• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2008.11a
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• pp.43-44
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• 2008

실리콘 웨이퍼 위에 마이크로웨이브 플라즈마 화학증착법으로 나노결정질 다이아몬드 박막을 형성하고 그 위에 RF 마그네트론 스퍼터로 ZnO 박막을 적층한 후 SAW(Surface Acoustic Wave) 필터를 제작하여 평가하였다. 기판온도, 작업압력, Ar/$CH_4$ 비율을 변화시켜 최적공정 조건에서 30nm 수준의 결정립을 갖는 $4{\mu}m$ 두께의 다이아몬드 박막을 얻었고, RF 인가전력, 기판온도, Ar/$O_2$ 비율을 조정하여 결정성이 우수하고, 표면 거칠기가 좋으며, 높은 비저항을 갖는 $2.2{\mu}m$ 두께의 ZnO 박막을 얻었다. 박막의 특성은 FESEM과 XRD로 평가하였다. Lift-off 식각공정을 이용하여 일정한 선폭과 간격(Line/Space : 1.5/$1.5{\mu}m$)을 갖는 구리 전극 패턴을 형성하였다. Network Analyzer를 이용하여 측정한 SAW 필터의 중심주파수는 1.67GHz이었다.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.8 no.3
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• pp.686-693
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• 2004

We have studied a method to fabricated a Surface Acoustic Waves (SAW) filter for Wide band Codeless Division Multiple Access(WCDMA) was formed on the Langasite substrate and was evaporated by Aluminum-Copper alloy and then we developed a simulator using the mathematica package. And, we can design and fabricate the Slanted finger Inter-digital Transducer (SFIT) for the purpose to decreased the ultimate rejections on side of the electrodes, and performed computer-simulation by simulator. Also, we have employed that the block weighted type Inter-digital Transduce(IDT) as input transduce of the filter and the withdrawal weighted type IDT as an output transducer of the filter in order to minimize effect of diffractions. We have employed that the number of pairs of the input and output IDT are 50 pairs and the thickness and the width of reflector are $5000\AA$, and $1\lambda/4(\cong3.6{\mu}m)$, respectively. Also the width of IDT' finger and the space between IDT' finger and reflector are $1\lambda$/16 and 1\lambda$/8, respectively. Frequency response of the fabricated SAW bandpass filter has the property that center frequency is about 190MHz, bandwidth at the 3dB is probably 4MHz and out-band attenuation is -60dB approximately.

• Proceedings of the Acoustical Society of Korea Conference
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• spring
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• pp.389-392
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• 2000

본 연구에서는 1, 2단자쌍 회로망의 임피던스 정합회로를 간단하고 빠르게 구할 수 있는 방안을 개발하였다. 우선 회로망의 전체 전달함수를 F 행열로 부터 계산하고, 이를 이용하여 양단의 부하저항 및 정합회로가 포함된 각각의 단자의 입출력 임피던스를 구하였으며, 이 식으로부터 정합용 소자의 정확한 값을 계산하였다. 본 연구의 타당성을 검증하기 위해 CDMA용 소자로 널리 사용되는 중간주파수 대역 withdrawal 가중형 SAW 필터에 본 연구의 결과를 적용하여 임피던스 정합 전후의 특성변화를 시뮬레이션과 실험을 통하여 동시에 확인하였다 그 결과 85.38 MHz의 중심주파수에서 비대역폭이 $1.2\%$, 삽입손실이 29dB, VSWR이 80인 필터를 본 연구방법을 이용하여 정합 한 경우, 각각 $1.8\%$, 9dB, 3으로 향상됨을 시뮬레이션과 실험을 통해 확인하였다. 본 연구결과는 SAW 디바이스의 정합에 매우 용이하게 이용될 수 있을 뿐만 아니라 일반적인 1, 2단자쌍 회로망의 임피던스 정합에도 널리 사용될 수 있다

• Korean Journal of Materials Research
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• v.4 no.7
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• pp.783-791
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• 1994

Piezoelectric ZnO thin films were deposited on 7059 glass substrate by rf magnetron sputtering. The effects of deposition parameter, such as rf power, gas pressure and $O_{2}$/Ar gas ratio, on the crystallinity and electrical properties of the deposited ZnO thin films were studied. It was found that the deposition rate was higher than the previously reported values. ZnO films were suitable for SAW filter since a standard deviation of XRD (002) peak rocking curve was less than $6^{\circ}$. ZnO thin films, which were deposited at $O_{2}$/Ar ratio larger than 25%, showed high resistance. SAW filter was fabricated using ZnO film, of which thickness was 0.25 of the wavelength of the propatating surface acoustic wave. The measured frequency response was consistent with the calculated one. The SAW filter had center frequency 39.08 MHz, phase velocity 2501 m/sec and insertion loss 29 dB.

• Proceedings of the IEEK Conference
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• 2000.06b
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• pp.5-8
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• 2000

This paper proposes GaN film as a piezoelectric material for SAW(surface acoustic wave) filters. The fabricated GaN SAW filter exhibited a very high velocity of 5800 ㎧and relatively low insertion loss of -9.9 dB without matching circuit. From Smith's equivalent circuit model, the calculated electromechanical coupling factor (K$^2$) was about 4.$\pm$03％. which is larger than those obtained from other thin film piezoelectric materials and allows the realization of wider filter fractional bandwidths.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.05c
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• pp.247-250
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• 2002

SAW filters were fabricated on $LiNbO_3$ substrates to evaluate frequency response and properties of photolithography. In the both of etch and lift-off methods, lift off method was superior to etch method in fabrication process. Frequency response property was measured by network analyzer. From measurement of acoustic property, SAW propagation velocity was 3574.9m/sec for $LiNbO_3$ SAW filter.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.31 no.11A
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• pp.1159-1166
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• 2006

In this paper, we have designed a RFID reader receiver system for improving the performance of the passive Tag based 9$'908.5{\sim}914MHz'$ RFID reader, and analyzed the system performance according to the frequency, the reader, and tag properties. The commercial receive system causes a loss in sensitivity because of 24 capacitors and 6 inductors. So we have designed an improved system using a circulator, LNA and a SAW filter. The experimental results show that the use of a circulator to separate the Tx/Rx paths eliminates interference, the LNA improves the sensitivity of the Rx module and SAW filter eliminates the noise and spurious components in the received signal.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.9 no.2
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• pp.307-315
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• 2005

We have studied to obtain the SAW filter for the passband was formed on the Langasite substrate and was evaporated by Aluminum-Copper alloy and then we performed computer-simulated by simulator. We can fabricate that the block weighted type IDT as an input transducer of the filter and the withdrawal weighted type IDT as an output transducer of the filter from the results of our computer-simulation. Also, we have performed to obtain the properly design conditions about phase shift of the SAW filter for WCDMA. We have employed that the number of pairs of the input and output IDT are 50 pairs and the thickness and the width of reflector are 5000$\AA$ and 3.6$mu$m, respectively. Frequency response of the fabricated SAW filter has the property that the center frequency is about 190MHz and bandwidth at the 3dB is probably 8.2MHz. And we could obtain that return loss is less then 16dB, ripple characteristics is probably 4dB and triple transit echo is less then 18dB after when we have matched impedance.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.9 no.3
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• pp.602-608
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• 2005

We have studied to obtain the SAW filter for the Single Phase Unidirectional Transduce. (SPUDT), was formed on the Langasite substrate and was evaporated by Aluminum-Copper alloy and then we performed computer-simulated by simulator. We can fabricate that the block weighted type IDT as an input transducer of the filter and the withdrawal weighted type IDT as an output transducer of the filter from the results of our computer-simulations. Also, we have performed to obtain the properly conditions about impedance matching of the SAW filter for SPUDT. We have employed that the number of pairs of the input and output IDT are 50 pairs and the thickness and the width of reflector are 5000A and $3.6{\mu}m$, respectively. And the width of IDT' fingers is $2.4{\mu}m$, and the space between IDT' finger and reflector is $2.0{\mu}m$. Frequency response of the fabricated SAW filter has the property that the center frequency is about 190MHz and bandwidth at the 3dB is probably 7.7MHz after when we have matched impedance. Also, we could obtain that ripple characteristics is less than 0.4dB and standing wave ratio is probably 1.5 after when we have matched impedance.

• Journal of Korea Society of Industrial Information Systems
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• v.21 no.1
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• pp.43-50
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• 2016

In this paper, new automatic LC calibrator is proposed for realizing a passive LC filter with almost constant frequency characteristic regardless of the PVT variations. The SAW-less GPS RX front-end is implemented using a 65nm CMOS process using the proposed LC calibrator. Also, new dual-mode low noise amplifier (LNA) structure is proposed to generate the RF signal required for the LC calibrator. The characteristics of the implemented GPS RX front-end show the voltage gain of about 42.5 dB, noise figure of below 1.35 dB, the blocker input P1dB of -24 dBm in case of the worst blocker signal at 1710 MHz frequency, while it consumes 7 mA current at 1.2 V power supply voltage.