• Title/Summary/Keyword: SAW properties

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Detection of odorants and study on the odorant sensor system by using SAW device (SAW 디바이스를 이용한 냄새물질 측정 및 냄새센서 시스템의 연구)

  • 장상목;김기영;김종민;최용성;권영수
    • Electrical & Electronic Materials
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    • v.8 no.1
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    • pp.48-55
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    • 1995
  • A surface acoustic wave (SAW) sensor for the detection of odorants has been constructed by depositing various phospholipids and fatty acids onto the surface of the SAW device. The characteristics of a SAW device operating at 310 MHz deposited with silicon monoxide were analyzed. Menthone, amylacetate, acetoin, and other organic gases show different affinities to the coated lipids. An explanation is given for different odorant affinities based on the monolayer properties of phospholipids. The identification of odorants depending on the tkpe of lipid used for coating is discussed in terms of the similarity of their normalized resonant frequency shift patterns. Using a number of different lipid-coated SAW devices, odorants can be identified by a computerized pattern recognition algorithm.

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Effects of Tensile Properties and Microstructure on Abrasive Wear for Ingot-Slicing Saw Wire (잉곳 슬라이싱용 Saw Wire의 연삭마모에 미치는 인장특성과 미세조직의 영향)

  • Hwang, Bin;Kim, Dong-Yong;Kim, Hoi-Bong;Lim, Seung-Ho;Im, Jae-Duk;Cho, Young-Rae
    • Korean Journal of Materials Research
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    • v.21 no.6
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    • pp.334-340
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    • 2011
  • Saw wires have been widely used in industries to slice silicon (Si) ingots into thin wafers for semiconductor fabrication. This study investigated the microstructural and mechanical properties, such as abrasive wear and tensile properties, of a saw wire sample of 0.84 wt.% carbon steel with a 120 ${\mu}M$ diameter. The samples were subjected to heat treatment at different linear velocities of the wire during the patenting process and two different wear tests were performed, 2-body abrasive wear (grinding) and 3-body abrasive wear (rolling wear) tests. With an increasing linear velocity of the wire, the tensile strength and microhardness of the samples increased, whereas the interlamellar spacing in a pearlite structure decreased. The wear properties from the grinding and rolling wear tests exhibited an opposite tendency. The weight loss resulting from grinding was mainly affected by the tensile strength and microhardness, while the diameter loss obtained from rolling wear was affected by elongation or ductility of the samples. This result demonstrates that the wear mechanism in the 3-body wear test is much different from that for the 2-body abrasive wear test. The ultra-high tensile strength of the saw wire produced by the drawing process was attributed to the pearlite microstructure with very small interlamellar spacing as well as the high density of dislocation.

A study on the fabrication of polymer-coated SAW sensors and their sensing properties for some toxic chemical compounds (SAW 센서의 제작 및 독성화학물질 감도특성 연구)

  • Lim, Y.R.;Park, B.H.;Choi, S.K.;Song, K.D;Lee, D.D.
    • Journal of Sensor Science and Technology
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    • v.17 no.2
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    • pp.143-146
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    • 2008
  • Polymer-coated film SAW sensors have been fabricated and their sensing properties for toxic chemicals have been extensively investigated. Four types of the toxic chemical compounds of hydrogen cyanide(AC), carbonyl dichloride(CG), pinacolyl methylfluorophosphonate(GD), 2,2'-dichlorodiethylthio ether(HD) were used as target gases. SAW sensors using five different kinds of polymers were used to detect toxic chemicals and their gas sensing characteristics were investigated. The polymers used as the sensing materials were polyisobutylene(PIB), polyepichlorohydrin(PECH), polydimethylsiloxane(PDMS), polybutadiene(PBD) and polyisoprene(PIP). The recommendable mixing ratio of PIB, PECH, PDMS, PBD and PIP to solvents were 1:30, 1:40, 1:10, 1:30 and 1:30, respectively. The sensing characteristics of the SAW sensors were measured by using E-5061A network analyzer.

A Study on SAW Properties of Bilayer Thin Film Structure Composed of ZnO and Dielectric Thin Films (ZnO 박막과 유전체 박막으로 구성된 이중구조의 물성 및 표면 탄성파 특성)

  • 이용의;김형준
    • Korean Journal of Crystallography
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    • v.6 no.2
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    • pp.134-140
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    • 1995
  • SAW properties of SiNx/ZnO bilayer thin film structure were analyzed. ZnO thin films were deposited by rf magnetron sputter using O2 gas as an oxidizer. Structure of ZnO thin films was affected by Ar/O2 ratio. At the gas ratio of Ar/O2=67/33, the standard deviation of X-ray rocking curve of (002) preferred ZnO thin film was 2.17 degree. This value is sufficient to use ZnO thin films as an acoustic element. SAW velocity of glass/SiNx(7000Å)/Al/ZnO(5μm) structure was max. 2.2% faster than that of ZnO/glass.

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Frequency Response Properties of SAW Tansversal Filters by Impulse Modeling (임펄스 모델에 의한 SAW Transversal Filters의 주파수 응답 특성)

  • 손헌영;윤영섭
    • Proceedings of the IEEK Conference
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    • 1999.11a
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    • pp.173-176
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    • 1999
  • Frequency responses of the surface acoustic wave(SAW) filters are simulated by using the impulse modeling. The simulation technique of the SAW filters is to use the Fourier transformation to make a correspondence between the impulse response of the filter and the taps in the delay line. Since the Fourier series must be truncated after a finite number of terms, window functions are often used to weight the coefficients to obtain the desirable side-lobe level and bandwidth. The filter design is operated through the iterative simulation procedures. The design process is capable of yielding filters with optimized frequency response characteristics.

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A study on Photolithography of band pass filter for communication devices (통신기기용 대역통과필터의 공정에 관한 연구)

  • Lee, Dong-Yoon;Shin, Yong-Deok
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.05c
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    • pp.247-250
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    • 2002
  • SAW filters were fabricated on $LiNbO_3$ substrates to evaluate frequency response and properties of photolithography. In the both of etch and lift-off methods, lift off method was superior to etch method in fabrication process. Frequency response property was measured by network analyzer. From measurement of acoustic property, SAW propagation velocity was 3574.9m/sec for $LiNbO_3$ SAW filter.

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surface acoustic wave oscillator hymidity sensor using hexafluoropropene plasma thin film (헥사플루오르프로펜 플라즈마박막을 이용한 표면탄성파발진기 습도센서)

  • 박남천;서은덕
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1992.05a
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    • pp.144-146
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    • 1992
  • Surface acoustic wave(SAW) oscillator offers many attractive features for application to vapor sensors. The perturbation of SAW velocity by the hexafluoropropence plasma polymer thin film has been studied for relative humidity sensing. adsorption of moisture produces rapid aid changes in the properties of the film, resulting in a change in the velocity of surface acoustic waves and, hence, in the frequency of one SAW oscillator. The device used in our experiments have 55 MHZ SAW oscillator fabricated on a LiNbO substrate.

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Characteristics analysis of Piezoelectric Thin Film SAW filter using Mg-doped GaN/Sapphire Structure (Mg-Doped GaN/Sapphire 구조로 제작된 압전 박막 SAW 필터의 특성분석)

  • 장철영;정은자;정영철;최현철;이정희;이용현
    • Proceedings of the IEEK Conference
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    • 2003.07b
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    • pp.759-762
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    • 2003
  • The epitaxially grown Mg-doped GaN thin film was prepared by MOCVD (Metal Organic Chemical Vapor Deposition) for a SAW(Surface Acoustic Wave) filter. Mg-doped GaN thin film had enough properties for a SAW filter which include crystallinity and morphology. The surface morphology and crystalline of the Mg-doped GaN thin films were characterized using AFM and an X-ray rocking curve. The SAW filter, which was fabricated by lift-off process and frequency response, was measured by HP 8753C network analyzer. Center frequency was 96.687 MHz and SAW velocity was 5801 m/s when wavelength(λ) was 60${\mu}{\textrm}{m}$. Insertion loss was over -10 dB, Q was factor over 200, and side lobe attenuation was over 22 dB which was suitable for use as a SAW filter. Electro-mechanical coupling coefficient (k$^2$) was calculated from the measured data. k$^2$ was from 1 % to 1.44 %. The fabricated SAW filter using Mg-doped GaN/sapphire structure has good qualities as a filter and will be used as a SAW filter for operating RF frequency.

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