• 제목/요약/키워드: Reflectivity

검색결과 683건 처리시간 0.027초

Rigorous coupled-wave analysis of antireflective surface-relief gratings

  • Han, Chang-Wook;Cho, Doo-Jin;Rhee, Bum-Ku
    • Journal of the Optical Society of Korea
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    • 제1권1호
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    • pp.26-35
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    • 1997
  • Rigorous coupled-wave analysis (RCWA) with a simplified eigenvalue problem is used to investigate the an-tireflective property of one-dimensional surface-relief gratings such as binary gratings, triangular gratings and gratings with triangle-like surface profiles. The convergence of RCWA is investigated by varying the number of layers and the number of space-harmonics used in the computation. For unpolarized light normally incident on a medium of refractive index 1.64 from vaccum, a triangle-like grating shows the reflectivity of $1.6 {\times} 10^{-4}$ in contrast to a minimum reflectivity of $3.8 {\times} 10^{-3}$ for a binary grating. We also study the dependence of reflectivity on the wavelength, and on the angle of incidence for a groove shape and depth which result in minimum reflectivity.

Focused Ion Beam을 이용한 EUVL Mask Defect Isolation 및 Repair (EUVL Mask Defect Isolation and Repair using Focused Ion Beam)

  • 김석구;백운규;박재근
    • 반도체디스플레이기술학회지
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    • 제3권2호
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    • pp.5-9
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    • 2004
  • Microcircuit fabrication requires precise control of impurities in tiny regions of the silicon. These regions must be interconnected to create components and VLSI circuits. The patterns to define such regions are created by lithographic processes. In order to image features smaller than 70 nm, it is necessary to employ non-optical technology (or next generation lithography: NGL). One such NGL is extreme ultra-violet lithography (EUVL). EUVL transmits the pattern on the wafer surface after reflecting ultra-violet through mask pattern. If particles exist on the blank mask, it can't transmit the accurate pattern on the wafer and decrease the reflectivity. It is important to care the blank mask. We removed the particles on the wafer using focused ion beam (FIB). During removal, FIB beam caused damage the multi layer mask and it decreased the reflectivity. The relationship between particle removal and reflectivity is examined: i) transmission electron microscope (TEM) observation after particle removal, ii) reflectivity simulation. It is found that the image mode of FIB is more effective for particle removal than spot and bar mode.

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휘발성 유기화합물 탐지용 다공성 실리콘 Microcavity 센서 (Porous Silicon Microcavity Sensors for the Detection of Volatile Organic Compounds)

  • 박철영
    • 통합자연과학논문집
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    • 제2권3호
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    • pp.211-214
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    • 2009
  • A new porous silicon (PSi) microcavity sensor for the detection of volatile organic compounds (VOCs) was developed. PSi microcavity sensor exhibiting unique reflectivity was successfully obtained by an electrochemical etching of silicon wafer. When PSi was fabricated into a structure consisting of two high reflectivity muktilayer mirrors separated by an active layer, a microcavity was formed. This PSi microcavity is very sensitive structures. Reflection spectrum of PSi microcavity indicated that the full-width at half-maximum (FWHM) was of 10 nm and much narrower than that of fluorescent organic molecules or quantum dot. The detection of volatile organic compounds (VOCs) using PSi microcavity was achieved. When the vapor of VOCs condensed in the nanopores, the refractive indices of entire particle increased. When PSi microcavity was exposed to acetone, ether, and toluene, PSi microcavity in reflectivity was red shifted by 28 nm, 33 nm, and 20 nm for 2 sec, respectively.

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전류세기의 변화에 따른 DBR 다공성 실리콘의 광학적 특성 (Optical Characterization of DBR Porous Silicon by Changing of Applied Current Density)

  • 최태은;박재현
    • 통합자연과학논문집
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    • 제2권2호
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    • pp.82-85
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    • 2009
  • Distributed Bragg reflector (DBR) porous silicon (PSi) was generated by an electrochemical etching a bragg structure into a silicon wafer through electrode current in aqueous ethanolic HF solution. DBR PSi exhibiting unique reflectivity was successfully obtained by an electrochemical etching of silicon wafer using square current waveform. The multilayered photonic crystals of DBR PSi exhibited the reflection of a specific wavelength with high reflectivity in the optical reflectivity spectrum. In this work, we have developed a method to create refractive index in Si substrate through intensity of an electric current. The electrochemical process allows for precise control of the structural properties of DBR PSi such as thickness of the porous layer, porosity, and average pore diameter. The number of reflection peak of DBR PSi and its pore size increased as the intensity of electric current increased. This might be a demonstration for the fabrication of specific reflectors or filters.

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GRM(Gaussian Reflectivity Mirror)을 이용한 불안정 공진기형 Q-스위치 Nd:YAG 레이저의 출력특성 (Output Characteristics of a Q-Switched Nd:YAG laser with GRM(Gaussian Reflectivity Mirror) unstable resonator)

  • 이희철;김용평
    • 한국광학회지
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    • 제16권2호
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    • pp.152-158
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    • 2005
  • 출력거울로 GRM(Gaussian reflectivity mirror)을 채택한 불안정 공진기를 구성하여 그 Q-스위치 출력의 특성을 분석하였다. 입력 전기에너지가 55J 일 때 1064 nm의 기본파장에서 470 mJ, 532 nm의 제2고조파 파장에서 280 mJ의 출력 에너지를 얻었다. 출력빔의 발산각은 1.7 mrad 이었으며 근접장 영역에서 Top-Hat 형태의 빔을 얻을 수 있었다.

Pore Size Distribution and Reflectivity of Light of Paper

  • Won, Jong-Myoung;Park, Bong-Sun;Park, Kyung-Ouk
    • 한국펄프종이공학회:학술대회논문집
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    • 한국펄프종이공학회 2006년도 PAN PACIFIC CONFERENCE vol.2
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    • pp.479-484
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    • 2006
  • The pore structures of paper were modified by the application of the blending of pulp, refining, and filler particle size and ash content. It was conformed that the reflectivity of paper can be modified by the combination of above parameters. It was also found that the modifications of reflectivity of paper were very close relation with pore structure, such as average pore size, pore size distribution and porosity. The average pore size was decreased with addition of HwBKP, but showed smaller particle size than those made from 100% HwBKP. Refining of pulp decreased both average pore size and the reflectivity of paper. The pore size distribution of filled paper can be varied by the combination of filler particle size and ash content.

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MCPs의 반사 특성에 관한 연구 (A Research on Reflectivity of Microcellular Polypropylene)

  • 서정환;차성운;김학빈
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.1367-1370
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    • 2005
  • Microcellular foam processing of polymers requires a nucleated cell density greater than $10^9\;cells/cm^3$ so that the fully grown cells are smaller than 10 mm. A microcellular foam can be developed by first saturating a polymer sample with a volatile blowing agent, followed by rapidly decreasing its solubility in the polymer. In general, the cellular structure of crystalline polymer foams is difficult to control, compared to that of amorphous polymer foams. Since the gas does not dissolved in the crystallites, the polymer/gas solution formed during the microcellular processing is nonuniform. Moreover, the bubble nucleation is nonhomogeneous because of the heterogeneous nature of the crystalline polymer. In this paper, the effects of the crystallinity and morphology of crystalline polymers on the microcellular foam processing and on reflectivity of products are investigated. First, polymer specimens with various morphology and amount of solved blowing agent were prepared by varying the saturation pressure, saturation time and foaming condition. Then, cell morphologies according to several conditions were studied. The specimens with differing gas amount of solved and morphologies were foamed and their cellular structures were compared. The experimental results of reflectivity are compared to raw specimen and another specimen of different experimental conditions. After the experiments, recognize whether how reflectivity changes according to solved gas amount. And the effect of cell density and cell size on reflectivity is studied

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도금인자에 따른 LED 리드프레임 상의 도금층의 반사특성 (Reflection Characteristics of Electroplated Deposits on LED Lead frame with Plating Condition)

  • 기세호;김원중;정재필
    • 마이크로전자및패키징학회지
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    • 제20권2호
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    • pp.29-32
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    • 2013
  • 본 연구에서는 LED 리드프레임 상에 Sn-3.5wt%Ag를 무전해도금하여 표면 거칠기와 반사율을 측정하였다. Sn-3.5wt%Ag를 도금하기에 앞서 Sn-3.5wt%Ag 도금층의 반사율을 향상시키기 위하여 Cu 전해도금을 실시하였다. 도금 후 도금액의 교반속도와 온도가 도금층의 표면 거칠기와 반사율에 어떠한 영향을 미치는지 알아보기 위하여 각각의 도금인자에 대해서 표면 거칠기와 반사율을 측정하고자 하였다. 교반속도가 100~300 rpm으로 증가함에 따라 표면 거칠기는 0.513 ${\mu}m$에서 0.266 ${\mu}m$으로 감소하였으며, 반사율은 1.67 GAM에서 1.86 GAM으로 증가하였다. 또한 온도가 $25{\sim}45^{\circ}C$로 증가함에 따라 표면 거칠기는 0.507 ${\mu}m$에서 0.350 ${\mu}m$으로 감소하였으며, 반사율은 1.68 GAM에서 1.84 GAM으로 증가하였다.

연직강우레이더와 광학우적계 관측자료를 이용한 2012년 여름철 남해안 강우사례 분석 (Analysis of Summer Rainfall Case over Southern Coast Using MRR and PARSIVEL Disdrometer Measurements in 2012)

  • 문지영;김동균;김연희;하종철;정관영
    • 대기
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    • 제23권3호
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    • pp.265-273
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    • 2013
  • To investigate properties of cloud and rainfall occurred at Boseong on 10 July 2012, Raindrop Size distributions (RSDs) and other parameters were analyzed using observation data collected by Micro Rain Radar (MRR) and PARticle SIze and VELocity (PARSIVEL) disdrometer located in the National center for intensive observation of severe weather at Boseong in the southwest of the Korean peninsula. In addition, time series of RSD parameters, relationship between reflectivity-rain rate, and vertical variation of rain rates-fall velocities below melting layer were examined. As a result, good agreements were found in the reflectivity-rain rate time series as well as their power relationships between MRR and PARSIVEL disdrometer. The rain rate was proportional to reflectivity, mean diameter, and inversely proportional to shape (${\mu}$), slope (${\Lambda}$), intercept ($N_0$) parameter of RSD. In comparison of the RSD, as rain rate was increased, the slope of RSD became less steep and the mean diameter became larger. Also, it was verified that reflectivities are classified in three categories (Category 1: Z (reflectivity) > 40 dBZ, Category 2: 30 dBZ < Z < 40 dBZ, Category 3: Z < 30 dBZ). As reflectivity was increased, rain rate was intensified and larger raindrops were existed, while reflectivity was decreased, shape (${\mu}$), slope (${\Lambda}$), intercept ($N_0$) parameter of RSD were increased. We expected that these results will lead to better understanding of microphysical process in convective rainfall system occurred during short-term period over Korean peninsula.

레이더기반 다중센서활용 강수추정기술의 개발 (Development of Radar-Based Multi-Sensor Quantitative Precipitation Estimation Technique)

  • 이재경;김지현;박혜숙;석미경
    • 대기
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    • 제24권3호
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    • pp.433-444
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    • 2014
  • Although the Radar-AWS Rainrate (RAR) calculation system operated by Korea Meteorological Administration estimated precipitation using 2-dimensional composite components of single polarization radars, this system has several limitations in estimating the precipitation accurately. To to overcome limitations of the RAR system, the Korea Meteorological Administration developed and operated the RMQ (Radar-based Multi-sensor Quantitative Precipitation Estimation) system, the improved version of NMQ (National Mosaic and Multi-sensor Quantitative Precipitation Estimation) system of NSSL (National Severe Storms Laboratory) for the Korean Peninsula. This study introduced the RMQ system domestically for the first time and verified the precipitation estimation performance of the RMQ system. The RMQ system consists of 4 main parts as the process of handling the single radar data, merging 3D reflectivity, QPE, and displaying result images. The first process (handling of the single radar data) has the pre-process of a radar data (transformation of data format and quality control), the production of a vertical profile of reflectivity and the correction of bright-band, and the conduction of hydrid scan reflectivity. The next process (merger of 3D reflectivity) produces the 3D composite reflectivity field after correcting the quality controlled single radar reflectivity. The QPE process classifies the precipitation types using multi-sensor information and estimates quantitative precipitation using several Z-R relationships which are proper for precipitation types. This process also corrects the precipitation using the AWS position with local gauge correction technique. The last process displays the final results transformed into images in the web-site. This study also estimated the accuracy of the RMQ system with five events in 2012 summer season and compared the results of the RAR (Radar-AWS Rainrate) and RMQ systems. The RMQ system ($2.36mm\;hr^{-1}$ in RMSE on average) is superior to the RAR system ($8.33mm\;hr^{-1}$ in RMSE) and improved by 73.25% in RMSE and 25.56% in correlation coefficient on average. The precipitation composite field images produced by the RMQ system are almost identical to the AWS (Automatic Weather Statioin) images. Therefore, the RMQ system has contributed to improve the accuracy of precipitation estimation using weather radars and operation of the RMQ system in the work field in future enables to cope with the extreme weather conditions actively.