• Tribology and Lubricants
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• v.15 no.1
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• pp.90-97
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• 1999

Chemical-Mechanical Polishing (CMP) refers to a material removal process done by rubbing a work piece against a polishing pad under load in the presence of chemically active, abrasive containing slurry. CU process is a combination of chemical dissolution and mechanical action. The mechanical action of CMP involves tribology. The liquid slurry is trapped between the wafer (work piece) and pad (tooling) forming a lubricating film. For the first step to understand material removal rate of the CMP process, the lubricational analyses were done with commercial 100mm diameter silicon wafers to get nominal clearance of the slurry film, roll and pitch angle at the steady state. For this purpose, we calculate slurry pressure, resultant forces and moments at the steady state in the range of typical industrial polishing conditions.

• Journal of environmental and Sanitary engineering
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• v.7 no.1
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• pp.45-56
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• 1992

The Anaerbic Anoxic/oxic process is one of the biological treatment methods to remove nitrogen and phosphorus effectively which are nutritional elements for eutrophication. Supernatant of primary sediment of Anaerobic digester is used as a carbon source instead of methanol methanol supply in usual A$_{2}$/O process. The efficiency of the following treatment processes are as follow : 1) Changing recycle ratio in the usual A$_{2}$/O process without the stage of Anaerobic digester. 2) Changing recycle ratio in the usual A$_{2}$/O process with the supernatant supply of the Anaerobic digester. In the result of comparison, changing recycle ratio is almost no effect in the removal of phosphorus, however the effect of removal in nitrogenous substance are remarkable, and the effect of Anaerobic digester is not as effective as expected because the BOD removed in the digester partly, the rate of phosphorus to the BOD exceed pertinent range.

• Proceedings of the Korean Society of Broadcast Engineers Conference
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• 1998.06b
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• pp.16.2-21
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• 1998

Old movies are often corrupted by randomly located blotches and scratches. In this paper were present an efficient method for detection and removal of these distortions. The presented method is composed of two separate steps: the detection process and the restoration process. In the detection process, blotch locations are detected through global motion segmentation, the sequential approach to motion segmentation, a robust model-fit criterion and so on, we form the algorithm for the algorithm for the global motion segmentation tuned to the blotch detection problem. In the restoration process, the missing data of the detected blotch areas are temporally extrapolated from the corresponding image areas at the preceding or the succeeding image frame with considering the global motion segmentation results. We apply the presented method to moving image sequences distorted by artificial blotches. The method works very well and provides a subjective improvement of picture quality.

• Journal of Korean Society for Atmospheric Environment
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• v.8 no.4
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• pp.262-268
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• 1992

The trend of international concerns on environmental conservation and domestic demand of ambient air quality improvement, specially on sulfur dioxide level has resulted in the establishment of mid-term strategy of environmental improvement and stepwise strengthening of emission regulations in this decade in Korea. Development of flue gas desulfurization(FGD) process is becoming an essential task to be accomplished especially for the power plants and large industrial facilities. This study is an initial stage researc focusing on the mass transfer principles in wet type FGD process and the effects of operating variables of a jet bubbling scrubber utilizing limestone slurry on sulfur dioxide removal efficiency. Experimental results showed this type of scrubbing system has some advantages in terms of mass transfer mechanism and removal efficiency. More rigorous research is needed for the reaction system and the comparison with existing FGD processess for the possible development of a process which is compatative in view of installation cost and treatment of by-products.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.558-559
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• 2007

A commercially de-waxer which kinds of solvent after was used to remove a thick organic wax film after polishing process and several steps of SC-1 cleanings were followed for the removal of organic wax residues and particles which requires long process time and high cost of ownership (COO). DIO3 was used to remove organic wax residues too achieve low COO. In this study, 0103 rinsing could use instead of 01 water rinsing. The process time and chemical consumption were reduced by using DIO3.

• Journal of Power System Engineering
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• v.18 no.6
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• pp.84-90
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• 2014

The degradation of 2,3-dichlorophenol(2,3-diCP) by various advanced oxidation systems with continuous feeding of hydrogen peroxide including the ultraviolet/hydrogen peroxide, the Fenton and the photo-Fenton process has been conducted. The highest removal efficiency for 2,3-diCP in the aqueous phase was obtained by the photo-Fenton process among the advanced oxidation systems. In the photo-Fenton process, The removal efficiency of 2,3-diCP decreased with increasing pH in the range of 3 to 6, and it decreased with increasing initial concentration. As the intermediates of 2,3-diCP by photo-fenton reaction, 3,4-chlorocatechol and 2,3-dichlorohydroquinone were detected, thus the degradation pathways were proposed.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.288-288
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• 2012

The oxidation characteristics of tungsten line pattern during the carbon-based mask layer removal process using oxygen plasmas and the reduction characteristics of the WOx layer formed on the tungsten line surface using hydrogen plasmas have been investigated for sub-50 nm patterning processes. The surface oxidation of tungsten line during the mask layer removal process could be minimized by using a low temperature ($300^{\circ}K$) plasma processing instead of a high temperature plasma processing for the removal of the carbon-based material. Using this technique, the thickness of WOx on the tungsten line could be decreased to 25% of WOx formed by the high temperature processing. The WOx layer could be also completely removed at the low temperature of $300^{\circ}K$ using a hydrogen plasma by supplying bias power to the tungsten substrate to provide an activation energy for the reduction. When this oxidation and reduction technique was applied to actual 40 nm-CD device processing, the complete removal of WOx formed on the sidewall of tungsten line could be observed.

• Journal of Microbiology
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• v.42 no.1
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• pp.1-8
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• 2004

Changes in the bacterial populations of a 5-stage biological nutrient removal (BNR) process, with a step feed system for wastewater treatment, were monitored by denaturing gradient gel electrophoresis (DGGE) of PCR-amplified 16S ribosomal DNA fragments. DGGE analysis indicated seasonal community changes were observed, however, community profiles of the total bacteria of each reactor showed only minor differences in the samples obtained from the same season. The number of major bands was higher in the summer samples, and decreased during the winter period, indicating that the microbial community structure became simpler at low temperatures. Since the nitrogen and phosphate removal efficiencies were highly maintained throughout the winter operation period, the bacteria which still remaining in the winter sample can be considered important, playing a key role in the present 5-stage BNR sludge. The prominent DGGE bands were excised, and sequenced to gain insight into the identities of the predominant bacterial populations present, and most were found to not be closely related to previously characterized bacteria. These data suggest the importance of culture-independent methods for the quality control of wastewater treatment.

• Journal of The Korean Society of Agricultural Engineers
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• v.47 no.3
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• pp.69-76
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• 2005

An Absorbent Biofilter System (ABS) combined with the recirculation process was investigated for the feasible application in additional removing of organics (BOD, SS) as well as nutrients (TN, TP) from small Community wastewater in Korea. Polyurethane biofilter media with high porosity and large surface area were /used for the aerobic system. A part of treated wastewater was recirculated into the anoxic septic tank to promote removal of nutrients. The concentrations of BOD and SS of treated wastewater satisfied the regulations for small on-site wastewater treatment facility (10 mg/L) during the overall experimental period. The effluent concentrations of BOD and SS were decreased with enhancement of removal efficiencies of 95.7 and $96.7\%$. The nitrogen and phosphorus removal efficiencies by the recirculation increased to $52.9\%\;and\;43.2\%$ in average during the overall experimental period, respectively. With the improvement, these values were increased as much as additional 42 and $18\%$ compared with those of non-recirculation. The rates of nitrification and denitrification were enhanced showing $65\~77\%\;and\;42\~92\%$, respectively. The described process modification is a low cost and effective method of enhancing nitrogen and phosphorus removal, especially on existing systems without changing major design components of a treatment facility.

• Journal of Korean Society on Water Environment
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• v.24 no.3
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• pp.328-332
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• 2008

This research was about T-N removal efficiency of oxic reactor in which fixed media submerged from Membrane BNR(An+Ax+Ox) process. This experiment was implemented by using fixed media and changing DO concentration in the oxic reactor. Nitrification efficiencies of all modes were more than 98%. When no media was in the oxic reactor, T-N removal efficiency was only 47.4%, while it were shown from 60.3% to 67.4% with packed media, which indicated improved efficiency of 27~42%. The removal efficiencies of TCOD and BOD were more than 89%, 98% respectively, which could satisfy the guideline of advanced sewage reclamation by Department of Environment. When DO concentration in the packed oxic-media tank was 0.5~1.0 mg/L, T-N removal efficiency was low, which resulted from insufficient nitrification in the oxic reactor. Therefore, DO concentration of bulk solution needs to be kept more than 1.0 mg/L to induce higher nitrification efficiency in the reactor in which media was submerged. Also, the selection of DO concentration is important to prevent media from being clogged.