• Title/Summary/Keyword: Recirculation air

Search Result 362, Processing Time 0.033 seconds

A Three-Dimensional CFD Study on the Air Flow Characteristics in a Wax Spin Coater for Silicon Wafer Manufacturing (실리콘 웨이퍼 생산공정용 왁스 스핀코팅장치 내 기류 특성에 대한 3차원 전산유동해석)

  • Kim, Yong-Ki;Kim, Dong-Joo;Umarov, Alisher;Kim, Kyoung-Jin;Park, Jun-Young
    • Journal of the Korean Society of Manufacturing Process Engineers
    • /
    • v.10 no.6
    • /
    • pp.146-151
    • /
    • 2011
  • Wax spin coating is a part of several wafer handling processes in the silicon wafer polishing station. It is important to ensure the wax layer free of contamination to achieve the high degree of planarization on wafers after wafer polishing. Three-dimensional air flow characteristics in a wax spin coater are numerically investigated using computational fluid dynamics techniques. When the bottom of the wax spin coater is closed, there exists a significant recirculation zone over the rotating ceramic block. This recirculation zone can be the source of wax layer contamination at any rotational speed and should be avoided to maintain high wafer polishing quality. Thus, four air suction ducts are installed at the bottom of the wax spin coater in order to control the air flow pattern over the ceramic block. Present computational results show that the air suction from the bottom is quite an effective method to remove or minimize the recirculation zone over the ceramic block and the wax coating layer.

The Effect of Flue-gas Recirculation on Combustion Characteristics of Self Regenerative Low NOx Burner (자기축열식 저 NOx 연소기에서 배가스 재순환이 연소특성에 미치는 영향)

  • Kang, Min-Wook;Kim, Jong-Gyu;Dong, Sang-Keun;Yoon, Young-Bin
    • Journal of the Korean Society of Combustion
    • /
    • v.8 no.1
    • /
    • pp.17-24
    • /
    • 2003
  • The conventional regenerative system has a high thermal efficiency as well as energy saving using the high preheated combustion air. in spite of these advantages, it can not avoid high nitric oxide emissions. Recently, flameless combustion has received much attention to solve these problems. In this research, numerical analysis is performed for flow-combustion phenomena in the self regenerative burner. In this analysis we used Fluent 6.0 code. the that is developed for commercial use, Methane gas is used as a fuel and two-step reaction model for methane and Zeldovich mechanism for NO generation are used. the velocity of the preheated combustion air is used as a parameter and we analyze the characteristics of flow-field, temperature distributions and NO emissions. Due to the increased recirculation rate, the maximum temperature of flame is significantly increased and NOx emissions is reduced.

  • PDF

Flow Characteristics of Liquid Ramjet Engines using Two Color PIV

  • Ahn Kyubok;Yoon Youngbin
    • 한국가시화정보학회:학술대회논문집
    • /
    • 2001.12a
    • /
    • pp.151-163
    • /
    • 2001
  • A two color PIV technique has been developed for visualization of complex and high speed flow in a ramjet combustor. Two color PIV has the advantages that velocity distributions in high speed flowfields can be measured simply by varying the time interval between two different laser beams and a directional ambiguity problem can be solved by color separation, and then a signal-to-noise ratio can be increased through nearly perfect cross-correlation. As a basic research of the ramjet engine, a 2-D shaped combustor with two symmetric air intakes has been manufactured and an experimental study has been conducted using a two color PIV technique. The flow characteristics such as recirculation zones, intake air mixing and turbulent kinetic energy have been investigated varying inlet angles and dome heights. It was found that the primary recirculation zone is affected mainly by the dome height, whereas the secondary recirculation zone is influenced by the air inlet angle.

  • PDF

Numerical Simulation of Spray Behavior and Its Interaction with Air Flow in Oil Burner (오일 버너에 있어서 분무거동과 공기유동의 상호작용에 관한 수치해석)

  • 나가지마
    • Journal of Advanced Marine Engineering and Technology
    • /
    • v.23 no.3
    • /
    • pp.320-330
    • /
    • 1999
  • A numerical study was performed to investigate spray behavior and its interaction with air flow in a flame holding region of an oil burner(0.1MW) using the KIVA3 code. The numerical results in shape of the recirculating flow and size of the recirculation zone under different conditions were compared to those experimental results. The numerical results in fuel droplet trajectory show that a droplet under 30${\mu}m$ can follow the air flow but a droplet over 50${\mu}m$ penetrates the recirculation zone due to large momentum and a droplet of 30-50${\mu}m$ can follow the recirculating flow or pene-trates the recirculation zone.

  • PDF

The experimental study of the performance characteristics of a tumbler type laundry dryer (통기드럼형 의류용 건조기의 성능특성에 관한 실험적 연구)

  • Jang, Yong-Soo;Lee, Sang-Won;Kim, Soo-Yeon;Jung, Pyung-Suk
    • Proceedings of the KSME Conference
    • /
    • 2000.04b
    • /
    • pp.187-192
    • /
    • 2000
  • The textile which is rotated in the tumbler dryer is dried by the heated air. the energy consumption for drying textile depends on various parameters. The objective of this study is to save the energy and the drying time. One of the various methods for energy saving is EGR(exhaust gas recirculation). We set the drying equipment for this study and perform the experimental study with the changes of the recirculation rate, the input power, and the air mass flow rate. We found the optimal drying conditions.

  • PDF

The effect of flue-gas recirculation on combustion characteristics of regenerative low NOx burner (축열식 저 NOx 연소기의 배가스 재순환이 연소특성에 미치는 영향)

  • Kang, Min-Wook;Yoon, Young-Bin;Dong, Sang-Keun
    • 한국연소학회:학술대회논문집
    • /
    • 2002.11a
    • /
    • pp.97-104
    • /
    • 2002
  • The conventional regenerative system has a high thermal efficiency as well as energy saving using the high preheated combustion air. in spite of these advantages, it can not avoid high nitric oxide emissions. Recently, flameless combustion has received much attention to solve these problems. In this research, numerical analysis is performed for flow-combustion phenomena in the self regenerative burner. In this analysis we used Fluent 6.0 code. the that is developed for commercial use, Methane gas is used as a fuel and two-step reaction model for methane and Zeldovich mechanism for NO generation are used. the velocity of the preheated combustion air is used as a parameter and we analyze the characteristics of flow-field, temperature distributions and NO emissions. Due to the increased recirculation rate, the maximum temperature of flame is significantly increased and NOx emissions is reduced

  • PDF

Numerical Simulation and Comparison of Particle Dispersion and Air Quality with Domain Setting of Gwangyang Bay Area (광양만 권역의 영역 설정에 따른 입자확산 및 대기질 수치모의 비교)

  • Lee, Hyun-Mi;Lee, Hwa-Woon;Lee, Soon-Hwan
    • Journal of Korean Society for Atmospheric Environment
    • /
    • v.26 no.6
    • /
    • pp.591-605
    • /
    • 2010
  • Recirculation of airmass in coastal region occurs because of the change from land to sea breeze and was shown to produce a contrary result on air quality. This study examines the numerical simulation to analyze the effect of recirculation flow in Gwangyang Bay, Korea. For this purpose two case studies are performed by the WRF-FLEXPART-CMAQ modeling system, each for a different Meso-Synoptic Index. Additionally this research make a comparative study of large domain (Domain L) and small domain (Domain S). The horizontal wind fields are simulated from WRF. Changes in the land-sea breeze have an effect on the particle dispersion modeling. The numerical simulation of air quality is carried out to investigate the recirculation of ozone. Ozone is transported to eastward under strong synoptic condition (Case_strong) because of westerly synoptic flow and this pattern can confirm in all domain. However ozone swept off by the land breeze and then transported to northward along sea breeze under conditions of clear sky and weak winds (Case_weak). In this case re-advected ozone isn't simulate in Domain S. The study found that recirculation of airmass must be concerned when numerical simulation of air quality is performed in coastal region, especially on a sunny day.

A Study on the Performance Evaluation of Recirculation System for Individual Hot Water Supply System in Residential Buildings (주거건물의 개별급탕방식 환탕배관 적용에 따른 급탕성능 평가에 관한 연구)

  • Cha, Min-Chul;Yeo, Myoung-Souk;Seok, Ho-Tae
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
    • /
    • v.19 no.12
    • /
    • pp.857-864
    • /
    • 2007
  • In the current residential building, hot water supply system consumes the second largest energy in order to make the thermal comport condition of residential space. The more residential environment improves the more the demand for hot water and water consumption is increasing gradually. So this study examines the possibility of applying the recirculation for individual hot water supply system compared with the existing method for waiting time for hot water, wasted water and energy consumption. The results are as follows. (1) In case of recirculation system method the waiting time for hot water can be reduced up to $69\sim85%$ in spring and fall period and so dose up to $77\sim85%$ in winter period. (2) The total wasted water has a little change compared with the existing method which can make the total wasted water reduced about $77\sim86%$. (3) The efficiency of hot water supply system can be improved, if the method which blocks the inflow of cold water is applied, when return pump is operated to recirculate hot water in recirculation system.

Experiment on Low $NO_x$ Combustion Characteristics by Flue Gas Dilution In Air and Fuel Sides (공기 및 연료에 대한 배기가스 희석 방법에 의한 저 $NO_x$ 연소특성에 관한 실험)

  • Cho, Eun-Seong;Chung, Suk-Ho
    • Proceedings of the KSME Conference
    • /
    • 2004.04a
    • /
    • pp.1499-1504
    • /
    • 2004
  • Flue gas recirculation (FGR) is a method used to control oxides of nitrogen ($NO_x$) in combustion system. The recirculated flue gases resulted in slow reaction and low flame temperatures, which in turn resulted in decreased thermal NO production. Recently, it has been demonstrated that introducing the recirculated flue gas in the fuel stream, that is, the fuel induced recirculation (FIR), resulted in a much greater reduction in $NO_x$ per unit mass of recirculated gas, as compared to introducing the flue gases in air. In the present study, the effect on $NO_x$ reduction in turbulent swirl flame in laboratory scale using FGR/FIR methods through the dilution using $N_2$ and $CO_2$. Results. show the $CO_2$ dilution is more effective $NO_x$ reduction methods because of large temperature drop due to the larger specific heat $CO_2$ compared to $N_2$. FIR is more effective to reduce $NO_x$ emission than FGR when the same recirculation ratio of dilution gas.

  • PDF

A Study on the Development of Heat-Recovery Ventilator for Preventing Freezing in a Cold Weather (혹한기 결빙 방지를 위한 열회수형 환기장치 개발에 관한 연구)

  • Park, Woo-Cheul;Kim, Il-Gyoum;Tae, Kyung-Eung
    • Journal of the Korea Academia-Industrial cooperation Society
    • /
    • v.19 no.5
    • /
    • pp.593-598
    • /
    • 2018
  • Computational fluid dynamics was used to develop a heat-recovery ventilator for preventing freezing in cold weather. An optimal internal return damper was applied, and a prototype was made for frost and freezing experiments. A total of 16 models were used to design the optimal internal return damper with the maximum exhaust recirculation ratio. The exhaust recirculation ratio of the exhaust air to the outdoor air was 59.9-62.3%. The tests showed that frost and freezing did not occur at outdoor air temperatures of $-15^{\circ}C$ or higher in both exhaust recirculation operation and normal operation. However, at an outdoor air temperature of $-20^{\circ}C$, no freezing occurred in the outdoor air area when the internal return damper was opened by 45 degrees. Heat recovery ventilators for preventing cold weather frost and freezing should be operated in two operation modes: normal and exhaust recirculation mode. An operating algorithm was developed for the heat-recovery ventilator operating in normal mode when the outdoor temperature is higher than $-15^{\circ}C$ and recirculation mode when the temperature is lower.