• 한국진공학회지
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• 제8권4B호
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• pp.541-547
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• 1999

Reactive ion etching process for InP using BCl3/O2/Ar high density inductively coupled plasma was investigated. The experimental design method proposed by the Taguchi was utilized to cover the whole parameter range while maintaining reasonable number of actual experiments. Results showed that the ICP power and the chamber pressure were the two dominant parameters affectsing etch results. It was also observed that the etch rate decreased and the surface roughness improved as the ICP power and the bias voltage increased and as the chamber pressure decreased. The Addition of oxygen to the gas mixture drastically improved surface roughness by suppressing the formation of the surface reaction product. The optimum condition was ICP power 600W, bias voltage -100V, 10% $O_2$, 6mTorr, and $180^{\circ}C$, resulting in about 0.15$\mu\textrm{m}$ etch rate with smooth surfaces and vertical mesa sidewalls Also, the maximum etch rate of abut 4.5 $\mu\textrm{m}$/min was obtained at the condition of ICP power 800W, bias voltage -150V, 15% $O_2$, 8mTorr and $160^{\circ}C$.

• The Korean Journal of Ceramics
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• 제2권1호
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• pp.43-47
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• 1996

$RuO_2$ thin films deposited directly on Si substrate by RF magnetron sputtering method using $RuO_2$ target have been investigated. Special interest was focused on the effect of process parameter on the surface roughness of $RuO_2$ films. Crystallization behavior and electrical properties of the films deposited at $300^{\circ}C$ were superior to those deposited at room temperature. Metallic Ru phase was formed in pure Ar and this phase had resulted poor adhesion after post annealing process in oxidizing ambient. Microstructural analysis reveals that the size of the $RuO_2$ crystallites gets smaller and the surface becomes smoother as the $O_2$ partial pressure or film thickness decreases. Irrespective of the $O_2/Ar$ ratio, resistivity of $RuO_2$ films ranged in $50~70 {\mu}{\Omega}-cm$. As the film thickness decreases, there is a thickness where the resistivity rises abruptly. Such an onset thickness turned out to be dependent n the $O_2$/Ar ratio.

• Fibers and Polymers
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• 제2권4호
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• pp.196-202
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• 2001

In order to investigate the relationship between subjective sensation for fabric sound and touch and the objective measurements, eight different apparel fabrics were selected as specimens. Sound parameters of fabrics including level pressure of total sound (LPT), level range (ΔL), and frequency differences (Δf) and mechanical properties by Kawabata Evaluation System (KES) were obtained. For subjective evaluation, seven aspects of the sound (softness, loudness, pleasantness, sharpness, clearness, roughness, and highness) and eight of the tough (hardness, smoothness, fineness, coolness, pliability, crispness, heaviness, and thickness) were rated using semantic differential scale. Polyester ultrasuede was evaluated to sound softer and more pleasant while polyester taffeta to sound louder and rougher than any other fabrics. Wool fabric such as worsted and woolen showed similar sensation for sound but differed in some touch sensation in that woolen was coarseast, heaviest, and thickest in touch. In the prediction model for sound sensation, LPT affected positively subjective roughness and highness as well as loudness, while ΔL was found as a parameter related positively with softness and pleasantness. Touch sensation was explained by some of mechanical properties such as surface, compressional, shear, and bending properties implying that a touch sensation could be expressed by a variety of properties.

• 한국기계가공학회지
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• 제15권5호
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• pp.1-7
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• 2016

In the present study, a plastic surface end-milling was implemented to investigate the effects of processing parameters on surface quality. The end milling can be considered an efficient method for rapid prototyping of thermoplastic bio-systems since it exhibits several beneficial functions including short fabrication time and high dimensional accuracy. In this regard, putative biocompatible thermoplastic materials, such as PMMA, PET, and PC, were chosen as workpiece materials. Among the relevant processing parameters influencing the surface quality of the final product, depth of cut, feed rate, and spindle speed were considered in the present study. The roughness of surfaces machined under various conditions was measured to elucidate the effect of each parameter. We found that the cut depth was the most significant factor. Heat generation during machining also had a remarkable effect. From these investigations, an appropriate combination of processing conditions specific to each type of use and end-product could be found. This optimization can be useful in end-milling of thermoplastic bio-systems.

• 한국생산제조학회지
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• 제24권3호
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• pp.334-341
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• 2015

This paper summarizes the results of an investigation into the environmental factors that have an indirect impact on parts quality, as well as those process variables and modeling information that have a direct impact. The effects of strength, surface hardness, roughness, and accuracy of shape, that is, qualities that users generally need to know, were evaluated with laminating direction experimentally. The 3D printing methods used in this experiment were fused deposition modeling (FDM), stereolithography apparatus (SLA), selective laser sintering (SLS), 3D printing (3DP) and laminated object manufacturing (LOM). The goal was to achieve a high standard of quality control and product quality by optimizing the fabrication process.

• 터널과지하공간
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• 제29권6호
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• pp.542-557
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• 2019

암석의 성인과 변성에 따른 내부구조의 마이크로 특성은 암반의 거동 특성에 영향을 미친다. 본 연구에서는 암석 내부의 구성물질의 분포 특성을 반영하는 엑스레이 단층(X-ray CT) 이미지에 기초한 새로운 암석특성의 평가방안을 고찰하였다. 암석의 불균질 특성 및 이방성 특성의 정량화, 암석의 구성광물 입자의 크기분포 및 형상특성, 공극이미지를 이용한 유동해석, 암석내부의 노출되지 않은 절리면 거칠기 평가 등 전통적인 암석의 시험법으로 측정하기 어려웠던 중요한 암석의 특성들이 X-ray CT 이미지의 분석을 통하여 평가될 수 있다.

• Tribology and Lubricants
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• 제11권5호
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• pp.71-77
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• 1995

The capacitance technique was used to measure the minimum oil film thickness in engine bearing and the central oil film thickness between cam and tappet. This method is based on the measurement of total capacitance of oil film. For the measurement of the oil film thickness between cam and tappet, two surfaces were assumed to be flat and parallel within the Hertzian region and all the measured capacitance originated from this region. Shear rates from the measured minimum oil film thickness are over 10$^{6}$ sec$^{-1}$ in the greater part in both two cases. The minimum oil film thickness in engine bearing is larger than the surface roughness. Between cam and tappet it is mostly smaller than the surface roughness. In spite of the awkward restriction of the reliability of measured oil film thickness, it was known that the capacitance technique makes it possible to measure the oil film thickness in elastohydrodynamic and mixed lubrication regimes as well as in hydrodynamic regime. Therefore, it is also possible to classify the lubrication regimes based on the oil film thickness.

• 대한원격탐사학회지
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• 제27권3호
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• pp.225-234
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• 2011

This study proposes an inversion algorithm to extract the surface parameters, such as surface roughness and soil moisture contents, using multi-frequency SAR data. The study areas include the tidal flats of Jebu Island and the reclaimed lands of Hwaong district on the western coasts of the Korean peninsula. SAR data of three frequencies were accordingly calibrated to provide precise backscattering coefficients through absolute radiometric calibration. The root mean square (RMS) height and the correlation length, which can describe the surface roughness, were extracted from the backscattering coefficients using the inversion of the Integral Equation Method (IEM). The IEM model was appropriately modified to accommodate the environmental conditions of tidal flats. Volumetric soil moisture was also simultaneously extracted from the dielectric constant using the empirical model, which define the relations between volumetric soil moistures and dielectric constants. The results obtained from the proposed algorithm were verified with the in-situ measurements, and we confirmed that multi-frequency SAR observations combined with the surface scattering model for tidal flats can be used to quantitatively retrieve the geophysical surface parameters in tidal flats.

• 한국소음진동공학회논문집
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• 제16권5호
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• pp.485-494
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• 2006

The state-of-the-art of low-noise fan design usually includes the consideration of optimal sound level and sound quality. The influential design parameters of the noise level by the centrifugal fan were selected based on the preliminary test. The centrifugal fans were designed according to the experiment plan method by specifying the selected design parameters. The experiment with these machined mock-up's of centrifugal impellers suggested the major design parameters among many, having impacts upon the indices of sound quality (e.g. loudness, sharpness, roughness and fluctuation strength) at the same operation point. With the response surface method, the major design parameters selected thereafter were analyzed to estimate each contribution upon the sound quality of the centrifugal fan, and the optimal values were drawn by the consideration of the sound quality levels and their regression equations. In addition, the validity of the regression equations was numerically verified by means of the coefficient of determination. Furthermore, the mechanism by which the centrifugal fan impeller influences the determinants of its sound quality was suggested.

• 한국표면공학회지
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• 제43권5호
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• pp.230-237
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• 2010

FTMP(friction thermo-mechanical process) is an adaptation of friction stir welding, and can be used as a generic process to modify the microstructure at selective locations. In this study, in order to analyze characteristics of surface modification of ACA4 castings by FTMP, change of rotating speed(R/S) and traveling speed(T/S) of tool were applied as conditional parameter. Analysis of microstructure, hardness, surface roughness and depth of modified zone(MZ) were searched. The best condition were obtained at R/S 600 rpm and T/S 100 mm/min. At this time, hardness was 82 HV, the surface roughness was 0.07 mm and the depth at MZ was 1.72 mm. Free defects microstructure and fine Si particles formation and strong forging effects were analyzed at MZ.