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Characteristics of $Ta_{2}O_{5}$ Films by RF Reactive Sputtering (RF 반응성 스펏터링으로 제조한 $Ta_{2}O_{5}$ 막의 특성)

  • Park, Wug-Dong;Keum, Dong-Yeal;Kim, Ki-Wan;Choi, Kyu-Man
    • Journal of Sensor Science and Technology
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    • v.1 no.2
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    • pp.173-181
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    • 1992
  • Tantalum pentoxide($Ta_{2}O_{5}$) thin films on p-type (100) silicon wafer were fabricated by RF reactive sputtering. Physical properties and structure of the specimens were examined by XRD and AES. From the C-V analysis, the dielectric constant of $Ta_{2}O_{5}$ films was in the range of 10-12 in the reactive gas atmosphere in which 10% of oxygen gas is mixed. The ratio of Ta : 0 was 1 : 2 and 1 : 2.49 by AES and RBS examination, respectively. The heat-treatment at $700^{\circ}C$ in $O_{2}$ ambient led to induce crystallization. When the heat-treatment temperature was $1000^{\circ}C$, the dielectric constant was 20.5 in $O_{2}$ ambient and 23 in $N_{2}$ ambient, respectively. The crystal structure of $Ta_{2}O_{5}$ film was pseudo hexagonal of ${\delta}-Ta_{2}O_{5}$. The flat band voltage shift(${\Delta}V_{FB}$) of the specimens and the leakage current density were decreased for higher oxygen mixing ratio. The maximum breakdown field was 2.4MV/cm at the oxygen mixing ratio of 10%. The $Ta_{2}O_{5}$ films will be applicable to hydrogen ion sensitive film and gate oxide material for memory device.

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Process Optimization of PECVD SiO2 Thin Film Using SiH4/O2 Gas Mixture

  • Ha, Tae-Min;Son, Seung-Nam;Lee, Jun-Yong;Hong, Sang-Jeen
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.434-435
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    • 2012
  • Plasma enhanced chemical vapor deposition (PECVD) silicon dioxide thin films have many applications in semiconductor manufacturing such as inter-level dielectric and gate dielectric metal oxide semiconductor field effect transistors (MOSFETs). Fundamental chemical reaction for the formation of SiO2 includes SiH4 and O2, but mixture of SiH4 and N2O is preferable because of lower hydrogen concentration in the deposited film [1]. It is also known that binding energy of N-N is higher than that of N-O, so the particle generation by molecular reaction can be reduced by reducing reactive nitrogen during the deposition process. However, nitrous oxide (N2O) gives rise to nitric oxide (NO) on reaction with oxygen atoms, which in turn reacts with ozone. NO became a greenhouse gas which is naturally occurred regulating of stratospheric ozone. In fact, it takes global warming effect about 300 times higher than carbon dioxide (CO2). Industries regard that N2O is inevitable for their device fabrication; however, it is worthwhile to develop a marginable nitrous oxide free process for university lab classes considering educational and environmental purpose. In this paper, we developed environmental friendly and material cost efficient SiO2 deposition process by substituting N2O with O2 targeting university hands-on laboratory course. Experiment was performed by two level statistical design of experiment (DOE) with three process parameters including RF power, susceptor temperature, and oxygen gas flow. Responses of interests to optimize the process were deposition rate, film uniformity, surface roughness, and electrical dielectric property. We observed some power like particle formation on wafer in some experiment, and we postulate that the thermal and electrical energy to dissociate gas molecule was relatively lower than other runs. However, we were able to find a marginable process region with less than 3% uniformity requirement in our process optimization goal. Surface roughness measured by atomic force microscopy (AFM) presented some evidence of the agglomeration of silane related particles, and the result was still satisfactory for the purpose of this research. This newly developed SiO2 deposition process is currently under verification with repeated experimental run on 4 inches wafer, and it will be adopted to Semiconductor Material and Process course offered in the Department of Electronic Engineering at Myongji University from spring semester in 2012.

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Field Test and Performance Verification of On-board Oriented Train Control System (차상중심 열차제어시스템의 현장시험을 통한 성능검증)

  • Baek, Jong-Hyen
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.16 no.8
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    • pp.5513-5521
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    • 2015
  • There is an operational efficiency problem about wayside equipment applied to the domestic low-density branch as the equipment has been installed and operated similarly in the mainline. On-board oriented train control system, which has been developed for train safety and operation efficiency, ensures safe train operation without expensive ground control signal devices. Such system consists of on-board control system, wayside control system, and local control system. In this paper, the details of tests such as suitability test, communication test, and interface test are described by installing the on-board control system and wayside control system in field. Installation tests include checking power, voltage, cable connection, LED status, etc. Field applicability of the developed system is also verified through the dynamic operation tests with diverse scenarios, which are performed on the virtual line similar to the real environment including switch machine and level crossing gate. Dynamic operation tests were conducted for total 7 scenarios, and several tests were repeated for each scenario. The elapsed time for each operation was computed by analyzing main process log, and we could check that each operation was accomplished within several seconds. Furthermore, the developed system was verified through field test with an accredited institute, and testing certificates were issued.

The Historical Geography of Sacheon Bay Region -with Special Reference to Transportation, Fishery, and Industry- (사천만 연안의 지역 변화에 관한 연구 -교통.수산업.공업 기능의 변화를 중심으로-)

  • Lee, Jeon;Kwak, Chul-Hong
    • Journal of the Korean association of regional geographers
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    • v.5 no.2
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    • pp.119-132
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    • 1999
  • The Korean Peninsula, jutting southward from the Asian mainland into the Pacific Ocean, is surrounded by numerous bays and islands on three sides. The study area of this research is the coastal area surrounding the Sacheon Bay, which is located in the mid-southern tip of the peninsula. Historically, the bay region took the role of the main gate leading to the western part of Kyung-nam Do(Province) due to the fact that the bay is the nearest coast to Chinju, the central city of the province. The Sacheon Bay had provided important sea routes from the old days until the early twentieth century. Because of the bay's sea routes, the bay region has been militarily of great significance. Recently, road/rail/highway/airplane transportation functions have become gradually increased but sea transportation function has been decreased in the region. As the Sacheon Bay was rich in fishery resources, dozens of fishing villages in the bay region depended on fishery and marine product industries for long years. But the inflow of the fresh water used to cause serious damage to the fishing industry in the bay region after a drainage canal from the Nam River was constructed in 1969. As a result, the industry has dwindled gradually for last decades. Recently, a couple of industrial parks were constructed along the coast and many manufacturing factories were built on the parks. It has been expected that many jobs lost in fishery and agriculture are replaced by new opportunities in industry. More than half of the workers employed in the parks' factories commute from the city of Chinju. It is asserted in this paper that the transportation, fishery, manufacturing, and tourism functions of the Sacheon Bay region are closely associated with. The characteristics of the region can be well understood through the functional changes and associations.

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Design of a Low Power Digital Filter Using Variable Canonic Signed Digit Coefficients (가변 CSD 계수를 이용한 저전력 디지털 필터의 설계)

  • Kim, Yeong-U;Yu, Jae-Taek;Kim, Su-Won
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.38 no.7
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    • pp.455-463
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    • 2001
  • In this Paper, an approximate processing method is proposed and tested. The proposed method uses variable CSD (VCSD) coefficients which approximate filter stopband attenuation by controlling the precision of the CSD coefficient sets. A decimation filter for Audio Codec '97 specifications has been designed having processor architecture that consists of program/data memory, arithmetic unit, energy/level decision, and sinc filter blocks, and fabricated with 0.6${\mu}{\textrm}{m}$ CMOS sea-of-gate technology. For the combined two halfband FIR filters in decimation filter, the number of addition operations were reduced to 63.5%, 35.7%, and 13.9%, compared to worst-case which is not an adaptive one. Experimental results show that the total power reduction rate of the filter is varying from 3.8 % to 9.0 % with respect to worst-case. The proposed approximate processing method using variable CSD coefficients is readily applicable to various kinds of filters and suitable, especially, for the speech and audio applications, like oversampling ADCs and DACs, filter banks, voice/audio codecs, etc.

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A Study on the Sun-Moon-Stars(日月星辰) appeared in Huang Ti Nei Chin(『黃帝內經』) (『황제내경(黃帝內經)』에 나타난 일월성진(日月星辰)에 관(關)한 연구(硏究))

  • Park, Chan-Yeong;Kim, Gi-Uk;Park, Hyeon-Guk
    • The Journal of Dong Guk Oriental Medicine
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    • v.5
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    • pp.281-306
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    • 1996
  • A study on the effect of the Sun-Moon-Stars(日月星辰) in Huang Ti Nei Ching("黃帝內經") on the formation of the Yunqi theory(運氣理論) have revealed following conclusions. 1. There was a record of Stars(星辰) written by Gabgol-Character(甲骨文字) in the Yin(殷) Dynasty. But the very first documentary records of Stars(星辰) is Shu Jing("書經"). Ancient astronomy had the tendency of astrology of combined with theory of the Five Elements(五行) and finally effects the theory of formation of Huang Ti Nei Ching("黃帝內經"). 2. Shu Jing("書經") said that Junrak(錢樂) made an Armillary sphere(運天儀) in the Sung(宋) Dynasty. And in the Jin(秦) and the Han(漢) Dynasty, they already observed the stars. The Sunkiokhyung(璿機玉衡) which is machinery of star-observing, became to be called an Armillary sphere (運天儀) by the pass of times. 3. As of the theory of the Cosmos-structure(宇宙-構造論) in Ohanunhangdaeron("五運行大論"), Guiyugu(鬼兒區) announced the Hypothesis of Covering Heaven(蓋天說) but Kibak(岐伯) supported the Hypothesis of chaosheven's(蓋天說) and in the theory of atmosphere(大氣論) in Ohanunhangdaeron("五運行大論") said that the earth was in Great Empty(太虛) and it was floating in the universe by the Great Chi(大氣). 4. The knowledge about the Five stars(五星) in Huang Ti Nei Ching("黃帝內經") is presented in the section of Gemgwejineonron("金?眞言論"), Gigoupyondaeron("氣交變大論"), Youkwonjeonggidaeron("六元正紀大論").ln the method of identifying the Five stars(五星) presented the criteria of the brightness, the altitude, the colours and the orbit etc. 5. The jupiter which has twelve year's revolution cycle was the basis of determination on the Twelve constellation(12辰), the Twelve field of heaven(12次), the Twelve Houses in the ecliptic(黃道 12宮), the Twelve Earth's Branches(12支) and the Twelve fields of Earth(12分野) and also it became the origin of the duodecimals(12進法). 6. The saturn having about twenty-eight year's revolution cycle became the criterion in identifying the Twenty Eight Constellations(28宿) which was used as the coordinates of the Celestial sphere (天球). 7. By the Percussional movement(歲差運動), the position of polaris and the Vernal-Antumal equinox(春秋分点) were shifted. Therefore the ancient the Heaven Gate-Earth Door(天門-地戶) changed from the position of Sil-Byuk(室壁), Yik-Jin(翼軫). And the precisional movements brought about the concept of the WunHoyYunSe(元會運世) that is a method of dividing a period. Also the precisional movement gave three dimension(三次元) foundation interpreted the Sixty JiaZi (六十甲子) which is revolving through sixty years uniformally. 8. The Hypothesis of the Nine Houses and Eight Winds(九宮八風論) which is one field of the astrology of ancient polaris-nine Houses divination plate(太一九宮占盤) brought about the concept of deficiency and excess and the concept of the Wind Vice(風邪). In the Calendar System(曆法) presented in Huang Ti Nei Ching("黃帝內經") the tropical year of the Sun-Moon-Stars(日月星辰) and the revolution and the rotation of the earth give explanations the changes of Yin-Yang(陰陽) by the use of the ten Celestial branches(十干) and the twelve Earth branches(十二支).

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Analysis of the Contact Pressure Distribution and Kinetics of Knee Implant Using the Simulator (Simulator를 이용한 인공무릎관절 접촉면의 압력분포 및 운동성 분석)

  • 이문규;김종민;김동민;최귀원
    • Journal of Biomedical Engineering Research
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    • v.24 no.4
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    • pp.363-367
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    • 2003
  • Contact area and pressure are important factors which directly influence a life of knee implants. Since implant's mechanical functions should be experimentally evaluated for clinical use, many studies using a knee simulator and a pressure sensor system have been conducted. However it has not been reported that the contact pressure's distribution of a knee implant motion was estimated in real-time during a gate cycle. Therefore. the objective of this study was to analyze the contact pressure distribution for the motion of a joint using the knee simulator and I-scan sensor system. For this purpose, we developed a force-controlled dynamic knee simulator to evaluate the mechanical performance of artificial knee joint. This simulator includes a function of a soft tissue and has a 4-degree-of-freedom to represent an axial compressive load and a flexion angle. As axial compressive force and a flexion angle of the femoral component can be controlled by PC program. The pressure is also measured from I-scan system and simulator to visualize the pressure distribution on the joint contact surfaces under loading condition during walking cycle. The compressive loading curve was the major cause for the contact pressure distribution and its center move in a cycle as to a flexion angie. In conclusion, this system can be used to evaluate to the geometric interaction of femoral and tibial design due to a measured mechanical function such as a contact pressure, contact area and a motion of a loading center.

A Proposal on the Consulting Model for Efficient Construction of Material Handling Automation System : Focused on K Company's Case (물류자동화 시스템의 효율적 구축을 위한 컨설팅 방법론 제안 : K기업의 사례를 중심으로)

  • Ko, J.H.;Cho, J.H.;Oh, H.S.;Shim, S.C.;Ryu, J.H.;Lee, S.J.
    • Journal of Korean Society of Industrial and Systems Engineering
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    • v.38 no.4
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    • pp.202-211
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    • 2015
  • Companies build the factory automation system to improve management effectiveness and productivity as prime strategies for sustainable growth. But most companies undergo various trials and errors while carrying out the project without elaborate preparation stage for factory automation. In this study, we tried to verify what factors are critical to effectively building distribution automation system, which is a branch of factory automation system. A consulting model for setting up a Material Handling Automation System by utilizing the Stage-Gate Process, which is product development process was studied. 29 material handling automation projects carried out between the year 1990 to 2013 at K-Company were selected. Interviews with the project managers, operators and maintenance personnels, various records and current status of the projects were used as data for structural equations based on the Milan consulting model and existing researches of factory automation, CIM for material handling automation. Creating effective basis of production, material handling system and energy saving system with expert review, when preparing a material handling automation project, help promote the project planning thus contributing to the performance of the resulting system, which appears though rather weakly in our data. Also the effect of material handling automation can be enhanced through sufficient and effective links to the relevant environments such as production logistics management and automated warehouses. More detailed planning characteristics of project promotion or some time-series data of effective Material Handling Automation System could enhace furthur studies. We propose a consulting model for setting up an efficient material handling automation system.

Status of Exotic Plant Species in Gyeongju Yangdong Village (경주 양동마을의 외래식물 현황)

  • Kim, Gi Song;Shin, Hyun Tak;Yi, Myung Hun;Yoon, Jung Won;Kim, Yong Shik
    • Korean Journal of Heritage: History & Science
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    • v.45 no.1
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    • pp.174-189
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    • 2012
  • This study aims to examine the traditional living space to reflect the environment-friendly design methods and principles of reestablishment. To do so, this study carried on a related literature study and field survey. The traditional living space in terms of the environmental friendliness is reflected on site selection and space composition, and utilization of natural energy and natural materials. Focused on the Kwangajeong in Yangdong Village, this study is to identify eco-friendly techniques on the traditional living space. As a result, it shows that Kwangajeong with the side of the southeast in site selection had been considered in aspect of environmental control such as sunshine and solar radiation. Also building construction techniques had been used to minimize the variation of terrain. In aspect of environmental conservation, Kwangajeong had structurally arranged the gate, an inner yard and an inner floor to allow good ventilation. In aspect of space composition, Kwangajeong with the emphasis of scenic view had utilized the methods that attract external landscape through the control of its fences. Environment-friendly techniques and control principles in traditional space had been developed by a long experience through the long periods and the traditional techniques suitable for local climate and local environment have been developed. The technical development of these techniques to resolve the global environmental and energy issues and create a more pleasant living environment of human beings might be critical.

A Study on the Environment-friendly Planning Elements on High-Class Houses Kuangajeong in Chosun Dynasty (관가정(觀稼亭)으로 본 조선시대 상류주택의 환경친화적 계획요소 분석)

  • Heo, Jun;Lee, Shi Young;Song, Byeong Hwa
    • Korean Journal of Heritage: History & Science
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    • v.44 no.3
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    • pp.164-177
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    • 2011
  • This study aims to examine the traditional living space to reflect the environment-friendly design methods and principles of reestablishment. To do so, this study carried on a related literature study and field survey. The traditional living space in terms of the environmental friendliness is reflected on site selection and space composition, and utilization of natural energy and natural materials. Focused on the Kwangajeong in Yangdong Village, this study is to identify eco-friendly techniques on the traditional living space. As a result, it shows that Kwangajeong with the side of the southeast in site selection had been considered in aspect of environmental control such as sunshine and solar radiation. Also building construction techniques had been used to minimize the variation of terrain. In aspect of environmental conservation, Kwangajeong had structurally arranged the gate, an inner yard and an inner floor to allow good ventilation. In aspect of space composition, Kwangajeong with the emphasis of scenic view had utilized the methods that attract external landscape through the control of its fences. Environment-friendly techniques and control principles in traditional space had been developed by a long experience through the long periods and the traditional techniques suitable for local climate and local environment have been developed. The technical development of these techniques to resolve the global environmental and energy issues and create a more pleasant living environment of human beings might be critical.