• 제목/요약/키워드: Radius Measurement

검색결과 293건 처리시간 0.022초

Settling Time에 따른 웨이퍼 TTV 측정 및 변수 영향 분석 (Wafer TTV Measurement and Variable Effect Analysis According to Settling Time)

  • 김형원;정안목;김태호;이학준
    • 반도체디스플레이기술학회지
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    • 제22권3호
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    • pp.8-13
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    • 2023
  • High bandwidth memory a core technology of the future memory semiconductor industry, is attracting attention. Temporary bonding and debonding process technology, which plays an important role in high bandwidth memory process technology, is also being studied. In this process, total thickness variation is a major factor determining wafer performance. In this study, the reliability of the equipment measuring total thickness variation is identified, and the servo motor settling, and wafer total thickness variation measurement accuracy are analyzed. As for the experimental variables, vacuum, acceleration time, and speed are changed to find the most efficient value by comparing the stabilization time. The smaller the vacuum and the larger the radius, the longer the settling time. If the radius is small, high-speed rotation performance is good, and if the radius is large, low-speed rotation performance is good. In the future, we plan to conduct an experiment to measure the entire of the wafer.

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Approach for Microwave Frequency Measurement Based on a Single Photonic Chip Combined with a Phase Modulator and Microring Resonator

  • Zhang, Jiahong;Zhu, Chuyi;Yang, Xiumei;Li, Yingna;Zhao, Zhengang;Li, Chuan
    • Current Optics and Photonics
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    • 제2권6호
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    • pp.576-581
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    • 2018
  • A new approach for identification of a microwave frequency using an integrated optical waveguide chip, combined with a phase modulator (PM) and two microring resonators (MRRs), is proposed, theoretically deduced, and verified. By wavelength tuning to set the PM under the condition of a double side band (DSB), the measurement range can be started from the dc component, and the measurement range and response slope can be adjusted by designing the radius and transmission coefficient of the MRR. Simulations reveal that the amplitude comparison function (ACF) has a monotonic relationship from dc to 32.5 GHz, with a response slope of 5.15 dB under conditions of DSB modulation, when the radius values, transmission coefficients, and the loss factors are designed respectively as $R_1=400{\mu}m$, $R_2=600{\mu}m$, $t_1=t_2=0.63$, and ${\gamma}_1={\gamma}_2=0.66$. Theoretical calculations and simulation results both indicate that this new approach has the potential to be used for measuring microwave frequencies, with the advantages of compact structure and superior reconfigurability.

고압 수은등의 온도분포 측정에 대한 연구 (A study on the temperature distribution measurement of the high pressure mercury lamp)

  • 손승현;김상용;김창섭;지철근
    • 한국조명전기설비학회:학술대회논문집
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    • 한국조명전기설비학회 1990년도 추계학술발표회논문집
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    • pp.35-40
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    • 1990
  • Temperature distribution of high pressure mercury lamp has been mesured as a function of time using spectroscopic method. Sampling signal which is synchronized by lamp voltage was used to mesure temporal line intensity at each radius. To obtain radial temprature distribution, the mesured intensity was transformed into radial line intensity by Abel's formula. Absolute temperature profile was calculater from relative intensities of spectral lines as a function of line and tube radius. The temperature profile is very similar to the electrical tube current profile.

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대사당량(MET)과 최대긴장력(Peak Strain Score)에 근거하여 측정한 스포츠 활동량과 여대생의 요골 골밀도와의 상관성 (The Relationship between Lifetime Sports Activity Measured with MET and Peak Strain Score and Bone Measurement in College-aged Women)

  • 이은남;최은정
    • 대한간호학회지
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    • 제38권5호
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    • pp.667-675
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    • 2008
  • Purpose: The aim of this study was to compare the relation between differently measured sports activities (metabolic equivalent [MET] and peak strain score) and distal radius bone mineral density in college-aged women. Methods: lifetime sports activity was scored in two different ways: 1) a sports activity score by multiplying the intensity (METs) and duration and 2) a sports activity score by adding up physical strain scores based on the ground reaction force of each sports activities. Bone mineral density was measured using dual energy x-ray densitometry (DTX-200) in the distal radius site. Results: In stepwise multiple regression analysis, body weight and sports activities during the college period were significant positive predictors for distal radius bone mineral density. The explained variance of sports activity measured with a peak strain score (8.8%) for distal radius bone mineral density was higher than one measured with the MET score (3.3%). Conclusion: It can be concluded that sports activity scores based on MET and peak strain scores during college are very important for determining the bone mineral density in the distal radius site in women under 30.

롤투롤 시스템의 와인더 반경 추정을 이용한 와인더 장력의 가변 PID이득 제어 (Variable PID Gain Control of Winder Tension of Roll-to-Roll Printing System using Estimation of Winder-Roll Radius)

  • 박종찬;전성웅;남기상;김충환
    • 한국생산제조학회지
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    • 제22권4호
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    • pp.755-760
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    • 2013
  • The dynamics of the winder roller of a roll-to-roll printing system for printed electronics is a time-varying system because of the variation of the winder roller radius owing to rewinding or unwinding of the web. Therefore, an adaptive control method considering the time-variant characteristics is required for precise tension control. In this study, the variable PID gain method is applied to the actual roll-to-roll system and verified by experiments for unwinder tension control. The required value of the winder roller radius for the application of the variable PID gain is estimated from the measurement of the winder tension and winder motor torque. The simulation results as well as experimental results show that the fixed PID gain control cannot stabilize the tension of the winder roller with varying winder roller radius. On the other hand, the variable PID gain method can control the tension of the winder roller regardless of the winder roller radius.

다이아몬드 촉침의 이온 스파터 가공조건에 관한 연구 (A study on the machining condition of diamond stylus using ion sputter machining)

  • 한응교;노병옥;김병우
    • 대한기계학회논문집
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    • 제14권6호
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    • pp.1495-1508
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    • 1990
  • 본 연구에서는 전류밀도와 가공시간을 변화시켰을 때의 가공량, 가공상태를 검토해 보았으며, 촉침홀더의 가공각도를 달리하거나 재부착문제를 해결하기 위한 마 스크의 사용여부에 따른 촉침의 가공상태를 알아보기 위해 초기선단반경 2$\mu\textrm{m}$, 선단각 90˚의 다이아몬드 촉침을 이온스파터 가공기를 사용하고, 가공조건을 변화시켜서 초 정밀 가공품의 표면거칠기 측정에 적합한 0.5$\mu\textrm{m}$ 이하의 미세한 선단반경을 갖는 촉침 을 가공하기 위한 가공조건에 대한 실험을 하였다.

평활 및 노치재의 미소피로균열측정과 성장특성 (Small Fatigue Crack Measurement and Crack Growth Characteristics for Smooth and Notch Specimens)

  • 이종형
    • 대한기계학회논문집
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    • 제17권9호
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    • pp.2145-2152
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    • 1993
  • The objective of this paper is to examine the detection limit, growth characteristics and notch curvature radius in short crack problem. Measurement techniques such as ultrasonic method and back-face strain compliance method were adopted. The fatigue crack growth rate of the short crack is slower than that of a long crack for a notched specimen. The characteristic of crack growth and crack closure is same as the case of a delay of crack growth caused by constant amplitude load for an ideal crack or single peak overload for a fatigue crack. The short crack is detected effectively by ultrasonic method. A short surface crack occurs in the middle of specimen thickness and is transient to a through crack depth is larger than the notch curvature radius.

촉침에 의한 표면 거칠기 측정 오차 해석 (Analysis of Measuring Error of Surface Roughness by Contact Stylus Profilometer)

  • 조남규;권기환
    • 한국정밀공학회지
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    • 제16권12호
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    • pp.174-181
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    • 1999
  • This paper describes the effect of the stylus tip size on the shape error in surface topography measurement. To analyze the distortional effect of an actual surface geometry origination from the finite stylus size, the surface is modeled as a sinusoid and the stylus tip as a circle. The magnitude of this distortion is defined as the ration of standard deviation, and this is expressed as an analytic function of the stylus tip radius and the geometrical parameter of a sinusoid. In this paper, the spectrum analysis of the profile is applied to investigate the distortional effect due to the mechanical filtering of the stylus in the frequency domain. and, the cumulative power spectrum is proposed to assess the shape error of measured data according to the various stylus tip sizes. From these results, a new method to select proper stylus tip radius is proposed.

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광열변위법을 이용한 재료의 열확산계수 측정에 대한 이론적 연구 (A Theoretical Study for the Thermal Diffusivity Measurement of Solid Material using Photothermal Displacement Method)

  • 전필수;이은호;이광재;유재석;김기현
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2000년도 춘계학술대회논문집B
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    • pp.132-137
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    • 2000
  • A complete theoretical treatment of the photothermal displacement technique has been performed for thermal diffusivity measurement in solid materials. The influence of parameters - radius and modulation frequency of pump beam and thickness of material - on the phase lag was studied. The phase decreases up to a certain position, then starts to increase and does have an asymptotic value. The position, where phase has the minimum value, is a function of thermal diffusion length thickness of sample, and radius of pump beam. A new method based on minimum phase lag is described to determine the thermal diffusivity of solid material.

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미소균열측정과 성장특성에 관한 연구 (A Study of Small Fatigue Crack Measurement and Crack Growth Characteristics)

  • 이종형;소윤섭;김윤곤;임춘규;이상영
    • 한국산업융합학회 논문집
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    • 제10권1호
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    • pp.39-46
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    • 2007
  • The objective of this paper is to examine the detection limit, growth characteristics and notch curvature radius in short crack problem. Measurement techniques such as ultrasonic method and back-face strain compliance method were adapted. The fatigue crack growth rate of the short crack is slower than that of a long crack for a notched specimen. The short crack is detected effectively by ultrasonic method. A short surface crack occurs in the middle of specimen thickness and is transient to a through crack when maximum crack depth is larger than the notch curvature radius.

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