• Journal of the Korean Vacuum Society
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• v.17 no.1
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• pp.1-8
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• 2008

We analyzed the characteristics of water leakage from cooling components of the storage ring in the Pohang Light Source. The water leaks led localized pressure bumps and abnormal pressure changes. The leakage also changed the residual gas compositions depending not only on the position between leakage place to gas analyzer but also on on/off switching of ion pump and electron beam. We found that the residual gas analysis of $CH_4$, CO, NO was useful in determining water leaks.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.155.2-155.2
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• 2014

Plasma Enhanced Atomic Layer Deposition(PEALD)와 Atomic Layer Deposition(ALD) Techniques는 '정확한 두께 조절' 및 '우수한 균일도'를 가지는 신뢰할 수 있는 진공 기술이다. 본 연구에서는 다공성 구조를 가지는 기판을 대상으로 PEALD와 ALD Techniques을 이용한 $Al_2O_3$ 형성 공정의 증착 특성을 비교하였다. 각 공정은 공통적으로 Tris-Methyl-Aluminium(TMA)을 첫번째 전구체로 사용하였고 purge gas로는 Nitrogen를 사용하였다. 그리고 두번째 전구체로 PEALD 공정에서는 Oxygen Plasma를 사용하였고 ALD 공정에서는 Water를 사용하였다. 복잡한 다공성 구조를 가지는 기판은 $TiO_2$ Nano-Particle paste과 colloidal Silver paste를 소결시켜 제작하여 사용하였다. 각 공정의 차이점을 비교하기 위해서 배기단에 Capacitor Diaphram Gauge(CDG)와 Residual Gas Analyzer(RGA)를 통해서 압력과 잔류 가스를 모니터하였다. 그리고 각 공정을 통해서 porous한 Nano-Particles Network에 형성된 $Al_2O_3$막의 특성을 비교하기 위해서 FE-SEM과 EDX를 통해서 관찰하였다. 또한 좀 더 자세한 비교 분석을 위해서 $Al_2O_3$ 막이 형성된 porous한 Nano-Particles Networks의 각 각의 particles들을 분산시켜 TEM과 AFM를 통해서 관찰하였다. 나아가 전기적 물성의 차이점을 비교하기 위해서 IV 및 CV를 측정하였다. 위의 일련의 비교 실험을 통해서 'PEALD과 ALD을 이용한 다공성 기판의 증착 특성'에 대하여 고찰하였다.

• Proceedings of the KIEE Conference
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• 2001.07a
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• pp.134-136
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• 2001

This paper describes the application of Fuzzy Power System Stabilizer(FPSS) for improving dynamic stability of power system. The Real-coding Genetic Algorithm(RGA) was applied to optimize gains of the inputs and outputs of the FPSS. The effectiveness of the proposed FPSS was demonstrated by simulation studies for single-machine infinite system. To show the superiority of the proposed FPSS, its performances were compared with those of Conventional Power System Stabilizer(CPSS) The proposed FPSS showed better control performances than the CPSS in three-phase ground fault under a normal load which was system condition in tuning FPSS. To show the robustness of the proposed FPSS, it was applied to damp the low frequency oscillations caused by disturbances such as three-phase ground fault under heavy and light load conditions. The proposed FPSS showed better performance than CPSS in terms of the settling time and damping effect for power system operation condition.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.52 no.2
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• pp.74-80
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• 2003

In this paper, a robust two-degree-of-freedom(TDF) the speed control system using $H_{\infty}$ optimization method and real genetic algorithm is proposed for the robust stability and the robust performance in dc servo motor system. This control system composed of feedback and feedforward controller. The feedback(FB) controller with $H_{\infty}$ optimization method is designed for real genetic algorithm that is model matching problem using mixed sensitivity function. The feedforward(FF) controller with $H_{\infty}$optimization method is minimized the error between transfer function of the optimal model and the overall transfer function. The proposed robust two-degree-of-freedom speed control system is simulated to the dc servo motor. By the simulation, feedback controller can obtain the robust stability property and feedforward controller can obtain the robust performance property under modelling error. The performance of the dc servo motor is analyzed by the experiment setting. The validity of the proposed method is verified through being compared with pid(proportional integrated differential)control system design method for the dc servo motor.

• Applied Science and Convergence Technology
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• v.26 no.6
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• pp.179-183
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• 2017

The direct growth method is simplified manufacturing process used to avoid damages and contaminants from the graphene transfer process. In this paper, graphene nano-walls (GNWs) were direct synthesized using electron cyclotron resonance (ECR) plasma by varying the $CH_4/H_2$ gas flow rate on the copper foil at low temperature (without substrate heater). Investigations were carried out of the changes in the morphology and characteristic of GNWs due to the relative intensity of hydrocarbon radical and molecule in the ECR plasma. The results of these investigations were then discussed.

• Journal of the Korean Society of Systems Engineering
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• v.16 no.2
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• pp.87-96
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• 2020

In this paper we proposed the test design method of reliability growth management. First, we presented the process for establishing the reliability growth management test design considering the number of failures and the termination test time. Reliability growth analysis of continuous system was performed in accordance with the test design process presented. In case the reliability test result is not met with the reliability target value after more than three failures occurred, the required test times were analyzed that 1,725 hrs for one corrective action, 1,950 hrs for two corrective actions. If the number of failures is less than three, design a reliability demonstration test according to confidence level 80% and 90% was performed using RGA 11 Software. As a result, it is possible to establish the reliability growth management test design with sufficient use of available resources. The results of this study can be used when establishing a test design for assessment of reliability growth management of all continuous systems.

• Journal of the Korean Institute of Telematics and Electronics
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• v.23 no.2
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• pp.243-248
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• 1986

The impurities in As and Ga sources and the contamination of the GaAs substrate prior to growing of MBE GaAs epitaxial layer have been investigated using RHEED, AES and RGA methods. The as source was contaminated by H2O, CO, CO2 and AsO, and the Ga source was contaminated by H2, H2O, CO and CO2. These contaminants could easily be removed by prebaking the source. On the other hand, GaAs substrate was contaminated principally carbon and oxygen. The oxygen could easily be removed by heating the substrate above 480\ulcorner, and the carbon could also be reduced by sputtering the substrate with 1ke V Ar+. The chemically etched substrate surface prior to growing the layer was rough, but it was made to be smooth and clean by heating it above 530 \ulcorner.

• Journal of the Korean Chemical Society
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• v.44 no.4
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• pp.343-349
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• 2000

Volatile Organic Compounds(VOCs) emitted form electronicSince toluene, xylene, cyclohexanone, and benzofuran will bring on the deleterious smell and the health risk, eventhough very small amount of these areexposed to human body, quantitative analysis was achieved by GC-MS system. As a result of these analyses, except PCB(CEM-1) of which is one of the electronic parts, the left of electronic parts represented, imme-diately form 30 minutes to 1 hour after heating, the trends that toluene, xylene, cyclohexanone and phenol were consecuticely emitted very high. and toluene, xylene, phenol, cyclohexanone, and benzofuran from most of the electronic parts were emitted very frequently within the measuring period. Finally, Trans of electronic parts showed the highest concentration of emission, and xylene(550~2482 ${\mu}g/m^2$) was the most noticeably emitting compound of VOCs.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.613-617
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• 2001

The test items like as endurance, air leakage and oil endurance test is requested for reliability evaluation about O-ring which is a kind of core machinery accessories of semi-conduct manufacturing equipment. For verification of these, we design and manufactured a test system for endurance, air leakage and oil endurance of O-ring for semi-conduct manufacturing equipment, and also performed the test for two kinds of O-ring, as it were Viton and Kalretz. The characteristics of this test equipment consist in realization of the test conditions of semi-conduct manufacturing equipment and satisfying the test method. The test conditions are cut gas, vacuum grade, temperature and revolution numbers in the endurance test system, vacuum grade and temperature in the air leakage test system, temperature and time in the oil endurance test system. The separating test results for wearing which is an oil endurance test item, the wearing index of domestic produced Viton O-ring is higher than foreign product by 2%, wearing rate of Kalretz O-ring better than Viton O-ring by 17%, and particles existed in various place. The test result of air leakage which is measured through the RGA sensor used Helium, the vacuum grade was $10^-3$Torr. And the test result of oil endurance, the volume change rate was 7~15%. Hereafter, we intend to analysis the reliability test evaluation and to utilize for domestic manufacturing companies by establishing data base and developing reliability softwares.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.51-51
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• 2008

Carbon nanotubes (CNTs) have long been reported as an ideal material due to their excellent electrical conductivity and chemical and mechanical stability as well as their high aspect ratios for field emission devices. CNT emitters made by screen printing the organic binder-based CNT paste may act as a source to release gases inside a vacuum panel. These residual gases may cause a catastrophic damage by electrical arcing or ion bombardment to the vacuum microelectronic devices and may change their physical or electrical properties by adsorbing on the CNT emitter surface. In this study, we analyzed the composition of residual gases inside the vacuum-sealed panel by residual gas analyzer (RGA), investigating the effects of individual gases of different kinds at several pressures on the field emission characteristics of CNT emitters. The residual gases included $H_2$, CO, $CO_2$, $N_2$, $CH_4$, $H_2O$, $C_2H_6$, and Ar. Effect of residual gases on the field emission was studied by observing the variation of the pulse voltages with the duty ratio of3.3% to keep the constant emission current of $28{\mu}A$. Each gas species was introduced to a vacuum chamber up to three different pressures ($5\times10^{-7}$, $5\times10^{-6}$, and $5\times10^{-5}$ torr) each for 1 h while electron emission was continued. The three different pressure regions were separated by keeping a high vacuum of $\sim10^{-8}$ torr for a 1 h. The emission was terminated 6 h after the third gas exposure was completed. Field emission characteristics under residual gases will be discussed in terms of their adsorption and desorption on the surface of CNTs and the resultant change of work function.