• Journal of the Korean Vacuum Society
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• v.6 no.4
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• pp.308-313
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• 1997

TDS (Thermal Lkso~ption Spectroscopy)system, for diagnosis of CRT manufacturing process, was designed and constructed. Outgassings and themla1 desorptions from the part or materials of CRT can be measured and analysed with this system at various temperatures. The system is consisted of 3 pirrts. vacuum chamher and pumping system with variable conductance, sample heating stages & their controller, and outgassing measurement devices, like as ion gauge or quadrupole mass spectrometer. The ultimate pressure of the system was under $1\times10^{-7}$ Pa. With the variable conductance system, the effective pumping speed of the chamber could he controlled from sub 11s to 100 11s. The effective pumping speed values were determined by dynamic flow measurement principle. The temperatures and ramp rate of sample were controlled by tungsten heater and PID controller up to $600^{\circ}C$ within t $\pm 1^{\circ}C$$difference to setting value. Ion gauge & QMS were calibrated for quantitative measurements. Some examples of TDS measurement data ;ind application on the CRT process analysis were shown.

• Water for future
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• v.26 no.1
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• pp.63-69
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• 1993

Remediation technology becomes an issue in environmental engineering. The vibro-recovery technique is one of popular means to remove pollutants from contaminated soils and groundwater. Using Ultrasonic excitation in soil-fluid medium, it was found that removal efficiency in a mechanical effects was significant. In this paper, therefore, laboratory experiments were conducted on clayey sand soil columns using a probe-type ultrasonic processor. Ultrasonic treatment with simultaneous pumping enhances dislodgement of clay particles, and ultrasonic excitation reduced the proportions of finer particles and thus result in increased hydraulic conductivity significantly. Also, the results provided the changes in grain size distribution curve of the soil due to ultrasonic excitation. The results indicated that the maximum size of particles mobilized by Ultrasonic is about 0.004mm and particles in the size range from 0.04mm to 1.0mm were subjected to fracturing. The economic feasibility of Ultrasonic implementation is considered in power requirement of the generator and maintenance of the horn. At a specified amplitude of vibrations, the power requirement of the generator depends on overburden pressure of the horn, temperature and viscosity of fluid in the soil medium. For comparisons, the requirement of a one inch and two inch diameter horn sonicators are compared with the power required for pumping water from different depths.

• Journal of the Korean Vacuum Society
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• v.7 no.1
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• pp.1-4
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• 1998

We have developed an extreme high vacuum (XHV) system using a new combination pump cpmposed of a suitably shaped NEG(Non-Evaporable Getters) in the body of a sputter-ion pump (SIP). The stainless-steel test chamber was used which had been well oxidized at $450^{\circ}C$ and already yielded XHV with a turbomolecular pumping system. The pressure was measured by a Leybold extractor gauge (EXG,limit:1~$2{\times}10^{-12}$torr, but in the ultimate pressure regionthe EXG shows an unusual sign as $-0.{\times}10^{-12}$ torr which indicates much lower pressure range than its available lower limit. These results are mainly due to the high pumping speed of NEG for hydrogen. Furthermore, use of the SIP combined with the NEG as a XHV pumping system implies the potential for actualization of the surface analysis under XHV environment, and allows one to have a chance tp meet a new world in nanometer science and technology.

• Journal of the Korean Society of Safety
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• v.26 no.1
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• pp.1-7
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• 2011

When the pumps stopped in the operation by the power failure, the hydraulic transients take place in the sudden change of a velocity of pipe line. Each and every water hammer problem shows the critical stage to be greatly affected the facts of safety and reliability in case of power failure. The field tests of the water hammer executed at Cheong-Yang booster pump station having an air chamber. The effects were studied by both the practical experiments and the CFD(Computational Fluid Dynamics : Surge 2008). The result states that the system with water hammering protection equipment was much safer when power failure happens. The following data by a computational fluid dynamic analysis are to be shown below, securing the system stability and integrity. (1) With water hammering protection equipment. (1) Change of pressure : Up to $15.5\;kg/cm^2$ in contrary to estimating $16.88\;kg/cm^2$. (2) Change rate of water level : 52~33% in contrary to estimating 55~27%. (3) Note that the operational pressure of pump runs approx. 145 m, lowering 155 m of the regularity head of pump. (4) Note that the cycle of water hammering delays from 80 second to 100 second, together with easing the function of air value at the pneumatic lines. (2) Change of pressure without water hammering protection equipment : Approximate $22.86\;kg/cm^2$. The comprehensive result says that the computational fluid dynamics analysis would match well with the practical field-test. It was able to predict Max. or Min. water hammering time in a piping system. This study aims effectively to alleviate water hammering in a pipe line to be installed with air chamber at the pumping station and results in making the stability of pump system in the end.

• Nuclear Engineering and Technology
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• v.37 no.3
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• pp.279-286
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• 2005

A prototype of a relativistic proton generation system, based on laser-induced plasma interaction, has been designed and fabricated. The system is composed of three major parts: a fs TW laser; a target chamber, including targets and controls; and a diagnostic system for charged particles and lasers. An Offner-type pulse stretcher for chirped pulse amplification (CPA) and eight pass pre-amplifier are installed. The main amplifier will be integrated with a new pumping laser. The design values of the laser at the first stage are 1 TW in power and 50 fs in pulse duration. We expect to generate protons with their maximum energy of approximately 3 MeV and the flux of at least $10^6$ per pulse using a 10 $\mu$m Al target. A prototype target chamber with eight 8-inch flanges, including target mounts, has been designed and fabricated. For laser diagnostics, an adaptive optics based on the Shack-Hartmann type, beam monitoring, and alignment system are all under development. For a charged particle, CR-39 detectors, a Thomson parabola spectrometer, and Si charged-particle detectors will be used for the density profile and energy spectrum. In this paper, we present the preliminary design for laser-induced proton generation. We also present plans for future work, as well as theoretical simulations.

• Journal of the Korean Vacuum Society
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• v.19 no.1
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• pp.1-9
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• 2010

A dynamic flow system has been developed which can be used for vacuum gauge calibration by comparison method - a calibration method in which the reading of the gauge under calibration is compared to another calibrated vacuum gauge called the "secondary standard" - and other vacuum-related experiments. The chamber of the calibration system is pumped by a turbomolecular pump (TMP), backed by a scroll pump. As maximum acceptable pressure at the inlet of a TMP is 0.1 Pa, above which the TMP decelerates, the pumping speed decreases and it becomes more difficult to adjust pressure under such circumstances. In the present work, high pressures of up to 133 Pa have been generated in the chamber of the newly developed dynamic flow control system by installing a well-designed conductance-reducer in the by-pass line and, at the same time, operating the TMP in safe mode. In addition, the gas flow and pressure distribution within the chamber have been investigated for the entire pressure range (0.1 Pa ~ 133 Pa) while generating pressure dynamically. Maximum deviations in pressure (1.6 %) were observed at point C on the chamber, which is close to the gas inlet port on the top of the chamber.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.258-258
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• 2014

Spark discharge in water generates shockwaves which have been utilized to generate mechanical actuation for potential use in pumping application. Discharge pulses of several microseconds generate shockwaves and vapor bubbles which subsequently displace the water for a period of milliseconds. Through the use of a sealed discharge chamber and metal bellow spring, the fluid motion can be used create an oscillating linear actuator. Continuous actuation of the bellow has been demonstrated through the use of high frequency spark discharge. Discharge in water forms a region of high electric field around the electrode tip which leads to the creation of a thermal plasma channel. This process produces fast thermal expansion, vapor and bubble generation, and a subsequent shockwave in the water which creates physical displacement of the water [1]. Previous work was been conducted to utilize the shockwave effect of spark discharge in water for the inactivation of bacteria, removal of mineral fouling, and the formation of sheet metal [2-4]. Pulses ranging from 25 to 40 kV and 600 to 900 A are generated inside of the chamber and the bellow motion is captured using a slow motion video camera. The maximum displacements measured are from 0.7 to 1.2 mm and show that there is a correlation between discharge energy input to the water and the displacement that is generated. Subsequent oscillations of the bellow are created by the spring force of the bellow and vapor in the chamber. Using microsecond shutter speed ICCD imaging, the development of the discharge bubble and spark can be observed and measured.

• Korean Journal of Materials Research
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• v.18 no.3
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• pp.148-152
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• 2008

A new cost-effective atomic layer deposition (ALD) technique, known as Proximity-Scan ALD (PS-ALD) was developed and its benefits were demonstrated by depositing $Al_2O_3$ and $HfO_2$ thin films using TMA and TEMAHf, respectively, as precursors. The system is consisted of two separate injectors for precursors and reactants that are placed near a heated substrate at a proximity of less than 1 cm. The bell-shaped injector chamber separated but close to the substrate forms a local chamber, maintaining higher pressure compared to the rest of chamber. Therefore, a system configuration with a rotating substrate gives the typical sequential deposition process of ALD under a continuous source flow without the need for gas switching. As the pressure required for the deposition is achieved in a small local volume, the need for an expensive metal organic (MO) source is reduced by a factor of approximately 100 concerning the volume ratio of local to total chambers. Under an optimized deposition condition, the deposition rates of $Al_2O_3$ and $HfO_2$ were $1.3\;{\AA}/cycle$ and $0.75\;{\AA}/cycle$, respectively, with dielectric constants of 9.4 and 23. A relatively short cycle time ($5{\sim}10\;sec$) due to the lack of the time-consuming "purging and pumping" process and the capability of multi-wafer processing of the proposed technology offer a very high through-put in addition to a lower cost.

• Journal of the Korean Vacuum Society
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• v.19 no.3
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• pp.190-198
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• 2010

Asymmetric model for plasma uniformity by Ar and $CF_4$ was modeled by the antenna structure, the diameter of chamber, and the distance between source and substrate for the development of plasma equipment for 450 mm wafer. The aspect ratio of chamber was divided by diameter, distance from substrate, and pumping port area. And we found the condition with the optimized plasma uniformity by changing the antenna structure. The drift diffusion and quasi-neutrality for simplification were used, and the ion energy function was activated for the surface recombination and etching reaction. The uniformity of plasma density on substrate surface was improved by being far of the distance between substrate wall and chamber wall, and substrate and plasma source. And when the antenna of only 2 turns was used, the plasma uniformity can improve from 20~30% to 4.7%.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.2672-2677
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• 2007

An investigation of low Reynolds number flow in nozzles and diffusers which are widely used in the valveless micropump is presented. Flow characteristics in the nozzle and diffuser are explained in view of viscous effect and flow oscillation induced by pumping membrane. These calculation results show that the rectification property of valveless micropump is due to a flow separation in the diffuser and the separation is largely originated from the flow oscillation. Under the assumptions of steady flow velocity profile and flow separation in the diffuser, simplified analytical models are provided to see the dependency of rectification on the micropump geometry. Geometric parameters of channel length, nozzle throat, chamber size, and converging/diverging angle are depicted through the analytical models in low Reynolds number flow, and the prediction and experimental results are compared. This theoretical study can be used to determine the optimum geometry of valveless micropump.