• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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• pp.872-875
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• 2003

Carbon nitride($CN_x$) thin films were deposited on quartz substrates using reactive RF magnetron sputtering system at uarious deposition conditions and investigated dielectric characteristics. Samples for capacitance measurements were of the MIM(Metal-Insulator-Metal) type devices. Aluminum film electrodes were prepared by a vacuum thermal evaporation method before and after the deposition of carbon nitride films. Capacitances were measured by a FLUKE PM6306 RCL Meter at room temperature. Current-voltage(I-V) characteristics and resistivity were measured by a CATS CA-EDA semiconductor test and analyzer. The carbon nitride films showed ${\alpha}-C_3N_4$ and ${\beta}-C_3N_4$ etc. peaks through Raman and FTIR. Observed surface of film and side structure using SEM(Scanning Electron Microscope), and measured thickness of film by ${\alpha}-step$. We can find that the dielectric constant was the lowest value in 50% nitrogen ratio and the resistivity was the highest value in 70% nitrogen ratio.

• 한국전기전자재료학회논문지
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• 제20권10호
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• pp.859-863
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• 2007

Aluminum oxide films were deposited on n-type 6H-SiC(0001) substrates by RF magnetron sputtering technique for MIS devices applications. Well-behaved C-V characteristics were obtained measured in MIS capacitors structures. The calculated interface trap density measured at $300^{\circ}C$ was about $4.6{\times}10^{10}/cm^2\;eV$ in the upper half of the bandgap. The gate leakage current densities of the MIS structures were about $10^{-8}A/cm^2$ and about $10^{-6}A/cm^2$ measured at room temperature and at $300^{\circ}C$ for a ${\pm}1\;MV/cm$, respectively These results indicate that the interface property of this structure is enough quality to MIS devices applications.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2002년도 ITC-CSCC -2
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• pp.1133-1136
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• 2002

We designed and fabricated a low local oscillation (LO) power V-band CPW mixer module using a CPW-to-waveguide transition technology for the application of millimeter-wave wireless communication systems. The mixer was designed using a unique gate mixing architecture to achieve simultaneously a low LO input power, a high conversion gain, and good LO-RF isolation characteristics. The fabricated mixer exhibited a high conversion gain of 2 dB at a low LO power of 0 dBm. For data transmission of the 60 ㎓ wireless LNA systems, we fabricated a CPW-to-waveguide converter module of WR-15 type and mounted the fabricated mixer in the converter module. The fabricated V-band mixer exhibited a higher conversion gain and a lower LO input power than other reported V-band mixers.

• 전자공학회논문지A
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• 제33A권2호
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• pp.114-121
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• 1996

Thin film Ba$^{0.7}Sr^{0.3}TiO^{3}$ (BST) capacitors were fabricated on SiO$_{2}$/Si substrates by RF magnetron sputtering method and characterized at microwave frequencies ranging from 40 MHz to 1GHz to examine the dielectric dispersion of the capacitors. The BST thin films were electrode material of BST thin films capacitor which is known as one of the best electrode materials for BST films. 50$\AA$-thick titanium (Ti) layers were introduced to increase adhesion between bottom Pt and SiO$_{2}$. The leakage current density of the capacitors was about 1.7${\times}10^{7}A/cm^{2}$ at 1.5V and the dielectric constant was about 140 at 1MHz. Microwave measurement patterns having a coplanar waveguide type were fabricated and their S parameters were measured using network analyzer. After de-embedding parasitic components in microwave measurement patterns nearly frequency-invariant dielectric constant of about 120 was extracted in the measurement range of 40 MHz to 1 GHz.

• 한국정밀공학회지
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• 제22권8호
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• pp.192-198
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• 2005

In this paper, we propose a new training system for the improvement of equilibrium sense using unstable platform. The equilibrium sense, which provides orientation with respect to gravity, is important to integrate the vision, somatosensory and vestibular function to maintain the equilibrium sense of the human body. In order to improve the equilibrium sense, we developed the software program such as a block game, pingpong game using Visual C++. These training system for the equilibrium sense consists of unstable platform, computer interface and software program. The unstable platform was a simple structure of elliptical-type which included tilt sensor, wireless RF module and the device of power supply. To evaluate the effect of balance training, we measured and evaluated the parameters as the moving time to the target, duration to maintain cursor in the target of screen and the error between sine curve and acquired data. As a results, the moving time to the target and duration to maintain cursor in the target was improved through the repeating training of equilibrium sense. It was concluded that this system was reliable in the evaluation of equilibrium sense. This system might be applied to clinical use as an effective balance training system.

• 한국자기학회:학술대회 개요집
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• 한국자기학회 2003년도 하계학술연구발표회 및 한.일 공동심포지엄
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• pp.21-21
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• 2003

Microstructure and magnetic transport phenomina in rf sputtered AlN/Co type ten-layered discontinuous films of nanoscaled [AlN (3 nm)/Co (t nm)]...$\sub$10/ with t$\sub$Co/=1.0∼2.0 nm have been investigated. The microstructure and tunneling magnetic resistance of the samples are strongly dependent on the thickness of Co layer. Negative tunneling magneto-resistance due to the spin-dependent transport has been observed along the current-in-plane configuration in the samples having the Co layers below 1.6 nm thick. When the thickness of Co layer was less than 1,2 nm, randomly oriented granular Co particles were completely isolated and embedded in amorphous AlN matrix, and the films showed the superparamagnetic behavior with a high MR value of Δ$\rho$/$\rho$$\sub$0/=1.8 %. As t$\sub$Co/ increases, a transition from the regime of co-existence of superparamagnetic and ferromagnetic behaviors to ferromagnetic behavior was observed. Tunneling barrier called "decay length for tunneling" for the films having the thickness of Co layer from 1.4 to 1.6 nm was measured to be ranged from 0.004 to 0.021 ${\AA}$$\^$-1/.

• Journal of Ginseng Research
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• 제20권1호
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• pp.1-6
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• 1996

Effects of Panax ginseng on allergic reactions were studied uslng various in vivo and in vitro experimental models such as 48-hr passive cutaneous anaphylaxis, mediators-induced skin reactions, histamine release from rat peritoneal mast cells, hexosaminidase release from RBL-2H3 cells, and lipoxygenase assay . In all of anti-allergic experiments we conducted, ginseng components (50% ethanol extract or ginseng total saponin or ginsenosides) extracted from Korean red ginseng, did not show significant anti-allergic actions. In 48-hr passive cutaneous anaphylaxis and mediators-induced skin reactions, 50% ethanol extract did not suppress hypersensitivity reactions. Total saponin, 50% ethanol extract, and 8 major ginsenosides did not show inhibitory effects on lipoxygeanse activity. Ginseng total saponin did not inhibit histamine release from rat peritoneal mast cells. All of the ginseng components mentioned above were also tested on RBL-2H3 cells, but none of them inhibited hexosaminidase release from this cell line. These results suggest that Panax ginseng does not have effects on allergic reactions at the level of 50% ethanol extract or total saponin used. All of 8 major saponin components tested ($Rb_1$, $Rb_2$, Rc, Rd, Re, Rf, $Rg_1$, $Rg_2$), did not inhibit lipoxygenase activity and degranulation events.

• KSTLE International Journal
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• 제3권1호
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• pp.38-42
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• 2002

Diamond-like Carbon(DLC) films were deposited on Si wafers by an RF-plasma-assisted CVD using CH$_4$gas. Tribological tests were conducted with the use of a rotating type ball on a disk friction tester with dry air. This study made use of four kinds of mating balls that were made with stainless steel but subjected to different annealing conditions in order to achieve different levels of hardness. In all load conditions, testing results demonstrated that the harder the mating materials, the lower the friction coefficient was. The friction coefficients were fecund to be lower with austenite mating balls than with fully annealed martensite balls. Conversely, the high friction coefficient found in soft martensite balls appeared to be caused by the larger contact area between the DLC film and the ball. The wear tracks on DLC films and mating balls could prove that effect. Measuring the wear track of both DLC films and mating balls revealed a similar tendency compared to the results of friction coefficients. The wear rate of austenite balls was also less than that of fully annealed martensite balls. Friction eoefficients decrease when applied leads exceed critical amount. The wear track on mating balls showed that a certain amount of material transfer occurs from the DLC film to the mating ball during a high friction process. Raman Spectra analysis Showed that the transferred materials were a kind of graphite and that the contact surface of the DLC film seemed to undergo a phase transition from carbon to graphite during the high friction process.

• 대한원격탐사학회:학술대회논문집
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• 대한원격탐사학회 2008년도 International Symposium on Remote Sensing
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• pp.324-327
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• 2008

Microwave remote sensing has great potential, especially in monsoon Asia, since optical observations are often hampered by cloudy conditions. The radar backscattering characteristics of rice crop were investigated with a ground-based automatic scatterometer system. The system was installed inside a shelter in an experimental paddy field at the National Institute of Agricultural Science and Technology (NIAST) before transplanting. The rice cultivar was a kind of Japonica type, called Chuchung. The scatterometer system consists of X-band antennas, HP8720D vector network analyzer, RF cables, and a personal computer that controls frequency, polarization and data storage. This system automatically measures fully-polarimatric backscattering coefficients of rice crop every 10 minutes, accompanied by a digital camera that takes pictures in a fixed position with the same interval. The backscattering coefficients were calculated by applying a radar equation. Plant variables, such as leaf area index (LAI), biomass, plant height and weather conditions were measured periodically throughout the rice growth season. We have performed polarimetric decomposition of paddy data such as single, double and volume scattering to extract the scattering information effectively. We investigated the relationships between backscattering coefficients and the plant variables.

• 한국진공학회:학술대회논문집
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• 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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• pp.61-61
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• 1999

저항이 5$\Omega$-cm인 n-type Si(100) 웨이퍼를 실리콘 식각시 마스크로 사용하기 위하여 습식 열산화법을 이용하여 100$0^{\circ}C$에서 SiO2을 2400$\AA$ 성장시킨 후, OPCVD 공정을 통해 785$^{\circ}C$서 SiH2Cl2 가스 30sccm과 NH3가스 100sccm을 이용하여 Si3N4를 3000$\AA$ 증착시켰다. 이 웨이퍼를 포토-리쏘그라피 공정을 거쳐 지름 2$\mu\textrm{m}$의 포토레지스트 패턴을 제작한 후 600W의 RF power하에서 CF4 가스 10sccm, CHF3 가스 15sccm, O2가스 8sccm 및 Ar가스 10sccm을 이용하여 MERIE 방법으로 Si3N4를 식각한 다음, 7:1 BHF 용액내에서 30초간의 습식식각을 통해 40wt.%의 KOH 용액내에 8$0^{\circ}C$에서 30초간의 이방성 식각을 통해 피라미드 모양의 Si FEA(field emitter array)를 제작하였다. 본 실험은 다음과 같이 완성된 Si FEA를 샤프닝 산화 후 산화막 식각을 통해 마스크를 제거한 다음, tip의 열화학적 내구성을 증가시키고 장시간 구동시 안정성과 전계방출 전류밀도를 높이기 위해 tip의 표면에 Ti를 sputter 방법으로 약 300$\AA$ 증착시킨 후, RTA 장비를 이용하여 2단계 열처리 (first annealing:$600^{\circ}C$/30sec, second annealing : 85$0^{\circ}C$/15sec)를 통해 Si FEA의 경우보다 낮은 turn-on 전압과 높은 전계방출 특성을 나타낼 것으로 기대된다.