• Journal of Mechanical Science and Technology
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• 제19권5호
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• pp.1065-1071
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• 2005

In this study, residual stress distribution in multi-stacked film by MEMS (Micro-Electro Mechanical System) process is predicted using Finite Element method (FEM). We evelop a finite element program for residual stress analysis (RESA) in multi-stacked film. The RESA predicts the distribution of residual stress field in multi-stacked film. Curvatures of multi­stacked film and single layers which consist of the multi-stacked film are used as the input to the RESA. To measure those curvatures is easier than to measure a distribution of residual stress. To verify the RESA, mean stresses and stress gradients of single and multi layers are measured. The mean stresses are calculated from curvatures of deposited wafer by using Stoney's equation. The stress gradients are calculated from the vertical deflection at the end of cantilever beam. To measure the mean stress of each layer in multi-stacked film, we measure the curvature of wafer with the left film after etching layer by layer in multi-stacked film.

• International Journal of Precision Engineering and Manufacturing
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• 제3권2호
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• pp.72-77
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• 2002

In this paper, a simple method to measure the residual stress in microstructure is presented. In order to find the residual stress in micro-machined beam, the first natural frequency of the beam that has the residual stress inside is analyzed using Rayleigh's energy method. Micro gold electroplated structure is fabricated by surface micro-machining process including electroplating. The made structure is an approximate shape of clamped-clamped beam and its 1 st natural frequency is measured by resonance method. For the better estimation of the residual stress, an equivalent length of micro-fabricated beam to ideal beam is calculated by FEM. The residual stress was estimated from the equivalent length and the measured natural frequency. It was found that a tensile stress was residue in the micro beam structure.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.622-626
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• 2005

The Residual stress is stress at the inside of materials after plastic deformation. Certainly, this residual stress have an effect on fatigue life. Therefore, it is very important that understanding residual stress at the inside of materials. But in case of U-shaped Pipe that it is dealt with a mailer in this paper, distribution of residual stress is very complicated and exactly become unknown caused by difficulty of measurement. Then, in this paper, we are evaluated residual stress at in the inside of materials by finite clement method program and verified validity by test.

• 반도체디스플레이기술학회지
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• 제14권1호
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• pp.1-5
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• 2015

This paper deals with the residual stresses developed in an epoxy film deposited on Si wafer. First, chemically induced residual stresses due to the volumetric shrinkage in cross-linking resins during polymerization are treated. The curvature measurement method is employed to investigate the residual stresses. Then, thermally induced stresses are investigated along the interface between the epoxy film and Si wafer. The boundary element method is employed to investigate the whole stresses in the film. The singular stress is observed near the interface corner. Such residual stresses are large enough to initiate interface delamination to relieve the residual stresses.

• 대한용접접합학회:학술대회논문집
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• 대한용접접합학회 2002년도 Proceedings of the International Welding/Joining Conference-Korea
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• pp.652-656
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• 2002

The HDM(Hole Drilling Method) is a relatively simple and accurate method in measuring residual stress of welded metal. Various methods of evaluating residual stress are studied in welding field. The method of cutting holes on the plate much affects the accuracy of result. Especially for the hard material like stainless steel difficult to cut preciously is difficult to measure residual stress on welded metal. Because heat conduction of stainless steel is lower than other general steel, the magnitude of residual stress might be different as to changing of welding conditions. Therefore, The distribution of residual stress on the STS304 steel after welding using HDM is evaluated in this paper.

• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 2001년도 추계학술발표대회 논문집
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• pp.61-63
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• 2001

Residual stress distribution in injection-molded short fiber composites was determined using layer-removal method. Polysterene with 3 vol% carbon fibers was injection-molded into the tensile specimen. With milling machine layer-removal process was conducted and the curvature data were acquired. Treuting and Read analysis which is assuming isotropic material, and White analysis considering anisotropy due to the fiber orientation were used to calculate residual stress of the flow direction through the thickness direction and compared with each other.

• 한국광학회:학술대회논문집
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• 한국광학회 2005년도 하계학술발표회
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• pp.206-207
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• 2005

The gradient of the residual stress distribution in the mechanical defect on the optical fiber surface was investigated. This gradient of the residual stress distribution appeared in both of the core and the clad of the mechanical defect region on the optical fiber. The residual stress measurement was suggested as a investigation method of the mechanical defect on the optical fiber.

• 한국자기학회지
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• 제11권2호
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• pp.50-57
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• 2001

강자성 극박소재에 유기된 잔류응력을 검출하기 위하여 자기유도형 탐촉자(probe)를 설계·제작하였으며, 이를 장착한 잔류음력 평가시스템은 박판내에 유기된 잔류응력의 주응력 방향과 크기를 효과적으로 결정하여 준다. 이 시스템을 반도체 칩 팩키지(package)용으로 사용하는 Fe-42Ni계 lead frame 판재의 잔류응력 검출에 적용한 결과, 양호재 및 잔류응력과다 불량재에 대한 출력전압은 명확히 구별되었고, 잔류응력이 축적된 판재는 양호재와 비교하여 응력의 분포 및 크기에 있어 항상 차이를 나타내었다. 이러한 차이는 탐촉자에 투입하는 전류와 주파수의 함수로 잘 분해되어질 수 있음을 확인하였다.

• 대한기계학회논문집A
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• 제33권4호
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• pp.401-408
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• 2009

This study is performed to check the three dimensional characteristics of residual stress in the dissimilar metal weld. Although two dimensional analysis has been widely used for the assessment of weld residual stress, it has limitations to understand the stress distribution of the third direction. 3-D analysis was done to understand residual stress distribution of the welded plate. A simple butt-welded plate was considered to show the stress variation on all direction. A mock-up plate weldment was fabricated with SA-508 and F316L, which are widely used in nuclear power plants. The analysis results were validated with the measured values in the mock-up.

• 한국생산제조학회지
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• 제7권5호
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• pp.120-126
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• 1998

Second step shot peening was applied on both smooth specimen and U-notch specimen in order to investigate the stress distribution and the improvement in fatigue strength. Various experiments and measurements such as rotary bending fatigue test and the measurement of compressive residual stress were performed. The results showed that the fatigue strength of second step shot peened specimens increased by 34 percent compared to that of unpeened ones. Compressive residual stress also considerably increased, which resulted in the increase of fatigue strength. finite element analysis showed that shot peening is effective in decreasing the bending stress by external force. The effectiveness of shot peening in reducing the compressive residual stress was anticipated by the superposition of the concentrated stress and the compressive residual stress.