• Title/Summary/Keyword: RF MEMS switch

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An optical true time delay for 10 GHz linear phased array antennas composed of optical 2×2 MEMS switches and fiber delay lines (광 2×2 MEMS 스위치와 광섬유 지연선로를 이용한 10 GHz 선형 위상배열 안테나용 광 실시간 지연선로)

  • 이백송;신종덕;김부균
    • Korean Journal of Optics and Photonics
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    • v.14 no.4
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    • pp.466-472
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    • 2003
  • In this paper, we proposed an optical true time-delay (TTD) feeder system for phased array antennas (PAAs). The system possesses high-speed beam scan capability since, in this scheme, different lengths of fiber delay-lines are selected by optical 2${\times}$2 MEMS switches at high speed. An optical TTD capable of beam scanning in one of eight different directions has been built for 10 GHz linear PAA systems. Experimental results on time delay measurements show that the maximum time delay error is less than 0.2 ps corresponding to a scan angle error of less than 0.84o. We have also designed a 10 GHz linear PAA composed of eight micro-strip patch antenna elements driven by the proposed TTD, and the radiation patterns of this PAA have been analyzed by simulation.

Specimen Size Effect on Fatigue Properties of Surface-Micromachined Al-3%Ti Thin Films (Al-3%Ti 박막의 피로성질에 대한 시편 크기 영향)

  • Park, Jun-Hyub;Myung, Man-Sik;Kim, Yun-Jae
    • Proceedings of the KSME Conference
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    • 2007.05a
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    • pp.1708-1711
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    • 2007
  • This paper presents high cycle fatigue properties of an Al-3%Ti thin film, used in a RF (radio-frequency) MEMS switch for a mobile phone and also describes new test method for obtaining static and dynamic characteristics of thin film and reliability evaluation method on MEMS device with thin film developed by authors. Durability should be ensured for such devices under cycling load. Therefore, with the proposed specimen and test procedure, tensile and fatigue tests were performed to obtain mechanical and fatigue properties. The specimen was made with dimensions of $1000{\mu}m$ long, $1.0{\mu}m$ thickness, and 3 kinds of width, 50, 100 and $150{\mu}m$. High cycle fatigue tests for each width were also performed, from which the fatigue strength coefficient and the fatigue strength exponent were found to be 193MPa and .0.02319 for $50{\mu}m$, 181MPa and -0.02001 for $100{\mu}m$, and 164MPa and -0.01322 for $150{\mu}m$, respectively. We found that the narrower specimen is, the longer fatigue life of Al-3%Ti is and the wider specimen is, the more susceptible to stress level fatigue life of Al-3%Ti was.

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Comparison between $d_{31}\;and\;d_{33}$ actuation characterization of the PZT micro-actuator for RF MEMS switch (RF 스위치 적용을 위한 박막 PZT 엑추에이터의 $d_{31}$ 구동과 $d_{33}$ 구동 특성 비교)

  • Shin M.J.;Seo Y.H.;Choi D.S.;Whang K.H.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2006.05a
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    • pp.467-468
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    • 2006
  • In this work, we present the comparison between $d_{31}\;and\;d_{33}$ mode characterization using the PZT micro-actuator for large displacement. The PZT micro-actuator consisted of Si, PZT, and Pt layer on SOI wafer. The electrode shapes were laminated and interdigitated for $d_{31}\;and\;d_{33}$ mode, respectively. In order to characterize the actuation mode, we measured the displacement using laser interferometer. The maximum displacement of d31 mode was $12.2{\mu}m$ at 10V, the actuation characterization of d31 was better than that of d33 mode. We estimated that displacement of d33 mode would be larger than that of d31 above 30V.

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A 4-bit optical true time-delay for phased array antennas using 2×2 optical MEMS switches and fiber-optic delay lines (2×2 광 MEMS 스위치와 광섬유 지연선로를 이용한 위상배열 안테나용 4-비트 광 실시간 지연선로)

  • 정병민;윤영민;신종덕;김부균
    • Korean Journal of Optics and Photonics
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    • v.15 no.4
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    • pp.385-390
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    • 2004
  • In this paper, we designed a 4-bit optical true time-delay(TTD) for phased array antennas(PAAs), which is composed of a wavelength-fixed optical source, 2 ${\times}$ 2 optical MEMS switches, and fiber-optic delay lines. A 4-bit TTD with a unit time delay difference of 6 ps for 10-GHz PAAs has been implemented. Measurement results on time delay show an error of -0.4 ps at maximum, corresponding to a radiation angle error of less than 1.63$^{\circ}$. Thus, the TTD implemented in this research performs in excellent agreement with theory. Each TTD line, composed of MEMS switches and fiber-optic delay lines, connected to the corresponding antenna element has insertion loss in between 1.36 ㏈ and 2.40 ㏈ depending upon the setup of the switches. On the other hand, the insertion loss difference between TTD lines was 0.32 ㏈ at maximum for a fixed radiation angle. The TTD structure proposed in this paper might be more reliable and economical than those previously proposed using tunable wavelength sources if proper power equalization either with gain control of RF amplifiers or variable attenuators is achieved.

WDM Optical True Time-Delay for X-Band Phased Array Antennas (X-밴드 위상 배열 안테나를 위한 WDM 광 실시간 지연선로)

  • Jung, Byung-Min;Shin, Jong-Dug;Kim, Boo-Gyoun
    • Korean Journal of Optics and Photonics
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    • v.18 no.2
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    • pp.162-166
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    • 2007
  • In this paper, we propose a WDM optical true time-delay (OTTD) beam former for phased way antenna (PAA) systems. It is composed of a delay lines matrix and a multiwavelength source with discrete DFB laser diodes. The building block of a delay lines matrix is a $2\times2$ optical MEMS switch with proper fiber-optic delay line connected between cross ports. A $4\times3$ matrix using four DFB lasers has been fabricated with unit time-delay difference of 12 ps. Maximum time-delay error was measured to be -1.74 ps and +1.14 ps at a radiation angle of $46.05^{\circ}$, corresponding to error range of $-2.87^{\circ}\sim+1.88^{\circ}$. By measuring time-delays at six different RF frequencies from 5- to 10-GHz, we verified the true time-delay characteristic of our OTTD.