• Journal of the Semiconductor & Display Technology
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• v.23 no.2
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• pp.129-134
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• 2024

This study aims to talk about the necessity of solving the PFC gas emission problem raised by the recent development of the semiconductor industry and the remote plasma source method monitoring system used in the semiconductor industry. The 'monitoring system' means that the researchers applied machine learning to the existing monitoring technology and modeled it. In the process of this study, Residual Gas Analyzer monitoring technology and linear regression model were used. Through this model, the researchers identified emissions of at least 12700mg CO2 to 75800mg CO2 with values ranging from ion current 0.6A to 1.7A, and expect that the 'monitoring system' will contribute to the effective calculation of greenhouse gas emissions in the semiconductor industry in the future.

• Journal of the Korean Vacuum Society
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• v.16 no.2
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• pp.91-98
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• 2007

The Korea Research Institute of Standards and Science (KRISS) has developed a residual gas analyzer (RGA) calibration system and measured gas sensitivities for two different types QMSs using nitrogen, argon, and helium. Different gas sensitivities were identified according to mass and pressure, so it was revealed that the gas sensitivity correction is necessary for proper use of mass spectrometers.

• Transactions of the Korean Society of Automotive Engineers
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• v.12 no.3
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• pp.19-26
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• 2004

A prior fundamental study was executed using a constant volume chamber to improve the burning properties of lean pre-mixture by the injection of active radicals generated in the sub-chamber. In consequence, RI method shows remarkable progress in the aspects of burning velocity and combustible lean limit compared with SI method. In this study, the necessary additional works have been performed to be based on the former results. We changed parameters as the initial temperature and the initial pressure of mixture. And the effects of residual gas at issue in a real engine were investigated. As a result, the effects of initial temperature were significant, but on the other hand, those of initial pressure were slight. The correlation of passage hole number between overall passage hole area was grasped. And the more detailed analysis is required on residual gas.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.262.2-262.2
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• 2014

Plasma processing is an essential process for pattern etching and thin film deposition in nanoscale semiconductor device fabrication. It is necessary to maintain plasma chamber in steady-state in production. In this study, we determined plasma chamber state with residual gas analysis with self-plasma optical emission spectroscopy. Residual gas monitoring of fluorocarbon plasma etching chamber was performed with self-plasma optical emission spectroscopy (SPOES) and various chemical elements was identified with a SPOES system which is composed of small inductive coupled plasma chamber for glow discharge and optical emission spectroscopy monitoring system for measuring optical emission. This work demonstrates that chamber state can be monitored with SPOES and this technique can potentially help maintenance in production lines.

• 한국가스학회:학술대회논문집
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• 2004.11a
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• pp.61-70
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• 2004

• Journal of the Korean Society for Heat Treatment
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• v.11 no.4
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• pp.305-314
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• 1998

This study has been performed to investigate into some effects of various amounts of $CO_2$ and CO gas added to the $50%NH_3-N_2$ based gas atmosphere on microstructure, hardness, chemical analysis and residual stress in the compound and diffusion layer of AISI H13 treated by gaseous nitrocarburising process. The compound layer formed in the surface is composed of mainly ${\varepsilon}-Fe_3$(N,C) and small amount of ${\gamma}^{\prime}-Fe_4N$ and cementite. The maximum hardness value obtainable from H13 steel is shown to be 1200 Hv and the effecvtive hardening depth increases with increasing CO content from 1% to 4%. In the case of CO content over 4%, however, it decreases with increasing CO content. The composition profiles of nitrogen and carbon are found to be within the ${\varepsilon}$-phase field located above the ${\varepsilon}+{\gamma}^{\prime}$ phase field in the Fe-N-C diagram. It is shown that the maximum value of compressive residual stress of H13 steel treated in atmospheres of $50%NH_3-(2,4)%CO_2-N_2-CO$ gas mixture is $48kg/mm^2$ and the depth to which residual stress is in Compressive state is $90{\mu}m$ for the atmosphere $50%NH_3-45%N_2-4%CO_2-1%CO$ gas mixture. It is consequently important to control the maximum value and size of compressive residual stress region in order to obtain desirable mechanical properties.

• Journal of the Korean Society for Heat Treatment
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• v.2 no.2
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• pp.27-32
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• 1989

The effect of quenchant temperature on the surface residual stress was studied for AISI 8620 steel. Specimens were carburized at $900^{\circ}C$ in all case type furnace using a gas-base atmosphere of methanol cracked and liquefied petroleum gas, and then subjected to single reheat quenchant in oil or salt bath in the temperature range of $60^{\circ}C$ to $300^{\circ}C$. After carburizing and reheat Quenching, residual stress was measured by the hole drilling method. Experimental results showed that the surface residual stress was increased as the quenchant temperature was raised. This is in contrast to the fact that the formation of phase of low transformation strain such as bainite results in lower surface compressive stress. The greater compressive stress observed in specimens Quenched at higher temperature may be attributed to the shifting of the transformation start point farther from the surface, as was reported in other carburizing steels.

• Journal of the Korean Society for Heat Treatment
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• v.32 no.5
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• pp.201-211
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• 2019

Low carbon steel (S20C steel) and SPCC steel sheet have been austenitic nitrided at $700^{\circ}C$ in a closed pit type furnace by changing the flow rate of ammonia gas and heat treating time. When the flow rate of ammonia gas was low, the concentration of residual ammonia appeared low and the hardness value of transformed surface layer was high. The depth of the surface layer, however, was shallow. With increasing the concentration of residual ammonia by raising up the ammonia gas flow, both the depth of the surface layer and the pore depth increased, while the maximum hardness of the surface layer decreased. By introducing a large amount of ammonia gas in a short time, a deep surface layer with minimal pores on the outermost surface was obtained. In this experiment, while maintaining 10~12% of residual ammonia, the flow rate of inlet ammonia gas, 7 liter/min, was introduced at $700^{\circ}C$ for 1 hour. In this condition, the thickness of the surface layer without pores appeared about $60{\mu}m$ in S20C steel and $30{\mu}m$ in SPCC steel plate. Injecting additional methane gas (carburizing gas) to this condition played a deteriorating effect due to promoting the formation of vertical pores in the surface layer. For $1^{st}$ transformed surface layer for S20C steel, maintaining 10~12% residual ammonia condition via austenitic nitriding process resulted in ${\varepsilon}$ phase with relatively high nitrogen concentration (just below 4.23 wt.%N) among the mixed phases of ${\varepsilon}+{\gamma}$. The ${\varepsilon}$ phase was formed a specific orientation perpendicular to the surface. For $2^{nd}$ transformed layer for S20C steel, ${\gamma}$ phase was rather dominant (just above 2.63 wt.%N). For SPCC steel sheet, there appeared three phases, ${\gamma}$, ${\alpha}(M)$ and weak ${\varepsilon}$ phase. The nitrogen concentration would be approximately 2.6 wt.% in these phases condition.

• Environmental Engineering Research
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• v.9 no.5
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• pp.214-222
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• 2004

• 한국신재생에너지학회:학술대회논문집
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• 2006.06a
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• pp.419-423
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• 2006

Basic studies on natural gas hydrates in the East Sea were been carried out by the Korea Institute of Geoscience and Mineral Resources (KIGAM) from 2000 to 2004 involving 2D multichannel seismic lines and piston coring. 27 piston cores recovered from the deed-water Ulleung Basin of the East Sea were analyzed in this study. In piston cores cracks generally developed parallel to bedding suggest significant gas content. The core analyses showed high total organic carbon (TOC) content, sedimentation rate and heat flow of sediments. The cores recovered from the southern study area show also high residual hydrocarbon gas concentrations for the formation of natural gas hydrates. This study indicates that there is the potential for the generation of biogenic gas and the formation of natural gas hydrates in the near seafloor sediments of the study area.