• Journal of Mechanical Science and Technology
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• v.19 no.5
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• pp.1065-1071
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• 2005

In this study, residual stress distribution in multi-stacked film by MEMS (Micro-Electro Mechanical System) process is predicted using Finite Element method (FEM). We evelop a finite element program for residual stress analysis (RESA) in multi-stacked film. The RESA predicts the distribution of residual stress field in multi-stacked film. Curvatures of multi­stacked film and single layers which consist of the multi-stacked film are used as the input to the RESA. To measure those curvatures is easier than to measure a distribution of residual stress. To verify the RESA, mean stresses and stress gradients of single and multi layers are measured. The mean stresses are calculated from curvatures of deposited wafer by using Stoney's equation. The stress gradients are calculated from the vertical deflection at the end of cantilever beam. To measure the mean stress of each layer in multi-stacked film, we measure the curvature of wafer with the left film after etching layer by layer in multi-stacked film.

• International Journal of Precision Engineering and Manufacturing
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• v.3 no.2
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• pp.72-77
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• 2002

In this paper, a simple method to measure the residual stress in microstructure is presented. In order to find the residual stress in micro-machined beam, the first natural frequency of the beam that has the residual stress inside is analyzed using Rayleigh's energy method. Micro gold electroplated structure is fabricated by surface micro-machining process including electroplating. The made structure is an approximate shape of clamped-clamped beam and its 1 st natural frequency is measured by resonance method. For the better estimation of the residual stress, an equivalent length of micro-fabricated beam to ideal beam is calculated by FEM. The residual stress was estimated from the equivalent length and the measured natural frequency. It was found that a tensile stress was residue in the micro beam structure.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.622-626
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• 2005

The Residual stress is stress at the inside of materials after plastic deformation. Certainly, this residual stress have an effect on fatigue life. Therefore, it is very important that understanding residual stress at the inside of materials. But in case of U-shaped Pipe that it is dealt with a mailer in this paper, distribution of residual stress is very complicated and exactly become unknown caused by difficulty of measurement. Then, in this paper, we are evaluated residual stress at in the inside of materials by finite clement method program and verified validity by test.

• Journal of the Semiconductor & Display Technology
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• v.14 no.1
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• pp.1-5
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• 2015

This paper deals with the residual stresses developed in an epoxy film deposited on Si wafer. First, chemically induced residual stresses due to the volumetric shrinkage in cross-linking resins during polymerization are treated. The curvature measurement method is employed to investigate the residual stresses. Then, thermally induced stresses are investigated along the interface between the epoxy film and Si wafer. The boundary element method is employed to investigate the whole stresses in the film. The singular stress is observed near the interface corner. Such residual stresses are large enough to initiate interface delamination to relieve the residual stresses.

• Proceedings of the KWS Conference
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• 2002.10a
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• pp.652-656
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• 2002

The HDM(Hole Drilling Method) is a relatively simple and accurate method in measuring residual stress of welded metal. Various methods of evaluating residual stress are studied in welding field. The method of cutting holes on the plate much affects the accuracy of result. Especially for the hard material like stainless steel difficult to cut preciously is difficult to measure residual stress on welded metal. Because heat conduction of stainless steel is lower than other general steel, the magnitude of residual stress might be different as to changing of welding conditions. Therefore, The distribution of residual stress on the STS304 steel after welding using HDM is evaluated in this paper.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2001.10a
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• pp.61-63
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• 2001

Residual stress distribution in injection-molded short fiber composites was determined using layer-removal method. Polysterene with 3 vol% carbon fibers was injection-molded into the tensile specimen. With milling machine layer-removal process was conducted and the curvature data were acquired. Treuting and Read analysis which is assuming isotropic material, and White analysis considering anisotropy due to the fiber orientation were used to calculate residual stress of the flow direction through the thickness direction and compared with each other.

• Proceedings of the Optical Society of Korea Conference
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• 2005.07a
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• pp.206-207
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• 2005

The gradient of the residual stress distribution in the mechanical defect on the optical fiber surface was investigated. This gradient of the residual stress distribution appeared in both of the core and the clad of the mechanical defect region on the optical fiber. The residual stress measurement was suggested as a investigation method of the mechanical defect on the optical fiber.

• Journal of the Korean Magnetics Society
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• v.11 no.2
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• pp.50-57
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• 2001

Magnetic inductive probe was designed and assembled for sensing the residual stress developed in the ferromagnetic thin sheet. The residual stress measurement system with this probe could resolve the residual stresses developed in the sheet in terms of principal stress orientation, and magnitude of the principal stress. It was consumed that the obtained probe output voltage from the qualified ferromagnetic Fe-42Ni lead frame sheet and quality-rejected sheet is effectively determined using the developed device. The lead frame sheet which has accumulated a high level of residual stress always showed a distinctive stress distribution and magnitude compared with those of qualified lead frame sheet. Those differences were well resolved as functions of input current or used frequency.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.33 no.4
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• pp.401-408
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• 2009

This study is performed to check the three dimensional characteristics of residual stress in the dissimilar metal weld. Although two dimensional analysis has been widely used for the assessment of weld residual stress, it has limitations to understand the stress distribution of the third direction. 3-D analysis was done to understand residual stress distribution of the welded plate. A simple butt-welded plate was considered to show the stress variation on all direction. A mock-up plate weldment was fabricated with SA-508 and F316L, which are widely used in nuclear power plants. The analysis results were validated with the measured values in the mock-up.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.7 no.5
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• pp.120-126
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• 1998

Second step shot peening was applied on both smooth specimen and U-notch specimen in order to investigate the stress distribution and the improvement in fatigue strength. Various experiments and measurements such as rotary bending fatigue test and the measurement of compressive residual stress were performed. The results showed that the fatigue strength of second step shot peened specimens increased by 34 percent compared to that of unpeened ones. Compressive residual stress also considerably increased, which resulted in the increase of fatigue strength. finite element analysis showed that shot peening is effective in decreasing the bending stress by external force. The effectiveness of shot peening in reducing the compressive residual stress was anticipated by the superposition of the concentrated stress and the compressive residual stress.