• Journal of Sensor Science and Technology
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• v.21 no.3
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• pp.217-222
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• 2012

Optical coherence tomography(OCT) is a noninvasive optical imaging tool for biomedical applications. OCT can provide depth resolved two/three dimensional morphological images on biological samples. In this paper, we integrated an OCT system that was composed of an SLED(Superluminescent Light Emitting Diode, ${\lambda}_0$=1305 nm bandwith= 141 nm), a reference arm adopting a rapid scanning optical delay line(RSOD) to get high speed imaging, and a sample arm that used a micro electro mechanical systems(MEMS) scanning mirror. The sample arm contained a compact probe for imaging dental structures. The performance of the system was evaluated by imaging in-vivo human teeth with dental calculus, and the results indicated distinct appearance of dental calculus from enamel, gum or decayed teeth. The developed probe and system could successfully confirm the presence of dental calculus with a very high spatial resolution($6{\mu}m$).

• ICROS
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• v.8 no.6
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• pp.27-33
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• 2002

• 한국전자현미경학회:학술대회논문집
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• 1997.05a
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• pp.26-26
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• 1997

• Proceedings of the Korean Vacuum Society Conference
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• 2007.02a
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• pp.33-33
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• 2007

• Proceedings of the Korean Vacuum Society Conference
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• 2001.02a
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• pp.29-30
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• 2001

• Proceedings of the Materials Research Society of Korea Conference
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• 1992.05a
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• pp.22-22
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• 1992

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 1998.05a
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• pp.27-27
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• 1998

• Polymer Science and Technology
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• v.3 no.2
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• pp.116-130
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• 1992

• Polymer Science and Technology
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• v.22 no.3
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• pp.285-289
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• 2011

• Journal of the Korean Society for Precision Engineering
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• v.22 no.11 s.176
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• pp.173-181
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• 2005

We report on the design and fabrication of an electrostatic 2-axis MEMS stage possessing a platform with a size of $5{times}5mm^2$. The stage, as a key component, would be used in developing probe-based storage devices in the future. It was fabricated by forming numerous $5{\times}5{\mu}m^2$ etching holes in the central platform, as a result, reducing the total number of masks to 1, thereby simplifying the whole fabrication process. Experimental results show that the driving range of the stage was $32{\mu}m$ at the supplied voltage of 20V and the natural frequency was approximately 300Hz. The mechanical coupling between x- and y-motion was also measured and verified to be $25\%$.