Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Effects of deposition conditions on properties of AlN thin films and characterization of AlN SAW devices

다양한 증착변수에 따른 AlN 박막의 물성 및 SAW 소자의 특성 분석

  • Jung, Jun-Phil (Dept. of Electronic, Electrical, Control, and Instrumentation Engineering, Hanyang University) ;
  • Lee, Myung-Ho (Dept. of Electronic, Electrical, Control, and Instrumentation Engineering, Hanyang University) ;
  • Lee, Jin-Bock (Dept. of Electronic, Electrical, Control, and Instrumentation Engineering, Hanyang University) ;
  • Park, Jin-Seok (Dept. of Electronic, Electrical, Control, and Instrumentation Engineering, Hanyang University)
  • 정준필 (한양대학교 전자전기어계측공학과) ;
  • 이명호 (한양대학교 전자전기어계측공학과) ;
  • 이진복 (한양대학교 전자전기어계측공학과) ;
  • 박진석 (한양대학교 전자전기어계측공학과)
  • Published : 2002.07.10
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Abstract

AlN thin films were deposited on Si(100) and $SiO_2$/Si substrates using R.F. magnetron sputtering system. The effect of various deposition conditions on the crystal orientation of AlN films was investigated to obtain a highly (002)-oriented films. SAW filters were fabricated using AlN films with various thicknesses and their frequency response characterizations were measured. Experimental results showed that the (002)-orientation and surface roughness of AlN films played a crucial role of determining the frequency response of AlN SAW devices.

Keywords