• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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• pp.688-692
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• 2004

In this paper, zinc oxide (ZnO) films with c-axis (002) orientation have been successfully deposited on the Al/Si substrate by rf magnetron sputtering method. The deposited films were characterized by substate temperature. Physical and structural properties of the deposited films were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM) measurement. Electrical Properties of the deposited films were investigated by 4-poing probe and LCR meter measurement. The optimal condition in this experimental result was found at foot of the substrate temperature and shown good film quality for FBAR application.

• 비파괴검사학회지
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• 제21권3호
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• pp.261-268
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• 2001

열-음향방출(thermo-AE) 기법을 이용하여 두께 3mm, $[+45_6/-45_6]_s$ 복합재료 적층판의 열응력 유기 손상에 대한 비파괴평가의 유효성을 연구하였다. 반복적인 열부하 사이클에 의해서 thermo-AE 사상수가 감소하는 경향이 뚜렷하게 나타나서 열부하에 따른 카이저효과가 관찰되었다. 열부하사이클중의 thermo-AE거동을 분석하여 복합재료의 응력자유온도를 결정할 수 있었다. 초음파 C스캔, 광학현미경, 주사형 전자현미경을 통해 섬유파단과 모재파손이 관찰되었으며, 이들 파손 인자는 thermo-AE 신호의 단시간 퓨리에 변환처리에 의해 생성된 3종류의 서로 다른 시간-주파수 특성과 대응하였나 이 특성을 이용하여 복합재료의 냉각열처리 및 반복 열부하사이클시의 손상발생과정 및 내부 마찰거동 내역을 추적할 수 있었다.

• 비파괴검사학회지
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• 제26권4호
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• pp.220-230
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• 2006

3점 굽힘 하중을 받는 단일 PET 및 평판형 압전 복합재료 작동기(PCA)의 파괴거동을 음향방출(AE) 법을 이용하여 살펴보았다. 단일 PET의 경우 최대 굽힘하중에서 발생한 AE신호는 고진폭 및 긴 유지시간을 갖는 특징을 보였으며 FFT에 의한 지배 주파수 대역을 확인한 결과 $100{\sim}230kHz$의 비교적 저주파수 대역이었다. PCA의 경우, stage 1에서 발생한 80dB이상의 고진폭 및 $170{\sim}223kHz$의 저 지배 주파수 대역을 갖는 신호는 PZT층에서의 취성파괴 및 PZT층과 인근 섬유층 사이의 층간분리에 의한 것으로 추정되었다. 상기의 AE거동 해석결과와 광학현미경 및 주사전자현미경에 의한 손상관찰에 근거하여 비대칭으로 적층된 PCA의 파괴거동과 관련한 AE특성을 규명하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1993년도 추계학술대회 논문집
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• pp.650-655
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• 1993

Carbon/epoxy composite(CFRP) coupons previously damaged by low velocity impact were tested under static tensile loading and microscope progress of damage was characterized by ultrasonic C-scan, Scanning Acoustic Microscopy (SAM) and Acoustic Emission(AE) techniques which were based on the application of elastic waves. The degress of impact damage has been correlated with the AE activity during monotonic or loading/unloading tensile testing as well as the result of ultrasonic test. The coupons were subjected to impact velocities ranged from 0.71 to 2.17 m/sec, which introduced the amount of damage rated as 0%, 10%, 30%, and 50% with reference to the total absorbed energy at fracture. Special attention was paid to determine optimal AE parameters to characterize the microscopic fracture process and to predict the residual strength of composite laminates. AE RMS voltage during the early stage of tensile loading was found an effective parameter to quantify the degree of impact damage. It was also found that the Felicity ratio is closely related to the stacking sequence and the residual strength of the CFRP laminates.

• 한국생산제조학회지
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• 제25권6호
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• pp.401-409
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• 2016

The formation of micro-burrs in micro-milling processes causes several problems related to productivity and surface integrity. It should be minimized and suppressed by effective monitoring of the cutting conditions. This paper presents the correlation between the micro-burr length and cutting signals in the micro-milling process of an Al alloy (Al6061-T6). The acoustic emission (AE) signals and cutting force signals are acquired during the experiments. The characteristics of the cutting signals are obtained by analyzing the AE root mean square value and resultant cutting force. In addition, the micro-burr length is measured according to the cutting conditions by analyzing a scanning electron microscopy image of the machined surface. The results of this study can be used to enhance the surface quality of micro parts.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1992년도 추계학술대회 논문집
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• pp.166-171
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• 1992

Mechanical seals are generally used in the fields of industries as sealing devices. The failure of mechanical seals like crack, leakage, breakage fast and severe wear, excessive torque, and squeaking result in big problems. For the development of monitoring system, this study was carried out to identify abnormal phenomina on alumina(AI $\_$2/ O /sub3/) seal ring and resin bonded carbon ring, and to propose the proper parameter for monitoring failure on mechanical seals. Sliding were tests are conducted at 12 experimental conditions that contains 3 different contact pressure and 4 surface conditions. Torque, temperature, and acoustic emission are measured. Optical microstructure and scanning electron microscopy are observed for the wear processing every 10 minute sliding at rotation speed of 1750 RPM.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2003년도 추계학술대회 발표 논문집
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• pp.54-58
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• 2003

본 연구에서는 $SiO_2/Si$ 기판 위에 $1.1\mu\textrm{m}$ 두께의 ZRO 압전층을 다양한 조건 하에서 증착하고, 그 특성을 분석하고, film bulk acoustic wave resonator 소자에 적용하였다. 증착조건으로 $Ar/O_2$ 유량비를 25-75 %로 변화시켰으며, working pressure는 3~15 mtorr, RF power는 213~300 W로 변화시켜가며 실험을 하였다. 증착된 ZnO 박막은 XRD (X-ray diffractomter)와 SEM (scanning electron microscopy)을 통해 특성이 분석되었다. LFE모드의 BAW 공진기는 $50\times50\mu\textrm{m}^2$ 공진면적을 가지며, $W/SiO_2$의 5층 Bragg reflector와 상하부 전극으로 $1800{\AA}$의 Al-3% Cu, 그리고 $1.4\mu\textrm{m}$ 두께의 ZnO 압전박막으로 구성되었다. 2.128-2.151 GHz 주파수 사이에서 공진이 일어났으며, Q factor는 400으로 측정되었다.

• 한국통신학회논문지
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• 제34권11A호
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• pp.904-908
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• 2009

The PZT(lead, zirconium, titanium) based ceramics which, are reported to be ferroelectric materials have their important applications in the areas of surface acoustic waves (SAW), filters, infrared detectors, actuators, ferroelectric random acess memory, speakers, electronic switches etc. Moreover, these PZT materials possess the large electromechanical coupling factor, large spontaneous polarization, low dielectric loss and low internal stress etc. Hence, keeping in view the unique properties of PZT piezoelectric ceramics we also tried to synthesize indigenously the small sized PZT ceramic powder in the laboratory by using the modified sol-gel approach. In this paper, Propyl alcohol based sol-gel method was used for preparation of PZT piezoelectric ceramic. The powder obtained by this sol-gel process was calcined and sintering to reach a pyrochlore-free crystal phase. The characterization of synthesized material was carried out by the XRD analysis and the surface morphology was determined by high resolution scanning electron microscopy.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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• pp.327-327
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• 2007

$LiTaO_3$ single crystal has been studied for surface acoustic wave(SAW) applications. There are two kinds of $LiTaO_3$ single crystals, stoichiometric $LiTaO_3$ (SLT) and congruent $LiTaO_3$ (CLT). These two crystals show quite different dielectrical properties, which might be related with defects in crystals. In this study, we observed the domain boundary of SLT and CLT with scanning nonlinear dielectric microscopy and discussed the stress distribution in $LiTaO_3$ single crystals.

• 반도체디스플레이기술학회지
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• 제23권2호
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• pp.135-142
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• 2024

Cu-Cu bonding, one of the key technologies in advanced packaging, enhances semiconductor chip performance, miniaturization, and energy efficiency by facilitating rapid data transfer and low power consumption. However, the quality of the interface bonding can significantly impact overall bond quality, necessitating strategies to quickly detect and classify in-process defects. This study presents a methodology for detecting defects in wafer junction areas from Scanning Acoustic Microscopy images using a ResNet-50 based deep learning model. Additionally, the use of the defect map is proposed to rapidly inspect and categorize defects occurring during the Cu-Cu bonding process, thereby improving yield and productivity in semiconductor manufacturing.