• 제목/요약/키워드: RPM system

검색결과 1,048건 처리시간 0.255초

PIV를 이용한 Chemical Mechanical Polishing 공정 중의 연마용액 유동흐름 측정 (Visualization of the Slurry Flow-Field during Chemical Mechanical Polishing by PIV)

  • 신상희;김문기;윤영빈;고영호
    • 한국가시화정보학회:학술대회논문집
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    • 한국가시화정보학회 2004년도 추계학술대회 논문집
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    • pp.48-51
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    • 2004
  • Chemical Mechanical Polishing(CMP) is popularly used in production of semiconductor because of large area polishing ability probability of improvement for more integrated circuit. However, present CMP processing causes some non-uniformity errors which can be critical for highly integrated circuit. Previous studies predict that flow-field of slurry during CMP can create non-uniformity, but no quantitative measurement has conducted. In this study, using PIV, slurry velocity flow-field during CMP is measured by changing the ratio of RPM of pad and carrier with tuned PIV system adequate for small room in CMP machine and Cabot's non-groove pad Epad-A100. The result show that velocity of slurry is majorly determined by pad-rpm and the ratio of between carrier and pad rpm make some changes in streamlines.

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연 풍력시스템의 회전속도 측정 및 발전기 시스템에 적용 가능한 영구자석 발전기 설계에 관한 연구 (Study on Rotating Speed of Kite Wind Turbine System and Design of PM Generator)

  • 신유정;김수현;김진호
    • 한국기계가공학회지
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    • 제15권4호
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    • pp.141-147
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    • 2016
  • A direct PM generator has the effect of reducing the mechanical noise and ease of maintenance by eliminating a number of power transmission components. In addition, wind turbines operating at low speed with the advantages of high output, high efficiency, and small size. The generator was designed as a small direct-drive PM generator that can be applied to a kite even at low wind speeds. The RPM (Revolutions Per Minute) of the reel was measured in two ways using a cadence/speedometer sensor and a tachometer while the actual kite. The RPM derived from the experiment was applied to the simulation on the designed generator. The no-load characteristic analysis for the magnetic fields produced for the permanent magnet generator by a permanent magnet and stator winding currents is achieved using a 2D coordinate system. A commercial electromagnetic analysis program, ANSYS Maxwell, was used to model the electromagnetic dynamics.

Graphic-programming 을 이용한 주축용 유도전동기의 토크감시시스템 개발 (Development of Torque Monitoring System of Induction Spindle Motor using Graphic-programming)

  • 이인환;권원태
    • 한국정밀공학회지
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    • 제18권10호
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    • pp.184-193
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    • 2001
  • In vector control technique, stator currents of an induction motor are transformed to equivalent d-q currents in a reference frame consist of d and q axis, each of which is coincide with flux and torque direction respectively. Since the current in q-axis is related to the torque in a synchronously rotating frame, torque is estimated as a function of q-axis current and flux. In this paper, a method to estimate torque of an induction motor based on the measurement of 3-phase currents and rotating velocity of a rotor is presented. Graphic-programming is used to measure signals, to estimate the torque and to show the result in the form of user friendly graph in window environment. To stabilize the fluctuation of estimated torque caused from the small measurement error of the rotor velocity, the stator current is reconstructed in a program based on measured signals. The experimental results executed under the velocity of 500 rpm, 1500 rpm without load and 1500 rpm with load show that the proposed method estimates the torque very well.

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사이클링 초최대운동(Supra maximal training)시 RPM과 족관절의 운동학적 분석 (Kinematic characteristics of the ankle joint and RPM during the supra maximal training in cycling)

  • 이용우
    • 한국운동역학회지
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    • 제15권4호
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    • pp.75-83
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    • 2005
  • The purpose of this study was to determine the kinematic characteristics of the ankle joint and RPM(repetition per minutes) during the supra maximal training in cycling. For this study, 8 national representative cyclists, distance cyclists in track and road, were selected. During the super-maximum pedalling, kinematic data were collected using a six-camera(240Hz) Qualisys system. the room coordinate system was right-handed and fixed in the back of a roller for cycle, with right-handed orthogonal segment coordinate systems defined for the leg and foot. Lateral kinematic data were recorded at least for 3 minutes while the participants pedal on a roller. Two-dimensional Cartesian coordinates for each marker were determined at the time of recording using a nonlinear transformation technique. Coordinate data were low-pass filtered using a fourth-order Butterworth recursive filter with cutoff frequency of 15Hz. Variables analyzed in this study were compared using a one factor(time) ANOVA with repeated measures. The results of investigation suggest that the number of rotating pedal was decreased with time phase during the super-maximum pedaling. Maximum angle of the ankle joint showed little in change with time phase compared with minimum angle of that.

가변 용적형 사판식 피스톤 펌프의 회전 속도 조절에 의한 정압 제어 소비 동력 절감 (Reduction of Power Consumption for Constant Pressure Control of Variable Swash Plate-type Piston Pump by Varying the Pump Speed)

  • 김종혁;홍예선
    • 드라이브 ㆍ 컨트롤
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    • 제11권4호
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    • pp.53-60
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    • 2014
  • This paper proposes a control scheme to reduce the power consumption of a variable displacement swash-plate type piston pump supplying oil to a valve-controlled hydraulic cylinder at constant pressure. Whenever flow rate demand was absent, the swash plate angle and the pump speed were changed to the minimum values required to compensate for the internal leakage flow. In response to command signals, the pump speed was changed in proportion to the absolute mean value of the speed component for position commands. At the same time, a pressure regulator was activated to maintain constant system pressure by precisely adjusting the pump speed with the swash plate angle fixed at the maximum. The conventional system consisting of a pressure-compensated variable displacement type pump is driven at a constant speed of 1,800rpm. By comparison, computer simulation and experimental results showed that idling power at stand-by status could be reduced by up to 70% by reducing the pump speed from 1,800rpm to 300rpm and the swash plate angle to the minimum.

2륜 자동차 공기청정기의 STS적용에 관한 연구 (A study on the Application of STS wire Mesh air Cleaner for the 2-Wheel Automotive)

  • 이중섭;이용훈;서정세;정한식;정효민
    • 동력기계공학회지
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    • 제6권4호
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    • pp.30-35
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    • 2002
  • This study represents the effects of the material of the air cleaner on the performance in a 4-stroke spark-ignition engine for motorcycles. This study is mainly focused on the possibility of the adopting the STS wire mesh air cleaner of a S.I engine. For investigating the possibility of that, the engine power, the fuel consumption and the exhaust gas analysis were carried out for the synthetic fiber air cleaner and the different size of 200 mesh, 250 mesh, 300 mesh of STS wire mash air cleaner. As the results of this study, the performance of STS wire air cleaner was similar to the fiber air cleaner at 9000 rpm but 300 mesh of STS air cleaner had a high engine power and torque at 9500 rpm. In the case of the synthetic fiber air cleaner the concentration of CO was low at 6500 rpm and in the case of the 300 mesh in STS wire mesh air cleaner the concentration of HC was lowest at all experimental regions.

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초전도 플라이휠 에너지 저장시스템 개발 (Development of a Flywheel Energy Storage System using Superconducting Magnetic Bearing)

  • 정환명;연제욱;최재호;고창섭
    • 전력전자학회논문지
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    • 제4권5호
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    • pp.433-441
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    • 1999
  • 본 논문에서는 기존 축전지를 대체하기 위한 초전도 플라이휠 에너지 저장시스템에 관해 연구 하였다. 전동/발전기, 베어링, 휠재료, 전력변환기등의 설계요소에 관해 기술하였으며 초고속의 회생 및 저장 모드에서 모터입력전류를 정현파로 제어하기 위한 전력변환기를 설계 제작하였다. 높은 보자력을 갖는 희토류 영구자석을 사용하여 계자를 구성하는 원통형 영구자석 동기전동기를 사용함으로써 고효율을 실현하고자 하였다. 기계적 베어링과 초전도 자기부상 베어링을 사용하는 시스템에 적용하여 운전하였으며 후자의 경우 약 10.000[rpm]에서 매우 안정된 회전 특성을 보였으며 전자의 경우 설계 특성을 만족하면서 7.000[rpm]에서 100[V]의 일정 직류전압으로 약 25초 동안 400[W]의 전력을 회생하였다.

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자동차 에어컨용 냉매인 HFC-134a와 OS-12a의 성능 특성에 관한 연구 (A Study on Characteristics of HFC-l34a and OS-l2a Refrigerant in Automobile Air-Conditioning System)

  • 이종인;하옥남
    • 한국자동차공학회논문집
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    • 제10권3호
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    • pp.136-142
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    • 2002
  • HFC-134a is currently used as the refrigerant in automobile air-conditioner, replacing the ozone depleting refrigerant CFC-12. Although HFC-l34a has no ozone depletion potential, it has a relatively high global warming potential, approximately 1300 tins that of CO$_2$ over a 100 year time horizon. Therefore, HFC- l34a does not seem to be a perfect alternative refrigerant due to high GWP. For this reason, non-azeotrope refrigerant mixture have been proposed as a long-term and drop-in alternative to HFC-l34a in the automobile air-conditioning system which has variable operating conditions with changes in RPM and pressure ratio. In this study,OS-l2a of which thermodynamic properties are similar to those of HFC-l34a is selected among the mixed refrigerant. HFC-l34a and OS-l2a are examined experimently by the performance test in the same automobile air-conditioning system.

EHA용 가변용적형 사판식 유압 피스톤 펌프의 하이브리드 제어 (Hybrid control of the swash plate-type variable displacement hydraulic piston pump for an EHA)

  • 권용철;홍예선
    • 한국항공우주학회지
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    • 제41권4호
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    • pp.291-298
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    • 2013
  • 본 논문에서는 압력보상형 사판식 유압 피스톤 펌프와 밸브 제어형 실린더를 결합한 EHA에 대하여 유압 실린더의 소비 유량이 작으면 펌프 회전 속도를 낮추는 새로운 개념의 하이브리드형 제어 시스템을 제안하였다. 펌프 내 압력조절기의 사판각 제어와 간섭을 피하기 위해 위치 명령 신호의 속도 성분 평균치를 이용하여 펌프의 회전속도를 조절하였고, 시스템 압력이 기준치 이하로 낮아지는 것을 방지하기 위해 압력 스위치 기능을 추가하였다. 시뮬레이션과 실험 결과에 의하면, EHA의 동적인 응답 특성에 영향을 주지 않는 조건에서 하이브리드 제어를 통해 공전 모드에서의 펌프 회전속도를 1,800rpm에서 600rpm로 낮춤으로써 하이브리드 제어를 안 할 경우에 비해 펌프 구동 동력을 약 44%까지 절감시킬 수 있음을 확인하였다.

원심 임펠러가 장착된 발효조에서 G. hansenii에 의한 미생물셀룰로오스 생산 (Production of Bacterial Cellulose by Gluconacetobacter hansenii Using a New Bioreactor Equipped with Centrifugal Impellers)

  • 칸살만;쉐자드오머;칸타우스;하정환;박중곤
    • Korean Chemical Engineering Research
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    • 제47권4호
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    • pp.506-511
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    • 2009
  • 미생물셀룰로오스의 생산성을 높이기 위하여 원심(centrifugal) 임펠러와 경사원심(inclined centrifugal) 임펠러가 사용되었다. 발효조 내의 유체흐름 형태와 부피산소전달 계수가 고찰되었으며 원심 임펠러 및 경사원심 임펠러가 장착된 발효조 내에서 G. hansenii PJK 균주에 의하여 미생물 셀룰로오스가 생산되었다. 유체는 발효조 하부에서 원심 임펠러의 실린더 내부를 통과하여 발효조 벽면을 향해 순환되었다. 임펠러의 회전속도 100 rpm에서 부피산소전달계수는 터바인 임펠러 계에 비하여 경사원심 임펠러의 경우는 23%, 원심 임펠러의 경우는 15%에 불과하였다. 하지만 미생물셀룰로오스 생산 불능 돌연변이주로의 전환이 방지되어 20 rpm의 경사원심 임펠러의 회전속도에서 미생물셀룰로오스의 생산량이 터바인임펠러의 최적회전속도 300 rpm에서의 미생물셀룰로오스 생산량과 같았다.