• Korean Journal of Optics and Photonics
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• v.17 no.4
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• pp.335-341
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• 2006

A modified Michelson interferometer type digital holography microscopy system is developed. There is a problem about recording and numerical reconstruction area at the microscopy application of Michelson type interferometer structure in the digital holography field. In this paper, to overcome this problem, we developed a new reflection type digital holography microscope system and increased recording and numerical reconstruction area of target object.

• Journal of the Korean Society for Nondestructive Testing
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• v.35 no.2
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• pp.141-149
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• 2015

In the fabrication of electronic circuits used in electronic products, molybdenum thin films are deposited on semiconductors to prevent oxidation. During the deposition, the presence of a particle or dust at the interface between the thin film and substrate causes the decrease of adhesion, performance, and life cycle. In this study, a damage measurement targeting two kinds of glass substrate, with and without particles, was performed in order to measure the change in the molybdenum thin film deposition area in the presence of a particle. Clean and dirty molybdenum thin film specimens were fabricated and directly deposited on a substrate using the sputtering method, and a reflection-type digital holographic interferometer was configured for measuring the damage. Reflection-type digital holography has several advantages; e.g., the configuration of the interferometer is simple, the measurement range can be varied depending on the magnification of a microscopic lens, and the measuring time is short. The results confirm that reflection-type digital holography is useful for the measurement of the damage and defects of thin films.

• Proceedings of the Optical Society of Korea Conference
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• 2008.07a
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• pp.169-171
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• 2008

마이켈슨 간섭계 시스템에 두 개의 Convex Lens를 추가함으로서 평면파 참조광을 유지 시키며, 물체에 조사되는 물체광의 조사면적을 변화시킬 수 있는 새로운 형태의 마이켈슨 간섭계를 제작 하였다. 새로운 형태의 마이켈슨 간섭계를 반사형 디지털 홀로그래피 현미경 시스템(Digital Holography Microscope System)에 적용하여 촬상소자(CCD: Charge Couple Device)에 홀로그램 기록 시 기록 가능한 CCD의 유효 영역과 재생 가능 영역에 대해 연구를 하였다

• Korean Journal of Optics and Photonics
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• v.22 no.5
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• pp.214-218
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• 2011

In this paper we have applied self-reference hologram to DHM (digital holography microscopy) to remove phase aberration. We have constructed an off-axis reflection- type digital holography microscope. We have extracted a low spatial frequency hologram from the conjugated hologram and used it as a reference hologram. Experimentally we show that distortion of image and aberration of phase in a measurement system are removed using the self-reference hologram.