Gas Sensing Characteristics and Doping Effect of $MoO_3$ Thin Films prepared by RF magnetron sputtering
(RF magnetron sputtering법으로 제조한 $MoO_3$ 박막의 가스 감지 특성 및 첨가물의 영향)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2002.11a
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- pp.460-463
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- 2002