• Proceedings of the KIEE Conference
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• 1987.07b
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• pp.1591-1594
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• 1987

The Scanning Acoustic Microscope(SAM) is an image device which can display the small opaque material or the interior of solid. This paper showed the design of the acoustic lens which is an important factor of the Scanning Acoustic Microscope, and analyzed the performance of the acoustic lens. Finally, I experimented the image processing of the interior of solid through the Scanning Acoustic Microscope and the change of the acoustic image (resolution,contrast) by the change of F/number.

• Journal of the Korean Society for Heat Treatment
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• v.32 no.3
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• pp.118-123
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• 2019

The aim of this study investigates the feasibility of scanning acoustic microscope (SAM) with high frequency transducer for material degradation. The test specimen was prepared by artificial heat treatment of Co-base superalloy. The high frequency 200 MHz acoustic lens was used to generate the leaky surface acoustic wave (LSAW) on the test specimens. The matrix precipitates coarsened with thermal aging time, and then grow up to several tens of micrometers. The velocity of LSAW decreased with increasing aging time. Also, it has a good correlation between LSAW and hardness. Consequently, V(z) curve methods of SAM using high frequency transducer is useful tool to evaluate the heat treatment effects on microstructure.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.336-341
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• 2004

This research investigates the feasibility of ultrasonic microscope for nondestructive assessment of thermal degradation in artificially aged commercial Co-base superalloy, FSX414. This alloy has been used for high temperature structure applications such as stationary gas turbine blade and nozzle chamber in fossil plant. Microstructural change was found that the fine carbides became coarser and spheroidized in matrix as aging time increased. The leaky surface acoustic wave velocity gradually decreases by a maximum of 4.7% with increasing aging time up to 4,000hours. However, the longitudinal wave velocity has a little change. Also, it has a good correlation between leaky surface acoustic wave velocity and Vickers hardness. Consequently, LSAW can be used to examine the degree of degradation in thermally aged Co-base superalloy.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.7
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• pp.217-225
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• 2000

Scanning Acoustic Microscope (SAM) is used as an important nondestructive test tool in semiconductor reliability evaluation and failure analysis. However, inspections of chip attach adhesive interface fer thin chip has proven difficulty as the reflected signals from the chip top and bottom are superimposed. In this paper, in order to overcome this difficulty, a new signal processing method based on the deconvolution technique combined with the wavelet transform is proposed. The wavelet transform complements a disability of deconvolution technique of which performance largely decreases when the waveform of target signal is not identical to that of reference signal. Performances of the proposed method are demonstrated by through computer simulations using model signal and experiments for the fabricated semiconductor samples, and satisfactory results are obtained.

• Journal of the Korean Society of Fisheries and Ocean Technology
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• v.25 no.4
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• pp.200-208
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• 1989

To the purpose of preparation for investigating aspect of material that not revealed by the light microscope and extending our knowledge in applicable field, a scanning acoustic microscope system of 200MHz was organized and appraised its performance with experiments. Professor N.CHUBACHI in Tohoku University in Sendai, Japan provided the ZnO transducer with lens. The system for transmitting and receiving ultrasonic pulses of 200nsec was organized with a rectangular audio wave generator for modulation of 200MHz carrier wave, gating system for transmitting and receiving, mixer for converting intermediate frequency, a directional coupler, ZnO transducer, radio frequency amplifiers. detecter and personal computer. The Scanning system was driven in micro steps with three stepping motors in the direction of x, y and z axes. The system was a reflecting type scanning acoustic microscope and the operation program processed graphics data from receiving echo intensities. Photograph of fish scale obtained by optical microscope was compared with its image by the scanning acoustic microscope organized here. The result was satisfiable.

• Journal of the Korean Society for Nondestructive Testing
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• v.34 no.2
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• pp.171-175
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• 2014

In this study, we suggest a method to measure the thickness of thin films nondestructively using the dispersion characteristics of a surface acoustic wave propagating along the thin film surface. To measure the thickness of thin films, we deposited thin films with different thicknesses on a Si (100) wafer substrate by controlling the deposit time using the E-beam evaporation method. The thickness of the thin films was measured using a scanning electron microscope. Subsequently, the surface wave velocity of the thin films with different thicknesses was measured using the V(z) curve method of scanning acoustic microscopy. The correlation between the measured thickness and surface acoustic wave velocity was verified. The wave velocity of the film decreased as the film thickness increased. Therefore, thin film thickness can be determined by measuring the dispersion characteristics of the surface acoustic wave velocity.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.11a
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• pp.697-698
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• 2010

• Journal of the Korean Society for Nondestructive Testing
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• v.23 no.5
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• pp.475-479
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• 2003

Traditional ultrasonic evaluation to detect micro/small surface cracks is the pulse-echo technique using the normal immersion transducer with high frequency, or the angle beam transducer with surface wave. It is difficult to make the automatic ultrasonic system that is to detect micro and small surface crack and position on the large structure like steel and ceramic rolls, because of the huge data of inspection and the ambiguous position data of transducer. The aim of this study using the high precision scanning acoustic microscope with 10MHz large aperture transducer was to display the real time A, B, C-scan for the automatic ultrasonic system in order to detect the existence and position of surface crack. The ultrasonic method with large aperture transducer was improved the scanning time and speed over 10times faster than traditional methods.

• The Journal of the Acoustical Society of Korea
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• v.15 no.1E
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• pp.70-76
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• 1996

We proposed to use shear waves instead of longitudinal waves in a STAM (scanning tomographic acoustic microscope system) in which the specimens are solid. For any specimen with a shear modulus, mode conversion will take place at the water-solid interface. Some of the energy of the insonifying longitudinal waves in the water will convert to shear wave energy within the specimen. The shear wave energy is detectable and can be used for tomographic reconstruction. The resolution limitation of STAM depends on the available angular view and the acoustic wavelength. While wave transmission in most solid specimens is limited to about 20°for longitudinal waves, we show that it is about twice that high for shear waves. Since the wavelength of the shear wave is shorter than that of the longitudinal wave, we are able to achieve the high resolution. In order to compare the operation of a shear-wave STAM with that of the conventional longitudinal-wave STAM we have simulated tomographic reconstruction for each. Our simulation results with aluminum specimen and back-and-forth propagation algorithm showed resolution of a shear-wave STAM is better than that of a longitudinal-wave STAM.

• Journal of Welding and Joining
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• v.23 no.2
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• pp.59-65
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• 2005

A leaky surface acoustic wave (LSAW) velocity was measured using a scanning acoustic microscope on the ceramic/metal interface in order to investigate material properties. The inverse Fourier transform (IFFT) of the V(z) curve contains the reflectance function of a liquid-specimen interface. So, the longitudinal, transverse, and Rayleigh wave velocities for each layer are obtained by the inversion of the V(z) curve at the same time. This paper contains mainly the experimental procedure for measurements of the LSAW velocity, and the results obtained for the velocity variation of individual layer after the thermal shock. It is shown that this method is useful in measuring the material properties under external stress.