• Title/Summary/Keyword: SI reaction

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Interaction of Co/Nb Bilayer with $SiO_2$ Substrate ($SiO_2$와 Co/Nb 이중층 구조의 상호반응)

  • Gwon, Yeong-Jae;Lee, Jong-Mu;Bae, Dae-Rok;Gang, Ho-Gyu
    • Korean Journal of Materials Research
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    • v.8 no.10
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    • pp.956-960
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    • 1998
  • The interfacial reaction between the CoINb bilayer and the $SiO_2$ substrate in the temperature range of $330^{\circ}C$-$800^{\circ}C$ in a vacuum has been investigated by X-ray photoelectron spectroscopy, glancing angle XRD, Auger Electron Spectroscopy and Atomic force microscopy. The Co and Nb were actively interdiffused at $600^{\circ}C$, and the layer inversion completed at $700^{\circ}C$. NbO was formed by interfacial reaction between the Nb interlayer and the $SiO_2$ substrate, while $Nb_20_5$ was formed on the surface by reaction of Nb with oxygen in the ambients. Free Si atoms obtained by the reaction between Nb and $SiO_2$ formed silicides like CoSi and $Nb_5Si_3$ by reacting with Co and Nb remnants. The sheet resistance of the Co/Nb bilayer increased substantially after annealing at $800^{\circ}C$. which is due to the agglomeration of the Co layer to reduce its surface energy.

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Effect of Fabricating Temperature on Hardness Characteristics of $Nb/MoSi_2$ Laminate Composite ($Nb/MoSi_2$ 적층복합재료의 경도특성에 미치는 제조온도의 영향)

  • Lee, Sang-Pill;Yoon, Han-Ki
    • Journal of Ocean Engineering and Technology
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    • v.13 no.4 s.35
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    • pp.37-44
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    • 1999
  • Hardness characteristics and microstructures of $Nb/MoSi_2$ laminate composites were evaluated from the variation of fabricating conditions such as preparation temperature, applied pressure and pressure holding time. $Nb/MoSi_2$ laminate composites composed of $MoSi_2$ powder and Nb sheets were fabricated by the hot press. From experimental results, it was found that the lamination from Nb sheet and $MoSi_2$ powder was an excellent strategy to improve hardness characteristics of monolithic $MoSi_2$. However, interfacial reaction products like(Nb, Mo)$SiO_2\;and\;Nb2Si_3$ formed at the interface of $Nb/MoSi_2$ and increased with fabricating temperature.

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Preparation of α-Si3N4 Powder in Reaction System Containing Molten Salt by SHS - Part 1. Synthesis of Powder (용융염계에서 자전연소합성법에 의한 α-Si3N4분말의 제조 - Part 1.분말의 합성)

  • ;;Nersisyan Hayk
    • Journal of the Korean Ceramic Society
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    • v.41 no.3
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    • pp.235-242
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    • 2004
  • Si, NH$_4$Cl, NaN$_3$, NaCl, $N_2$ were used as raw materials for preparation of $\alpha$-Si$_3$N$_4$ powder. NH$_4$Cl and NaN$_3$ were used as additives, and NaCl was used as a diluent. Initial $N_2$ gas pressure in the SHS reactor was 60 atm. In preparation of $\alpha$-Si$_3$N$_4$, the reactivity and the properties of the products were examined with the various kinds of additives and the content of diluent. At first, the optimum reaction system for the preparation of $\alpha$-Si$_3$N$_4$ is examined and then the optimum composition was examined in the optimum reaction system. The optimum reaction system was Si-$N_2$-additive(NH$_4$Cl+NaN$_3$)-diluent(NaCl) and the optimum composition was 38 wt%Si+50 wt%(NH$_4$Cl+NaN$_3$)+12 wt%NaCl. The maximum fraction of $\alpha$-phase of Si$_3$N$_4$ produced in this condition was 96.5 wt% and the shape of the $\alpha$-Si$_3$N$_4$ produced in this condition was an irregular fiber with a length of 10 ${\mu}{\textrm}{m}$ and a diameter of 1 ${\mu}{\textrm}{m}$.

Properties of Al2O3-SiCw Composites Fabricated by Three Preparation Methods (제조방법에 따른 Al2O3-SiCw 복합체의 특성)

  • Lee, Dae-Yeop;Yoon, Dang-Hyok
    • Journal of the Korean Ceramic Society
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    • v.51 no.5
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    • pp.392-398
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    • 2014
  • $Al_2O_3$-SiC composites reinforced with SiC whisker ($SiC_w$) were fabricated using three different methods. In the first, $Al_2O_3-SiC_w$ starting materials were used. In the second, $Al_2O_3-SiC_w$-SiC particles ($SiC_p$) were used, which was intended to enhance the mechanical properties by $SiC_p$ reinforcement. In the third method, reaction-sintering was used with mullite-Al-C-$SiC_w$ starting materials. After hot-pressing at $1750^{\circ}C$ and 30 MPa for 1 h, the composites fabricated using $Al_2O_3-SiC_w$ and $Al_2O_3-SiC_w-SiC_p$ showed strong mechanical properties, by which the effects of reinforcement by $SiC_w$ and $SiC_p$ were confirmed. On the other hand, the mechanical properties of the composite fabricated by reaction-sintering were found to be inferior to those of the other $Al_2O_3$-SiC composites owing to its relatively lower density and the presence of ${\gamma}-Al_2O_3$ and ${\gamma}-Al_{2.67}O_4$. The greatest hardness and $K_{1C}$ were 20.37 GPa for the composite fabricated using $Al_2O_3-SiC_w$, and $4.9MPa{\cdot}m^{1/2}$ using $Al_2O_3-SiC_w-SiC_p$, respectively, which were much improved over those from the monolithic $Al_2O_3$.

Dry etching of polysiliconin high density plasmas of $CI_2$ (고밀도 플라즈마를 사용한 $CI_2$/ Poly-Si 건식 식각)

    • Journal of the Korean Vacuum Society
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    • v.8 no.1
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    • pp.63-69
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    • 1999
  • The characteristic parameters of high density plasma source (Helical Resonator) have been measured with Langmuir probe to get the plasma density electron temperature, ion current density, etc. Optical emission spectra of Si and SiCl have been analyzed in $Cl_2$$/poly-Si system to elucidate etching mechanism. In this system, the main reaction to remove silicon atoms on the surface is proceeding mostly through chemical reaction, not pure physical reaction. The emission intensity of SiCl (chemical etching product) increases much faster than Si (pure physical etching product) with increasing the concentration of impurities (P). This is due to the electron transfer from substrate to the surface via Si-Cl bond. As a result, Si-Cl bond becomes more ionic and mobile, therefore the Cl-containing etchant forms $SiCl_x$ with surface more easily. Consequently, for the removal of Si atom from poly silicon surface, the chemical etching is more favorable than physical etching with increasing P concentrations.

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Process Control for the Synthesis of Ultrafine Si3N4-SiC Powders by the Hybrid Plasma Processing (Hybrid Plasma Processing에 의한 Si3N4-SiC계 미립자의 합성과정 제어)

  • ;吉田禮
    • Journal of the Korean Ceramic Society
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    • v.29 no.9
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    • pp.681-688
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    • 1992
  • Ultrafine Si3N4 and Si3N4+SiC mixed powders were synthesized through thermal plasma chemical vapor deposition(CVD) using a hybrid plasma, which was characterized by the supersposition of a radio-frequency plasma and arc jet. The reactant SiCl4 was injected into an arc jet and completely decomposed in a hybrid plasma, and the second reactant CH4 and/or NH3 mixed with H2 were injected into the tail flame through double stage ring slits. In the case of ultrafine Si3N4 powder synthesis, reaction efficiency increased significantly by double stage injection compared to single stage one, although crystallizing behaviors depended upon injection speed of reactive quenching gas (NH3+N2) and injection method. For the preparation of Si2N4+SiC mixed powders, N/C composition ratio could be controlled by regulating the injection speed of NH3 and/or CH4 reactant and H2 quenching gas mixtures as well as by adjusting the reaction space.

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Preparation of SiC Composite by the Method of Reaction-Bonded Sintering (반응결합 소결법을 이용한 SiC 복합체 제조)

  • 한인섭;양준환;정윤중
    • Journal of the Korean Ceramic Society
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    • v.31 no.5
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    • pp.561-571
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    • 1994
  • For the preparation of SiC composite, the properties of reaction sintering in the SiC-C-Si-Ti system with the titanium contents variation were investigated. Either the case of titanium additions or the case of direct infiltration of titanium in SiC+C preform, the newly formed fine-grained $\beta$-SiC, which was reacted from the molten silicon with graphite, was intergranulated between the original $\alpha$-SiC particles. Also titanium disilicide (TiSi2) was discontinuously formed isolated pocket in silicon matrix. The amount of titanium disilicide was gradually increased as titanium content increase. With the results of hardness and fracture toughness measurement, SiC-titanium disilicide (TiSi2) composite represented high properties compared with the system of the infiltrated pure silicon.

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The Numerical Simulation of Ultrafine $SiO_2$ Particle Fabrication and Deposition by Using the Tube Furnace Reactor (튜브형 가열로 반응기를 이용한 초미립 $SiO_2$ 입자의 제조 및 증착에 대한 수치모사)

  • 김교선;현봉수
    • Journal of the Korean Ceramic Society
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    • v.32 no.11
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    • pp.1246-1254
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    • 1995
  • A numerical model for fabrication and deposition of ultrafine SiO2 particles were proposed in the simplified horizontal MCVD apparatus using tube furnace reactor. The model equations such as energy and mass balance equations and the 0th, 1st and 2nd moment balance equations of aerosols were considered in the reactor. The phenomena of SiCl4 chemical reaction, SiO2 particle formation and coagulation, diffusion and thermophoresis of SiO2 particles were included in the aerosol dynamic equation. The profiles of gas temperature, SiCl4 concentration and SiO2 particle volume were calculated for standard conditions. The concentrations, sizes and deposition efficiencies of SiO2 particles were calculated, changing the process conditions such as tube furnace setting temperature, total gas flow rate and inlet SiCl4 concentration.

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Effect of Ti and Si Interlayer Materials on the Joining of SiC Ceramics

  • Jung, Yang-Il;Park, Jung-Hwan;Kim, Hyun-Gil;Park, Dong-Jun;Park, Jeong-Yong;Kim, Weon-Ju
    • Nuclear Engineering and Technology
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    • v.48 no.4
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    • pp.1009-1014
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    • 2016
  • SiC-based ceramic composites are currently being considered for use in fuel cladding tubes in light-water reactors. The joining of SiC ceramics in a hermetic seal is required for the development of ceramic-based fuel cladding tubes. In this study, SiC monoliths were diffusion bonded using a Ti foil interlayer and additional Si powder. In the joining process, a very low uniaxial pressure of ~0.1 MPa was applied, so the process is applicable for joining thin-walled long tubes. The joining strength depended strongly on the type of SiC material. Reaction-bonded SiC (RB-SiC) showed a higher joining strength than sintered SiC because the diffusion reaction of Si was promoted in the former. The joining strength of sintered SiC was increased by the addition of Si at the Ti interlayer to play the role of the free Si in RB-SiC. The maximum joint strength obtained under torsional stress was ~100 MPa. The joint interface consisted of $TiSi_2$, $Ti_3SiC_2$, and SiC phases formed by a diffusion reaction of Ti and Si.

EFFECT OF ADDED Si ON DENSIFICATION OF Ni-AI INTERMETALLIC COATING ON SPHEROIDAL GRAPHITE CAST IRON SUBSTRATES

  • Kim, Tetsuro ata;Keisuke Uenishi;Akira Ikenaga;Kojiro F. Kobayashi
    • Proceedings of the KWS Conference
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    • 2002.10a
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    • pp.726-731
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    • 2002
  • Reaction synthesis is a process to form ceramics, intermetallics and their composites from elemental powder mixture. Application of this process to a surface modification techniques has a possibilities to enable the process at a lower temperature or for a shorter time, although synthesized materials are likely to include voids and unreacted elements. This paper intend to examine the effect of Si addition to the mixture of Al and Ni on the densification of synthesized Ni-Al intermetallic compounds and to evaluate the surface properties of obtained coatings. By the Si addition, exothermic reaction temperature to form Ni-Al intermetallic was lowered to be below the melting point of Al. Si soluted $Al_3$Ni$_2$, $Al_3$Ni and $Al_{6}$Ni$_3$Si were mainly formed in the coating layer when powder mixture was heated to 973K for 300s. Besides, densification was enhanced by increasing hot press pressure, Si additions and heating rate. When the composition of eutectic Al-Si reaches 78%, void ratio of sintered compact reduced to 0.4%. It is caused by higher flowability of Al-Si liquid phase generated and its infiltration into the void. Since the hardness of NiAl(Si) compound (about 600HV) formed in the coating layer is higher than that of Ni-Al compound (about 400HV), coating layer with high density and superior wear property is obtained by hot press using reaction synthesis from Al-Ni-Si powder mixture.

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