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Generation of Charged Clusters and their Deposition in Polycrystalline Silicon Hot-Wire Chemical Vapor Deposition (열선 CVD 증착 다결정 실리콘에서 전하를 띈 클러스터의 생성 및 증착)

  • Lee, Jae-Ik;Kim, Jin-Yong;Kim, Do-Hyeon;Hwang, Nong-Moon
    • 한국신재생에너지학회:학술대회논문집
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    • 2005.11a
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    • pp.561-566
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    • 2005
  • Polycrystalline silicon films were deposited using hot wire CVD (HWCVD). The deposition of silicon thin films was approached by the theory of charged clusters (TCC). The TCC states that thin films grow by self-assembly of charged clusters or nanoparticles that have nucleated in the gas phase during the normal thin film process. Negatively charged clusters of a few nanometer in size were captured on a transmission electron microscopy (TEM) grid and observed by TEM. The negatively charged clusters are believed to have been generated by ion-induced nucleation on negative ions, which are produced by negative surface ionization on a tungsten hot wire. The electric current on the substrate carried by the negatively charged clusters during deposition was measured to be approximately $-2{\mu}A/cm^2$. Silicon thin films were deposited at different $SiH_4$ and $H_2$ gas mixtures and filament temperatures. The crystalline volume fraction, grain size and the growth rate of the films were measured by Raman spectroscopy, X-ray diffraction and scanning electron microscopy. The deposit ion behavior of the si1icon thin films was related to properties of the charged clusters, which were in turn controlled by the process conditions. In order to verify the effect of the charged clusters on the growth behavior, three different electric biases of -200 V, 0 V and +25 V were applied to the substrate during the process, The deposition rate at an applied bias of +25 V was greater than that at 0 V and -200 V, which means that the si1icon film deposition was the result of the deposit ion of charged clusters generated in the gas phase. The working pressures had a large effect on the growth rate dependency on the bias appled to the substrate, which indicates that pressure affects the charging ratio of neutral to negatively charged clusters. These results suggest that polycrystalline silicon thin films with high crystalline volume fraction and large grain size can be produced by control1ing the behavior of the charged clusters generated in the gas phase of a normal HWCVD reactor.

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Fuel Supply of Direct Carbon Fuel Cells via Thermal Decomposition of Hydrocarbons Inside a Porous Ni Anode (다공성 니켈 연료 전극 내부에서 탄화수소의 열분해를 통한 직접 탄소 연료 전지의 연료공급)

  • Yi, Hakgyu;Li, Chengguo;Jalalabadi, Tahereh;Lee, Donggeun
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.39 no.6
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    • pp.527-534
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    • 2015
  • This study offers a novel method for improving the physical contact between the anode and fuel in a direct carbon fuel cell (DCFC): a direct generation of carbon in a porous Ni anode through the thermal decomposition of gaseous hydrocarbons. Three kinds of alkane hydrocarbons with different carbon numbers (CH4, C2H6, and C3H8) are tested. From electron microscope observations of the carbon particles generated from each hydrocarbon, we confirm that more carbon spheres (CS), carbon nanotubes (CNT), and carbon nanofibers (CNF) were identified with increasing carbon number. Raman scattering results revealed that the carbon samples became less crystalline and more flexible with increasing carbon number. DCFC performance was measured at $700^{\circ}C$ with the anode fueled by the same mass of each carbon sample. One-dimensional carbon fuels of CNT and CNF more actively produced and had power densities 148 and 210 times higher than that of the CS, respectively. This difference is partly attributed to the findings that the less-crystalline CNT and CNF have much lower charge transfer resistances than the CS.

Simultaneous Transfer and Patterning of CVD-Grown Graphene with No Polymeric Residues by Using a Metal Etch Mask

  • Jang, Mi;Jeong, Jin-Hyeok;Trung, T.Q.;Lee, Nae-Eung
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.642-642
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    • 2013
  • Graphene, two dimensional single layer of carbon atoms, has tremendous attention due to its superior property such as high electron mobility, high thermal conductivity and optical transparency. Especially, chemical vapor deposition (CVD) grown graphene has been used as a promising material for high quality and large-scale graphene film. Unfortunately, although CVD-grown graphene has strong advantages, application of the CVD-grown graphene is limited due to ineffective transfer process that delivers the graphene onto a desired substrate by using polymer support layer such as PMMA(polymethyl methacrylate). The transferred CVD-grown graphene has serious drawback due to remaining polymeric residues generated during transfer process, which induces the poor physical and electrical characteristics by a p-doping effect and impurity scattering. To solve such issue incurred during polymer transfer process of CVD-grown graphene, various approaches including thermal annealing, chemical cleaning, mechanical cleaning have been tried but were not successful in getting rid of polymeric residues. On the other hand, lithographical patterning of graphene is an essential step in any form of microelectronic processing and most of conventional lithographic techniques employ photoresist for the definition of graphene patterns on substrates. But, application of photoresist is undesirable because of the presence of residual polymers that contaminate the graphene surface consistent with the effects generated during transfer process. Therefore, in order to fully utilize the excellent properties of CVD-grown graphene, new approach of transfer and patterning techniques which can avoid polymeric residue problem needs to be developed. In this work, we carried out transfer and patterning process simultaneously with no polymeric residue by using a metal etch mask. The patterned thin gold layer was deposited on CVD-grown graphene instead of photoresists in order to make much cleaner and smoother surface and then transferred onto a desired substrate with PMMA, which does not directly contact with graphene surface. We compare the surface properties and patterning morphology of graphene by scanning electron microscopy (SEM), atomic force microscopy(AFM) and Raman spectroscopy. Comparison with the effect of residual polymer and metal on performance of graphene FET will be discussed.

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A Study of Copper Production Techniques at the Archaeological Site in Gwanbukri, Buyeo in the 6th and 7th Centuries (6~7C 부여 관북리 유적의 동 생산기법 연구)

  • Lee, Ga Young;Cho, Nam Chul
    • Journal of Conservation Science
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    • v.36 no.3
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    • pp.162-177
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    • 2020
  • Research was conducted to characterize the copper production and smelting process with 11 copper smelting by-products (copper slag and copper crucible) excavated from the NA and LA areas at the Gwanbuk-ri archeological site in Buyeo. Scanning electron microscopy-energy dispersive spectroscopy, wavelength dispersive X-ray fluorescence, X-ray diffraction, and Raman microspectroscopy were employed in the analysis. The research results reveal that the copper slag from Gwanbuk-ri contained silicate oxide, magnetite, fayalite, and delafossite, which are typical characteristics of crucible slag and refined slag. The outward appearance and microstructure of the slag were grouped as follows: 1. glassy matrix + Cu prill, 2. glassy matrix + Cu prill + magnetite, 3. silicate mineral matrix + Cu prill, 4. crystalline (delafossite and magnetite) + amorphous (Cu prill), 5. magnetite + fayalite, and 6. slag from slag. The copper slags from Guanbuk-ri were found to contain residues of impurities such as SiO2, Al2O3, CaO, SO4, P2O5, Ag2O, and Sb2O3 in their microstructure, and, in some cases, it was confirmed that copper, tin and lead are alloys. These results indicate that refining of intermediate copper(including impurities) and refining of alloys of copper(including impurities) - tin and refining of copper(including impurities) - tin - lead took place during the copper production process at Gwanbuk-ri, Buyeo.

The Photovoltaic Effect of Iodine-Doped Metal Free Phthalocyanine/ZnO System (Ⅱ). The Photovoltaic Effect of $ZnO/H_2Pc(I)_x$ Dispersed in Poly(9-vinylcarbazole) (요오드가 도핑된 무금속 프탈로시아닌/산화아연계의 광기전력 효과 (Ⅱ). Poly(9-vinylcarbazole)에 분산된 $ZnO/H_2Pc(I)_x$계의 광기전력 효과)

  • Heur, Soun-Ok;Kim, Young-Soon
    • Journal of the Korean Chemical Society
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    • v.39 no.3
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    • pp.176-185
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    • 1995
  • To improve photosensisitizing efficiency of ZnO/$H_2Pc(I)_x$ system, ZnO/$H_2Pc(I)_x$ system was dispersed in a typical photoconductive polymer of poly(9-vinylcarbazole)(PVCZ). The iodine dopant level(x) of ZnO/${\chi}-H_2Pc(I)_x$ is proportional to concentration of iodine, whereas x of ZnO/${\beta}-H_2Pc(I)_x$ decreased from the highest x=0.97 at more than $6.3{\times}10^{-3}$ M iodine solution. The Raman spectra of ZnO/${\chi}-H_2Pc(I)_x$ at 514 nm exhibited characteristic $I_3^-$ patterns in the range of 50∼550 $cm^{-1}$ at $x{\geq}0.57.$ The surface photovoltage of ZnO/${\chi}-H_2Pc(I)_{0.48}$/PVCZ was approximately 1.6 times greater than ZnO/${\chi}-H_2 Pc(I)_{0.48}$ and was 1.8 times of ZnO/${\chi}-H_2Pc(I)_{0.57}$/PVCZ at 670 nm. With ZnO/$H_2Pc(I)_x$/PVCZ, the highest iodine dopant levels showed a higher photovoltage. Therefore the injection of holes from H2Pc into PVCZ resulted in that photosensisitizing effect of ZnO/$H_2Pc(I)_x$/PVCZ system was improved compared to ZnO/$H_2Pc(I)_x$ case.

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Characterization of Nitrogen-Doped $TiO_2$ Thin Films Prepared by Metalorganic Chemical Vapor Deposition (유기금속 화학 기상증착법으로 실리콘 기판위에 증착된 질소치환 $TiO_2$ 박막의 특성분석)

  • 이동헌;조용수;이월인;이전국;정형진
    • Journal of the Korean Ceramic Society
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    • v.31 no.12
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    • pp.1577-1587
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    • 1994
  • TiO2 thin films with the substitution of oxygen with nitrogen were deposited on silicon substrate by metalorganic chemical vapor deposition (MOCVD) using Ti(OCH(CH3)2)4 (titanium tetraisopropoxide, TTIP) and N2O as source materials. X-ray diffraction (XRD) results indicated that the crystal structure of the deposited thin films was anatase TiO2 with only (101) plane observed at the deposition temperatures of 36$0^{\circ}C$ and 38$0^{\circ}C$, and with (101) and (200) plane at above 40$0^{\circ}C$. Raman spectroscopic results indicated that the crystal structure was anatase TiO2 in accordance with the XRD results without any rutile, fcc TiN, or hcp TiN structure. No fundamental difference was observed with temperature increase, but the peak intensity at 194.5 cm-1 increased with strong intensity at 143.0 cm-1 for all samples. The crystalline size of the films varied from 49.2 nm to 63.9 nm with increasing temperature as determined by slow-scan XRD experiments. The refractive index of the films increased from 2.40 to 2.55 as temperature increased. X-ray photoelectron spectroscopy (XPS) study showed only Ti 2s, Ti 2p, C 1s, O 1s and O 2s peaks at the surface of the film. The composition of the surface was estimated to be TiO1.98 from the quatitative analysis. In the bulk of the film Ti 2s, Ti 2p, O 1s, O 2s, N 1s and N 2s were detected, and Ti-N bonding was observed due to the substitution of oxygen with nitrogen. A satellite structure was observed in the Ti 2p due to the Ti-N bonding, and the composition of titanium nitride was determined to be about TiN1.0 from the position of the binding energy of Ti-N 2p3/2 and the quatitative analysis. The spectrum of Ti 2p energy level could be the sum of a 4, 5, or 6 Gaussian curve reconstruction, and the case of the sum of the 6 Gaussian curve reconstruction was physically most meaningful. From the results of Auger electron spectroscopy (AES), it was known that the composition was not varied significantly throughout the whole thickness of the film, and silicon oxide was not observed at the interface between the film and the substrate. The composition of the film was possible (TiO2)1-x.(TiN)x or TiO2-2xNx and in this experimental condition x was found to be about 0.21-0.16.

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Simple one-step synthesis of carbon nanoparticles from aliphatic alcohols and n-hexane by stable solution plasma process

  • Park, Choon-Sang;Kum, Dae Sub;Kim, Jong Cheol;Shin, Jun-Goo;Kim, Hyun-Jin;Jung, Eun Young;Kim, Dong Ha;Kim, Daseulbi;Bae, Gyu Tae;Kim, Jae Young;Shin, Bhum Jae;Tae, Heung-Sik
    • Carbon letters
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    • v.28
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    • pp.31-37
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    • 2018
  • This paper examines a simple one-step and catalyst-free method for synthesizing carbon nanoparticles from aliphatic alcohols and n-hexane with linear molecule formations by using a stable solution plasma process with a bipolar pulse and an external resistor. When the external resistor is adopted, it is observed that the current spikes are dramatically decreased, which induced production of a more stable discharge. Six aliphatic linear alcohols (methanol-hexanol) containing carbon with oxygen sources are studied as possible precursors for the massive production of carbon nanoparticles. Additional study is also carried out with the use of n-hexane containing many carbons without an oxygen source in order to enhance the formation of carbon nanoparticles and to eliminate unwanted oxygen effects. The obtained carbon nanoparticles are characterized with field emission-scanning electron microscopy, energy dispersive X-ray spectroscopy, and Raman spectroscopy. The results show that with increasing carbon ratios in alcohol content, the synthesis rate of carbon nanoparticles is increased, whereas the size of the carbon nanoparticles is decreased. Moreover, the degree of graphitization of the carbon nanoparticles synthesized from 1-hexanol and n-hexane with a high carbon (C)/oxygen (O) ratio and low or no oxygen is observed to be greater than that of the carbon nanoparticles synthesized from the corresponding materials with a low C/O ratio.

Spectroscopic Identifications and Phase Equilibria of THF + 3-OH THF + CH4 Clathrate Hydrates (삼성분계 THF + 3-OH THF + CH4 크러스레이트 하이드레이트의 상평형 거동 해석 및 분광학적 분석)

  • Kim, Heejoong;Ahn, Yun-Ho;Moon, Seokyoon;Hong, Sujin;Park, Youngjune
    • Korean Chemical Engineering Research
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    • v.55 no.3
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    • pp.353-357
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    • 2017
  • In this study, the inclusion phenomena of tetrahydrofuran + 3-hydroxytetrahydrofuran + $CH_4$ clathrate hydrates were explored via thermodynamic and spectroscopic approaches. The phase equilibria of the double hydrates - THF + $CH_4$ and 3-OH THF + $CH_4$ clathrate hydrates - were determined by pressure-temperature trace during hydrate formation and dissociation, and the result revealed that the equilibrium pressures were shifted to lower pressure region compared to pure $CH_4$ hydrate. The powder X-ray diffraction patterns revealed that the double hydrates of THF + 3-OH THF formed structure II type clathrate hydrates with $CH_4$. The dispersive Raman spectra of the double clathrate hydrates also exhibited that $CH_4$ can be trapped in both $5^{12}6^4$ and $5^{12}$ cages whereas THF and 3-OH THF were encaged in $5^{12}6^4$ cage.

New Synthesis of the Ternary Type Bi2WO6-GO-TiO2 Nanocomposites by the Hydrothermal Method for the Improvement of the Photo-catalytic Effect (개선된 광촉매 효과를 위한 수열법에 의한 삼원계 Bi2WO6-GO-TiO2 나노복합체의 쉬운 합성 방법)

  • Nguyen, Dinh Cung Tien;Cho, Kwang Youn;Oh, Won-Chun
    • Applied Chemistry for Engineering
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    • v.28 no.6
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    • pp.705-713
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    • 2017
  • A novel material, $Bi_2WO_6-GO-TiO_2$ composite, was successfully synthesized using a facile hydrothermal method. During the hydrothermal reaction, the loading of $Bi_2WO_6$ and $TiO_2$ nanoparticles onto graphene sheets was achieved. The obtained $Bi_2WO_{6-GO-TiO2}$ composite photo-catalysts were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), energy dispersive X-ray (EDX) analysis, transmission electron microscopy (TEM), Raman spectroscopy, ultraviolet-visible diffuse reflectance spectroscopy (UV-vis-DRS), and X-ray photoelectron spectroscopy (XPS). The $Bi_2WO_6$ nanoparticle showed an irregular dark-square block nanoplate shape, while $TiO_2$ nanoparticles covered the surface of the graphene sheets with a quantum dot size. The degradation of rhodamine B (RhB), methylene blue trihydrate (MB), and reactive black B (RBB) dyes in an aqueous solution with different initial amount of catalysts was observed by UV spectrophotometry after measuring the decrease in the concentration. As a result, the $Bi_2WO_6-GO-TiO_2$ composite showed good decolorization activity with MB solution under visible light. The $Bi_2WO_6-GO-TiO_2$ composite is expected to become a new potential material for decolorization activity. Photocatalytic reactions with different photocatalysts were explained by the Langmuir-Hinshelwood model and a band theory.

고에너지 이온빔에 의한 고분자의 micro-hardness 특성변화

  • Choi, Han-Woo;Woo, Hyung-Joo;Hong, Wan;Kim, Gi-Dong;Kim, Jun-Gon;Kim, Young-Seok;Lee, Sam-Geun
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.112-112
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    • 1999
  • 고분자 표면에 MeV급 이온을 주입하게 되면 화학적, 광학적, 물리적, 전기적 특성 등 기존의 재래식 공정으로는 불가능한 다양한 특성변화가 일어나게 된다. 본 실험에서는 이온 조사에 따른 micro-hardness의 변화에 중점을 두어 관찰하였다. 수 MeV로 가속시킨 Cl과 C 이온을 Kapton, Teflon, PMMA에 조사량을 바꾸어가며 조사하였다. 이때 조사 전후 고분자 시료의 표면 경도는 depth-sensing nanoindentation technique (Nano Indenter II, USA)을 이용하여 측정하였다. 측정깊이는 극표면 효과와 기측효과의 영향을 무시할 수 없는 100nm로 결정하였다. 또한 이와 같은 경도변화를 규명하기 위하여 각각의 시료에 대해 FTIR, Raman, UV-VIS, RBS, XPS 스펙트럼을 측정하였으며, 조사중에 발생되는 가스상 분자들을 RGA를 이용하여 측정하였다. 1 MeV Cl 이온을 Kato에 4x1015ions/cm2 조사하면 경도가 0.35 GPa에서 7.1GPa로 약 20배 정도 증가하게 되며, 이 경도는 stainless steel 경도 2~3 GPa, martensite steel 8~12와 비교하여 보면 상당히 높은 수준임을 알 수 있다. Teflon과 PMMA 시료의 경우 1MeV Cl 이온 4X1015ions/cm2를 조사시키면 각각 경도가 0.31GPa에서 4.1a, 0.30 GPa에서 3.9GPa로 변화하였으며 Kapton에 비하여 상대적으로 경도의 변화가 적음을 알 수 있었다. 이온 주입된 Kapton의 경우 FT-IR측정에 의하여 이온 조사량이 증가함에 따라 C=O 진동, 이미드그룹의 CONH, tertiary amine의 C-N 흡수 피크가 감소되며, 1X1014ions/cm2 이상의 양이 조사되어야 개질변화가 일어남을 알 수 있었다. XPS 측정 결과 Kapton에 조사되는 이온양이 증가할수록 C=O, C-O 및 C-N의 탄소는 감소하고 페닐고리 탄소가 증가함을 알 수 있었다. 또한 이온 조사 중 측정한 RGA에서도 CO 가스가 대량 방출되는 현상을 관찰하였으며 FTIR 및 XPS에서의 C=O 결합의 감소와도 일치하였다. RBS에 의한 CNO 원소의 변화에서도 다른 원소보다 O의 감소가 현저하게 나타남을 확인하였다. UV-VIS 측정을 통해 조사 이온량에 따라 에너지 준위가 변동하여 흡수스펙트럼이 장파장으로 확대됨을 알 수 있었으며, 이는 공액 2중 결합의 형성에 의한 $\pi$-전자 및 기타 결함에 기인한다. PMMA 및 Teflon의 경우 FTIR 측정에 의하여 이온 조사됨에 따라 function group 들의 peak가 세기가 감소되면서 완만해지는 경향을 보이며 원래의 구조를 상실하게 된다. PMMA와 Teflon은 이온 조사가 되면 가교형서보다는 사슬절단이 주로 일어나므로 가교형성이 잘 일어나는 Kapton보다는 상대적으로 경도의 증가가 적음을 알 수 있었다.

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