• Title/Summary/Keyword: SUBSTRATE SIZE

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Investigation on formation mechanism of ZnO thin films deposited by pulsed laser deposition depending on plume-substrate angles (펄스 레이저 증착법에서 증착 각도 변화에 따른 ZnO 박막 형성 메카니즘)

  • Kim, Jae-Won;Kang, Hong-Seong;Lee, Sang-Yeol
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.07a
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    • pp.200-202
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    • 2004
  • ZnO thin films were grown at different plume-substrate angles by pulsed laser deposition(PLD). From the X-ray diffraction(XRD) result, all ZnO thin films were found to be well c-axis oriented and c-axis lattice constant approached the value of bulk ZnO as plume-substrate(P-S) angle decreased. The grain size of ZnO thin films measured by atomic force microscopy increased and the UV intensity of ZnO thin films investigated by photoluminescence increased as P-S angle decreased. It is found that the improvement of structural and optical properties mainly comes from the reduction of the flux of ablated species arriving on a substrate per a laser shot by tilting a substrate parallel to the plume propagation direction.

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Enhancement of the nucleation density for diamond film on the pretreated glass substrate by the application of cyclic modulation of the source-gas flow rate

  • Kim, T.-G.;Kim, S.-H.;Kim, Y.-H.
    • Journal of Korean Vacuum Science & Technology
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    • v.4 no.1
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    • pp.18-22
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    • 2000
  • For the enhancement of the nucleation density of the diamond film, we introduced the cyclic process. The cyclic process was carried out by the on/off control of CH$_4$ flow rate for a relatively short time (10 min), compared with the total reaction time (6 h). Prior to depositing the diamond film, we made the pretreated glass substrate via the unidirectional scratch using ∼l $\mu\textrm{m}$ size diamond powders. Diamond films were deposited on the pretreated glass substrate in a microwave plasma enhanced chemical vapor deposition (MPECVD) system. We observed the enhancement of the nucleation density of the diamond films caused by the cyclic process. Detailed surface morphologies of the substrate were investigated after the cyclic process. Based on these results, we discussed the cause for the enhancement of the nucleation density on the pretreated glass substrate by the cyclic process.

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Effect of a Finite Substrate Size on the Radiation Characteristics of Two-Element Linear E-plane Array Antennas (유한한 기판 크기가 2소자 E-평면 선형 배열 안테나의 방사 특성에 미치는 영향)

  • Yoon, Young-Min;Kim, Boo-Gyoun
    • Journal of the Institute of Electronics and Information Engineers
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    • v.49 no.12
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    • pp.95-110
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    • 2012
  • The effect of a finite substrate size on the radiation characteristics of a two-element linear E-plane array antenna using microstrip patch antennas is investigated. The average active element pattern characteristics of two-element E-plane array antennas printed on different dielectric constant substrates with various substrate sizes and element spacings are analyzed. Using the average active element pattern, the radiation pattern characteristics of the array antenna versus scan angle is analyzed. The simulation results show that the diffracted fields of surface waves from substrate edges have a significant effect on the radiation characteristics of a 2-element E-plane array antenna. The distance between the center of patch antenna and the substrate edges on the E-plane for the enhancement of radiation characteristics of the array antenna is about $0.35{\lambda}_0$.

Effect of Substrate Thickness, Perforation Position and Size on the Bandwidth and Radiation Characteristics of a Proximity Coupled Perforated Microstrip Patch Antenna (기판 두께와 천공의 위치 및 크기가 근접 결합 급전을 이용한 천공된 마이크로스트립 패치 안테나의 대역폭과 방사특성에 미치는 영향)

  • Lee, Kyu-Hoon;Kwak, Eun-Hyuk;Kim, Boo-Gyoun
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.39A no.6
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    • pp.310-321
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    • 2014
  • Effect of substrate thickness, perforation position and size on the bandwidth and radiation characteristics of a proximity coupled perforated microstrip patch antenna (PCPPA) with $2{\times}2$ square perforations inside a patch is investigated. As the thicknesses of antenna substrate and feed substrate increase, the bandwidth of a PCPPA increases without the degradation of radiation characteristics. As the position of a perforation moves toward the edge of a patch along the length direction, the bandwidth of a PCPPA increases without the degradation of radiation characteristics, while the effect of changing the position of a perforation along the width direction on the bandwidth and radiation characteristics of a PCPPA is negligible. As the perforation size is decreased, the bandwidth of a PCPPA is increased and the radiation characteristics of a PCPPA are enhanced.

Study on the Properties of ZnO:Ga Thin Films with Substrate Temperatures (기판 온도에 따른 ZnO:Ga 박막의 특성)

  • Kim, Jeong-Gyoo;Park, Ki-Cheol
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.30 no.12
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    • pp.794-799
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    • 2017
  • Ga-doped ZnO (GZO) films were deposited by an RF magnetron sputtering method on glass substrates using ZnO as a target containing 5 wt% $Ga_2O_3$ powder (for Ga doping). The structural, electrical, and optical properties of the GZO thin films were investigated as a function of the substrate temperatures. The deposition rate decreased with increasing substrate temperatures from room temperature to $350^{\circ}C$. The films showed typical orientation with the c-axis vertical to the glass substrates and the grain size increased up to a substrate temperature of $300^{\circ}C$ but decreased beyond $350^{\circ}C$. The resistivity of GZO thin films deposited at the substrate temperature of $300^{\circ}C$ was $7{\times}10^{-4}{\Omega}cm$, and it showed a dependence on the carrier concentration and mobility. The optical transmittances of the films with thickness of $3,000{\AA}$ were above 80% in the visible region, regardless of the substrate temperatures.

Development of cube textured Ni-W alloy substrates for YBCO coated conductor (YBCO Coated Conductor를 위한 Cube texture Ni-W 합금 기판의 제작 및 특성평가)

  • 김규태;임준형;장석헌;김정호;주진호;김호진;지봉기;전병혁;김찬중
    • Proceedings of the Korea Institute of Applied Superconductivity and Cryogenics Conference
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    • 2003.10a
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    • pp.106-108
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    • 2003
  • We fabricated Ni and Ni-W alloys for use as a substrate in YBCO coated conductor applications and evaluated the effect of W in Ni on texture, microstructure and surface morphology, and hardness of substrate. Pure Ni, Ni-2 at.%W, and Ni-5at.%W alloy substrates were prepared by plasma arc melting, cold rolling, and the recrystallization heat treatment at various temperature (700- 130$0^{\circ}C$). It was observed that Ni-W alloy substrates had stronger cube texture and maintained it at higher annealing temperature, compared to pure Ni substrate : The full-width at half- maximums of in-plane texture was 13.40$^{\circ}$ for Ni substrate and 4.42$^{\circ}$-5.57$^{\circ}$ for Ni-W substrate annealed at 100$0^{\circ}C$. In addition, it was observed that the Ni-W substrate had smaller grain size, shallower boundary depth, and higher hardness, compared to those of pure Ni substrate.

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Study on Thermal behavior of Flexible CIGS Thin Film Solar Cell on Fe-Ni Alloy Substrates using Finite Element Analysis (유한요소해석을 이용한 CIGS 박막 태양전지용 Fe-Ni 합금 기판재 열적 거동 연구)

  • Han, Yun-Ho;Lee, Min-Su;Kim, Dong-Hwan;Yim, Tai-Hong
    • Journal of the Korean institute of surface engineering
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    • v.48 no.1
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    • pp.23-26
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    • 2015
  • What causes the transformation of a solar cell is the behavior difference of thermal expansion occurred between the substrate and the layer of semiconductor used in the solar cell. Therefore, the substrate has to possess a behavior of thermal expansion that is similar with that of semiconductor layer. This study employed electroforming to manufacture Fe-Ni alloy materials of different compositions. To verify the result from a finite element analysis, a two-dimensional Mo substrate was calculated and its verification experiment was conducted. The absolute values from the finite element analysis of Mo/substrate structure and its verification experiment showed a difference. However, the size of residual stress of individual substrate compositions had a similar tendency. Two-dimensional CIGS/Mo/$SiO_2$/substrate was modeled. Looking into the residual stress of CIGS layer occurred while the temperature declined from $550^{\circ}C$ to room temperature, the smallest residual stress was found with the use of Fe-52 wt%Ni substrate material.

RF High Power Amplifier Module using AlN Substrate (AlN 기판을 이용한 RF 고전력 증폭기 모듈)

  • Kim, Seung-Yong;Nam, Choong-Mo
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.22 no.10
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    • pp.826-831
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    • 2009
  • In this paper, a high power RF amplifier module using AlN substrate of high thermal conductivity has been proposed. This RF amplifier module has the advantage of compact size and effective heat dissipation for the packaging of high power chip. To fabricate the thru-hole and scribing line on AlN substrate, the key parameters of $CO_2$ laser were experimented. And then, microstrip lines and spiral planar inductors were fabricated on an AlN substrate using the thin-film process. The fabricated microstrip lines on the AlN substrate has an attenuation value of 0.1 dB/mm up to 10 GHz. The fabricated spiral planar inductor has a high quality factor, a maximum of about 62 at 1 GHz for a 5.65 nH inductor. Packaging of a RF power amplifier was implemented on an AlN substrate with thru-hole. From the measured results, the gain is 24 dB from 13 to 15 GHz and the output power is 33.65 dBm(2.3 W).

Effects of Substrate Temperature on Properties of Sb-doped SnO2 Thin Film

  • Do Kyung, Lee;Young-Soo, Sohn
    • Journal of Sensor Science and Technology
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    • v.31 no.6
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    • pp.371-375
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    • 2022
  • Antimony-doped tin oxide (ATO) thin films, one type of transparent conductive oxide (TCO) films, were prepared on a SiO2-coated glass substrate with different substrate temperatures by a radio-frequency magnetron sputtering system. Structural, optical, and electrical characteristics of the deposited ATO films were analyzed using X-ray diffraction, scanning electron microscopy, alpha-step, ultraviolet-visible spectrometer, and Hall effect measurement. The substrate temperature during deposition did not affect the basic crystal structure of the films but changed the grain size and film thickness. The optical transmittance of the ATO films deposited at different substrate temperatures was over 70%. The lowest sheet resistance and resistivity were 8.43 × 102 Ω/sq, and 0.3991 × 10-2 Ω·cm, respectively, and the highest carrier concentration and mobility were 2.36 × 1021 cm-3 and 6.627 × 10-2 cm2V-1s-1, respectively, at a substrate temperature of 400 ℃.

Interaction between Water Quality and Substrate on Benthic Macroinvertebrates Index (BMI) (수질 및 하상기질이 저서동물지수(BMI)에 미치는 상호작용)

  • Hyoju Lee;Dongsoo Kong
    • Journal of Korean Society on Water Environment
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    • v.39 no.4
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    • pp.261-268
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    • 2023
  • The benthic macroinvertebrates index (BMI) was developed based on the 5-day biochemical oxygen demand (BOD5), which is the amount of biodegradable organic matter in stream water. However, benthic macroinvertebrates mainly live in the streambed substrate and are affected by the interaction of water quality and substrate. This study was conducted to examine the interactive relationship between water quality items (BOD5, total phosphorus (TP), total suspended solids (TSS)) and substrate with BMI by performing statistical analyses (four-way analysis of variance, Pearson's correlation analysis, partial correlation analysis and multiple regression analysis). The data used in the analyses were collected from 19,915 sampling units at 1,937 sites in South Korea from 2010 to 2020. The interaction effect between BOD5 and substrate types was confirmed through a four-way analysis of variance. Partial correlation analysis and multiple regression analysis estimated the degree of influence on the change in BMI value in the order of mean grain size of the substrate as (𝜱m) > BOD5 > TP > TSS. BMI can be regarded as an index that evaluates the comprehensive effects of water quality and streambed status, although it is an index that was developed based on the amount of biodegradable organic matter in a water column.