• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.538-538
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• 2012

전북대학교 고온 플라즈마 응용 연구 센터는 교육과학기술부 기초연구사업 중 고가연구장비 구축사업의 일환으로 고부가가치 재료 연구 및 시험생산이 가능한 소재공정용 200kW ICP(RF) 플라즈마 발생장치를 구축하고 있다. 200 kW급 ICP (RF)형 플라즈마 발생장치는 수~수십 um 크기의 금속, 세라믹 등 고융점 원료분말 등을 수~수십 um 크기의 금속, 세라믹 등 고융점 원료 분말을 순간적으로 용해, 기화 및 분해시키고 이들 기화 또는 분해된 증기를 급랭시키는 과정에서 대량으로 초미분($<1{\mu}m$)을 합성하는 RF 플라즈마 분말 합성 시스템으로 시간당 1 kg 이상의 나노 분말의 제조가 가능하도록 설계 제작된 생산 지원용 대형 ICP(RF) 플라즈마 장치이다.

• Journal of the Korean Vacuum Society
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• v.15 no.2
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• pp.117-138
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• 2006

Plasmas can be made by electrical discharge on earth. Most of the plasmas on earth have been generated in low pressure environments where the pressure is less than one millionth of the atmospheric pressure. However, there are many plasma applications which require high pressure plasmas. Therefore, scientists start research on plasma generation at high pressure to avoid use of expensive vacuum equipments. Large-volume inexpensive plasmas are needed in the areas of material processing, environmental protection and improvement, efficient energy source and applications, etc. We therefore developed new methods of plasma generations at high pressure and carried out research of applying these plasmas to high tech industries representing 21 century. These research fields will play pivotal roles in material, environmental and energy science and technology in future.

• Journal of the Korean Chemical Society
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• v.30 no.3
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• pp.327-332
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• 1986

Spatial (radial and height) distribution of electron number density is measured for an inductively coupled plasma under five operating conditions: (1) no carrier gas, (2) carrier gas without aerosel, (3) carrier gas with aerosol, (4) carrier gas with desolvated aerosol, and (5) carrier gas with aerosol and excess lithium. A complete RF power mapping of electron density is obtained. The plasma electrons for a typical analytical torch are observed to be hollow at the radial center in the region close to the induction coil, but diffuse rapidly toward the center in the higher region of the plasma. The presence of excess Li makes no significant change in the electron density profiles. The increases in the RF power levels increase the values of electron density uniformly across the radial coordinate.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.179-179
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• 2016

A radio-frequency (RF) Inductively Coupled Plasma (ICP) torch system was used for boron-nitride nano-tube (BNNT) synthesis. Because of electrodeless plasma generation, no electrode pollution and effective heating transfer during nano-material synthesis can be realized. For stable plasma generation, argon and nitrogen gases were injected with 60 kW grid power in the difference pressure from 200 Torr to 630 Torr. Varying hydrogen gas flow rate from 0 to 20 slpm, the electrical and optical plasma properties were investigated. Through the spectroscopic analysis of atomic argon line, hydrogen line and nitrogen molecular band, we investigated the plasma electron excitation temperature, gas temperature and electron density. Based on the plasma characterization, we performed the synthesis of BNNT by inserting 0.5~1 um hexagonal-boron nitride (h-BN) powder into the plasma. We analysis the structure characterization of BNNT by SEM (Scanning Electron Microscopy) and TEM (Transmission Electron Microscopy), also grasp the ingredient of BNNT by EELS (Electron Energy Loss Spectroscopy) and Raman spectroscopy. We treated bundles of BNNT with the atmospheric pressure plasma, so that we grow the surface morphology in the water attachment of BNNT. We reduce the advancing contact angle to purity bundles of BNNT.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.231.1-231.1
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• 2014

열 플라즈마(thermal plasma) 는 저온 플라즈마(cold plasma)와 달리 이온과 전자와 중성입자들이 충분한 에너지 교환으로 인해 열평형 상태를 가진다. 열 플라즈마를 생성 시킬 때 전극 사이에서 아크방전을 시켜 제트 형태로 플라즈마를 발생시키는 것을 플라즈마 토치(plasma torch)라고 한다. 이러한 플라즈마 토치는 화학 원소 분해, 강판 절단, 유해 기체 분해 등으로 널리 사용되고 있다. 본 연구에서는 플라즈마 토치를 수치적으로 해석하여 플라즈마의 특성을 알아보았다. 수치해석적 접근방법으로 열 플라즈마는 LTE (local thermodynamic equilibrium)을 가정하였으며 one-fluid 이론을 적용하였다. 이때 사용된 코드는 DCPTUN으로서 $C^{+}^{+}$로 작성된 열플라즈마 유동의 특성해석 코드인 동시에 SIMPLE 알고리즘을 이용한 유체 코드이다. 시뮬레이션은 2차원 축대칭이며 정렬격자계 및 비정렬격자계 모두에서 사용이 가능하도록 되어있다. 또한 맥스웰 방정식을 통해 electromagnetic field를 풀도록 하여 RF 시뮬레이션이 가능하도록 하였다. 이와 같은 열 플라즈마 시뮬레이션을 통해서 플라즈마 토치의 특성을 알아보았다.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.268-268
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• 2012

Atmospheric pressure microwave induced plasmas are used to excite and ionize chemical species for elemental analysis, for plasma reforming, and for plasma surface treatment. Microwave plasma differs significantly from other plasmas and has several interesting properties. For example, the electron density is higher in microwave plasma than in radio-frequency (RF) or direct current (DC) plasma. Several types of radical species with high density are generated under high electron density, so the reactivity of microwave plasma is expected to be very high [1]. Therefore, useful applications of atmospheric pressure microwave plasmas are expected. The surface characteristics of SUS304 stainless steel are investigated before and after surface modification by microwave plasma under atmospheric pressure conditions. The plasma device was operated by power sources with microwave frequency. We used a device based on a coaxial transmission line resonator (CTLR). The atmospheric pressure plasma jet (APPJ) in the case of microwave frequency (880 MHz) used Ar as plasma gas [2]. Typical microwave Pw was 3-10 W. To determine the optimal processing conditions, the surface treatment experiments were performed using various values of Pw (3-10 W), treatment time (5-120 s), and ratios of mixture gas (hydrogen peroxide). Torch-to-sample distance was fixed at the plasma edge point. Plasma treatment of a stainless steel plate significantly affected the wettability, contact angle (CA), and free energy (mJ/$m^2$) of the SUS304 surface. CA and ${\gamma}$ were analyzed. The optimal surface modification parameters to modify were a power of 10 W, a treatment time of 45 s, and a hydrogen peroxide content of 0.6 wt% [3]. Under these processing conditions, a CA of just $9.8^{\circ}$ was obtained. As CA decreased, wettability increased; i.e. the surface changed from hydrophobic to hydrophilic. From these results, 10 W power and 45 s treatment time are the best values to minimize CA and maximize ${\gamma}$.

• Journal of the Korean Chemical Society
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• v.41 no.6
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• pp.292-298
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• 1997

An ICP(Inductively Coupled Plasma) emission spectrometer was developed with an axially viewed ICP source incorporated by a 5-turned induction coil and a torch, outer quartz tube of which was 50 mm longer than that used in conventional ICP/AES(Inductively Coupled Plasma Atomic Emission Spectrometry). The Optimization of the system has been performed in terms of the determination of signal-to-noise ratio and background intensity at various rf powers, sample flow rates, argon gas flow rates and cut-off gas flow rates. The spectro-analytical characteristics of the spectrum obtained between 200 and 500 nm was revealed to be similar compared with a vertically viewed ICP source. The detection limit of Pb(Ⅱ) at 220.35 nm was 11 ppb which was 5 times lower than that obtained with a vertically viewed ICP source.