• Title/Summary/Keyword: SI reaction

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Flexural Strength and Dielectric Properties of in-situ Si3N4-SiO2-BN Composite Ceramics (반응소결된 Si3N4-SiO2-BN 복합체의 기계적 강도 및 유전물성에 관한 연구)

  • Lee, Hyun Min;Lee, Seung Jun;Baek, Seungsu;Kim, Do Kyung
    • Journal of the Korean Ceramic Society
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    • v.51 no.5
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    • pp.386-391
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    • 2014
  • Silicon nitride ($Si_3N_4$) is regarded as one of the most promising materials for high temperature structural applications due to its excellent mechanical properties at both room and elevated temperatures. However, one high-temperature $Si_3N_4$ material intended for use in radomes has a relatively high dielectric constant of 7.9 - 8.2 at 8 - 10 GHz. In order to reduce the dielectric constant of the $Si_3N_4$, an in-situ reaction process was used to fabricate $Si_3N_4-SiO_2$-BN composites. In the present study, an in-situ reaction between $B_2O_3$ and $Si_3N_4$, with or without addition of BN in the starting powder mixture, was used to form the composite. The in-situ reaction process resulted in the uniform distribution of the constituents making up the composite ceramic, and resulted in good flexural strength and dielectric constant. The composite was produced by pressure-less sintering and hot-pressing at $1650^{\circ}C$ in a nitrogen atmosphere. Microstructure, flexural strength, and dielectric properties of the composites were evaluated with respect to their compositions and sintering processes. The highest flexural strength (193 MPa) and lowest dielectric constant (5.4) was obtained for the hot-pressed composites. The strength of these $Si_3N_4-SiO_2$-BN composites decreased with increasing BN content.

Fabrication of SiC Converted Graphite by Chemical Vapor Reaction Method (화학적 기상 반응법에 의한 탄화규소 피복 흑연의 제조 (I))

  • 윤영훈;최성철
    • Journal of the Korean Ceramic Society
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    • v.34 no.12
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    • pp.1199-1204
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    • 1997
  • SiC conversion layer was fabricated by the chemical vapor reaction between graphite substrate and silica powder. The CVR process was carried out in nitrogen atmosphere at 175$0^{\circ}C$ and 185$0^{\circ}C$. From the reduction of silica powder with graphite substrate, the SiO vapor was created, infiltrated into the graphite substrate, then, the SiC conversion layer was formed from the vapor-solid reaction of SiO and graphite. In the XRD pattern of conversion layer, it was confirmed that 3C $\beta$-SiC phase was created at 175$0^{\circ}C$ and 185$0^{\circ}C$. Also, in the back scattered image of cross-sectional conversion layer, it was found that the conversion layer was easily formed at 185$0^{\circ}C$, the interface of graphite substrate and SiC layer was observed. It was though that the coke particle size and density of graphite substrate mainly affect the XRD pattern and microstructure of SiC conversion layer. In the oxidation test of 100$0^{\circ}C$, the SiC converted graphites exhibited good oxidation resistance compared with the unconverted graphites.

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Synthesis of Tris(silyl)methanes by Modified Direct Process

  • Lee, Chang Yeop;Han, Jun Su;Yu, Bok Ryeol;Jeong, Il Nam
    • Bulletin of the Korean Chemical Society
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    • v.21 no.10
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    • pp.959-968
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    • 2000
  • Direct reaction of elemental silicon with a mixture of (dichloromethyl)silanes 1 $[Cl_3-nMenSiCHCl_2:$ n = 0 (a), n = 1(b), n = 2(c), n = 3(d)] and hydrogen chloride has been studied in the presence of copper catalyst using a stirred bed reactor equ ipped with a spiral band agitator at various temperatures from $240^{\circ}C$ to $340^{\circ}C.$ Tris(si-lyl) methanes with Si-H bonds, 3a-d $[Cl_3-nMenSiCH(SiHCl_2)_2]$, and 4a-d $[Cl_3-nMenSiCH(SiHCl_2)(SiCl_3)]$, were obtained as the major products and tris(silyl)methanes having no Si-H bond, 5a-d $[Cl_3-nMenSiCH(SiCl_3)_2]$, as the minor product along with byproducts of bis(chlorosilyl)methanes, derived from the reaction of silicon with chloromethylsilane formed by the decomposition of 1. In addition to those products, trichlorosilane and tetra-chlorosilane were produced by the reaction of elemental silicon with hydrogen chloride. The decomposition of 1 was suppressed and the production of polymeric carbosilanes reduced by adding hydrogen chloride to 1. Cad-mium was a good promoter for and the optimum temperature for this direct synthesis was $280^{\circ}C$.

Synthesis of $\beta$-Sialon Powder from Fly Ash (Fly Ash를 이용한$\beta$-Sialon 분말합성)

  • 최희숙;노재승;서동수
    • Journal of the Korean Ceramic Society
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    • v.33 no.8
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    • pp.871-876
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    • 1996
  • It is believed that fly ash could be suitable for preparing the sialon by carbothermal reduction method because the total amount of SiO2 and Al2O3 is above 80% and the unburned residual carbon is above 5% within the fly ash. The effects of reaction temperature (1350, 1400, 145$0^{\circ}C$) reaction time (1, 5, 10 hours) and the amount of carbon additions (C/SiO2=2, 3, 4 mole) on the $\beta$-sialon synthesis were obserbed, It was conformed that $\beta$-sialon (Z=2.15~2.18) was formed as major phase under all of the synthesis conditions and small amount of Si2ON2 SiC, AlN and Si3N4 was formed depending on the synthesis conditions. FeSix intermetal-lic compound was formed above 140$0^{\circ}C$ reaction temperature due to the large amount of iron oxides within the raw fly ash.

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HBr Formation from the Reaction between Gas-phase Bromine Atom and Vibrationally Excited Chemisorbed Hydrogen Atoms on a Si(001)-(2 X1) Surface

  • Ree, J.;Yoon, S.H.;Park, K.G.;Kim, Y.H.
    • Bulletin of the Korean Chemical Society
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    • v.25 no.8
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    • pp.1217-1224
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    • 2004
  • We have calculated the probability of HBr formation and energy disposal of the reaction exothermicity in HBr produced from the reaction of gas-phase bromine with highly covered chemisorbed hydrogen atoms on a Si (001)-(2 ${\times}$1) surface. The reaction probability is about 0.20 at gas temperature 1500 K and surface temperature 300 K. Raising the initial vibrational state of the adsorbate(H)-surface(Si) bond from the ground to v = 1, 2 and 3 states causes the vibrational, translational and rotational energies of the product HBr to increase equally. However, the vibrational and translational motions of product HBr share most of the reaction energy. Vibrational population of the HBr molecules produced from the ground state adsorbate-surface bond ($v_{HSi}$ =0) follows the Boltzmann distribution, but it deviates seriously from the Boltzmann distribution when the initial vibrational energy of the adsorbate-surface bond increases. When the vibration of the adsorbate-surface bond is in the ground state, the amount of energy dissipated into the surface is negative, while it becomes positive as vHSi increases. The energy distributions among the various modes weakly depends on surface temperature in the range of 0-600 K, regardless of the initial vibrational state of H(ad)-Si(s) bond.

Transformation Behaviour of High Temperature Thermoelectric $FeSi_2$ (고온열전재료 $FeSi_2$의 변태거동)

  • Eun, Young-Hyo;Min, Byoung-Gue;Lee, Dong-Hi
    • Applied Microscopy
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    • v.25 no.3
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    • pp.90-98
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    • 1995
  • In the Fe-Si system, a mixture of a($Fe_{2}Si_5$) - and ${\epsilon}$(FeSi)-composition powders was sintered and heat-treated subsequently at various temperatures and time to get thermoelectric ${\beta}$-phase($FeSi_2$) compacts. The different transformational sequences depending on the heat treating temperature were found through the investigation into phase transformation and microstructural development. That is, a rapid eutectoid decomposition of ${\alpha}{\to}{\beta}+Si$ occurred together with a accompanying slow reaction between the dispersed Si formed by above decomposition and the preexisted ${\epsilon}$ phase at temperatures below $830^{\circ}C$. The unreacted Si and the micropores formed due to the density change upon the transformation coarsened as heat treating time elapsed. At temperatures above $880^{\circ}C$, however, transformation was proceeded by a peritectoid reaction of ${\alpha}+{\epsilon}{\to}{\beta}$. It took at least 200min. to achieve 90% volume fracion of transformed ${\beta}$ phase, and the growth of micro-pores was also observed in this transformational sequence with prolonged heat treating time.

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Epitaxial growth of yttrium-stabilized HfO$_2$ high-k gate dielectric thin films on Si

  • Dai, J.Y.;Lee, P.F.;Wong, K.H.;Chan, H.L.W.;Choy, C.L.
    • Electrical & Electronic Materials
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    • v.16 no.9
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    • pp.63.2-64
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    • 2003
  • Epitaxial yttrium-stabilized HfO$_2$ thin films were deposited on p-type (100) Si substrates by pulsed laser deposition at a relatively lower substrate temperature of 550. Transmission electron microscopy observation revealed a fixed orientation relationship between the epitaxial film and Si; that is, (100)Si.(100)HfO$_2$ and [001]Si/[001]HfO$_2$. The film/Si interface is not atomically flat, suggesting possible interfacial reaction and diffusion, X-ray photoelectron spectrum analysis also revealed the interfacial reaction and diffusion evidenced by Hf silicate and Hf-Si bond formation at the interface. The epitaxial growth of the yttrium stabilized HfO$_2$ thin film on bare Si is via a direct growth mechanism without involoving the reaction between Hf atoms and SiO$_2$ layer. High-frequency capacitance-voltage measurement on an as-grown 40-A yttrium-stabilized HfO$_2$ epitaxial film yielded an dielectric constant of about 14 and equivalent oxide thickness to SiO$_2$ of 12 A. The leakage current density is 7.0${\times}$ 10e-2 A/$\textrm{cm}^2$ at 1V gate bias voltage.

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Nitridation of Silicon Powder Compacts in Air (Air 분위기에서 규소성형체의 질화반응)

  • 최석홍;안영필
    • Journal of the Korean Ceramic Society
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    • v.25 no.4
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    • pp.380-384
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    • 1988
  • This investigation includes nitridation phenomena of silicon powder compacts in air. Nitridation reaction condition has been provided with using silicon nitride bed and active carbon additive. Reaction products are Oxynitride, $\alpha$-Si3N4, and $\beta$-Si3N4, Oxynitride(Si2N2O) phase in formed at outer surface layer ofsilicon powder compacts. $\alpha$-Si3N4, and $\beta$-Si3N4 are formed at inner region of powder compacts. Microstructural observation indicates that nitridation mechanism in this work is the same as conventional nitridation mechanism nitrogen gas.

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High-Resolution TEM Study on TiAs Precipitate Formation Between $TiSi_2$ and As Doped in Poly-Silicon ($TiSi_2$와 다결정 실리콘에 이온주입된 As 계에서 TiAs 침전물형성에 관한 고분해능 TEM 연구)

  • 박형호;이정용;조경익;이중환;권오준;남기수
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.28A no.5
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    • pp.375-379
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    • 1991
  • Formation of TiAs precipitate through the reaction between TiSi2 with C54 structure and heavily doped arsenic ion in poly-silicon, and influence of TiSAs and silicon distribution resulted from the reaction TiSi2+As ->2Si on the morphology degradation have been studied.

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A Consideration of Void Formation Mechanism at Gate Edge Induced by Cobalt Silicidation (코발트 실리사이드에 의한 게이트 측벽 기공 형성에 대한 고찰)

  • 김영철;김기영;김병국
    • Korean Journal of Crystallography
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    • v.12 no.3
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    • pp.166-170
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    • 2001
  • Dopants implanted in silicon substrate affect the reaction between cobalt and silicon substrate. Phosphorous, unlike boron and arsenic, suppressing the reaction between cobalt and silicon induces CoSi formation during a low temperature thermal treatment instead of CoSi₂formation. The CoSi layer should move to the silicon substrate to fill the vacant volume that is generated in the silicon substrate due to the silicon out-diffusion into the cobalt/CoSi interface. The movement of CoSi at gate sidewall spacer region is suppressed by a cohesion between gate oxide and CoSi layers, resulting in a void formation at the gate sidewall spacer edge.

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