio Measurements in Gas Spray Using Laser Raman Scattering (Laser Raman Scattering을 이용한 가스 분무내 당량비 계측에 관한 연구)

  • Jin, S.H.;Park, K.S.;Song, J.I.;Kim, G.S.
    • Journal of ILASS-Korea
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    • v.2 no.4
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    • pp.7-14
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    • 1997
  • Laser Raman scattering method has been applied to measure equivalence ratio of methane/air mixture in injected spray. We used high power KrF excimer laser$(\lambda=248nm)$ and a high gain ICCD camera to capture low intensity signal. Raman shifts and Raman scattering cross -sections of $H_2,\;O_2,\;N_2,\;CO_2,\;CH_4\;and\;C_3H_8$ are measured precisely. Our results show an excellent agreement with those of other groups. Mole fraction measurement of $O_2\;and\;N_2$ from air shows that $O_2:N_2=0.206:0.794$. We used gas injector which was operated at 1 bar. Methane is used as a fuel. Spray region is $10mm\times37mm$ and this region is divided into 80 points. In Raman signals are obtained and ensemble averaged for each point. 3-d and contour plot of distribution of equuivalence ratio is presented. Our measured results show that the equivalence ratio of methane/air mixture in methane-rich region is reasonable. However, more study is necessary for methane-lean region because background noise level is almost same as Raman intensity of methane.

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Comparison of Liquid- and Vapor-Phase Spray Characteristics of E85 Fuel using Schlieren Visualization Technique (쉴리렌 가시화 기법을 이용한 E85 연료의 액상 및 기상 분무 비교)

  • Park, Suhan;Chang, Mengzhao
    • Journal of Institute of Convergence Technology
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    • v.8 no.1
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    • pp.9-13
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    • 2018
  • The purpose of this study is to investigate the liquid- and vapor-phase spray characteristics, such as spray tip penetration and spray angle using gasoline direct injection (GDI) injector with multi-hole. The vapor-phase spray was captured by the Schlieren visualization system, which consists of high-speed camera, LED lamp, concave mirrors, and knife-edge. The liquid-phase spray was visualized by Mie-scattering techniques. Both spray images of vapor- and liquid-phase were visualized under 373 K of ambient temperature, 1 bar of ambient pressure, and 100/200 bar of injection pressure. The energizing duration was fixed at 1.5 ms. From the analysis of experimental results, it revealed that the increased injection pressure induced an early vaporization due to the improvement of droplet atomization. The spray tip penetration and spray angle in vapor-phase were higher than those in liquid-phase. The difference in the spray tip penetration between vapor- and liquid-spray gradually increased with the time elapsed after the injection. Even with the spray angle characteristics, it was found that the difference between the spray angle of liquid and vapor spray gradually grew after they entered steady-state conditions.

Detection of Icebergs Using Full-Polarimetric RADARSAT-2 SAR Data in West Antarctica (고해상도 다중편파 RADARSAT-2 SAR자료를 이용한 서남극해의 빙산 탐지)

  • Kim, Jin-Woo;Kim, Duk-jin;Kim, Seung-Hee;Hwang, Byong-Jun;Yackel, John
    • Korean Journal of Remote Sensing
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    • v.28 no.1
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    • pp.21-28
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    • 2012
  • In this study, detection of icebergs that have various scattering characteristics around Wilkinson glacier in West Antarctica is investigated using C-band fully-polarimetric RADARSAT-2 SAR data. Various polarimetric analyses including Freeman-Durden decomposition, H/A/$\bar{\alpha}$ decomposition, entropy (H) and anisotropy (A) method, and Wishart unsupervised classification, were applied for the RADARSAT-2 data used in this study. The polarimetric decomposition methods were successfully classified most of the iceberg, yet some iceberg with similar intensity of volume and surface scattering as sea ice were indistinguishable. Unsupervised classification with a combination of the polarimetric parameter, [1-H][1-A], gave a possibility to distinguish those unclassified iceberg.

A Study on the spray characteristics according to injection conditions for LPG injector (분사조건에 따른 LPG 인젝터의 분무특성에 관한 연구)

  • Ryu, Jea-Duk;Yoon, Yong-Won;Lee, Ki-Hyung;Lee, Chang-Sik
    • Journal of ILASS-Korea
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    • v.6 no.3
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    • pp.17-22
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    • 2001
  • Recently LPG engine is developed to fulfill such new requirements as improved fuel efficiency in additional to further reduced exhaust emission. This experimental study is conducted to analyze spray characteristics for pintle type injector used in a LPLi (Liquid Phase LPG injection) engine. Since spray parameters including penetration length and spray angle make a role to design injector and engine intake system, spray visualization experiment is performed under atmosphere ambient and charging condition using Mie scattering method. From the experimental result under various LPG formation, the increased propane component decreases penetration length because boiling point of propane is lower than butane. To simulate intake charging condition in MPI engine, spray visualization is performed under high pressure condition. As a result, as ambient pressure is increased from atmosphere to 3.0 bar, penetration length is decreased. However, as ambient pressure is increased from atmosphere to 3.0 bar, spray angle is increased.

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