FBAR Devices Fabrication and Effects of Deposition Temperature on ZnO Crystal Growth for RF Filter Applications (RF 필터응용을 위한 FBAR 소자제작과 증착온도가 ZnO 박막의 결정성장에 미치는 영향)
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- Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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- 2003.05a
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- pp.88-92
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- 2003