• Title/Summary/Keyword: Reaction layer

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Characteristics of PECVD-W thin films deposited on $Si_3N_4$ ($Si_3N_4$상에 PECVD법으로 형성한 텅스텐 박막의 특성)

  • 이찬용;배성찬;최시영
    • Journal of the Korean Vacuum Society
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    • v.7 no.2
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    • pp.141-149
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    • 1998
  • The W thin films were deposited on Si3N4 by a PECVD technique. The effects of substrate temperature and gas flow ratio on the properties of the W films were investigated. The deposition of W films were limited by surface reaction at the temperature range of 150>~$250^{\circ}C$, W films had the deposition rate of 150~530 $\AA$/min and stress of 0.85~$14.35\times10 ^9 \textrm {dynes/cm}^2}$ at various substrate temperatures and $SiH_4/WF_6$ flow ratios. $SiH_4/WF_6$ flow ratio affected the deposition rate and stress of the W films, expecially, excessive flow of SiH4 abruptly changed the structure, chemical bonding, and stress of the W films. Among the deposited W films on TiN, Ti, Mo, NiCr and Al adhesion layer, the one on the Al had the best adhesion property.

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RTA Post-treatment of Thermal T${a_2}{O_5}$ Thin Films (열산화 T${a_2}{O_5}$박막에 미치는 RTA후처리의 영향)

  • Mun, Hwan-Seong;Lee, Jae-Seok;Han, Seong-Uk;Park, Sang-Gyun;Yang, Seung-Ji;Lee, Jae-Cheon;Park, Jong-Wan
    • Korean Journal of Materials Research
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    • v.3 no.3
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    • pp.310-315
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    • 1993
  • The effects of RT A treatment on the breakdown strengths were studied for tantalum pentoxide(${Ta_2}{O_5}$) films prepared by thermal oxidation of dc-sputtered Ta(400$\AA$) on p-type (100) Si wafer. While the relative dielectric constants of the RT A -treated specimens were not remarkably affected, the breakdown strengths of the RTA-treated specimens were greatly changed by RTA temperature and time. After the RTA treatment, the breakdown strengths of the specimens RTA-treated at the temperature below the crystallization temperature were increased to 5.4MV /cm, while those of the specimens RTA -treated at the temperature above it were decreased to 0.5MV /cm. RTA time-independence of the flat-bant voltage shift refleted that the RT A post-annealing effects on the breakdown strengths were not due to the interface reaction between the ${Ta_2}{O_5}$ layer and the Si substrate but, through the RBS analysis, to densification of the ${Ta_2}{O_5}$ films.

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TiN Surface-Alloying of Ti-6Al-4V Alloy by CO2 Laser (CO2 레이저에 의한 Ti-6Al-4V 합금(合金)의 TiN 표면합금화(表面合金化))

  • Park, S.D.;Lee, O.Y.;Song, K.H.
    • Journal of the Korean Society for Heat Treatment
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    • v.8 no.1
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    • pp.32-43
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    • 1995
  • Ti-6Al-4V alloy are widely used in chemical and aircraft industries for their good corrosion resistance and high strength to weight ratio. Surface alloying of Ti alloy by $CO_2$ laser is able to produce few hundred micrometers thick TiN surface-alloyed layer with high hardness on the substrate very simplely by injecting reaction gas($N_2$) into a laser-generated melt pool and adjust the hardness to the specific requirements of the individual application by changing of laser processing parameters. This research has been investigated the effect of such parameters on TiN surface-alloying of Ti-6Al-4V alloy by $CO_2$ laser. The maximum hardness of TiN surface-alloyed zone waw obtained by injecting 100% $N_2$ gas and it was decreased as the amount of $N_2$ gas in Ar and $N_2$ gas mixture was decreased. As scanning speed was increased, the hardness and depth of TiN surface-alloyed zone was decreased at constant laser power. The surface hardness after double scanning laser treatment is higher than that of single scanning. At constant laser power, the surface roughness is increased after the surface alloying if laser scanning speed is decreased.

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Preparation of Oligosaccharides from Alginic Acid by Enzymic Hydrolysis (효소분해에 의한 알긴산 올리고당류의 제조)

  • Joo, Dong-Sik;Lee, Jung-Suck;Park, Jung-Je;Cho, Soon-Yeong;Kim, Hee-Kyung;Lee, Eung-Ho
    • Korean Journal of Food Science and Technology
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    • v.28 no.1
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    • pp.146-151
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    • 1996
  • For the purpose of production of oligosaccharides from alginates, a bacterium was isolated from seaweed, and then an enzyme which degraded alginates was obtained from the bacterium. A specific activity of the enzyme was shown in G-rich block and Na-alginate (Wako Co.) as a result of reaction between the enzyme and six types of alginates (G-rich block, M-rich block and 4 commercial Na-alginate). Degradation products were prepared from the Na-alginate (Wako Co.) by the enzyme. The oligosaccharides were fractioned by Sephadex G-25 and Bio-gel P-2 and identified on a thin layer chromatography (TLC). Degree of polymerization (DP) of the oligosaccharides was shown from 2.6 to 7.5.

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An Experimental Study on the Durability and Load Carrying Capacity of RC Structure Repair System Using FR-ECC (고인성 내화보수모르터(FR-ECC)를 활용한 RC 구조물 보수공법의 내구성능 및 내하력에 관한 실험적 연구)

  • Kim, Jeong Hee;Lim, Seung Chan;Kim, Jae Hwan;Kwon, Yung Jin
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.16 no.2
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    • pp.75-86
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    • 2012
  • This paper presents some research results on the shrinkage characteristics and frost resistance before and after cracking of FR-ECC(Fire Resistance-Engineered Cementitious Composite). Also, a waterstop performance and exfoliating resistance of multi-layer lining specimens using FR-ECC and flexural performance of beam member by repaired FR-ECC are estimated in this paper. Experimental results indicate that the plastic shrinkage crack and length change ratio of FR-ECC have been reduced as compared with that of the existing repair mortar, and that its crack resistance on the dry shrinkage is improved under the confining stress. As well as FR-ECC has been great in the frost resistance and its tensile properties under the cracked state have been not reduced by freezing and thawing reaction. In addition, beam member by repaired FR-ECC have been increased in the flexural properties such as initial crack moment, yeild moment, and its crack width has been controled in a stable by the frexural failure.

Li-free Thin-Film Batteries with Structural Configuration of Pt/LiCoO2/LiPON/Cu and Pt/LiCoO2/LiPON/LiCoO2/Cu (Pt/LiCoO2/LiPON/Cu와 Pt/LiCoO2/LiPON/LiCoO2/Cu 구조를 갖는 Li-free 박막전지)

  • Shin, Min-Seon;Kim, Tae-Yeon;Lee, Sung-Man
    • Journal of Surface Science and Engineering
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    • v.51 no.4
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    • pp.243-248
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    • 2018
  • All solid state thin film batteries with two types of cell structure, Pt / $LiCoO_2$ / LiPON / Cu and Pt / $LiCoO_2$ / LiPON / $LiCoO_2$ / Cu, are prepared and their electrochemical performances are investigated to evaluate the effect of $LiCoO_2$ interlayer at the interface of LiPON / Cu. The crystallinity of the deposited $LiCoO_2$ thin films is confirmed by XRD and Raman analysis. The crystalline $LiCoO_2$ cathode thin film is obtained and $LiCoO_2$ as the interlayer appears to be amorphous. The surface morphology of Cu current collector after cycling of the batteries is observed by AFM. The presence of a 10 nm-thick layer of $LiCoO_2$ at the interface of LiPON / Cu enhances the interfacial adhesion and reduces the interfacial resistance. As a result, Li plating / stripping at the interface of LiPON / Cu during charge/discharge reaction takes place more uniformly on Cu current collector, while without the interlayer of $LiCoO_2$ at the interface of LiPON / Cu, the Li plating / stripping is localized on current collector. The thin film batteries with the interlayer of $LiCoO_2$ at the interface of LiPON / Cu exhibits enhanced initial coulombic efficiency, reversible capacity and cycling stability. The thickness of the anode current collector Cu also appears to be crucial for electrochemical performances of all solid state thin film batteries.

Synthesis and Characteristics of Diphosphine-digold complexes as Light-Emitting Materials (발광 재료용 다이포스핀-다이골드 착물의 합성과 특성 연구)

  • Kim, Jun-Ho;Sohn, Byung-Chung;Ha, Yun-Kyoung
    • Journal of the Korean Applied Science and Technology
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    • v.19 no.2
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    • pp.103-107
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    • 2002
  • Diphosphine dinuclear gold(I) complexes were synthesized from the reaction of bridged diphosphines and gold ions. As a bridged diphosphine, 1,2-bis(diphenylphosphino)metbane (dppm) or 1,1'-Bis(diphenylphosphino) ferrocene (dppf) was introduced. As anionic ligands, CI was first coordinated to Au, resulting in (diphosphine)$(AuCl)_{2}$. Then, the ligand, SPh, was substituted for Cl in the chloride complex to give (diphosphine)$(AuSPh)_{2}$. As a result, three digold complexes, (dppm)$(AuCl)_{2}$. (I), (dppf)$(AuCl)_{2}$. (II), and (dppf)$(AuSPh_{2}$. (III) were prepared in this study. The thermal properties were investigated at first hand to confirm that the gold complexes were in fact formed. The digold complexes were decomposed above $200^{\circ}C$ while the ligand, dppm or dppf, melts under $180^{\circ}C$ The photoluminescence (PL) spectra of the spin-coated thin films showed the maximum peak at 590, 595, and 540nm for the complex, I, II, and III, respectively. These complexes were found to give the orange color phosphorescence. Therefore, these digold complexes can be candidates for orange-red phosphorescent materials in organic electroluminescent devices (OELD). Further studies on application of the complexes as a dopant in an emitting layer are in progress in our laboratory.

Effect of Process Temperature on the Sm2Fe17 Alloying Process During a Reduction-Diffusion Process Using Fe Nanopowder (Fe 나노분말을 사용한 환원-확산공정에서 Sm2Fe17 합금상형성에 미치는 공정온도의 영향)

  • Yun, Joon-Chul;Lee, Geon-Yong;Lee, Jai-Sung
    • Korean Journal of Metals and Materials
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    • v.48 no.11
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    • pp.995-1002
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    • 2010
  • This study investigated the effect of process temperature on the alloying process during synthesis of $Sm_2Fe_{17}$ powder from ball-milled samarium oxide ($Sm_2O_3$) powders and a solid reducing agent of calcium hydrides ($CaH_2$) using iron nanopowder (n-Fe powder) by a reduction-diffusion (R-D) process. The $n-Fe-Sm_2O_3-CaH_2$ mixed powders were subjected to heat treatment at $850{\sim}1100^{\circ}C$ in $Ar-H_2$ for 5 h. It was found that the iron nanopowders in the mixed powders are sintered below $850^{\circ}C$ during the R-D process and the $SmH_2$ is synthesized by a reduced Sm that combines with $H_2$ around $850^{\circ}C$. The results showed that $SmH_2$ is able to separate Sm and $H_2$ respectively depending on an increase in process temperature, and the formed $Sm_2Fe_{17}$ phase on the surface of the sintered Fe nanopowder agglomerated at temperatures of $950{\sim}1100^{\circ}C$ in this study. The formation of the $Sm_2Fe_{17}$ layer is mainly due to the diffusion reaction of Sm atoms into the sintered Fe nanopowder, which agglomerates above $950^{\circ}C$. We concluded that nanoscale $Sm_2Fe_{17}$ powder can be synthesized by controlling the diffusion depth using well-dispersed Fe nanopowders.

Component Analysis of Persicaria hydropiper L. Extracts (여뀌 추출물의 성분 분석)

  • Kim, Jung-Eun;Kim, Eun-Hee;Park, Soo-Nam
    • Journal of the Society of Cosmetic Scientists of Korea
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    • v.36 no.1
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    • pp.89-92
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    • 2010
  • In the previous study, we reported the antioxidative activity, antiaging activity, antibacterial activity and moisturizing effect of cream containing Persicaria hydropiper L. extract. In this study, the components of Persicaria hydropiper L. extract were analyzed by TLC and HPLC. Aglycone fractions obtained from the deglycosylation reaction of ethyl acetate fraction among the Persicaria hydropiper L. extract, showed 2 bands and 2 peaks in TLC and HPLC experiments, respectively. Two components were identified as quercetin and kaempferol. TLC chromatogram of ethyl acetate fraction of Persicaria hydropiper L. extract revealed 6 bands and HPLC chromatogram showed 7 peaks, which were identified as quercetin, hyperin, isoquercitrin, quercitrin, kaempferol. In conclusion, with the antioxidative activity, antiaging activity, antibacterial activity and moisturizing effect reported previously, component analysis of Persicaria hydropiper L. extracts could be applicable to new cosmeceuticals.

Photocatalytic Properties of WO3 Thin Films Prepared by Electrodeposition Method (전기증착법으로 제조된 WO3 박막의 광촉매 특성)

  • Kang, Kwang-Mo;Jeong, Ji-Hye;Lee, Ga-In;Im, Jae-Min;Cheon, Hyun-Jeong;Kim, Deok-Hyeon;Nah, Yoon-Chae
    • Journal of Powder Materials
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    • v.26 no.1
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    • pp.40-44
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    • 2019
  • Tungsten trioxide ($WO_3$) is a promising candidate as a photocatalyst because of its outstanding electrical and optical properties. In this study, we prepare $WO_3$ thin films by electrodeposition and characterize the photocatalytic degradation of methylene blue using these films. Depending on the voltage conditions (static and pulse), compact and porous $WO_3$ films are fabricated on a transparent ITO/glass substrate. The morphology and crystal structure of electrodeposited $WO_3$ thin films are investigated by scanning electron microscopy, atomic force microscopy, and X-ray diffraction. An application of static voltage during electrodeposition yields a compact layer of $WO_3$, whereas a highly porous morphology with nanoflakes is produced by a pulse voltage process. Compared to the compact film, the porous $WO_3$ thin film shows better photocatalytic activities. Furthermore, a much higher reaction rate of degradation of methylene blue can be achieved after post-annealing of $WO_3$ thin films.