Proceedings of the IEEK Conference (대한전자공학회:학술대회논문집)
- 2000.06b
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- Pages.5-8
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- 2000
The Fabrication of SAW Filter Using The GaN Piezoelectric Thin Films
GaN 압전박막을 이용한 SAW 필터 제조
Abstract
This paper proposes GaN film as a piezoelectric material for SAW(surface acoustic wave) filters. The fabricated GaN SAW filter exhibited a very high velocity of 5800 ㎧and relatively low insertion loss of -9.9 dB without matching circuit. From Smith's equivalent circuit model, the calculated electromechanical coupling factor (K
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