Diameter Expansion of 6H-SiC Single Crystals by the Modification of Crucible Structure Design (도가니 구조 변경을 통한 6H-SiC 단결정의 직경 확장에 관한 연구)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.19 no.7
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- pp.673-679
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- 2006