• Journal of the Korea Academia-Industrial cooperation Society
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• v.20 no.6
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• pp.80-85
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• 2019

Vanadium dioxide is a well-known metal-insulator phase transition material. Lots of researches of vanadium redox flow batteries have been researched as large scale energy storage system. In this study, vanadium oxide($VO_x$) thin films were applied to cathode for lithium ion battery. The $VO_x$ thin films were deposited on Si substrate($SiO_2$ layer of 300 nm thickness was formed on Si wafer via thermal oxidation process), quartz substrate by RF magnetron sputter system for 60 minutes at $500^{\circ}C$ with different RF powers. The surface morphology of as-deposited $VO_x$ thin films was characterized by field-emission scanning electron microscopy. The crystallographic property was confirmed by Raman spectroscopy. The optical properties were characterized by UV-visible spectrophotometer. The coin cell lithium-ion battery of CR2032 was fabricated with cathode material of $VO_x$ thin films on Cu foil. Electrochemical property of the coin cell was investigated by electrochemical analyzer. As the results, as increased of RF power, grain size of as-deposited $VO_x$ thin films was increased. As-deposited thin films exhibit $VO_2$ phase with RF power of 200 W above. The transmittance of as-deposited $VO_x$ films exhibits different values for different crystalline phase. The cyclic performance of $VO_x$ films exhibits higher values for large surface area and mixed crystalline phase.

• Journal of the Semiconductor & Display Technology
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• v.2 no.3
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• pp.7-11
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• 2003

In this research, the etching characteristics of via contact and deep contact hole have been studied using multi-pole inductively coupled plasma(MICP) etching system. We investigated Plasma density of MICP source using the Langmuir probe and etching characteristics with RF frequency, wall temperature, chamber gap, and gas chemistry containing Carbon and Fluorine. As the etching time increases, formation of the polymer increases. To improve the polymer formation, we controlled the temperature of the reacting chamber, and we found that temperature of the chamber was very effective to decrease the polymer thickness. The deep contact etch profile and high selectivity(oxide to photoresist) have been achieved with the optimum mixed gas ratio containing C and F and the temperature control of the etching chamber.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.1
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• pp.7-14
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• 2002

In this paper, neutral networks are used to build models of oxide film etched In CHF$_3$/CF$_4$ with a magnetically enhanced reactive ion etcher(MERIE). A statistical 2$\^$4-1/ experimental design plus one center point was used to characterize relationships between process factors and etch responses. The factors that were varied include radio frequence(rf) power, pressure, CHF$_3$ and CF$_4$ flow rates. Resultant 9 experiments were used to train neural networks and trained networks were subsequently tested on its appropriateness using additionally conducted 8 experiments. A total of 17 experiments were thus conducted for this modeling. The etch responses modeled are dc bias voltage, etch rate and etch uniformity A qualitative, good agreement was obtained between predicted and observed behaviors.

• Journal of Ginseng Research
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• v.42 no.2
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• pp.183-191
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• 2018

Background: Ginseng saponin has long been used as a traditional Asian medicine and is known to be effective in treating various kinds of pain. Ginsenoside Rf is one of the biologically active saponins found in ginseng. We evaluated ginsenoside Rf's antinociceptive and anti-inflammatory effects, and its mechanism of action on adrenergic and serotonergic receptors, in an incisional pain model. Methods: Mechanical hyperalgesia was induced via plantar incision in rats followed by intraperitoneal administration of increasing doses of ginsenoside Rf (vehicle, 0.5 mg/kg, 1 mg/kg, 1.5 mg/kg, and 2 mg/kg). The antinociceptive effect was also compared in a Positive Control Group that received a ketorolac (30 mg/kg) injection, and the $Na{\ddot{i}}ve$ Group, which did not undergo incision. To evaluate the mechanism of action, rats were treated with prazosin (1 mg/kg), yohimbine (2 mg/kg), or ketanserin (1 mg/kg) prior to receiving ginsenoside Rf (1.5 mg/kg). The mechanical withdrawal threshold was measured using von Frey filaments at various time points before and after ginsenoside Rf administration. To evaluate the anti-inflammatory effect, serum interleukin $(IL)-1{\beta}$, IL-6, and tumor necrotizing $factor-{\alpha}$ levels were measured. Results: Ginsenoside Rf increased the mechanical withdrawal threshold significantly, with a curvilinear dose-response curve peaking at 1.5 mg/kg. $IL-1{\beta}$, IL-6, and tumor necrotizing $factor-{\alpha}$ levels significantly decreased after ginsenoside Rf treatment. Ginsenoside Rf's antinociceptive effect was reduced by yohimbine, but potentiated by prazosin and ketanserin. Conclusion: Intraperitoneal ginsenoside Rf has an antinociceptive effect peaking at a dose of 1.5 mg/kg. Anti-inflammatory effects were also detected.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2008.11a
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• pp.18-18
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• 2008

3차원 패키징 System In Package (SIP)구조에서 Chip to Chip 단위 Interconnection 역할을 하는 Through Silicon Via(TSV)를 형성하기 위하여 Pulsating RF bias가 장착된 Inductively Coupled Plasma Etcher 장비를 이용하였다. 이 Pulsating 플라즈마 공정 방법은 주기적인 펄스($50{\sim}500Hz$)와 듀티($20{\sim}99%$) cycle 조절이 가능하며, 플라즈마 에칭특성에 영향을 주는 플라즈마즈마 발생 On/Off타임을 조절할 수 있다. 예를 들면, 플라즈마 발생 Off일 경우에는 이온(SFx+, O+)과 래디컬(SF*, F*, O*)의 농도 및 활성도를 급격하게 줄이는 효과를 얻을 수가 있는데, 이러한 효과는 식각 에칭시, 이온폭격의 손상을 급격하게 줄일 수 있으며, 실리콘 표면과 래디컬의 화학적 반응을 조절하여 에칭 측벽 식각 보호막 (SiOxFy : Silicon- Oxy- Fluoride)을 형성하는데 영향을 미친다. 그리고, TSV 형성에 있어서 큰 문제점으로 지적되고 있는 언더컷과 수평에칭 (Horizontal etching)을 개선하기 위한 방법으로, Black-Siphenomenon을 이번 실험에 적용하였다. 이 Black-Si phenomenon은 Bare Si샘플을 이용하여, 언더컷(Undercut) 및 수평 에칭 (Horizontal etching)이 최소화 되는 공정 조건을 간편하게 평가 할 수 있는 방법으로써, 에칭 조건 및 비율을 최적화하는 데 효율적이었다. 결과적으로, Pulsating RF bias가 장착된 Inductively Coupled Plasma Etcher 장비를 이용한 에칭실험은 펄스 주파수($50{\sim}500Hz$)와 듀티($20{\sim}99%$) cycle 조절이 가능하여, 이온(SFx+, O+)과 래디컬(SF*, F*, O*)의 농도와 활성화를 조절 하는데 효과적이었으며, Through Silicon Via (TSV)를 형성 하는데 있어서 Black-Si phenomenon 적용은 기존의 Continuous 플라즈마 식각 결과보다 향상된 에칭 조건 및 에칭 프로파일 결과를 얻는데 효과적이었다.

• Proceedings of the KIEE Conference
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• 2005.11a
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• pp.30-32
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• 2005

This paper reports on an LTCC-based packaging method using Au/Sn eutectic bonding process for RF MEMS applications. The proposed packaging structure was realized by a micromachining technology. An LTCC substrate consists of metal filled vertical via feedthroughs for electrical interconnection and Au/Sn sealing rim for eutectic bonding. The LTCC capping substrate and the glass bottom substrate were aligned and bonded together by a flip-chip bonding technology. From now on, shear strength and He leak rate will be measured then the fabricated package will be compared with the LTCC package using BCB adhesive bonding method which has been researched in our previous work.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.3
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• pp.202-206
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• 2007

ZnO is a promising material to make high efficient ultraviolet(UV) or blue light emitting diodes(LEDs) because of its large binding energy and energy bandgap. In this study, we prepared ZnO thin films with p-type conductivity on silicon(100) substrates by RF magnetron sputtering in the mixture of $N_2$ and $O_2$. The process was accompanied by low pressure in-situ annealing in $O_2$ at $600^{\circ}C$ and $800^{\circ}C$ respectively. Hall effect in Van der Pauw configuration showed that the N-doped ZnO film annealed at $800^{\circ}C$ has p-type conductivity. Photoluminescence(PL) spectrum of the film annealed at $800^{\circ}C$ showed UV emission related to exciton and bound to donor-acceptor pair(DAP) as well as visible emission related to many intrinsic defects.

• Journal of the Korean institute of surface engineering
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• v.50 no.4
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• pp.237-243
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• 2017

We demonstrated the thin film deposition of sodium phosphorous oxynitride (NaPON) via RF magnetron sputtering of $Na_3PO_4$, as a solid-state Na-ion conductor similar to lithium phosphorous oxynitride (LiPON), which is a commonly used solid electrolyte. The deposited NaPON thin film was characterized by scanning electron microscopy, X-ray diffractometry, and electrochemical impedance spectroscopy, to investigate the feasibility of the solid-state electrolyte in several different cell configurations. The key properties of a solidstate electrolyte, i.e., ionic conductivity and activation energy, were estimated from the complex non-linear least square fitting of the measured impedance spectra at various temperatures in the range of $27-90^{\circ}C$. The ionic conductivity of the NaPON film was measured to be $8.73{\times}10^{-6}S\;cm^{-1}$ at $27^{\circ}C$, which was comparable to that of the LiPON film. The activation energy was estimated to be 0.164 eV, which was lower than that of the LiPON film (0.672 eV). The obtained values encourage the use of a NaPON thin film in the future as a reasonable solid-state electrolyte.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.36 no.2A
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• pp.91-99
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• 2011

Several repeater systems are used to enhance the cell coverage to location such as shadow and rural areas in mobile systems. But the general RF repeater solutions are not suitable for high power outdoor environment because it has the weakness such as self oscillation problem With adoption of a adaptive digital filter technology, feedback interference cancellation repeater prevents oscillation by detecting and canceling the unwanted feedback signal between transmission and receiver antenna. In this paper, dual NLMS based interference cancellation method is proposed and the step size adaptation can be implemented by the estimation of the feedback channel Doppler frequency characteristics. The performance of the proposed algorithm is quantified via analysis and simulation for the static and multipath fading feedback channels.

• Journal of the Korean Electrochemical Society
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• v.10 no.4
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• pp.252-256
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• 2007

A series of spherical porous carbons were prepared via resorcinol-formaldehyde (RF) sol-gel polymerization in the presence of cationic surfactant (CTAB, cetyltrimethylammonium bromide), wherein the carbon sphere size was controlled by varying the CTAB introduction time after a pre-determined period of addition reaction (termed as "pre-curing"). The sphere size gradually decreases with an increase in the pre-curing time within the range of 30-150 nm. The carbons possess two types of pores; one inside carbon spheres (intra-particle pores) and the other at the interstitial sites made by carbon spheres (inter-particle pores). Of the two, the surface exposed on the former was dominant to determine the electric double-layer capacitor (EDLC) performance of porous carbons. As the intra-particle pores were generated inside RF gel spheres by gasification, the pore diameter was similar for all these carbons, thereby the pore length turned out to be a decisive factor controlling the EDLC performance. The charge-discharge voltage profiles and complex capacitance analysis consistently illustrate that the smaller-sized RF carbons deliver a better rate capability, which must be the direct result of facilitated ion penetration into shorter pores.