• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제52권8호
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• pp.319-324
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• 2003

AIN thin films are deposited on Si (100) and $SiO_2$/Si substrates by using an RF magnetron sputtering method and by changing the conditions of deposition variables, such as RF power, $N_2$/Ar flow ratio, and substrate temperature ($T_sub$). For all the deposited AIN films, XRD Peak patterns are monitored to examine the effect of deposition condition on the crystal orientation. Highly (002)-oriented AIN films are obtained at following nominal deposition conditions; RF Power : 350W, $N_2$/Ar ratio = 10/20, T$_{sub}$ : $250^{\circ}C$, and working pressure = 5mTorr, respectively. AIN-based SAW devices are fabricated using a lift-off method by varying the thickness of AIN layer. Insertion losses and side-lobe rejection levels of fabricated SAW devices are extracted from their frequency response characteristics, which are also compared in terms of AIN thickness and substrate. Relationships between the film properties of AIN films and the frequency responses of SAW devices are discussed. It is concluded from the experimental results that the (002)-preferred orientation as well as the surface roughness of AIN film may play a crucial role of determining the device performances of AIN-SAW devices.s.

• 한국음향학회지
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• 제9권4호
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• pp.18-32
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• 1990

최근 신호 처리 기기와 센서로서 각광을 받고 있는 SAW Device 는 때론 목적에 따라 수중에서 사용해야 할 때가 있다. 그러나 유체내의 고체 표면을 전파하는 표면파의 경우, 유체내로의 에너지 손실로 인해 설계상에 많은 어려움을 주고 있다. 따라서 본 연구에서는 이러한 어려움을 극복할 수 있는 최적 설계법으로서, 컴퓨터 모형해석을 통해 수중에서 압전물질에 의한 표면파의 최대 발진 효율, 최소 전파 감쇄율, 그리고 pure mode 전파를 이룰 수 있는 SAW Device 의 최적 geometry, 즉 초적 압전 결정 평면, 표면과 전파 방향, 그리고 무차원 전파 계수 들을 구하였다. 본 논문에서는 표면파가 전파하는 고체 재료로서 PZT와 PVDF 적층, 그리고 쇠 하부층을 사용하였으나, 이 설계법은 임의의 유체층과 고체층의 조합에도 적용할 수 있다. 동일한 기술은 수중음향 계측기, antifouling, 그리고 산업 및 의료 분야 등에 쓰이는 센서와 발진기의 설계에도 바로 응용할 수 있다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2000년도 제18회 학술발표회 논문개요집
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• pp.80-80
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• 2000

Surface acoustic wave (SAW) devices have become more important as mobile telecommunication systems need h호-frrequency, low-loss, and down-sized components. Higher-frequency SAW divices can be more sasily realized by developing new h호-SAW-velocity materials. The ZnO/diamond/Si multilasyer structure is one of the most promising material components for GHz-band SAW filters because of its SAW velocity above 10,000 m/sec. Silicon carbide is also a potential candidate material for high frequency, high power and radiation resistive electronic devices due to its superior mechanical, thermal and electronic properties. However, high price of commercialized 6- or 4H-SiC single crystalline wafer is an obstacle to apply SiC to high frequency SAW devices. In this study, single crystalline 3C-SiC thin films were grown on Si (100) by MOCVD using bis-trimethylsilymethane (BTMSM, C7H20Si7) organosilicon precursor. The 3C-SiC film properties were investigated using SEM, TEM, and high resolution XRD. The FWHM of 3C-SiC (200) peak was obtained 0.37 degree. To investigate the SAW propagation characteristics of the 3C-SiC films, SAW filters were fabricated using interdigital transducer electrodes on the top of ZnO/3C-SiC/Si(100), which were used to excite surface acoustic waves. SAW velocities were calculated from the frequency-response measurements of SAW filters. A generalized SAW mode. The hard 3C-SiC thin films stiffened Si substrate so that the velocities of fundamental and the 1st mode increased up to 5,100 m/s and 9,140 m/s, respectively.

• Journal of electromagnetic engineering and science
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• 제7권1호
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• pp.12-16
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• 2007

A UHF band wireless identification system based on passive surface acoustic wave(SAW) devices is presented in this paper. SAW ID tags were fabricated on Y-Z $LiNbO_3$ piezoelectric substrate with a good electro-mechanical coupling property. To reduce degradation of the antenna performance associated with the piezoelectric materials, an efficient design of the SAW RFID antenna is introduced. By measuring the parameters of the SAW ID tag, the performance of the antenna was tested by experimentation.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2006년도 하계종합학술대회
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• pp.469-470
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• 2006

Surface Acoustic Wave(SAW) devices can be used to as wireless sensor elements, called SAW transponders, for measuring shysical quantities such as temperature that do not need any power supply and may be accessed wirelessly. SAW devices were fabricated on Y-Z $LiNbO_3$ piezoelectric substrate with a good temperature coefficient property. The signal response of SAW sensor on the temperature change were compared. To measure the change of SAW velocity. Temperature changed form $20^{\circ}C$ to $400^{\circ}C$ was linearly changed, the SAW sensor is application to the temperature sensor.

• 한국세라믹학회지
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• 제25권1호
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• pp.78-82
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• 1988

Good quality LiNbO3 single crystals which can be applied to SAW devices, were grown by Czochralski method. It was observed that the gas-bubbles were concentrated in ring shape at the outer part of grown crystals, and this anomaly was illustrated by modeling the mechanism of gas-bubble entrapment according to the melt flow pattern in the crucible. And this mechanism was also encertained by observation of solid-liquid interface shape of grown crystals. The optimal condition for good quality crystals was known that the solid-liquid interface shape was slightly concave.

• 대한의용생체공학회:학술대회논문집
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• 대한의용생체공학회 1991년도 춘계학술대회
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• pp.98-100
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• 1991

A sensitive surface acoustic wave (SAW) sensor for the detection of odorants has been constructed by depositing different phospholipids and fatty acids on the surface of the SAW device wi th the Langmuir-Blodgett technique. The characteristics of SAW device operating at 310 MHz deposited with phosphatidylcholine were analyzed. Amyl acetate, acetoin, menthone and other organic gases showed different affinities. The identification of odorants depending on the species of lipid used for coating is discussed in terms of the similarity of the normalized resonant frequency shift pattern. Using a number of different lipid-coated SAW devices, odorants could be identified by a neural-network pattern recognition with back-propagation algorithm.

• 한국전기전자재료학회논문지
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• 제25권12호
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• pp.979-983
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• 2012

We proposed the ZnO thin film for a SAW filter by PLD and RF sputtering method. ZnO thin films was pre-deposited on a sapphire substrate as a seed layer by PLD method and then deposited on seed layer by RF sputtering. The surface characteristics of ZnO thin film were investigated by XRD, SEM and AFM. The minimum surface roughness was 1.92 nm and FWHM of rocking curve was $0.92^{\circ}$. We demonstrated the SAW filter with bandwidth of approximately 0.97 MHz and the center frequency of 18.72 MHz using the proposed ZnO thin film.

• 한국음향학회지
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• 제21권2호
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• pp.102-109
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• 2002

본 논문에서는 위드로월 (withdrawal) 가중형 SAW필터를 자동으로 최적화할 수 있는 설계도구의 개발 내용을 제시하였다. SAW 공진기에 위드로월 가중법이 적용될 경우, 향상된 대역폭 및 천이대역 특성을 구현할 수 있으며, 이러한 위드로월 가중효과를 이용하여 사다리형 위드로월 SAW필터의 최적화도구를 완성하였다. 본 설계방법의 유효성을 검증하기 위하여 RF 대역 CDMA용 TX 및 RX SAW 필터를 본 설계도구를 이용하여 최적화하였으며 실제 실험 결과, 이론과 매우 잘 일치함을 알 수 있었다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2002년도 하계학술대회 논문집 C
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• pp.1479-1481
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• 2002

AlN thin films were deposited on Si(100) and $SiO_2$/Si substrates using R.F. magnetron sputtering system. The effect of various deposition conditions on the crystal orientation of AlN films was investigated to obtain a highly (002)-oriented films. SAW filters were fabricated using AlN films with various thicknesses and their frequency response characterizations were measured. Experimental results showed that the (002)-orientation and surface roughness of AlN films played a crucial role of determining the frequency response of AlN SAW devices.