• Proceedings of the Materials Research Society of Korea Conference
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• 2003.03a
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• pp.120-120
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• 2003

MOCVD법으로 TiN 표면에 Ru을 증착함에 있어서 Ru의 핵생성을 고양시키기 위한 ECR plasma 전처리 세정이 필요하다. 본 연구에서는 Ru 증착시 ECR $H_2O$$_2$, AE Plasma 전처리 세정 효과를 SEM, AES, XRD로 분석하였다. Ru의 핵생성은 ECR H$_2$, Ar Plasma의 노출시간이 증가할수록 향상된 반면, ECR $O_2$ plasma의 경우 노출시간이 증가할수록 핵생성 효과는 감소하였다. H$_2$ plasma 내의 H$_2$ion은 Ti와 NH$_3$를 형성하기 위해서 TiN과 반응하여 TiN을 Ti로 개질 시켰으며, Ar plasma 전처리 세정하는 동안 Ar plasma 내의 Ar ion은 TiN 또는 TiON 표면의 질소와 산소원자를 제거하는 효과를 나타내었다. 그 결과 TiN 표면상에서도 Ru의 핵생성이 쉽게 이루어졌으며 H$_2$, Ar ECR Plasma 전처리 세정에서 RU 핵생성이 향상되는 결과를 얻었다. 세 종류의 plasma중에서 Ar ECR plasma로 전처리 세정한 경우에 가장 높은 Ru 핵생성 밀도를 얻을 수 있었다.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.59 no.2
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• pp.363-368
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• 2010

In this work, electrochemiluminescence (ECL) cell using nanocrysralline $TiO_2$ electrode and Ru(II) complex (Ru${(bpy)_3}^{2+}$) is fabricated for low-cost high-efficient energy conversion device application. The nanocrysrallme $TiO_2$ layer (${\sim}10{\mu}m$ thickness) with large surface area (${\sim}360m^2$/g) can largely inject electrons from nanoporous $TiO_2$ electrode and allows the oxidation/reduction of Ru(II) complex in the nanopores. The cell structure is composed of a glass/ F-doped $SnO_2$(FTO)/ porous $TiO_2$/ Ru(II) complex in acetonitrile/ FTO/ glass. The nanocrysralline $TiO_2$ layer is prepared using sol-gel combustion method. The ECL efficiency of the cell consisting of the porous $TiO_2$ layers was 250 cd/W, which was higher than that consisting of only FTO electrode (50cd/W). The nanoporous $TiO_2$ layers wwas effective for increasine ECL intensities.

• Journal of Magnetics
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• v.13 no.2
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• pp.57-60
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• 2008

This study examined the effect of various types of epitaxial strain on the magnetic properties of $SrRuO_3$ thin films. Epitaxial $SrTiO_3$ (001), $SrTiO_3$ (110), and $SrTiO_3$ (111) substrates were used to apply different crystal symmetries to the grown films. The films were grown using pulsed laser deposition. The X-ray diffraction patterns of the films grown under optimum conditions showed very clear peaks for the $SrRuO_3$ film and $SrTiO_3$ substrates. The saturated magnetic moment at 5 K after 7 Tesla field cooling was $1.2-1.4\;{\mu}_B$/Ru. The magnetic easy axis for all three types of films was along the surface normal. The magnetic transition temperature for the $SrRuO_3$ film with lower symmetry was slightly larger than the $SrRuO_3$ film with higher symmetry.

• Journal of the Korean Ceramic Society
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• v.42 no.2 s.273
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• pp.94-98
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• 2005

$RuO_2$ is widely studied as a lower electrode material for high dielectric capacitors in DRAM (Dynamic Random Access Memories) and FRAM (Ferroelectric Random Access Memories). In this study, the effects of hydrogen, oxygen, and argon Electron Cyclotron Resonance (ECR) plasma pretreatments on deposited by Metal Organic Chemical Vapor Deposition (MOCVD) $RuO_2$ nucleation was investigated using X-Ray Diffraction (XRD), Scanning Electron Microscopy (SEM), and Atomic Force Microscopy (AFM) analyses. Argon ECR plasma pretreatment was found to offer the highest $RuO_2$ nucleation density among these three pretreatments. The mechanism through which $RuO_2$ nucleation is enhanced by ECR plasma pretreatment may be that the argon or the hydrogen ECR plasma removes nitrogen and oxygen atoms at the TiN film surface so that the underlying TiN film surface is changed to Ti-rich TiN.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2016.11a
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• pp.191.2-191.2
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• 2016

$TiO_2$는 우수한 화학적 및 물리적 안정성 때문에 수전해 장기간 사용에 적합한 전기화학 전극으로 여겨진다. 큰 표면적을 갖는 $TiO_2$를 제조하기 위한 수많은 방법 중 양극산화(anodization)는 비교적 간단하고 저렴한 공정으로 인하여 매우 실용적인 방법으로서 알려져 있다. 특히, 고도로 정렬 된 $TiO_2$ 나노튜브($TiO_2$ NTs) 의 경우에는 분말상과 달리 전극제조를 위해 추가적인 접착제를 필요하지 않다. 그러나, $TiO_2$는 일반적으로 절연 특성을 나타내기 때문에 전극의 활용을 위해서는 본질적으로 촉매의 사용이 불가피하다. 다수의 전기 촉매 중, $IrO_2$와 $RuO_2$는 수전해 분야에 잘 알려진 산화 촉매이다. 그럼에도 불구하고, 특유의 높은 종횡비 때문에 $TiO_2$ 나노튜브에 전기 촉매를 균일하게 도핑하는 것은 많은 어려움이 따른다. 이를 해결하기 위한 방법으로 $RuO_2$를 도핑하기 위한 단일공정 $TiO_2$ 양극산화 기술이 보고된 바 있다. 본 연구에서는 2원 촉매($IrO_2$ 및 $RuO_2$)를 $TiO_2$ 나노튜브에 도핑하기 위한 단일공정 양극산화 기술에 대하여 연구하였다. 전구물질로써 $KRuO_4$($RuO_2$ 전구체)와 IrOx 나노입자(IrOx NPs, $IrO_2$ 전구체)를 사용하였다. 특히, IrOx를 나노 입자는 $IrCl_3$로부터 중간 매체로 합성된다. IrOx는 단일공정 양극산화 중에 $TiO_2$ 나노튜브 상에 도핑 가능한 이온 형태인 $IrO_4$-로 전환될 수 있다. 제조된 시료는 열처리 후 바로 전극으로 사용되었으며 SEM, XPS, TEM, ICP-OES 등으로 정성, 정량 분석을 수행하였다. LSV와 EIS를 통해 전기화학적 성능 평가가 이루어졌으며, LSV를 통해 포집한 기체는 가스 크로마토그래피를 사용하여 정량분석한 후 그 효율을 측정하였다.

• Environmental Engineering Research
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• v.24 no.4
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• pp.646-653
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• 2019

Recovery of valuable metals in the industrial wastewater and sludge has attracted an attention owing to limited metallic resources in the earth. In this study, we firstly fabricated Ti/Ir-Ru electrodes by spin coating technique for effective recovery of Cu in electrowinning process. Two different Ti/Ir-Ru electrodes were fabricated using 100 and 500 mM of precursors (i.e., Ir-Ru). SEM-EDX and AFM revealed that Ir and Ru were homogenously distributed on the surface of Ti plate by the spin coating, in particular the electrode prepared by 500 mM showed distinct boundary line between Ir-Ru layer and Ti substrate. XRD, XPS, and cyclic voltammetry also revealed that characteristics of IrO₂, RuO₂, and TiO₂ and its electrocatalytic property increased as the concentration of coating precursor increased. Finally, we carried out Cu recovery experiments using two Ti/Ir-Ru as anodes in electrowinning process, showing that both anodes showed a complete removal of Cu (1 and 10 g/L) within 6 h reaction, but much higher kinetic rate constant was obtained by the anode prepared by 500 mM. The findings in this study can provide a fundamental knowledge for surface characteristics of Ti/Ir-Ru electrode prepared by spin coating method and its potential feasibility for effective electrowinning process.

• Environmental Engineering Research
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• v.25 no.3
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• pp.324-334
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• 2020

Tannery wastewater is known to contain high concentrations of organic compounds, pathogens, and other toxic inorganic elements such as heavy metals, nitrogen, sulfur, etc. Biological methods such as aerobic and anaerobic processes are unsuitable for tannery wastewater treatment due to its high salinity, and electrochemical oxidation offers a promising method to solve this problem. In this study, raw tannery wastewater treatment using DSA® Ti/RuO₂, Ti/IrO₂ and Ti/BDD electrodes with continuous flow systems was examined. Effects of current densities and electrolysis times were investigated, to evaluate the process performance and energy consumption. The results showed that a Ti/BDD electrode is able to reach higher treatment efficiency than Ti/IrO₂, and Ti/RuO₂ electrodes across all parameters, excluding Total Nitrogen. The main mechanism of tannery wastewater oxidation at a Ti/BDD electrode is based on direct oxidation on the electrode surface combined with the generation of oxidants such as °OH and Cl₂, while at DSA® Ti/RuO₂ and Ti/IrO₂ electrodes, the oxidation mechanisms are based on the generation of chlorine. After treatment, the effluents can be discharged to the environment after 6-12 h of electrolysis. Electrooxidation thus offers a promising method for removing the nutrients and non-biodegradable organic compounds in tannery wastewater.

• Clean Technology
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• v.22 no.1
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• pp.16-28
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• 2016

Textile industry is considered as one of the most polluting sectors in terms of effluent composition and volume of discharge. It is well known that the effluents from textile dying industry contain not only chromatic substances but also large amounts of organic compounds and insolubles. The azo dyes generate huge amount of pollutions among many types of pigments. In general, the electrochemical treatments, separating colors and organic materials by oxidation and reduction on electrode surfaces, are regarded as simpler and faster processes for removal of pollutants compared to other wastewater treatments. In this paper the electrochemical degradation characteristics of dye wastewater containing CI Direct Blue 15 were analyzed. The experiments were performed with various anode materials, such as RuO₂/Ti, PtO₂/Ti, IrO₂/Ti and graphite, with stainless steel for cathode. The optimal anode material was located by changing operating conditions like electrolyte concentration, current density, reaction temperature and initial pH. The degradation efficiency of dye wastewater increased in proportion to the electrolyte concentration and the current density for all anode materials, while the temperature effect was dependent on the kind. The performance orders of anode materials were RuO₂/Ti > PtO₂/Ti > IrO₂/Ti > graphite in acid condition and RuO₂/Ti > IrO₂/Ti > PtO₂/Ti > graphite in neutral and basic conditions. As a result, RuO₂/Ti demonstrated the best performance as an anode material for the electrochemical treatment of dye wastewater.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 2009.10a
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• pp.141-144
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• 2009

In this study, used simplest sandwich cells containing $Ru2^+$ liquid electrolytes in order to clarify the role of nanoporous $TiO_2$ electrodes. And, the cell structure is as follow: $F:SnO_2$ glass/ nanoporous $TiO_2$/ tris(2,2'-bipyridy)ruthenium(ll) colplex [$Ru(bpy)_3(PF_6)_2$] in acetonitrile/ $F:SnO_2$ glass. The result, we found that ECL intensities increased rapidly by use of cathodes with nanoporous $TiO_2$ layers. And, porous $TiO_2$ electrodes were confirmed to be efficient for ECL devices as well as solar cell devices. It is thought that the increases in the ECL intensities may be associated with both formation of $Ru^+$ in porous $TiO_2$ electrodes and the process taking place after reduction of $Ru^+$ which occurs in the nanoporous electrodes.

• Journal of Korean Society of Environmental Engineers
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• v.34 no.11
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• pp.715-719
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• 2012

We investigated the effects of electrochemical characteristics and generation of chlorine by the different amount of Ru coating which was prepared for $RuO_2$/Ti electrode coated with 1.5 mg, 2.5 mg, 5.5 mg, 8.5 mg Ru per unit area ($cm^2$). As a Result of the cycle voltammetry experiments, chlorine overvoltage of Ru-coated electrodes showed to be the nearly sustained value of approximately 1.15V (vs. Ag/AgCl). By contrary, According to the results of the AC impedance spectroscopy and potentiodynamic polarization tests, the amount of Ru per unit area ($cm^2$) included 2.5 mg, 3.5 mg as $RuO_2$/Ti offered the highest levels of durability which was electrode resistance and corrosion rate appeared to be $0.4582{\Omega}$, $0.5267{\Omega}$ and 0.082 mm/yr, 0.058 mm/yr, respectively. It was also observed that generation of chlorine coated with 3.5 mg per unit area ($cm^2$) was the highest value of 15.2 mg/L.