• Journal of the Korean Ceramic Society
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• v.31 no.7
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• pp.731-738
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• 1994

TiN films were deposited on high speed steels by plasma assisted chemical vapor deposition (PACVD), cathode arc ion plating (CAIP) and reactive magnetron sputtering (RMS). The properties of the films deposited by the three different methods were compared. The preferred oriented plane of PACVD-TiN is (200) and those of CAIP-TiN and RMS-TiN are (111). PACVD-TiN shows a dome surface and a microstructure having small grains. CAIP-TiN shows the highest microhardness and the best adhesion strength of the three because it has a dense microstructure and an ill-defined interface. But is shows the greatest surface roughness due to the Ti droplet created by the arc. RMS-TiN shows a microstructure having large voids so that its properties in microhardness and adhesion are the worst of the three.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.33 no.5
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• pp.514-520
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• 2009

In configuring an automated polishing system, a monitoring scheme to estimate the surface roughness is necessary. In this study, a precision polishing process, magnetic abrasive finishing (MAF), along with an in-process monitoring setup was investigated. A magnetic tooling is connected to a CNC machining to polish the surface of stavax(S136) die steel workpieces. During finishing experiments, both AE signals and force signals were sampled and analysed. The finishing results show that MAF has nano scale finishing capability (upto 8nm in surface roughness) and the sensor signals have strong correlations with the parameters such as gap between the tool and workpiece, feed rate and abrasive size. In addition, the signals were utilized as the input parameters of artificial neural networks to predict generated surface roughness. Among the three networks constructed -AE rms input, force input, AE+force input- the ANN with sensor fusion (AE+force) produced most stable results. From above, it has been shown that the proposed sensor fusion scheme is appropriate for the monitoring and prediction of the nano scale precision finishing process.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.30 no.1
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• pp.23-26
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• 2017

Mo doped carbon (C:Mo) thin films were fabricated with various Mo target power densities by unbalanced magnetron sputtering (UBM). The effects of target power density on the surface, structural, and electrical properties of C:Mo films were investigated. UBM sputtered C:Mo thin films exhibited smooth and uniform surfaces. However, the rms surface roughness of C:Mo films were increased with the increase of target power density. Also, the resistivity value of C:Mo film as electrical properties was decreased with the increase of target power density. From the performance of organic thin filml transistor using conductive C:Mo gate electrode, the carrier mobility, threshold voltage, and on/off ratio of drain current (Ion/Ioff) showed $0.16cm^2/V{\cdot}s$, -6.0 V, and $7.7{\times}10^4$, respectively.

• Progress in Superconductivity
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• v.6 no.1
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• pp.69-73
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• 2004

Ni alloy tape is electropolished to be used as a metal substrate for fabrication of IBAD (ion-Beam Assisted Deposition)-MgO texture template fur HTS coated conductor. Electropolishing is needed to obtain a very smooth surface of Ni alloy tape because the in-plane texture of templates is sensitive to the roughness of metal substrate. The critical current of YBCO coated conductor depends on the texture of YBCO that depends on the texture of the IBAD MgO layer. And so the smoothness of the metal substrate is directly related to the superconducting properties of the coated conductor. In this study, we have prepared a reel-to-reel electropolishing apparatus to polish the Ni alloy tapes for IBAD. Various electropolishing conditions were investigated to improve the surface roughness. Hastelloy tape is continuously electropolished with high polishing current density (0.5 ∼ 2 A/$\textrm{cm}^2$) and fast processing time (1 ∼ 3 min). Polished hastelloy tapes have surface roughness(RMS) of below 1 nm on a 5 ${\times}$ 5 $\mu\m^2$ from AFM and SEM.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.2 s.95
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• pp.234-243
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• 1999

Using the geometric and the vector methods, three dimensional surface texture and roughness models in flat end milling are developed. In these models, rear cutting effect on surface generation is considered along with tool run-out and tool setting error including tool tilting and eccentricity between tool center and spindle rotational center. Rear cutting is the secondary cutting of the already machined surface by the trailing cutting edge. The effects of tool geometry and tool deflection on surface roughness are also considered. For representing the surface texture more practically, three dimentional surface topography parameters such as RMS deviaiton, skewness and kurtosis are introduced and used in expressing the surface texture characteristics. Under various cutting conditions, it is confirmed that the developed models predict the real surface profile precisely. These models could contribute to the cutter design and cutting condition selection for the reduction of machining and manual finishing time.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.04a
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• pp.422-427
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• 2003

Sapphire have been ground by the ultra-precision surface grinder having a glass -ceramic spindle of extremely-low thermal expansion with various cup-type resinoid-bonded diamond wheels of #400-#3000 in grain size. Sapphire can be ground in the ductile mode. And also, the surface roughness and grinding conditions has been clarified. The smooth surface of Sapphire less than 1nm RMS, 1nm Ra can be obtained by the ultra-precision grinding without any polishing Process.

• 한국정보디스플레이학회:학술대회논문집
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• 2004.08a
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• pp.124-128
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• 2004

A Poly-Si and a ITO films with surface roughness 1.8 nm and 0.5 nm of root mean square ($R_{rms}$ vakue) values were developed, respectively. A 3 inch UXGA LTPS TFT-LCD with 667 ppi resolution and a 10 inch VGA LTPS OLED have been developed and demonstrated using PMOS technology.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.9 no.5
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• pp.504-509
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• 1999

In-situ cleaning and subsequent silicon epitaxial film growth were performed in a load-locked reactor equipped with Hg-grid UV lamp and PBN heater to obtain the smooth and contaminant-free underlying surface and develop low-temperature epitaxial film growth process. The removals of organic and native oxide were investigated using UV-excited $O_2$ and $NF_{3}/H_{2}$, and the effect of the surface condition was examined on the quality of silicon epitaxial film grown at temperature as low as $750^{\circ}C$. UV-excited gas phase cleaning was found to be effective in removing the organic and native oxide successfully providing a smooth surface with RMS roughness of 0.5$\AA$ at optimal condition. Crystalline quality of epitaxial film was determined by smoothness of cleaned surface and the presence of native oxide and impurity. Crystalline defects such as dislocation loops or voids due to the surface roughness were observed by XTEM.

• Proceedings of the Korea Water Resources Association Conference
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• 2020.06a
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• pp.125-125
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• 2020

European Space Agency's Sentinel-1 has an improved spatial and temporal resolution, as compared to previous satellite data such as Envisat Advanced SAR (ASAR) or Advanced Scatterometer (ASCAT). Thus, the assumption used for low-resolution retrieval algorithms used by ENVISAT ASAR or ASCAT is not applicable to Sentinel-1, because a higher degree of land surface heterogeneity should be considered for retrieval. The assumption of homogeneity over land surface is not valid any more. In this study, considering that soil roughness is one of the key parameters sensitive to soil moisture retrievals, various approaches are discussed. First, soil roughness is spatially inverted from Sentinel-1 backscattering over Yanco sites in Australia. Based upon this, Artificial Neural Networks data (feedforward multiplayer perception, MLP, Levenberg-Marquadt algorithm) are compared with Fractal approach (brownian fractal, Hurst exponent of 0.5). When using ANNs, training data are achieved from theoretical forward scattering models, Integral Equation Model (IEM). and Sentinel-1 measurements. The network is trained by 20 neurons and one hidden layer, and one input layer. On the other hand, fractal surface roughness is generated by fitting 1D power spectrum model with roughness spectra. Fractal roughness profile is produced by a stochastic process describing probability between two points, and Hurst exponent, as well as rms heights (a standard deviation of surface height). Main interest of this study is to estimate a spatial variability of roughness without the need of local measurements. This non-local approach is significant, because we operationally have to be independent from local stations, due to its few spatial coverage at the global level. More fundamentally, SAR roughness is much different from local measurements, Remote sensing data are influenced by incidence angle, large scale topography, or a mixing regime of sensors, although probe deployed in the field indicate point data. Finally, demerit and merit of these approaches will be discussed.

• Macromolecular Research
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• v.10 no.5
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• pp.291-295
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• 2002

Atomic force microscopy(AFM) was used to study the polyethylene(PE) surfaces grafted and immobilized with acrylic acid by Ar plasma treatment. The topographical images and parameters including RMS roughness and Rp-v value provided an appropriate means to characterize the surfaces. The plasma grafting and immobilization method were a useful tool for the preparation of surfaces with carboxyl group. However, the plasma immobilization method turned out to have a limitation to use as a means of preparation of PE surface with specific functionalities, due to ablation effect during the Ar plasma treatment process.