• Title/Summary/Keyword: Quartz crystal

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In-situ Deposition Rate Measurement System to Improve the Accuracy of the Film Formation Process (성막 공정 정밀도 향상을 위한 실시간 성막 속도 측정 시스템)

  • Somi Park;Seung-Yo Baek;Hyun-Bin Kim;Jonghee Lee;Jae-Hyun Lee
    • Applied Chemistry for Engineering
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    • v.34 no.4
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    • pp.383-387
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    • 2023
  • The quartz crystal microbalance (QCM), commonly used in high vacuum deposition, becomes difficult to use when a thick film is deposited on the quartz, affecting the crystal's inherent vibration. In this study, a non-destructive optical measurement method was developed to measure the film's deposition rate during the in-situ film deposition process. By measuring the scattered laser intensity caused by the dimer in the parylene gas passing through the gas flow path, it was successfully confirmed that the ratio of the dimer in the parylene gas increases as the pyrolysis temperature decreases. Additionally, it was noted that the film's thickness and haze increase as the pyrolysis temperature decreases by confirming the characteristics of the visible parylene films. Through the research results, we aim to utilize the stable in-situ film deposition rate measurement system to control the precise film deposition rate of parylene films.

Crystal Structure and Piezoelectric Properties of Four Component Langasite A3B Ga3Si2O14 (A = Ca or Sr, B = Ta or Nb)

  • Ohsato, Hitoshi;Iwataki, Tsuyoshi;Morikoshi, Hiroki
    • Transactions on Electrical and Electronic Materials
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    • v.13 no.4
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    • pp.171-176
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    • 2012
  • As langasite $A_3BC_3D_2O_{14}$ compounds with piezoelectric properties exhibit no phase transition up to the melting point of 1,400-$1,500^{\circ}C$, many high temperature applications are expected for the SAW filter, temperature sensor, pressure sensor, and so on, based on the digital transformation of wider bandwidth and higher-bit rates. It has a larger electromechanical coupling factor compared to quartz and also nearly the same temperature stability as quartz. The $La_3Ga_5SiO_{14}$ (LGS) crystal with the $Ca_3Ga_2Ge_4O_{14}$-type crystal structure was synthesized and the crystal structure was analyzed by Mill et al. It is also an important feature that the growth of the single crystal is easy. In the case of three-element compounds such as $[R_3]_A[Ga]_B[Ga_3]_C[GaSi]_DO_{14}$ (R=La, Pr and Nd), the piezoelectric constant increases with the ionic radius of R. In this study, crystal structures of four-element compounds such as $[A_3]_A[B]_B[Ga_3]_C[Si_2]_DO_{14}$ (A = Ca or Sr, B = Ta or Nb) are analyzed by a single crystal X-ray diffraction, and the mechanism and properties of the piezoelectricity depending on the species of cation was clarified based on the crystal structure.

Rapid Detection of Salmonella spp. by Antibody-Immobilized Piezoelectric Crystal Biosensor (고정화법을 달리하여 제조한 압전류적 항체 센서에 의한 Salmonella spp.의 신속 검출)

  • 박인선;김우연;김남수
    • Journal of Food Hygiene and Safety
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    • v.13 no.3
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    • pp.206-212
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    • 1998
  • An improved antibody-coated sensor system based on quartz crystal microbalance was developed for the detection of Salmonella spp. An antibody against Salmonella common structural antigen was immobilized onto one gold electrode of the piezoelectric quartz crystal surface by various immobilization procedures. The best results in sensitivity and stability were obtained with the thin layers of protein A and 3,3'-dithiopropionimidate.2HCI(DTBP), a homobifunctional thiol-cleavable crosslinker. After the addition of a S. typhimurium suspension into a reaction cell with 0.1 M sodium phosphate buffer, pH 7.2, the resonant frequency owing to S. typhimurium adsorption decreased conspicuously. The antibody-immobilized crystals prepared by the gold-protein A complex formation and DTBP thiolation showed the frequency shifts of 80 and 283 Hz, respectively. The time required for maximum frequency shift was about 30~60 min. The antibody-coated crystal could be reused for 6~8 consecutive assays.

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Rapid Detection of Salmonella spp. by Antibody Immobilization with Gold-protein A Complex (Gold-protein A Complex 항체 고정화법을 이용한 Salmonella spp.의 신속 검출)

  • Park, In-Seon;Kim, Nam-Soo
    • Korean Journal of Food Science and Technology
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    • v.31 no.1
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    • pp.1-6
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    • 1999
  • A piezoelectric (PZ) biosensor system detecting Salmonella spp. was developed. The system consisted of an oscillator, a frequency counter and an antibody-immobilized quartz crystal. An anti-Salmonella antibody was immobilized on one gold. surface of the quartz crystal with protein A. Salmonella detection was made by measuring resonant frequency shift owing to a mass change by specific binding of microbial cells to the gold surface of the PZ crystal. The PZ antibody sensor was operated optimally at 0.1M phosphate buffer, pH 7.2 and $35^{\circ}C$. The sensor was quite specific to Salmonella spp. The obtained frequency shift was correlated with the Salmonella concentration in the range of $10^5{\sim}10^6\;CFU/mL$. The frequency shift increased further by addition of polystyrene beads. The Salmonella detection which is indicated by a steady-state microbial adsorption to the quartz crystal was accomplished within 50min.

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Accelerated testing for evaluating bubble quality within quartz glass crucibles used for manufacturing silicon single crystal ingots (실리콘 단결정 잉곳 제조용 석영유리 도가니 내 기포 품질평가를 위한 가속시험)

  • Gyu Bin Lee;Seung Min Kang;Jae Ho Choi;Young Min Byeon;Hyeong-Jun Kim
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.33 no.3
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    • pp.91-96
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    • 2023
  • To verify the quality of bubbles during the use of quartz glass crucibles (QC), an appropriate accelerated testing method was proposed. The bubble state of discarded waste crucibles obtained from actual Czochralski (Cz) processes was analyzed, and optimal heat treatment conditions were suggested by varying temperature, pressure, and time using the QC test piece. By subjecting the samples to heat treatment at 1450℃, 0.4 Torr, and 40 hours, it was possible to control the bubble size and density to a similar level as those generated in the actual Cz process. In particular, by selecting a relatively lower pressure of 0.4 Torr compared to the typical range of 10~20 Torr applied in the Cz process, the time required for accelerated bubble formation testing could be reduced. However, it was determined that increasing the heat treatment temperature to 1550℃ led to the phenomenon of Ostwald ripening, resulting in larger bubbles and a rapid decrease in density. Therefore, it was concluded that it was not a suitable condition for the desired b ake test.

Crystal chemistry and growth of$La_3Ga_5SiO_{14}$ for the applications of filter and resonator (필터와 레죠네이터 응용을 위한 $La_3Ga_5SiO_{14}$ 의 결정화학 및 성장)

  • Jung, Il-Hyoung;Joo, Kyung;Shim, Kwang-Bo;Auh, Keun-Ho
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.9 no.1
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    • pp.74-79
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    • 1999
  • Langasite($La_3Ga_5SiO_14$) is a new piezoelectric material which is similar to quartz, LN($LiNbO_3$) and LT($LiTaO_3$) in its acoustic behavior. In this study, pure Langasite and Lagnasite family groups were synthesized by the solid state reactions in air. The diffusion species for synthesis were investigated and the sintered body was studied on dielectric property to comparison of characteristics. Also, Langasite single crystals were grown by self-designed Czochralski system and characterized.

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The single crystal growth of various colored cubic zirconia for jewelry (다양한 색의 보석용 큐빅 지르코니아 단결정 성장)

  • Nam, Kyung-Ju
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.17 no.6
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    • pp.272-276
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    • 2007
  • The various colored cubic zirconia single crystals for jewelry were grown by skull melting method of excellent productivity. The cubic zirconia is similar to the character of diamond, which has high refractive index, large dispersion and high hardness. It is possible that the development of new colored cubic zirconia by doping 3d-transition elements or 4f-rare earth elements. The colored cubic zirconia is representative of synthetic gemstone which was grown up by mixing one or over two materials among $Pr_6O_{11},\;TiO_2,\;MnO_2\;and\;Er_2O_3$ as coloring agent. Subsequent heat treatment improves the quality of color and uniformity. This study is aimed the color reappearance of cubic zirconia such as natural peridot, smoky-quartz and red-tourmaline.