• Title/Summary/Keyword: SI7

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Diameter Expansion of 6H-SiC Single Crystals by the Modification of Crucible Structure Design (도가니 구조 변경을 통한 6H-SiC 단결정의 직경 확장에 관한 연구)

  • Kim, Jung-Gyu;Kyun, Myung-Ok;Seo, Jung-Doo;An, Joon-Ho;Kim, Jung-Gon;Ku, Kap-Ryeol;Lee, Won-Jae;Kim, Il-Soo;Shin, Byoung-Chul
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.19 no.7
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    • pp.673-679
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    • 2006
  • A sublimation method using the SiC seed crystal and SiC powder as the source material is commonly adopted to grow SiC bulk single crystal. However, it has proved to be difficult to achieve the high quality crystal and the process reliability because SiC single crystal should be grown at very high temperature in closed system. In this study, SiC crystal boules were prepared with different angles in trapezoid-shaped graphite seed holders using sublimation physical vapor transport technique (PVT) and then their crystal quality was systematically investigated. The temperature distribution in the growth system and the crystal shape were varied with angles in trapezoid-shaped graphite seed holders, which was successfully simulated using 'Virtual Reactor'. The SiC polytype proved to be the n-type 6H-SiC from the typical absorption spectrum of SiC crystal. The micropipe densities of SiC wafers in this study were measured to be < $100/cm^2$. Consequently, SiC single crystal with large diameter was successfully achieved with changing angle in trapezoid-shaped graphite seed holders.

Structural and Magnetic Properties of Fe-Diluted Si Alloy Films by Pulsed-Laser Deposition (펄스레이저 증착법에 의한 Fe 희석된 Si 합금의 구조 및 자기 물성 연구)

  • Suh, Joo-Young;Lee, Kyung-Su;Pak, Sang-Woo;Kim, Eun-Kyu
    • Journal of the Korean Vacuum Society
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    • v.21 no.5
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    • pp.258-263
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    • 2012
  • Fe-diluted Si alloys grown on p-type Si (100) substrates by pulsed-laser deposition method were studied for structural, electrical, and magnetic properties. The X-ray diffraction patterns for these alloy samples showed a few of peaks with cubic structures such as FeSi, $Fe_3Si$, and $Fe_4Si$. The Fe-composition in alloys are confirmed as Fe atomic percent about 1.25~6.49 % from energy dispersive spectroscopy measurement. The resistivity as a function of the reciprocal temperature was indicated an exponential increase with two activation energies of 5.21 and 7.79 meV. The maximum value of the magnetization at 10 K was about 100 emu/cc, and the ferromagnetism was also observed until 350 K from total magnetization as a function of temperature with applied magnetic field of 3,000 Oe.

6H-SiC epitaxial growth and crystal structure analysis (6H-SiC 에피층 성장과 결정구조 해석)

  • Kook-Sang Park;Ky-Am Lee
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.7 no.2
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    • pp.197-206
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    • 1997
  • A SiC epilayer on the 6H-SiC crystal substrate was grown by chemical vapor deposition (CVD). The crystal structure of the SiC epilayer was investigated by using the X-ray diffraction patterns and the Roman scattering spectroscopy. The SiC epilayer on the 6H-SiC substrate was grown to be homoepilayer by CVD. In order to distinguish a certain SiC polytype mixed in the SiC crystal grown by the modified Lely method, we have calculated the X-ray diffraction intensities and Brags angles of the typical SiC crystal powders. By comparing the measured X-ray diffraction pattern with the calculated ones, it was identified that the SiC crystal grown by the modified Lely method was the 6H-SiC crystal mixed some 15R-SiC.

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Smoke Hazard Assessment of Cypress Wood Coated with Boron/Silicon Sol Compounds (붕소/실리콘 졸 화합물로 도포된 편백 목재의 연기유해성 평가)

  • Jin, Eui;Chung, Yeong-Jin
    • Fire Science and Engineering
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    • v.34 no.1
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    • pp.1-10
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    • 2020
  • In this study, boron/silicon sol compounds were applied to wood for construction and durable materials, and fire risks were investigated in terms of smoke performance index (SPI), smoke growth index (SGI), and smoke intensity (SI). The compound was synthesized by reacting tetraethoxyorthosilicate with boric acid and boronic acid derivatives. Smoke characteristics were investigated using a cone calorimeter (ISO 5660-1) equipment for cypress wood. The fire intensity fixed the external heat flux at 50 kW/㎡. The smoke performance index measured after the combustion reaction increased between 13.4% and 126.7% compared with cypress wood. The fire risk due to the smoke performance index decreased in the order of cypress, phenylboronic acid/silicon sol (PBA/Si), (2-methylpropyl) boronic acid/silicon sol (IBBA/Si), boric acid/silicon sol (BA/Si). The smoke growth index decreased between 12.0% and 57.5% compared to the base specimen. The risk of fire caused by the smoke growth index decreased in the order of cypress, PBA/Si, IBBA/Si, BA/Si. The fire risk due to smoke intensity decreased between 3.2% and 57.8%, and in the order of cypress, PBA/Si, IBBA/Si, BA/Si. COpeak concentrations ranged between 85 and 93 ppm, and decreased between 37% and 43% compared to the base specimen. A comprehensive assessment of the fire risk on smoke hazards decreased in the order of cypress, PBA/Si, IBBA/Si, BA/Si.

Settling of SiC Particlesin the Al-Si/${SiC}_{p}$ Composite Melts (Al-Si/$\{SiC}_{p}$ 복합재료 용탕에서 SiC 입자의 침강)

  • Kim, Jong-Chan;Gwon, Hyeok-Mu
    • Korean Journal of Materials Research
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    • v.7 no.2
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    • pp.145-151
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    • 1997
  • Remelting of $A-Si/SiC_{p}$ composites followed by isothermal holding and solidification, leads ro the settling of Sic particles to the bottom of the mold. With the isothermal holding time for molten $A-Si/SiC_{p}$ composites. the particle free zone increases rapidly up to approximately first 30 minutes of the holding time. Experimental resulls of the particle settling confirm that the larger SIC particles sink faster tlun the sniiller particles. An increase in volume fraction of Sic particles decreases the setrling velocity of the particles.

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Phosphomolybdic Acid Supported on Silica Gel as an Efficient and Reusable Catalyst for Cyanosilylation of Aldehydes

  • Kadam, Santosh T.;Kim, Sung-Soo
    • Bulletin of the Korean Chemical Society
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    • v.29 no.7
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    • pp.1320-1322
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    • 2008
  • Phosphomolybdic acid supported on silica gel (PMA-$SiO_2$) is an efficient catalyst for the activation of TMSCN for the facile cyanosilylation of various aldehydes. Cyano transfer from TMSCN to aldehyde proceeds smoothly at rt in presence of 0.8 mol % of PMA-$SiO_2$ leading to a range of cyanosilylether in excellent yield (mostly over 93%) within short reaction time (30 min). The catalyst can be recovered and reused several times without loss of activity.

Effects of Bi on Mg2Si Modification and Mechanical Properties of Mg-Al-Si Alloy (Mg-Al-Si 합금에서 Mg2Si의 개량화 및 기계적 특성에 미치는 Bi의 영향)

  • Jun, Joong-Hwan
    • Journal of the Korean Society for Heat Treatment
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    • v.24 no.2
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    • pp.82-86
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    • 2011
  • The influences of Bi addition on morphological modification of $Mg_2Si$ phase and mechanical properties were investigated in Mg-7%Al-0.5%Si casting alloy. It was found that the addition of 0.3%Bi changed the $Mg_2Si$ morphology from coarse Chinese script type to polygonal type, and significantly decreased the size to ~5 ${\mu}m$ or less with the increase of number density. The modification of $Mg_2Si$ phase by the addition of Bi resulted in the improvement of tensile properties of the Mg-Al-Si alloy at RT and $175^{\circ}C$.

Electron mobility and low temperature magnetoresistance effect in $Si/Si_{1-x}Ge_x$ quantum well devices ($Si/Si_{1-x}Ge_x$Quantum Well 디바이스에서의 전자이동도 및 저온 자기저항효과)

  • 김진영
    • Journal of the Korean Vacuum Society
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    • v.8 no.2
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    • pp.148-152
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    • 1999
  • the low temperature magnetoresistance effect, electron mobilities, and 2 Dimensional electron Gases (2DEG) properties were investigated in $Si/Si_{1-x}Ge_x$ quantum well devices. N-type $Si/Si_{1-x}Ge_x$ structures were fabricated by utilizing a gas source Molecular Beam Epitaxy (GSMBE). Thermal oxidation was carried out in a dry O atmosphere at $700^{\circ}C$ for 7 hours. Electron mobilities were measured by using a Hall effect and a magnetoresistant effect at low temperatures down to 0.4K. Pronounced Shubnikov-de Haas (SdH) oscillations were observed at a low temperature showing two dimensional electron gases (2DEG) in s tensile strained Si quantum well. The electron sheet density (ns) of $1.5\times10^{12}[\textrm{cm}^{-2}]$ and corresponding electron mobility of 14200 $[\textrm{cm}^2V^{-1}s^{-1}]$ were obtained at a low temperature of 0.4K from $Si/Si_{1-x}Ge_x$ structures with thermally grown oxides.

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Low-Temperature Growth of $SiO_2$ Films by Plasma-Enhanced Atomic Layer Deposition

  • Lim, Jung-Wook;Yun, Sun-Jin;Lee, Jin-Ho
    • ETRI Journal
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    • v.27 no.1
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    • pp.118-121
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    • 2005
  • Silicon dioxide ($SiO_2$) films prepared by plasma-enhanced atomic-layer deposition were successfully grown at temperatures of $100\;to\;250^{\circ}C$, showing self-limiting characteristics. The growth rate decreases with an increasing deposition temperature. The relative dielectric constants of $SiO_2$ films are ranged from 4.5 to 7.7 with the decrease of growth temperature. A $SiO_2$ film grown at $250^{\circ}C$ exhibits a much lower leakage current than that grown at $100^{\circ}C$ due to its high film density and the fact that it contains deeper electron traps.

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Characterization and Mechanical Properties of Silicon Nitride Films with Various Nitrogen Contents (질소함유량에 따른 질화규소 박막의 특성 및 기계적 성질)

  • 고철호;김봉섭;이홍림;윤존도;최성룡;김광호
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2003.03a
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    • pp.209-209
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    • 2003
  • 기계가공용으로 개발된 3성분계 Ti-Si-N 코팅막은 약 40㎬이상의 초고경도이며, 그 미세구조는 나노입자의 TiN결정과 비정질 Si$_3$N$_4$로 이루어져 있다. Ti-Si-N 코팅의 경도는 극소량 Si를 첨가함에 따라 급격히 증가하였으며, 7.7at%에서 약 45㎬이었다. 그 이상에서는 감소하였다. 본 연구는 Ti-Si-N 코팅에서 규소첨가에 따른 박막에 형성하는 질화규소 또는 규소의 특성을 조사하기 위하여 질화규소 박막을 제조하여 그 특성 및 기계적 성질을 조사하였다. 스퍼터링 방법으로 제조한 질화규소 박막의 표면 및 내부구조를 광학현미경, 주사전자현미경, 투과전자현미경 그리고 AFM으로, 정성 및 정량을 EPMA와 EDS로, 결정성을 박막 엑스선회 절분석기로, 화학 결합구조을 XPS으로 분석하였다. 그리고 나노인덴터를 이용하여 박막의 경도와 탄성계수를 조사하였다.

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