• Title/Summary/Keyword: Remote Center Motion

Search Result 27, Processing Time 0.025 seconds

Position Control of Wafer Lift Pin for the Reduction of Wafer Slip in Semiconductor Process Chamber

  • Koo, Yoon Sung;Song, Wan Soo;Park, Byeong Gyu;Ahn, Min Gyu;Hong, Sang Jeen
    • Journal of the Semiconductor & Display Technology
    • /
    • v.19 no.4
    • /
    • pp.18-21
    • /
    • 2020
  • Undetected wafer slip during the lift pin-down motion in semiconductor equipment may affect the center to edge variation, wafer warpage, and pattern misalignment in plasma equipment. Direct measuring of the amount of wafer slip inside the plasma process chamber is not feasible because of the hardware space limitation inside the plasma chamber. In this paper, we demonstrated a practice for the wafer lift pin-up and down motions with respect to the gear ratio, operating voltage, and pulse width modulation to maintain accurate wafer position using remote control linear servo motor with an experimentally designed chamber mockup. We noticed that the pin moving velocity and gear ratio are the most influencing parameters to be control, and the step-wised position control algorithm showed the most suitable for the reduction of wafer slip.

A New LED Light Device Lighting Control Algorithm for Optimal Energy Saving (최적의 에너지 효율을 위한 새로운 LED 조명기기 점등제어 알고리즘)

  • In, Chi-Goog;Hong, Sung-Il;Chang, Jeong-Uk;Lin, Chi-Ho
    • The Journal of the Institute of Internet, Broadcasting and Communication
    • /
    • v.12 no.6
    • /
    • pp.17-23
    • /
    • 2012
  • In this paper, we were proposed a new LED light device lighting control algorithm for optimal energy saving. The propose lighting control algorithm be to the LED lights devices lighting control by measuring illuminance into multi sensors. And it be to lighting control by inverting of octagon pattern during set-up time. All the LED is lighting when detecting motion by the motion sensor. And, it was designed enable remote management control by communicate with central monitoring center using Zigbee wireless network to measured data from sensors at real time. In this paper, a proposed lighting control algorithm was measured power consumption about the lighting status of LED lighting device using the lighting control program for demonstrate of energy savings effect. The measured result, the lighting method applying proposed algorithm were proved energy savings effect of more 40% more compared to the existing lighting method.

A Deformable Spherical Robot with Two Arms (두 팔을 가지는 변형 가능한 구형로봇)

  • Ahn, Sung-Su;Kim, Young-Min;Lee, Yun-Jung
    • Journal of Institute of Control, Robotics and Systems
    • /
    • v.16 no.11
    • /
    • pp.1060-1067
    • /
    • 2010
  • In this paper, we present a new type of spherical robot having two arms. This robot, called KisBot, mechanically consists of three parts, a wheel-shaped body and two rotating semi-spheres. In side of each semi-sphere, there exists an arm which is designed based on slider-crank mechanism for space efficiency. KisBot has hybrid types of driving mode: rolling and wheeling. In the rolling mode, the robot folds its arms through inside of itself and uses them as pendulum, then the robot works like a pendulum-driven robot. In the wheeling mode, two arms are extended from inside of the robot and are contacted to the ground, then the robot works like a one-wheel car. The Robot arms can be used as a brake during rolling mode and add friction to the robot for climbing a slope during wheeling mode. We developed a remote controlled type robot for experiment. It contains two DC motors which are located in the center of each semi-sphere for main propulsion, two RC motors for each arm operation, speed controllers for each semi-sphere, batteries for main power source, and other mechanical components. Experiments for the rolling and wheeling mode verify the hybrid driving ability and efficiency of the our proposed spherical robot.

Analysis of Snowfall Development Mechanism over the Korean Peninsula due to Polar Low (극저기압에 의한 한반도 강설 발달기구 분석)

  • Kim, Jinyeon;Min, Ki-Hong
    • Journal of the Korean earth science society
    • /
    • v.34 no.7
    • /
    • pp.645-661
    • /
    • 2013
  • The synoptic, thermodynamic, and dynamic characteristics of a heavy snowfall event that occurred in Seoul metropolitan area on 27 to 28 December 2010 was investigated. During this period there was a distinctive case that was identified as a polar low. We analyzed surface and upper level weather charts, snowfall amount, sea surface temperature, satellite imagery, sounding, and the National Center for Environmental Prediction global $1^{\circ}{\times}1^{\circ}$ reanalysis data. The polar low developed in an area where there was strong baroclinicity in the lower level aided by strong conditional instability due to 925 hPa warm air advection and 700 hPa cold air advection. The development mechanism of polar low is due, in part, to the tropopause folding, which advected stratospheric air increasing potential vorticity in mid-level and inducing cyclonic vorticity and convergence in low-level. Eventually clouds developed and there were snowfall total of 10 cm in Seoul metropolitan area and as much as 20 cm in southern parts of Korea. During the snowfall development, there was a $-45^{\circ}C$ cold core at 500 hPa and shortwave maintained $3-5^{\circ}$ separation with surface trough, which favored the development of polar low located in the warm sector and cyclonic advection area. The height of the dynamical tropopause lowered to 700 hPa during the peak development and increase in potential vorticity allowed strong vertical motion to occur. Overall, there was a close relationship between the development of snowfall and tropopause undulation. The heaviest snowfall occurred east of the tropopause folding where strong cyclonic vorticity, vertical motion, and moisture advection all coincided while the polar low was passing through the Korean peninsula.

Climatological variability of surface particulate organic carbon (POC) and physical processes based on ocean color data in the Gulf of Mexico

  • Son, Young-Baek;Gardner, Wilford D.
    • Korean Journal of Remote Sensing
    • /
    • v.27 no.3
    • /
    • pp.235-258
    • /
    • 2011
  • The purpose of this study is to investigate climatological variations from the temporal and spatial surface particulate organic carbon (POC) estimates based on SeaWiFS spectral radiance, and to determine the physical mechanisms that affect the distribution of pac in the Gulf of Mexico. 7-year monthly mean values of surface pac concentration (Sept. 1997 - Dec. 2004) were estimated from Maximum Normalized Difference Carbon Index (MNDCI) algorithm using SeaWiFS data. Synchronous 7-year monthly mean values of remote sensing data (sea surface temperature (SST), sea surface wind (SSW), sea surface height anomaly (SSHA), precipitation rate (PR)) and recorded river discharge data were used to determine physical forcing factors. The spatial pattern of POC was related to one or more factors such as river runoff, wind-derived current, and stratification of the water column, the energetic Loop Current/Eddies, and buoyancy forcing. The observed seasonal change in the POC plume's response to wind speed in the western delta region resulted from seasonal changes in the upper ocean stratification. During late spring and summer, the low-density river water is heated rapidly at the surface by incoming solar radiation. This lowers the density of the fresh-water plume and increases the near-surface stratification of the water column. In the absence of significant wind forcing, the plume undergoes buoyant spreading and the sediment is maintained at the surface by the shallow pycnocline. However, when the wind speed increases substantially, wind-wave action increases vertical motion, reducing stratification, and the sediment were mixed downward rather than spreading laterally. Maximum particle concentrations over the outer shelf and the upper slope during lower runoff seasons were related to the Loop Current/eddies and buoyancy forcing. Inter-annual differences of POC concentration were related to ENSO cycles. During the El Nino events (1997-1998 and 2002-2004), the higher pac concentrations existed and were related to high runoffs in the eastern Gulf of Mexico, but the opposite conditions in the western Gulf of Mexico. During La Nina conditions (1999-2001), low Poe concentration was related to normal or low river discharge, and low PM/nutrient waters in the eastern Gulf of Mexico, but the opposite conditions in the western Gulf of Mexico.

Estimates of Surface Explosion Energy Based on the Transmission Loss Correction for Infrasound Observations in Regional Distances (인프라사운드 대기 전파 투과손실 보정을 통한 원거리 지표폭발 에너지 추정)

  • Che, Il-Young;Kim, Inho
    • Journal of the Korean earth science society
    • /
    • v.41 no.5
    • /
    • pp.478-489
    • /
    • 2020
  • This study presents an analysis of infrasonic signals from two accidental explosions in Gwangyang city, Jeonnam Province, Korea, on December 24, 2019, recorded at 12 infrasound stations located 151-435 km away. Infrasound propagation refracted at an altitude of ~40 km owing to higher stratospheric wind in the NNW direction, resulting in favorable detection at stations in that direction. However, tropospheric phases were observed at stations located in the NE and E directions from the explosion site because of the strong west wind jet formed at ~10 km. The transmission losses on the propagation path were calculated using the effective sound velocity structure and parabolic equation modeling. Based on the losses, the observed signal amplitudes were corrected, and overpressures were estimated at the reference distance. From the overpressures, the source energy was evaluated through the overpressure-explosive charge relationship. The two explosions were found to have energies equivalent to 14 and 65 kg TNT, respectively. At the first explosion, a flying fragment forced by an explosive shock wave was observed in the air. The energy causing the flying fragment was estimated to be equivalent to 49 kg or less of TNT, obtained from the relationship between the fragment motion and overpressure. Our infrasound propagation modeling is available to constrain the source energy for remote explosions. To enhance the confidence in energy estimations, further studies are required to reflect the uncertainty of the atmospheric structure models on the estimations and to verify the relationships by various ground truth explosions.

Comparison of Wind Vectors Derived from GK2A with Aeolus/ALADIN (위성기반 GK2A의 대기운동벡터와 Aeolus/ALADIN 바람 비교)

  • Shin, Hyemin;Ahn, Myoung-Hwan;KIM, Jisoo;Lee, Sihye;Lee, Byung-Il
    • Korean Journal of Remote Sensing
    • /
    • v.37 no.6_1
    • /
    • pp.1631-1645
    • /
    • 2021
  • This research aims to provide the characteristics of the world's first active lidar sensor Atmospheric Laser Doppler Instrument (ALADIN) wind data and Geostationary Korea Multi Purpose Satellite 2A (GK2A) Atmospheric Motion Vector (AMV) data by comparing two wind data. As a result of comparing the data from September 2019 to August 1, 2020, The total number of collocated data for the AMV (using IR channel) and Mie channel ALADIN data is 177,681 which gives the Root Mean Square Error (RMSE) of 3.73 m/s and the correlation coefficient is 0.98. For a more detailed analysis, Comparison result considering altitude and latitude, the Normalized Root Mean Squared Error (NRMSE) is 0.2-0.3 at most latitude bands. However, the upper and middle layers in the lower latitudes and the lower layer in the southern hemispheric are larger than 0.4 at specific latitudes. These results are the same for the water vapor channel and the visible channel regardless of the season, and the channel-specific and seasonal characteristics do not appear prominently. Furthermore, as a result of analyzing the distribution of clouds in the latitude band with a large difference between the two wind data, Cirrus or cumulus clouds, which can lower the accuracy of height assignment of AMV, are distributed more than at other latitude bands. Accordingly, it is suggested that ALADIN wind data in the southern hemisphere and low latitude band, where the error of the AMV is large, can have a positive effect on the numerical forecast model.