• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1992년도 추계학술대회 논문집
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• pp.43-46
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• 1992

Measurement of straightness errors (vertical, horizontal),and angular error (roll, pitch, yaw) have been classified as difficult tasks in the machine tool metrology field. In this paper, computer aided measurement techniques are proposed using quadrant type photo pin diode. In the developed system, three photo diodes are mounted on the positioning table to detect the five degrees of movement error simultaneously. Outputs from the photo diode are analyzed in the computer and are displayed graphically.

• 한국정밀공학회지
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• 제11권5호
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• pp.180-188
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• 1994

Error assessment and evaluation for machine for machine tool slides have been considered as essential tools for improving accuracy. In this paper, a computer aided measurement technique is proposed using photo pin diodes of quadrant type and laser source. In thedeveloped system, three photo diodes are mounted on a sensor mounting table, and the sensored signal is processed by specially designed signal conditioner to give fine resolution with minimum noise. A micro computer inputs the processed signal, and the geometric errors of five degree of freedoms are successfully evaluated. Pitch, roll, yaw, vertical and horizontal straightness errors are thus assessed simultaneously for a machine tool slide. Calibration techniques such as optics calibration, photo diode calibration are proposed and implemented, giving precise calibration for the measurement system. The developed system has been applied to a practical machine tool slide, and has been found as one of efficient and precise technique for machine tool slide.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 추계학술대회 논문집
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• pp.375-378
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• 1995

Although laser interferometer measurement system has the advantage of range and accuracy, the traditional error measurement methods for geometric errors(two straightness and three angular errors) of a machine tool measures error components one at a time. It may also create an optical path difference and affect the measurement accuracy. In order to identify and compensate for geometric error of a moving body, an on-line measurement system for simultaneous detection of the five error components of a moving axis is required. An on-line measurement system with 5 degrees of freedom was developed for geometric error detection. Performance verification of the system was performed on an error generating mechanism. Experimental results show the feasibility of this system for identifying geometric errors of a side of machine tool.

• 한국정밀공학회지
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• 제15권5호
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• pp.93-99
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• 1998

Although laser interferometer measurement system has advantages of measurement range and accuracy, it has some disadvantages when measurement of multi degrees of freedom of motion are required. Because the traditional error measurement methods for geometric errors (two straightness and three angular errors) of a slide of machine tools measures error components one at a time. It may also create an optical path difference and affect the measurement accuracy. In order to identify and compensate for geometric errors of a moving rigid body in real time processes, an on-line error measurement system for simultaneous detection of the five error components of a moving object is required. Using laser alignment technique and some optoelectronic components, an on-line measurement system with 5 degrees of freedom was developed for the geometric error detection in this study Performance verification of the system has been performed on an error generating mechanism. Experimental results show the feasibility of this system for identifying geometric errors of a slide of machine tools.

• 한국정밀공학회지
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• 제23권8호
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• pp.72-79
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• 2006

We measured grating pitch standards using optical diffractometry and analyzed measurement uncertainty. Grating pitch standards have been used widely as a magnification standard for a scanning electron microscope (SEM) and a scanning probe microscope (SPM). Thus, to establish the meter-traceability in nano-metrology using SPM and SEM, it is important to certify grating pitch standards accurately. The optical diffractometer consists of two laser sources, argon ion laser (488 nm) and He-Cd laser (325 nm), optics to make an incident beam, a precision rotary table and a quadrant photo-diode to detect the position of diffraction beam. The precision rotary table incorporates a calibrated angle encoder, enabling the precise and accurate measurement of diffraction angle. Applying the measured diffraction angle to the grating equation, the mean pitch of grating specimen can be obtained very accurately. The pitch and orthogonality of two-dimensional grating pitch standards were measured, and the measurement uncertainty was analyzed according to the Guide to the Expression of Uncertainty in Measurement. The expanded uncertainties (k = 2) in pitch measurement were less than 0.015 nm and 0.03 nm for the specimen with the nominal pitch of 300 nm and 1000 nm. In the case of orthogonality measurement, the expanded uncertainties were less than $0.006^{\circ}$. In the pitch measurement, the main uncertainty source was the variation of measured pitch values according to the diffraction order. The measurement results show that the optical diffractometry can be used as an effective calibration tool for grating pitch standards.