• 제목/요약/키워드: Pure W layer

검색결과 53건 처리시간 0.034초

Pd 촉매의 부분 산화 조절을 이용한 SnO$_2$박막 센서의 CH$_4$감도 변화 연구 (The effect of initial Pd catalyst oxidation stale on CH$_4$sensitivity of SnO$_2$thin film sensor)

  • 최원국;조정;조준식;송재훈;정형진;고석근
    • 마이크로전자및패키징학회지
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    • 제6권2호
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    • pp.45-49
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    • 1999
  • 이온빔 보조 증착법을 이용하여 제작한 $SnO_2$박막을 기저 물질로한 가연성 센서에 catalyst로 ultra-thin Pd layer를 이온빔 스퍼터링으로 흡착시켰다. 가연성 기체의 센싱 메카니즘에서 Pd 촉매의 역할을 정확하게 조사하기 위해서 진공 및 공기 상에서 annealing 함으로서 Pd 촉매의 초기 산화 상태를 조절하였다. 촉매가 순수한 금속 Pd 클러스터 상태로 존재하는 $SnO_2$센서의 경우에는 PdO 클러스터가 있는 것에 비해 높은 감응성을 보였다. 이것은 PdO 클러스터가 표면 acceptor로 작용을 하는 것으로 생각되며 $SnO_2$로 부터 Pd sub-channel을 통해 전자를 받아 센서의 감도를 낮추고 응답시간을 늦추는 것으로 생각된다.

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Influence of gas mixture ratio on the secondary electron emission coefficient (${\gamma}$) of MgO single crystals and MgO protective layer in surface discharge AC-PDPs

  • Lim, J.Y.;Jung, J.M.;Kim, Y.G.;Ahn, J.C.;Cho, T.S.;Cho, D.S.;Kim, J.G.;Kim, T.Y.;Kim, S.S.;Jung, M.W.;Choi, S.H.;Ko, J.J.;Kim, D.I.;Lee, C.W.;Seo, Y.;Cho, G.S.;Kang, S.O.;Choi, E.H.
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2000년도 제1회 학술대회 논문집
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    • pp.117-118
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    • 2000
  • The secondary electron emission coefficient ${\gamma}$ of MgO single crystals according to the gas mixture ratio of Xe to Ne have been investigated by ${\gamma}-focused$ ion beam system. It is found that the MgO single crystals of (111) crystallinity has the highest ${\gamma}$ from 0.09(0.03) up to 0.16(0.04), while from 0.07(0.02) to 0.15(0.03) for (200) and from 0.06(0.01) to 0.13(0.02) for (220) crystallinity for operating Ne (Xe) ions ranging from 50eV to 200eV throughout this experiment. And it is found that the ${\gamma}$ ranged from 0.03 up to 0.06 for Ne-Xe mixtures are much smaller than those of 0.09 up to 0.16 for pure Ne ions under accelerating voltage ranged from 50V to 200V.

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Classification of Red Wines by Near Infrared Transflectance Spectroscopy

  • W.Guggenbichler;Huck, C.W.;M.Popp;G.K.Bonn
    • 한국근적외분광분석학회:학술대회논문집
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    • 한국근적외분광분석학회 2001년도 NIR-2001
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    • pp.1516-1516
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    • 2001
  • During the recent years, wine analysis has played an increasing role due the health benefits of phenolic ingredients in red wine [1]. On the other hand there is the need to be able to distinguish between different wine varieties. Consumers want to know if a wine is an adulterated one or if it is based on the pure grape. Producers need to certificate their wines in order to ensure compliance with legal regulations. Up to now, the attempts to investigate the origin of wines were based on high-performance liquid chromatography (HPLC), gas chromatography (GC) and pyrolysis mass spectrometry (PMS) [l,2,3]. These methods need sample pretreatment, long analysis times and therefore lack of high sample throughput. In contradiction to these techniques using near infrared spectroscopy (NIRS), no sample pretreatment is necessary and the analysis time for one sample is only about 10 seconds. Hence, a near infrared spectroscopic method is presented that allows a fast classification of wine varieties in bottled red wines. For this, the spectra of 50 bottles of Cabernet Sauvignon, Lagrein and Sangiovese (Chianti) were recorded without any sample pretreatment over a wavelength range from 1000 to 2500 nm with a resolution of 12 cm$\^$-1/. 10 scans were used for an average spectrum. In order to yield best reproducibility, wines were thermostated at 23$^{\circ}C$ and a optical layer thickness of 3 mm was used. All recorded spectra were partitioned into a calibration and validation set (70% and 30%). Finally, a 3d scatter plot of the different investigated varieties allowed to distinguish between Cabernet Sauvignon, Lagrein and Sangiovese (Chianti). Considering the short analysis times this NRS-method will be an interesting tool for the quality control of wine verification and also for experienced sommeliers.

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Research of Diffusion Bonding of Tungsten/Copper and Their Properties under High Heat Flux

  • Li, Jun;Yang, Jianfeng
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2011년도 춘계학술발표대회
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    • pp.14-14
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    • 2011
  • W (tungsten)-alloys will be the most promising plasma facing armor materials in highly loaded plasma interactive components of the next step fusion reactors due to its high melting point, high sputtering resistance and low deuterium/tritium retention. The bonding technology of tungsten to Cu alloy was one of the key issues. In this paper, W/CuCrZr diffusion bonding has been performed successfully by inserting pure metal interlay. The joint microstructure, interfacial elements migration and phase composition were analyzed by SEM, EDS, XRD, and the joint shear strength and micro-hardness were investigated. The mock-ups were fabricated successfully with diffusion bonding and the cladding technology respectively, and the high heat flux test and thermal fatigue test were carried out under actively cooling condition. When Ni foil was used for the bonding of tungsten to CuCrZr, two reaction layers, Ni4W and Ni(W) layer, appeared between the tungsten and Ni interlayer with the optimized condition. Even though Ni4W is hard and brittle, and the strength of the joint was oppositely increased (217 MPa) due primarily to extremely small thicknesses (2~3 ${\mu}m$). When Ti foil was selected as the interlayer, the Ti foil diffused quickly with Cu and was transformed into liquid phase at $1,000^{\circ}C$. Almost all of the liquid was extruded out of the interface zone under bonding pressure, and an extremely thin residual layer (1~2 ${\mu}m$) of the liquid phase was retained between the tungsten and CuCrZr, which shear strength exceeded 160 MPa. When Ni/Ti/Ni multiple interlayers were used for bonding of tungsten to CuCrZr, a large number of intermetallic compound ($Ni_4W/NiTi_2/NiTi/Ni_3T$) were formed for the interdiffusion among W, Ni and Ti. Therefore, the shear strength of the joint was low and just about 85 MPa. The residual stresses in the clad samples with flat, arc, rectangle and trapezoid interface were estimated by Finite Element Analysis. The simulation results show that the flat clad sample was subjected maximum residual stress at the edge of the interface, which could be cracked at the edge and propagated along the interface. As for the rectangle and trapezoid interface, the residual stresses of the interface were lower than that of the flat interface, and the interface of the arc clad sample have lowest residual stress and all of the residual stress with arc interface were divided into different grooved zones, so the probabilities of cracking and propagation were lower than other interfaces. The residual stresses of the mock-ups under high heat flux of 10 $MW/m^2$ were estimated by Finite Element Analysis. The tungsten of the flat interfaces was subjected to tensile stresses (positive $S_x$), and the CuCrZr was subjected to compressive stresses (negative $S_x$). If the interface have a little microcrack, the tungsten of joint was more liable to propagate than the CuCrZr due to the brittle of the tungsten. However, when the flat interface was substituted by arc interfaces, the periodical residual stresses in the joining region were either released or formed a stress field prohibiting the growth or nucleation of the interfacial cracks. Thermal fatigue tests were performed on the mock-ups of flat and arc interface under the heat flux of 10 $MW/m^2$ with the cooling water velocity of 10 m/s. After thermal cycle experiments, a large number of microcracks appeared at the tungsten substrate due to large radial tensile stress on the flat mock-up. The defects would largely affect the heat transfer capability and the structure reliability of the mock-up. As for the arc mock-up, even though some microcracks were found at the interface of the regions, all microcracks with arc interface were divided into different arc-grooved zones, so the propagation of microcracks is difficult.

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Al$_2$O$_3$ 표면 보호층이 박막형 $SnO_2$ 가스센서의 감지 특성에 미치는 영향 (Effects of an $Al_2$O$_3$Surfasce Protective Layer on the Sensing Properties of $SnO_2$Thin Film Gas Sensors)

  • 성경필;최동수;김진혁;문종하;명태호
    • 한국재료학회지
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    • 제10권11호
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    • pp.778-783
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    • 2000
  • 고주파 스피터 방법으로 제조된 SnO$_2$감지막 위에 에어로졸 화염 증착법으로 알루미나 표면 보호층을 증착하여 SnO$_2$박막 가스 센서의 감지 특성에 미치는 영향에 대햐여 조사하였고, 표면 보호층에 귀금속 Pt를 도핑하여 Pt의 함량이 CO 및 CH(sub)4 가스들의 선택성에 미치는 영향에 대하여 조사하였다. SnO$_2$박막은 R.F power 50 W, 공정 압력 4 mtorr, 기판온도 20$0^{\circ}C$에서 30분간 0.3$\mu\textrm{m}$ 두께로 Pt 전극 위에 제조하였고, 질산알루미늄(Al(NO$_3$).9$H_2O$) 용액을 희석하여 에어로졸 화염증착법으로 알루미나 표면 보호층을 만든후 $600^{\circ}C$에서 6시간동안 산소분위기에서 열처리하였다. 알루미나 표면 보호층이 증착된 SnO$_2$가스 센서소자의 경우 보호층이 없는 가스 센서와 비교하여 CO 가스에 대한 감도는 매우 감소하였으나 CH$_4$가스에 대한 감도 특성은 순수한 SnO$_2$센서 소자와 비슷하였다. 결과적으로 보호층을 이용하여 CH$_4$가스에 대한 상대적인 선택성 증가를 이룰 수 있었다. 특히 표면 보호층에 Pt가 첨가된 센서 소자의 경우 CO 가스에 대해서는 낮은 감도 특성을 나타내었으나 CH$_4$에 대한 감도는 매우 증가하여 CH$_4$가스의 선택성을 더욱 증대시킬 수 있었다. CH$_4$가스 선택성 향상에 미치는 알루미나 표면 보호층과 Pt의 역할에 대하여 고찰해 보았다.

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$N_2$$SiH_4$ 가스를 사용하여 PECVD로 증착된 Silicon Nitride의 물성적 특성과 전기적 특성에 관한 연구 (Physical properties and electrical characteristic analysis of silicon nitride deposited by PECVD using $N_2$ and $SiH_4$ gases)

  • 고재경;김도영;박중현;박성현;김경해;이준신
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 춘계학술대회 논문집 유기절연재료 전자세라믹 방전플라즈마 일렉트렛트 및 응용기술
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    • pp.83-87
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    • 2002
  • Plasma enhanced chemical vapor deposited (PECVD) silicon nitride ($SiN_X$) is widely used as a gate dielectric material for the hydrogenated amorphous silicon(a-Si:H) thin film transistors (TFT's). We investigated $SiN_X$ films were deposited PECVD at low temperature ($300^{\circ}C$). The reaction gases were used pure nitrogen and a helium diluted of silane gas(20% $SiH_4$, 80% He). Experimental investigations were carried out with the variation of $N_2/SiH_4$ flow ratios from 3 to 50 and the rf power of 200 W. This article presents the $SiN_X$ gate dielectric studies in terms of deposition rate, hydrogen content, etch rate and C-V, leakage current density characteristics for the gate dielectric layer of thin film transistor applications. Electrical properties were analyzed through high frequency (1MHz) C-V and current-voltage (I-V) measurements. The thickness and the refractive index on the films were measured by ellipsometry and chemical bonds were determined by using an FT-IR equipment.

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열가소성 섬유금속적층판의 온도를 고려한 유동응력 예측에 대한 연구 (Evaluation of the Temperature Dependent Flow Stress Model for Thermoplastic Fiber Metal Laminates)

  • 박으뜸;이병언;강동식;김정;강범수;송우진
    • 소성∙가공
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    • 제24권1호
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    • pp.52-61
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    • 2015
  • Evaluation of the elevated temperature flow stress for thermoplastic fiber metal laminates(TFMLs) sheet, comprised of two aluminum sheets in the exterior layers and a self-reinforced polypropylene(SRPP) in the interior layer, was conducted. The flow stress as a function of temperature should be evaluated prior to the actual forming of these materials. The flow stress can be obtained experimentally by uniaxial tensile tests or analytically by deriving a flow stress model. However, the flow stress curve of TFMLs cannot be predicted properly by existing flow stress models because the deformation with temperature of these types of materials is different from that of a generic pure metallic material. Therefore, the flow stress model, which includes the effect of the temperature, should be carefully identified. In the current study, the flow stress of TFMLs were first predicted by using existing flow stress models such as Hollomon, Ludwik, and Johnson-Cook models. It is noted that these existing models could not effectively predict the flow stress. Flow stress models such as the modified Hollomon and modified Ludwik model were proposed with respect to temperatures of $23^{\circ}C$, $60^{\circ}C$, $90^{\circ}C$, $120^{\circ}C$. Then the stress-strain curves, which were predicted using the proposed flow stress models, were compared to the stress-strain curves obtained from experiments. It is confirmed that the proposed flow stress models can predict properly the temperature dependent flow stress of TFMLs.

생활폐기물(生活廢棄物) 소각(燒却) 바닥재의 자력선별(磁力選別)에 따른 ferrous material의 분리(分離) 특성(特性) (Separation of Ferrous Materials from Municipal Solid waste Incineration Bottom Ash)

  • 엄남일;한기천;유광석;조희찬;안지환
    • 자원리싸이클링
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    • 제16권3호
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    • pp.19-26
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    • 2007
  • 도심지에서 발생하는 생활폐기물들은 재활용 가능한 목재나 iron 등을 분리시킨 후 소각장으로 보내지기 때문에 자기류나 유리류 그리고 가장 많은 양을 차지하고 있는 가연성 물질로 존재하게 된다. 하지만 소각 전 분리 공정에도 불구하고 생활폐기물에서의 iron의 함유량은 약 $3{\sim}11%$에 달하고 있다. 이러한 iron은 소각로에서 소각 처리될 경우 약 $1000^{\circ}C$의 온도(로의 내부 온도)에서 산화반응에 의해 표면에 산화물 층을 형성하게 된다. 소각된 바닥재는 water-cooling냉각 처리를 통해 냉각되며 물과 접촉한 iron 표면의 산화물 층은 심한 붕괴가 일어나 부식작용이 더욱 활발히 일어나며 많은 양의 ferrous material($Fe_3O_4,\;Fe_2O_3,\;FeS_2$)을 생성하게 된다. 이러한 iron과 ferrous material은 산화 환원 작용에 의해 부피변화를 일으키기 때문에 시멘트 골재 등으로의 재활용 시 많은 문제점을 일으킬 수 있다. 따라서 본 연구에서는 소각 바닥재를 이용하여 각 입도별 자력선별에 따른 ferrous material의 분리 특성에 대해 연구하였다. 그 결과 전체 바닥재의 약 18.7%(ferrous product; $Fe_3O_4,\;Fe_2O_3,\;FeS_2$, iron)가 자력선별(자력세기:3800gauss)에 의해 분리 되었으며 1.18mm이상의 입도에서 전체 ferrous product의 87.7%가 분포하였다. iron의 경우 전체 바닥재의 약 3.8%의 함유량을 보였으며 1.18mm이상의 입도에서 전체 iron의 99%이상이 존재하였다.

강유전체 기억소자 응용을 위한 하부전극 최적화 연구 (Bottom electrode optimization for the applications of ferroelectric memory device)

  • 정세민;최유신;임동건;박영;송준태;이준식
    • 한국결정성장학회지
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    • 제8권4호
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    • pp.599-604
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    • 1998
  • 본 논문은 PZT 박막의 기억소자 응용을 위한 Pt 그리고 RuO2 박막을 조사하였다. 초고주파 마그네트론 스퍼터링 방법을 이용하여 하부전극을 성장하였으며, 조사된 실험변수는 기판온도, 가스 부분압, RF 전력 그리고 후열처리 등이다. 기판온도는 Pt, $RuO_2$박막의 결정구조 뿐만 아니라 표면구조 및 비저항 성분에 크게 영향을 주었다. Pt 박막의 XRD 분석으로 기판온도가 상온에서 $200^{\circ}C$까지는 (111) 그리고 (200) 면이 혼재하는 결과를 보였으나 $300^{\circ}C$에서는 (111) 면으로 우선 방위 성장 특성을 보였다. XRD와 AFM 해석으로부터 Pt 박막 성장시 기판온도 $300^{\circ}C$, RF 전력 80W가 추천된다. 산소 분압비를 0~50%까지 가변하여 조사한 결과 산소가 5% 미만으로 공급되면 Ru 금속이 성장되고, 산소 분압비가 10 ~40%까지는 Ru와 $RuO_2$ 상이 공존하였으며 산소 분압비가 50%에서는 순수한 $RuO_2$상만이 검축되었다. 이 결과로부터 RuO2/Ru 이층 구조의 하부전극 형성이 산소 가스 부분압을 조절하여 한번의 공정으로 성장 가능하며, 이런 구조를 이용하면 금속의 낮은 비저항을 유지하면서도 PZT 박막의 산소 결핍에 의한 기억소자의 피로도 문제를 완화할 것으로 사료된다. 후 열처리 온도를 상온에서부터 $700^{\circ}C$까지 증가할 때 Pt와 $RuO_2$의 비저항 성분은 선형적 감소 추세를 보였다. 본 논문은 강유전체 기억소자 응용을 위한 최적화된 하부전극 제적조건을 제시한다.

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Morphology of RF-sputtered Mn-Coatings for Ti-29Nb-xHf Alloys after Micro-Pore Form by PEO

  • Park, Min-Gyu;Park, Seon-Yeong;Choe, Han-Cheol
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2016년도 추계학술대회 논문집
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    • pp.197-197
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    • 2016
  • Commercially pure titanium (CP Ti) and Ti-6Al-4V alloys have been widely used for biomedical applications. However, the use of the Ti-6Al-4V alloy in biomaterial is then a subject of controversy because aluminum ions and vanadium oxide have potential detrimental influence on the human body due to vanadium and aluminum. Hence, recent works showed that the synthesis of new Ti-based alloys for implant application involves more biocompatible metallic alloying element, such as, Nb, Hf, Zr and Mo. In particular, Nb and Hf are one of the most effective Ti ${\beta}-stabilizer$ and reducing the elastic modulus. Plasma electrolyte oxidation (PEO) is known as excellent method in the biocompatibility of biomaterial due to quickly coating time and controlled coating condition. The anodized oxide layer and diameter modulation of Ti alloys can be obtained function of improvement of cell adhesion. Manganese(Mn) plays very important roles in essential for normal growth and metabolism of skeletal tissue in vertebrates and can be detected as minor constituents in teeth and bone. Radio frequency(RF) magnetron sputtering in the various PVD methods has high deposition rates, high-purity films, extremely high adhesion of films, and excellent uniform layers for depositing a wide range of materials, including metals, alloys and ceramics like a hydroxyapatite. The aim of this study is to research the Mn coatings on the micro-pore formed Ti-29Nb-xHf alloys by RF-magnetron sputtering for dental applications. Ti-29Nb-xHf (x= 0, 3, 7 and 15wt%, mass fraction) alloys were prepared Ti-29Nb-xHf alloys of containing Hf up from 0 wt% to 15 wt% were melted by using a vacuum furnace. Ti-29Nb-xHf alloys were homogenized for 2 hr at $1050^{\circ}C$. Each alloy was anodized in solution containing typically 0.15 M calcium acetate monohydrate + 0.02 M calcium glycerophosphate at room temperature. A direct current power source was used for the process of anodization. Anodized alloys was prepared using 270V~300V anodization voltage at room. Mn coatings was produced by RF-magnetron sputtering system. RF power of 100W was applied to the target for 1h at room temperature. The microstructure, phase and composition of Mn coated oxide surface of Ti-29Nb-xHf alloys were examined by FE-SEM, EDS, and XRD.

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