• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.8
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• pp.319-324
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• 2003

AIN thin films are deposited on Si (100) and $SiO_2$/Si substrates by using an RF magnetron sputtering method and by changing the conditions of deposition variables, such as RF power, $N_2$/Ar flow ratio, and substrate temperature ($T_sub$). For all the deposited AIN films, XRD Peak patterns are monitored to examine the effect of deposition condition on the crystal orientation. Highly (002)-oriented AIN films are obtained at following nominal deposition conditions; RF Power : 350W, $N_2$/Ar ratio = 10/20, T$_{sub}$ : $250^{\circ}C$, and working pressure = 5mTorr, respectively. AIN-based SAW devices are fabricated using a lift-off method by varying the thickness of AIN layer. Insertion losses and side-lobe rejection levels of fabricated SAW devices are extracted from their frequency response characteristics, which are also compared in terms of AIN thickness and substrate. Relationships between the film properties of AIN films and the frequency responses of SAW devices are discussed. It is concluded from the experimental results that the (002)-preferred orientation as well as the surface roughness of AIN film may play a crucial role of determining the device performances of AIN-SAW devices.s.

• The Journal of the Acoustical Society of Korea
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• v.9 no.4
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• pp.18-32
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• 1990

Deeping on purpose, SAW device may have to function while immersed in a liquid. Those who are familiar with SAW devices would anticipate difficulty since the propagating surface waves will tend to radiate energy into the liquid and hence suffer attenuation. Thus, to design an immerable SAW device, more attention and full information about the wave properites is required to overcome the attenuation and get the highest SAW generation eficiency. Though numerical simulation, the optimal geometry of underwater SAW devices, such as optimal piezoelectric crystal cut, SAW propagation direction and nondimensional wave number(ka) is determined to get the maximum SAW excitation efficiency, the minimum attenuation in propagation and pure mode propagation for all the modes of surface wave propagation. The design technique can be appliedto an arbitrary combination of a piezoelectric layer, a substrate and a liquid medium. In this paper, PZT and PVDF layers and a steel substrate are use for the solid medium. The technique can be easily employed for the design of underwater sensors and actuators for the applications, such as sonar marine antifouling, industrial and medical uses.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.80-80
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• 2000

Surface acoustic wave (SAW) devices have become more important as mobile telecommunication systems need h호-frrequency, low-loss, and down-sized components. Higher-frequency SAW divices can be more sasily realized by developing new h호-SAW-velocity materials. The ZnO/diamond/Si multilasyer structure is one of the most promising material components for GHz-band SAW filters because of its SAW velocity above 10,000 m/sec. Silicon carbide is also a potential candidate material for high frequency, high power and radiation resistive electronic devices due to its superior mechanical, thermal and electronic properties. However, high price of commercialized 6- or 4H-SiC single crystalline wafer is an obstacle to apply SiC to high frequency SAW devices. In this study, single crystalline 3C-SiC thin films were grown on Si (100) by MOCVD using bis-trimethylsilymethane (BTMSM, C7H20Si7) organosilicon precursor. The 3C-SiC film properties were investigated using SEM, TEM, and high resolution XRD. The FWHM of 3C-SiC (200) peak was obtained 0.37 degree. To investigate the SAW propagation characteristics of the 3C-SiC films, SAW filters were fabricated using interdigital transducer electrodes on the top of ZnO/3C-SiC/Si(100), which were used to excite surface acoustic waves. SAW velocities were calculated from the frequency-response measurements of SAW filters. A generalized SAW mode. The hard 3C-SiC thin films stiffened Si substrate so that the velocities of fundamental and the 1st mode increased up to 5,100 m/s and 9,140 m/s, respectively.

• Journal of electromagnetic engineering and science
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• v.7 no.1
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• pp.12-16
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• 2007

A UHF band wireless identification system based on passive surface acoustic wave(SAW) devices is presented in this paper. SAW ID tags were fabricated on Y-Z $LiNbO_3$ piezoelectric substrate with a good electro-mechanical coupling property. To reduce degradation of the antenna performance associated with the piezoelectric materials, an efficient design of the SAW RFID antenna is introduced. By measuring the parameters of the SAW ID tag, the performance of the antenna was tested by experimentation.

• Proceedings of the IEEK Conference
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• 2006.06a
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• pp.469-470
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• 2006

Surface Acoustic Wave(SAW) devices can be used to as wireless sensor elements, called SAW transponders, for measuring shysical quantities such as temperature that do not need any power supply and may be accessed wirelessly. SAW devices were fabricated on Y-Z $LiNbO_3$ piezoelectric substrate with a good temperature coefficient property. The signal response of SAW sensor on the temperature change were compared. To measure the change of SAW velocity. Temperature changed form $20^{\circ}C$ to $400^{\circ}C$ was linearly changed, the SAW sensor is application to the temperature sensor.

• Journal of the Korean Ceramic Society
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• v.25 no.1
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• pp.78-82
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• 1988

Good quality LiNbO3 single crystals which can be applied to SAW devices, were grown by Czochralski method. It was observed that the gas-bubbles were concentrated in ring shape at the outer part of grown crystals, and this anomaly was illustrated by modeling the mechanism of gas-bubble entrapment according to the melt flow pattern in the crucible. And this mechanism was also encertained by observation of solid-liquid interface shape of grown crystals. The optimal condition for good quality crystals was known that the solid-liquid interface shape was slightly concave.

• Proceedings of the KOSOMBE Conference
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• v.1991 no.05
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• pp.98-100
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• 1991

A sensitive surface acoustic wave (SAW) sensor for the detection of odorants has been constructed by depositing different phospholipids and fatty acids on the surface of the SAW device wi th the Langmuir-Blodgett technique. The characteristics of SAW device operating at 310 MHz deposited with phosphatidylcholine were analyzed. Amyl acetate, acetoin, menthone and other organic gases showed different affinities. The identification of odorants depending on the species of lipid used for coating is discussed in terms of the similarity of the normalized resonant frequency shift pattern. Using a number of different lipid-coated SAW devices, odorants could be identified by a neural-network pattern recognition with back-propagation algorithm.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.25 no.12
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• pp.979-983
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• 2012

We proposed the ZnO thin film for a SAW filter by PLD and RF sputtering method. ZnO thin films was pre-deposited on a sapphire substrate as a seed layer by PLD method and then deposited on seed layer by RF sputtering. The surface characteristics of ZnO thin film were investigated by XRD, SEM and AFM. The minimum surface roughness was 1.92 nm and FWHM of rocking curve was $0.92^{\circ}$. We demonstrated the SAW filter with bandwidth of approximately 0.97 MHz and the center frequency of 18.72 MHz using the proposed ZnO thin film.

• The Journal of the Acoustical Society of Korea
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• v.21 no.2
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• pp.102-109
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• 2002

This paper proposes a new design algorithm to optimize the withdrawal weighted SAW ladder devices, Withdrawal weighting on SAW resonators gives enhanced bandwidth and transition band characteristics, so an optimization algorithm was developed for ladder type SAW filters. To illustrate the validity of the technique, this method was applied to the design of RF band CDMA TX SAW filters, and the design results were confirmed to show good agreement with experimental performance.

• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.1479-1481
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• 2002

AlN thin films were deposited on Si(100) and $SiO_2$/Si substrates using R.F. magnetron sputtering system. The effect of various deposition conditions on the crystal orientation of AlN films was investigated to obtain a highly (002)-oriented films. SAW filters were fabricated using AlN films with various thicknesses and their frequency response characterizations were measured. Experimental results showed that the (002)-orientation and surface roughness of AlN films played a crucial role of determining the frequency response of AlN SAW devices.