• 한국재료학회지
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• 제1권1호
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• pp.46-53
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• 1991

반도체 공정의 최종 보호막으로 주로 사용되는 PSG (Phosphosilicate class), USG (Undoped silicate glass) 및 SiN 막을 CVD 방식으로 deposition 하여 각 막의 스트레스를 막 두께 또는 대기중 방치시간의 함수로 조사하고 Al 배선의 stress-migration 관점에서 평가했다. 그 결과 PSG 막과 USG 막은 tensile stress를 나타내고 두께증가에 따라 스트레스가 증가하였고, SiN 막은 두께에 관계없이 일정한 compressive stress를 나타내었다. PSG 막은 현저한 스트레스 경시변화를 보여 대기중에 방치시 2일이내로 tensile stress가 compressive stress로 변화되었다. 그 주 원인은 PSG 막의 수분 흡수 때문인것이 FTIR 분석으로 밝혀졌고, $300^{\circ}C$에서 20분간 anneal 처리로 $2.5{\times}{10^9}\;dyne/cm^2$의 스트레스 회복이 가능하였다. PSG 막이 포함된 복합막의 경우, 복합막 stress는 PSG 막의 방치시간에 따라 변한다. 즉, 복합막의 스트레스는 복합막을 구성하고 있는 막들의 두께의 함수이다. 또 SiN 막의 강한 압축응력을 완화시켜주는 PSG, USG 막의 스트레스가 큰 인장응력을 나타낼수록 Al 배선의 stress-migration 에 대한 저항은 커진다.

• Pediatric Gastroenterology, Hepatology & Nutrition
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• 제24권4호
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• pp.377-383
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• 2021

Purpose: We investigated the association of effector memory (EM) CD8⁺ T cell and CD4⁺ T cell immunity with metabolic syndrome (MS). Methods: Surface and intracellular staining of peripheral blood mononuclear cells was performed. Anti-interleukin-7 receptor-alpha (IL-7Rα) and CX3CR1 antibodies were used to stain the subsets of EM CD8⁺ T cells, while anti-interferon-gamma (IFN-γ), interleukin-17 (IL-17), and forkhead box P3 (FOXP3) antibodies were used for CD4⁺ T cell subsets. Results: Of the 47 obese children, 11 were female. Children with MS had significantly higher levels of serum insulin (34.8±13.8 vs. 16.4±6.3 µU/mL, p<0.001) and homeostasis model assessment of insulin resistance (8.9±4.1 vs. 3.9±1.5, p<0.001) than children without MS. Children with MS revealed significantly higher frequencies of IL-7Rα^low CD8⁺ T cells (60.1±19.1% vs. 48.4±11.5%, p=0.047) and IL-7Rα^lowCX3CR1⁺ CD8⁺ T cells (53.8±20.1% vs. 41.5±11.9%, p=0.036) than children without MS. As the serum triglyceride levels increased, the frequency of IL-7Rα^lowCX3CR1⁺ and IL-7Rα^highCX3CR1^- CD8⁺ T cells increased and decreased, respectively (r=0.335, p=0.014 and r=-0.350, p=0.010, respectively), in 47 children. However, no CD4⁺ T cell subset parameters were significantly different between children with and without MS. Conclusion: In obese children with MS, the changes in immunity due to changes in EM CD8⁺ T cells might be related to the morbidity of obesity.

• 한국재료학회지
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• 제10권12호
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• pp.812-818
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• 2000

본 연구에서는 Ge PAM이 선폭 미세화에 따른 C54 실리사이드화 및 실제 CMOS 트랜지스터 접합부에서의 각종 전기적 특성에 미치는 영향을, As PAM과의 비교를 통하여 관찰하였다. 평판 상에서 각 PAM 및 기판의 도핑 상태에 따른 Rs의 변화량을 측정하였으며, 각 PAM 방식은 기존의 살리사이드 TiSi$_2$에 비해 개선된 C54 형성 효과를 보였다. 특히, Ge PAM은 n+ 기판에서 As PAM보다 효과적인 실리사이드화를 보였고, 이 경우 XRB 상에서도 가장 강한 (040) C54 배향성을 나타내었다. ~0.25$\mu\textrm{m}$ 선폭 및 n+ 접합층에서 기존 방식에 비해 As과 Ge PAM은 각각 ~85,66%의 개선된 바저항을 보였으며, P+ 접합층에서는 As과 Ge PAM 모두 62~63% 정도의 유사한 Rs 개선 효과를 보였다. 콘택 저항에서도 각 콘택 크기 별로 바저항(bar resistance) 개선과 같은 경향의 PAM 효과를 관찰하였으며, 모든 경우 10 $\Omega$/ct. 이하로 양호한 결과를 보였다. 누설 전류는 area 형 패턴에서는 모든 공정 조건에서 <10E-14A/$\mu\textrm{m}^{2}$ 이하로, edge 형에서는 특히 P+ 접합부에서 As 또는 Ge PAM 적용 시 <10E-13 A/$\mu\textrm{m}^{2}$ 이하로 다소 누설 전류를 안정화시키는 결과를 보였다. 이러한 결과는 XTEM에 의해 관찰된 바 Ge PAM 적용 시 기존의 경우에 (PAM 적용 안한 경우) 비해 유사한 평활도의 TiSi$_2$박막 형상과 일치하였으며, 또한 본 실험의 Ge PAM 이온주입 조건이 접합층에 손상을 주지 않는 범위에서 적정화되었음을 제시하였다

• 한국콘텐츠학회:학술대회논문집
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• 한국콘텐츠학회 2006년도 추계 종합학술대회 논문집
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• pp.168-171
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• 2006

제주의 해녀는 독특한 인적 문화 자원으로 세계적으로 한국과 일본에만 존재한다. 특히, 제주 해녀들은 1931년 생존권을 스스로 찾기 위해 해녀항일운동을 전개하여 일제의 식민지 수탈 기관인 관제 조합과 식민지 수탈정책에 대항하여 민족해방운동을 일으켰다. 현재 제주에서는 독특한 제주 해녀문화를 전승하기 위해 제주 해녀를 유네스코 세계 문화유산으로 등재하기 위한 노력이 진행되고 있다. 본 연구에서는 이처럼 해녀와 그들이 전개했던 항일운동에 기반한 디지털 스토리텔링, 캐릭터, 애니메이션, 게임, 홈페이지 등을 개발하여 유아들에게 해녀들의 정신과 문화를 이해하고 계승할 수 있도록 교육적으로 활용하고자 한다. 본 연구를 통해 점점 사라져 가는 해녀와 관련된 문화 자원을 새롭게 재창출할 수 있는 방안과 항일운동의 정신을 재음미해 볼 수 있도록 한다.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2009년도 추계학술발표대회
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• pp.39.1-39.1
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• 2009

NiTi alloy is widely used innumerous biomedical applications (orthodontics, cardiovascular, orthopaedics, etc.) for its distinctive thermomechanical and mechanical properties such as shape memory effect, super elasticity, low elastic modulus and high damping capacity. However, NiTi alloy is still a controversial biomaterial because of its high Ni content which can trigger the risk of allergy and adverse reactions when Ni ion releases into the human body. In order to improve the corrosion resistance of the TiNi alloy and suppress the release of Ni ions, many surface modification techniques have been employed in previous literature such as thermal oxidation, laser surface treatment, sol-gel method, anodic oxidation and electrochemical methods. In this paper, the NiTi was electrochemically etched in various electrolytes to modify surface. The microstructure, element distribution, phase composition and roughness of the surface were investigatedby scanning electron microscopy (SEM), energy-dispersive X-ray spectrometry(EDS), X-ray diffractometry (XRD) and atomic force microscopy (AFM). Systematic controlling of nano and submicron surface features was achieved by altered density of hydro fluidic acid in etchant solution. Nanoscale surface topography, such as, pore density, pore width, pore height, surface roughness and surface tension were extensively analyzed as systematical variables.Importantly, bone forming cell, osteoblast adhesion was increased in high density of hydro fluidic treated surface structures, i.e., in greater nanoscale surface roughness and in high surface areas through increasing pore densities.All results delineate the importance of surface topography parameter (pores) inNiTi to increase the biocompatibility of NiTi in identical chemistry which is crucial factor for determining biomaterials.

• 한국의류산업학회지
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• 제21권6호
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• pp.697-707
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• 2019

This review paper deals with materials, classification, and a current article investigation on smart textile sensors for wearable vital signs monitoring (WVSM). Smart textile sensors can lose electrical conductivity during vital signs monitoring when applying them to clothing. Because they should have to endure severe conditions (bending, folding, and distortion) when wearing. Imparting electrical conductivity for application is a critical consideration when manufacturing smart textile sensors. Smart textile sensors fabricate by utilizing electro-conductive materials such as metals, allotrope of carbon, and intrinsically conductive polymers (ICPs). It classifies as performance level, fabric structure, intrinsic/extrinsic modification, and sensing mechanism. The classification of smart textile sensors by sensing mechanism includes pressure/force sensors, strain sensors, electrodes, optical sensors, biosensors, and temperature/humidity sensors. In the previous study, pressure/force sensors perform well despite the small capacitance changes of 1-2 pF. Strain sensors work reliably at 1 ㏀/cm or lower. Electrodes require an electrical resistance of less than 10 Ω/cm. Optical sensors using plastic optical fibers (POF) coupled with light sources need light in-coupling efficiency values that are over 40%. Biosensors can quantify by wicking rate and/or colorimetry as the reactivity between the bioreceptor and transducer. Temperature/humidity sensors require actuating triggers that show the flap opening of shape memory polymer or with a color-changing time of thermochromic pigment lower than 17 seconds.

• 한국생산제조학회지
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• 제6권4호
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• pp.72-79
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• 1997

A study is a experiment which is figure out to optimum discharge cutting condition of the surface roughness, electronic discharging speed and electrode wear ration with Ton , Toff and V(voltage) as an input condition according to the current(Ip) in an electric spark machine : 1) Electrode is utilized Cu and Graphite. 2) Work piece is used the material of carbon steel. The condition of experiment is : 1) Current is varied 0.7(A) to 50(A) and the time of electric discharging to work piece in each time is 30(min) to 60(min). 2) After the upper side of work piece was measured in radius(5$\mu$m) of stylus analyzed the surface roughness to ade the table and graph of Rmax by yielding data. 3) Electro wear ratio is : \circled1Cooper was measured ex-machining and post-machining by the electronic balance. \circled2The ex-machining of graphite measured by it, the post-machining was found the data from volume $\times$specific gravity and analyzed to made its table and graph on ground the data. 4) In order to keep the accuracy of voltage affected to the work piece was equipped with the A.V. R and the memory scope was sticked to the electric spark machine. 5) In order to preserve the precision of current, to get rid of the noise occured by internal resistance of electric spark machine and to force injecting for the discharge fluid , it made the fixed table for a work piece to minimize the work error by means of one's failure during the electric discharging.

• 한국생산제조학회지
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• 제6권4호
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• pp.130-137
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• 1997

The demand for wire-cut EDM is increasing rapidly in the die and tool making industry. In this study machining characteristics such as machining rate, surface roughness, hand drum form and hardness of machined material are investigated experimentally under the conditions varing pulse on time, pulse off time, peak voltage, wire tension after fixing other conditions in SKD 11 and brass and brass workpiece. It was found that various operating conditions had significant influences on machining characteristics. But the hardness of workpiece was uneffected by operating conditions. Also it was obtained experimentally that brass workpeice had better machinability than SKD 11 one.dition according to the current(Ip) in an electric spark machine : 1) Electrode is utilized Cu and Graphite. 2) Work piece is used the material of carbon steel. The condition of experiment is : 1) Current is varied 0.7(A) to 50(A) and the time of electric discharging to work piece in each time is 30(min) to 60(min). 2) After the upper side of work piece was measured in radius(5$\mu$m) of stylus analyzed the surface roughness to ade the table and graph of Rmax by yielding data. 3) Electro wear ratio is : \circled1Cooper was measured ex-machining and post-machining by the electronic balance. \circled2The ex-machining of graphite measured by it, the post-machining was found the data from volume $\times$specific gravity and analyzed to made its table and graph on ground the data. 4) In order to keep the accuracy of voltage affected to the work piece was equipped with the A.V. R and the memory scope was sticked to the electric spark machine. 5) In order to preserve the precision of current, to get rid of the noise occured by internal resistance of electric spark machine and to force injecting for the discharge fluid , it made the fixed table for a work piece to minimize the work error by means of one's failure during the electric discharging.

• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 1998년도 춘계학술대회 및 발표대회 강연 및 발표논문 초록집
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• pp.6-6
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• 1998

In 1957, the first magnetic disk drive compatible with a movable head was introduced as an external file memory device for computer system. Since then, magnetic disks have been improved by increasing the recording density, which has brought about the development of a high performance thin film magnetic head. The thin film magnetic head has a magnetic circuit on a ceramic substrate using IC technology. The physical property of the substrate material is very important because it influences the tribology of head/disk interface and also manufacturing process of the head. $Al_{2}O_{3}$-TiC ceramics, so called ALTIC, is known to be one of the best substrate materials which satisfies this property requirement. Even though the head is not in direct contact with the disk, frequent instantaneous contacts are unavoidable due to its high rotating speed and the close gap between them. This may cause damage in the magnetic recording media and, thus, it is very important that the magnetic head has a good wear resistance. $Al_{2}O_{3}$-TiC ceramics has an excellent tribological property in head/disk interface. Manufacturing process of thin film head is similar to that of IC, which requires extremely smooth and flat surface of the substrate. The substrate must be readily sliced into the heads without chipping. $Al_{2}O_{3}$-TiC ceramics has excellent machineability and mechanical properties. $Al_{2}O_{3}$-TiC ceramics was first developed at Nippon Tungsten Co. as cutting tool materials in 1968, which was further developed to be used as the substrate materials for thin film head in collaboration with Sumitomo Special Metals Co., Ltd. in 1981. Today, we supply more than 60% of the substrates for thin film head market in the world. In this paper, we would like to present the sintering process of $Al_{2}O_{3}$-TiC ceramics and its property in detail.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.307-307
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• 2014

정보화 시대로 접어들면서 동일한 공간에 더 많은 정보를 저장할 수 있고, 보다 빠른 동작이 가능한 비휘발성 메모리 소자에 대한 요구가 증가하고 있다. 하지만, 최근 비휘발성 메모리 소자 관련 연구보고에 따르면, 메모리 소자의 소형화 및 직접화 측면에서, 전하 저장을 기반으로 하는 기존의 Floating-Gate(FG) Flash 메모리는 20 nm 이하 공정에서 한계가 예측 되고 있다. 따라서, 이러한 FG Flash 메모리의 한계를 해결하기 위해, 기존에 FET 기반의 FG Flash 구조와 같은 3 terminal이 아닌, Diode와 같은 2 terminal로 동작이 가능한 ReRAM, PRAM, STT-MRAM, PoRAM 등 저항변화를 기반으로 하는 다양한 종류의 차세대 메모리 소자가 연구되고 있다. 그 중, 저항 변화 메모리(ReRAM)는 CMOS 공정 호환성, 3D 직접도, 낮은 소비전력과 빠른 동작 속도 등의 우수한 동작 특성을 가져 차세대 비휘발성 메모리로 주목을 받고 있다. 또한, 상하부 전극의 2 terminal 만으로 소자 구동이 가능하기 때문에 Passive Crossbar-Array(CBA)로 적용하여 플래시 메모리를 대체할 수 있는 유력한 차세대 메모리 소자이다. 하지만, 이를 현실화하기 위해서는 Passive CBA 구조에서 발생할 수 있는 Read Disturb 현상, 즉 Word-Line과 Bit-Line을 통해 선택된 소자를 제외하고 주변의 다른 소자를 통해 흐르는 Sneak Leakage Current(SLC)를 차단하여 소자의 메모리 State를 정확히 sensing하기 위한 연구가 선행 되어야 한다. 따라서, 현재 이러한 이슈를 해결하기 위해서, 많은 연구 그룹에서 Diodes, Threshold Switches와 같은 ReRAM에 Selector 소자를 추가하는 방법, 또는 Self-Rectifying 특성 및 CRS 특성을 보이는 ReRAM 구조를 제안 하여 SLC를 차단하고자 하는 연구가 시도 되고 있지만, 아직까지 기초연구 단계로서 아이디어에 대한 가능성 정도만 보고되고 있는 현실 이다. 이에 본 논문은 Passive CBA구조에서 발생하는 SLC를 해결하기 위한 새로운 아이디어로써, 본 연구 그룹에서 선행 연구로 확보된 안정적인 저항변화 물질인 SiN를 정류 특성을 가지는 n-Si/Ti 기반의 Schottky Diode와 결합함으로써 기존의 CBA 메모리의 Read 동작에서 발생하는 SLC를 차단 할 수 있는 1SD-1R 구조의 메모리 구조를 제작 하였으며, 본 연구 결과 기존에 문제가 되었던 SLC를 차단 할 수 있었다.