• Title/Summary/Keyword: Purging

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HIGH-THROUGHPUT PROCESS FOR ATOMIC LAYER DEPOSITION

  • Shin, Woong-Chul;Choi, Kyu-Jeong;Baek, Min;Kim, Mi-Ry
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2009.11a
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    • pp.23.2-23.2
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    • 2009
  • Atomic layer deposition (ALD)have been proven to be a very attractive technique for the fabrication of advanced gate dielectrics and DRAM insulators due to excellent conformality and precise control of film thickness and composition, However, one major disadvantages of ALD is its relatively low deposition rate (throughput) because the deposition rate is typically limited by the time required for purging process between the introduction of precursors. In order to improve its throughput, many efforts have been made by commercial companies, for example,the modification reactor and development of precursors. However, any promising solution has not reported to date. We developed a new concept ALD system(Lucida TM S200) with high-throughput. In this process, a continuous flow of ALD precursor and purging gas are simultaneously introduced from different locations in the ALD reactor. A cyclic ALD process is carried out by moving the wafer holder up and down. Therefore, the time required for ALD reaction cycle is determined by speed of the wafer holder and vapor pressure of precursors. We will present the operating principle of our system and results of deposition.

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VLD technique for MEAs performance enhancement (MEA의 장기 성능 향상을 위한 VLD 기술 개발)

  • Lim, Sang-Jin;Kim, Hyoung-Juhn;Cho, Eun-Ae;Lee, Sang-Yeop;Lim, Tae-Hoon
    • 한국신재생에너지학회:학술대회논문집
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    • 2006.11a
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    • pp.494-497
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    • 2006
  • For commercialization of polymer electrolytemembrane fuel cell (PEMFC), durability of membrane electrode assemblies (MEAs) has to be improved. Especially, long-term stability of MEA is one of the most important issues for frequent shut-down and start-up processes of PEMFC. The degradation of MEA could be attributed to chemical attack of hydrogen peroxide radicals that are formed at high cell voltages without any special treatment to remove residual hydrogen from anode gas channel after shut-down of the fuel cell. In this study, we investigated the long-term stability of MEA under different on/off operation conditions. Residential hydrogen gas was removed from the anode flow channel by purging air or nitrogen. Also, a dummy resistance was applied to the fuel cell to exhaust residential hydrogen at the anode. In these cases, MEA showed much more stable durability. Electrochemical characteristics of the fuel cell were measured byrepeating the on/off cycles with the hydrogen removal processes. Also, degradation of MEA components was examined by SEM, TEM and XRD analyses.

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Characteristics of Tin Oxide Thin Films Deposited by PE-ALD (PE-ALD를 이용한 SnO2 Thin Film의 특성)

  • Park Yongju;Lee Woonyoung;Choi Yongkook;Lee Hyunkyu;Park Jinseong
    • Korean Journal of Materials Research
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    • v.14 no.12
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    • pp.840-845
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    • 2004
  • Tin dioxide ($SnO_2$) thin films were prepared on Si(100) substrate by PE-ALD using the $DBDTA((CH_{3}CO_2)_{2}Sn[(CH_2)_{3}CH_3]_2)$ Precursor. The properties were studied as a function of source temperature, substrate temperature, and purging time. Scanning probe microscopic images at the source temperature $50^{\circ}C$ and the substrate temperature $300^{\circ}C$ shows lower roughness than those $40/60^{\circ}C$ source and $200/400^{\circ}C$ substrate temperature samples. The purging time for optimum process was 8sec and the deposition rate was about 1 nm per 10 cycles. The conductance of $SnO_2$ thin film showed a constant region in the range of $200^{\circ}C\;to\;500^{\circ}C$. The thin films deposited for 200 cycle show a better sensitivity to CO gas.

A study on the removal of heavy metals from soils using electrokinetic soil processing and ion exchange membrane (전기장과 이온교환막을 이용한 토양에서의 중금속 제거에 대한 연구)

  • 김순오
    • Economic and Environmental Geology
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    • v.32 no.1
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    • pp.43-51
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    • 1999
  • In order to remediate hazardous waste site, a process of electrokinetically purging chemicals from saturated soil is examined by laboratory experiments. Electrokinetic soil remediation is one of the most promising soil decontamination processes that habe igh removal efficiency and time-effectiveness in low-permeability soils such as clay. Being combined with several mechanisms-electromigration, elec troosmosis, diffusion and electrolysis of water, electrokinetic soil processing can remove non-polar organics as well as ionic contaminants. The objectives of this study are; 1) the exploration of the feasibility of electrokinetic soil processing on the removal of heavy metals, 2) the investigation of applicability to the tailing-soils in aban doned mining area, 3) the examination of effects of soil pH and conductivity on the transport phenomena of elements in soils, and 4) the investigation of the applicability of the ionexchange membrance to the efficient collection of heavy metals removed from contaminated soils. With the result of this study, it is suggested that the removal efficiency is significantly influenced by applied voltage & current, type of purging solutions, soil pH, permeability and zeta potentials of soil. Although further study should be needed, it is possible to collect removed heavy metals with ion-exchange membrance in cathode compartment.

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Night Purge Evaluation Using the RTS-SAREK in Office Buildings (RTS-SAREK을 이용한 사무용 건물의 나이트 퍼지 성능 평가)

  • Shin, Dongshin;Park, Sungkeun;Park, Youngsoo;Park, Jisu;Lee, Jinyoung
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.27 no.12
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    • pp.633-638
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    • 2015
  • This study evaluates the capacity of night purging in office buildings to reduce the cooling load. RTS-SAREK is used to estimate the performance of night purging on the steady state. To overcome steady state RTS program limitations, we added unsteady heat transfer equations. When the ACH (Air Change per Hour) increases, the wall temperature decreases in both the steady and unsteady states. The unsteady heat transfer rate is different from the steady transfer rate, which validates the unsteady calculation. When ACH is low, the heat transfer rate increases continuously with time. When ACH becomes higher, the heat transfer rate increases and decreases with time. When ACH is quite high, there exists a large difference in the heat transfer rate between the steady and unsteady calculations, which emphasizes the importance of the unsteady calculation.

The Study for Development of Day Hospital Program of Eating Disorders (섭식장애를 위한 낮병원 프로그램 개발에 관한 연구)

  • 공성숙
    • Journal of Korean Academy of Nursing
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    • v.34 no.1
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    • pp.25-34
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    • 2004
  • Purpose: The purpose of this study was to develop the day hospital program for Korean eating disorders patients and to examine the effect of the day hospital program on improving frequency of binging and purging, eating disorders symptoms, self-esteem, and depression. Method: The subjects were 24 binge eaters visited at eating disorders clinic 'M'. They participated in a modified day hospital program based on the Toronto Day Hospital Program. All subjects completed the Eating Disorders Inventory(EDI)-2, Rosenberg Self-Eesteem Scale, Beck Depression Inventory(BDI) at pre and post intervention, and recorded daily food records. Results: In paired t-test analysis, frequency of binging and purging, self-esteem, depression, and 11 sub-scales of EDI-2(drive for thinness, bulimia, body dissatisfaction, ineffectiveness, interoceptive awareness, perfectionism, interpersonal distrust, maturity fear, asceticism, impulse regulation, social insecurity) were significantly improved after treatment. Conclusion: The results of this study suggest that the day hospital program for Korean eating disorders patients may be an effective initial approach to overcoming various eating disorders symptoms. Further studies should investigate longer term outcome data using a larger sample.

Hyeongok's Sabeetang Was Combined According to the Theory for Properties and Tastes of Herbal Medicines (현곡(玄谷) 사비탕(瀉脾湯)의 구성한약과 그 기미배오(氣味配伍) 분석)

  • Park, Tae-Yeol;Kim, Gyeong-Cheol;Shin, Soon-Shik
    • Herbal Formula Science
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    • v.15 no.1
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    • pp.137-144
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    • 2007
  • Background and Objectives : There are three kinds of formulas for purging the spleen to cure its sthenic syndrome based on the types of preparation formulas : Sabeetang, Sabeehwan, Sabeesan and Sabeeeum. Another formulas called Sahwangtang, Sahwangsan. Sahwangeum is to purge the yellow colour of spleen. There are 8 kinds of Sabeetang, 3 kinds of Sabeehwan, 3 kinds of Sabeesan, 1 kind of Sabeeeum, 4 kinds of Sahwangtang, 7 kinds of Sahwangsan, and 1 kind of Sahwangeum. Combination of herbal medicines, carried out in formulas for purging the spleen, consists of various kinds depending on medical scientists' personal experience in medical treatment without any general principles, which makes it difficult to apply it to clinical use. The objectives of this study lie in theoretical establishment of Sabeetang for curing the sthenic syndrome of spleen through analyzing the component medicines and combination principles of Hyeongok's Sabeetang, and furthermore, maximizing the clinical use of Sabeetang. Methods : This study analyzed the component medicines and combination principles of Hyeongok's Sabeetang based on the theory for properties and tastes of herbal medicines from the ${\ulcorner}$Yellow Emperor's Canon of Internal Medicine${\lrcorner}$ , the theory for principal herbal medicine, assistant herbal medicine, adjuvant herbal medicine, dispatcher herbal medicine, and the five elements doctrine. Hyeongok's Sabeetang is an odd prescription, composed of 7 kinds of ingredients : No.1 Rhizoma Coptidis (2don;7.5g), No.2 Fructus Gardeniae (1don;3.75g), No.3 Ramulus Cinnamomi (1don), No.4 Gypsum Fibrosum (1don), No.5 Fructus Aurantii Immaturus (1don), No.6 Cortex Magnoliae Omcinalis (1don), and No.7 Radix Et Rhizoma Rhei (1don) Results : There are three methods for curing the sthenic syndrome of spleen according to the five elements doctrine : purging the spleen, purging the lung and invigorating the liver. First, if you suffer from the sthenic syndrome of the spleen, you need to purge your spleen. There are two available methods, including taste and property purgation according to the theory for properties and tastes of herbal medicines. They each imply the bitter taste and the cool property purge the spleen. In the case of taste purgation, two herbal medicines with bitter taste. Rhizoma Coptidis and Fructus Gardeniae, are combined into the principal and assistant herbal medicine, respectively. For property purgation, three herbal medicines with the cool property, Gypsum Fibrosum, Fructus Aurantii Immaturus and Radix Et Rhizoma Rhei, are combined into adjuvant herbal medicines. Secondly, if you suffer from the sthenic syndrome of the spleen, you need to purge your lung which is child in the mother-child relationship in inter-promotion among the five elements. There are two methods to purge the lung, including taste and property purgation according to the theory for properties and tastes of herbal medicines. They each mean the pungent taste and the warm property purge the lung. Therefore, it is important to use pungent herbal medicines for taste purgation and warm ones for property purgation. Both pungent and warm herb and property invigoration to invigorate the liver with warm property. Therefore, it is important to use pungent herbal medicines for taste invigoration and warm ones for property invigoration. Both pungent and warm herbal medicines, Ramulus Cinnamomi and Cortex Magnoliae Officinalis, were combined to invigorate the liver and purge the lung. In addition, Gypsum Fibrosum are combined as dispatcher herbal medicine, leading all the herbal medicines composing the formula to the spleen. Conclusions : First, to cure the sthenic syndrome of the spleen, the methods of purging the spleen and the lung, and invigorating the liver should be used according to the five elements doctrine. Secondly, herbal medicines appropriate for those treatment methods should be chosen according to the theory for properties and tastes of herbal medicine and thirdly, the combination of those herbal medicines should be carried out according to the theory for principal herbal medicine, assistant herbal medicine, adjuvant herbal medicine, dispatcher herbal medicine. As a good example, Hyeongok's Sabeetang is combined according to the above theories. In conclusion, this formula was created by applying to the theory for properties and tastes of herbal medicines.

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Hyeongok's Sagan-tang was Combined according to the Theory for Properties and Tastes of Herbal Medicines (현곡(玄谷) 사간탕(瀉肝湯)의 구성한약과 그 기미배오(氣味配伍) 분석)

  • Won, Chan-Uk;Kim, Sang-Chan;Shin, Soon-Shik
    • Journal of Physiology & Pathology in Korean Medicine
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    • v.21 no.5
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    • pp.1341-1345
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    • 2007
  • There are four kinds of formulas for purging the liver to cure its sthenic syndrome based on the types of preparation formulas : Sagan-tang, Saganhwan, Saseem-san and Saganeum. Another formula called Sacheonghwan, Sacheong-tang and Sacheong-san is to purge the green colour of liver. There are 38 kinds of Sagan-tang, 2 kinds of Saganhwan, 29 kinds of Sagan-san, 5 kinds of Saganeum, 4 kinds of Sacheonghwan, 3 kinds of Sacheong-tang and 1 kind of Sacheong-san. Combination of herbal medicines, carried out in formulas for purging the liver, consists of various kinds depending on medical scientists' personal experience in medical treatment without any general principles, which makes it difficult to apply it to clinical use. The objectives of this study lie in theoretical establishment of Sagan-tang for curing the sthenic syndrome of liver through analyzing the component medicines and combination principles of Hyeongok's Sagan-tang, and furthermore, maximizing the clinical use of Sagan-tang. This study analyzed the component medicines and combination principles of Hyeongok's Sagan-tang based on the theory for properties and tastes of herbal medicines from the ${\ulcorner}$Yellow Emperor's Canon of Internal Medicine${\lrcorner}$, the theory for principal herbal medicine, assistant herbal medicine, adjuvant herbal medicine, dispatcher herbal medicine, and the five elements doctrine. Hyeongok's Sagan-tang is an odd prescription, composed of 7 kinds of ingredients : No.1 Radix Paeoniae (2don;7.5 g), No.2 Fructus Chaenomelis (1don;3.75 g), No.3 Radix Rehmanniae (1don), No.4 Folium Phyllostachydis Henonis (1don), No.5 Radix Bupleuri (1don), No.6 Radix Scutellariae (1don), and No.7 Radix Glycyrrhizae (1don). There are three methods for curing the sthenic syndrome of liver according to the five elements doctrine : purging the liver, purging the heart and invigorating the lung. In the case of taste purgation, two herbal medicines with sour taste, Radix Paeoniae and Fructus Chaenomelis, are combined into the principal and assistant herbal medicine, respectively. For property purgation, two herbal medicines with the cool property, Radix Bupleuri and Radix Scutellariae, are combined into adjuvant herbal medicines. Both sweet and cold herbal medicines, Radix Rehmanniae and Folium Phyllostachydis Henonis, are combined into adjuvant herbal medicines. Sour herbal medicines, Radix Paeoniae and Fructus Chaenomelis, were combined to invigorate the lung. Cool herbal medicines, Radix Bupleuri and Radix Scutellariae, were combined to invigorate the lung and to purge the liver. In addition, Radix Glycyrrhizae are combined as dispatcher herbal medicine, harmonizing all the herbal medicines composing the formula. First, to cure the sthenic syndrome of the liver, the methods of purging the liver and the heart, and invigorating the lung should be used according to the five elements doctrine. Secondly, herbal medicines appropriate for those treatment methods should be chosen according to the theory for properties and tastes of herbal medicine and thirdly, the combination of those herbal medicines should be carried out according to the theory for principal herbal medicine, assistant herbal medicine, adjuvant herbal medicine, dispatcher herbal medicine. As a good example, Hyeongok's Sagan-tang is combined according to the above theories.