• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2003년도 International Meeting on Information Display
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• pp.1038-1041
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• 2003

In the paper, we investigated silicon surface microstructures formed by reactive ion etching in hollow cathode system. Wet anisotropic chemical etching technique use to form random pyramidal structure on <100> silicon wafers usually is not effective in texturing of low-cost multicrystalline silicon wafers because of random orientation nature, but High density hollow cathode plasma system illustrates high deposition rate, better film crystal structure, improved etching characteristics. The etched silicon surface is covered by columnar microstructures with diameters form 50 to 100nm and depth of about 500nm. We used $SF_{6}$ and $O_{2}$ gases in HCP dry etch process. This paper demonstrates very high plasma density of $2{\times}10^{12}$ $cm^{-3}$ at a discharge current of 20 mA. Silicon etch rate of 1.3 ${\mu}s/min$. was achieved with $SF_{6}/O_{2}$ plasma conditions of total gas pressure=50 mTorr, gas flow rate=40 sccm, and rf power=200 W. Our experimental results can be used in various display systems such as thin film growth and etching for TFT-LCDs, emitter tip formations for FEDs, and bright plasma discharge for PDP applications. In this paper we directed our study to the silicon etching properties such as high etching rate, large area uniformity, low power with the high density plasma.

• Journal of the Korean Physical Society
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• 제80권
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• pp.1-12
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• 2022

Over the past few decades, tetrafluoroethane (TFE, R134a Freon)-based gases have been widely used in the operation of phenolic resistive plate chambers (RPCs) in many high-energy experiments. However, TFE has a high global warming potential (GWP); therefore, a search for new eco-friendly gases to replace traditional TFE-based ones is now unavoidable. In this research, we present cosmic-ray test results of a prototype RPC for the SHiP (search for hidden particles) experiment using 1.6- and 1.4-mm-thick RPC electrodes containing mixtures of various gases, including 1,3,3,3-tetrafluoropropene (HFO1234ze), CO₂, iC₄H₁₀ and SF₆. We compare the performance data gathered with these new gas mixtures with those gathered with a traditional TFE-based gas used for RPCs in compact muon solenoid (CMS) and a toroidal LHC apparatus (ATLAS) experiments. The addition of CO₂ to the HFO1234ze-based gas was found to be fairly effective in reducing the working-point high voltage (HVWP) for RPC operation. The results of our experiments lead us to the conclusion that adding 40% CO₂ or less, when combined with HFO1234ze-based gas, is conducive to reliable detector performance for SHiP single-gap phenolic RPCs.

• 대한전자공학회논문지
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• 제25권11호
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• pp.1342-1349
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• 1988

플리즈마 변수로서 가스조성과 압력 및 RF 전력이 인 및 붕소가 각각 다른 양으로 주입된 다결정 실리콘의 식각율 변화에 미치는 영향을 고찰하였다. $POCl_3$에 의해 인이 주입된 경우, 염소조성보다 불소조성이 많은 영역, 즉 $Cl_2$와 $SF_4$의 비가 17대 33일 때, 가장 큰 비등방성과 가장 작은 선폭손실을 달성하였다. 플라즈마 조건에 관계없이 주입된 불순물 농도의 증가에 다라, 인이 주입된 경우는 식각율이 증가하였고, 붕소가 주입된 경우는 식각율이 반대로 감소하였다. 또한, 급속 열처리에 의한 활성화 시간의 함수로서 인이 주입된 다결정실리콘의 식각율변화를 측정한 결과, 도우핑 농도뿐 아니라 활성화된 운반자, 즉 전자의 농도가 그 식각율 증가에 중요한 역할을 한다는 것을 확인하였다.

• 한국전자파학회:학술대회논문집
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• 한국전자파학회 2005년도 종합학술발표회 논문집 Vol.15 No.1
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• pp.381-384
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• 2005

If obstacle in GIS(Gas Insulted Switchgear), its affects are great are on the community and it is consequently demanded lots of difficulties to recover and repair. Accordingly, diagnosis techniques, that are able to prevent from accidents before they happen by providing more stable and highly reliable power effectively and finding sign of the accidents is very important A novel UHF(Ultra High Frequency)-microstrip antenna is presented. The measured impedance bandwidth of the proposed antenna is from 0.5[GHz] to 15[GHz] with the stop band from 0.5[GHz] to 10.7 [GHz] for VSWR<2. Form results of this study, The antenna is will play an important role for the sensor for insulation diagnosis system by UHF method of real site GIS and power equipment using SF$_6$ gas.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 추계학술대회
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• pp.1046-1051
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• 2004

A plate-fin-tube heat exchanger used for a $SF_{6}$ gas-insulated transformer is extremely important since the dissipation of the heat generated from inside coils has a significant effect on the performance as well as the durability of the transformer. The heat exchanger consists of corrugated plate fins and staggered array tube bundles for coolant. In order to find out heat transfer and pressure drop characteristics, series of numerical analyses for plate fins with enhanced surface geometries were conducted. Based on the results of the numerical analyses, an improved model of the plate fin has been proposed.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2008년도 추계학술대회 논문집 전력기술부문
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• pp.342-344
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• 2008

This paper describes fault analysis of a $SF_6$ gas circuit breaker of a transformer in a hydro power plant which is connected to the 154kV line. The fault is a single-line-to-ground fault, so that it gives power generation halt and economical loss. The analysis has been done in aspects of the status of the breaker, insulation degradation, surge invasion and earthing resistance of the switchyard.

• 조명전기설비학회논문지
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• 제28권2호
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• pp.19-23
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• 2014

In this paper the experiments of breakdown characteristics of rod-electrodes by pressure and gap change of imitation-air were described. The results are fundamental data for electric insulation design of distribution power facilities which will be studied and developed in the future. And we could make an environment friendly gas insulation material with mataining dielectric strength by imitation air which generates a lower lever of the global warming effect.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2009년도 제40회 하계학술대회
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• pp.1358_1359
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• 2009

가스 절연 개폐장치(Gas Insulated Switchgear : GIS)의 고체 스페이서에 경사기능성 재료(Functionally Graded Material : FGM)를 적용할 때, 전계의 완화를 예상할 수 있다. 특히, 균일 유전율 분포를 가지는 스페이서에서 양극 근처에 집중된 높은 전계가 FGM 스페이서를 사용할 때, 스페이서와 $SF_6$ 가스의 접촉부로 옮겨지며, 그 크기가 완화됨을 확인할 수 있었다[1]. 본 연구에서는 상용 고체 스페이서의 양극 부근에서의 전계 집중을 감소시키기 위해 전극 형상의 최적화를 수행하였다. 최적화 기법으로는 완전계승계획법(Full Factorial Design : FFD)과 결합된 반응표면법(Response Surface Method : RSM)을 이용하였으며, 균일 유전율 스페이서에서 양극 형상을 최적화하였다. 또한 타원형 유전율 분포를 가지는 FGM 스페이서를 이용함으로써, 상용 GIS 모델에 비해 최대 전계가 크게 완화될 수 있음을 확인하였으며, 상용 GIS의 외함부의 크기를 줄여 실제 소형화 가능 여부를 확인하였다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2008년도 Techno-Fair 및 추계학술대회 논문집 전기물성,응용부문
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• pp.101-102
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• 2008

SF6 widely used as insulating gas is rising as the environment problem. For decreasing this greenhouse gas, electrical breakdown characteristics of vacuum with air are studied in non-uniform field. The gap of needle to plane was 0.5mm. The pressure of vacuum the range of 10^-4${\sim}$10^-5torr. The diameter of a plane made of the stainless steel is 150mm. As a result of the experiment, the breakdown voltage is increased about degree of vacuum increased. The electrode material influenced breakdown voltage in vacuum.

• 한국조명전기설비학회:학술대회논문집
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• 한국조명전기설비학회 2007년도 춘계학술대회 논문집
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• pp.413-416
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• 2007

If obstacle in GIS(Gas Insulted Switchgear), its affects are great are on the community and it is consequently demanded lots of difficulities to recover and repair. Accordingly, diagnosis techniques, that are able to prevent from accidents before they happen by providing more stable and highly reliable power effectively and finding sign of the accidents is very important. The strip-senser measured impedance bandwidth of the proposed antenna is from 0.5[GHz] to 2.5[GHz] with the stop band from 0.5[GHz] to 1.7[GHz] for VSWR<2. The antenna is will play an important role for the senser for insulation diagnosis system by UHF method of real site GIS and power equipment using $SF_6$ gas.