• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.430-430
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• 2012

Modulated pulsed power (MPP) 스퍼터링은 펄스 전압 shape, amplitude, duration의 modulation을 통해 증착율 손실을 극복하는 고출력 펄스 마그네트론 스퍼터링의 한 종류이다. Micro second 범위에서 on/off 시간을 다중 세트 형태로 자유롭게 프로그램 할 수 있어서 아킹 없이 고전류 영역의 마그네트론 동작을 할 수 있으므로, 고주파 유도 결합 플라즈마원이나 마이크로웨이브 투입 등의 부가적인 플라즈마 없이도 스퍼터링 재료의 이온화 정도를 획기적으로 높일 수 있는 장점을 가지고 있다. 본 연구에서는 $2{\times}1{\times}0.2$의 sputtering system에서 기판 캐리어를 이용해서 $400{\times}400mm$ 기판을 $272{\times}500mm$ 크기의 AZO target (Al 2 wt%)이 설치되어 있는 moving magnet cathode (MMC)을 이용하여 MPP로 증착했다. 두 종류의 micro pulse set을 하나의 macro pulse에 사용함으로서 weakly ionized plasma와 strongly ionized plasma를 만들 수 있다. 다양한 micro pulse set을 이용하여 평균 전력 2 kW에서 peak 전력을 4 kW에서 45 kW까지 상승 시킬 수 있으며, 이 때 타겟-기판 거리 80 mm에서 이온전류밀도는 $5mA/cm^2$에서 $20mA/cm^2$까지 상승했다. MPP는 같은 평균 전력에서 repetition frequency가 증가할 때, 증착 속도가 증가했으며, 같은 repetition frequency에서 macro pulse length가 증가할 때도, 증착 속도가 증가했다. 최적화된 marco, micro pulse set에서 증착 속도는 평균 전력 2 kW에서 110 nm/min이었고, 700 nm의 박막에서 비저항은 $1-2{\times}10^{-3}ohm{\cdot}cm$였다. 표면거칠기 Rrms는 약 3 nm였고, 400-700 nm 영역의 평균 투과도는 72-76%였다.

• Nuclear Engineering and Technology
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• v.51 no.3
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• pp.776-783
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• 2019

Laser welding is usually a more effective method than electron-beam one since a vacuum chamber is not required. It is important for joining Zr-1%Nb (E110) alloy in a manufacturing process of nuclear fuel rods. In the present work, effect of energy parameters of pulsed laser welding on properties of butt joints of sheets with a thickness of 0.5 mm is investigated. The most efficient combination has been found (8-11 J pulse energy, 10-14 ms pulse duration, 780-810 W peak pulse power, 3 Hz pulse frequency, 1.12 mm/s welding speed). The results show that ultimate strength under static loading can not be used as a quality criterion for zirconium alloys welds. Increased shielding gas flow rate does not allow to protect weld metal totally and contributes to defect formation without using special nozzles. Several types of imperfections of the welds have been found, but the major problem is branching microcracks on the surface of the welds. It is difficult to identify the cause of their appearance without additional research on improving the welding zone protection (gas composition and flow rate as well as nozzle configuration) and studying the hydrogen content in the welds.

• Laser Solutions
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• v.4 no.1
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• pp.29-38
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• 2001

This work was carried out to investigate the welding behavior of thin A3003 Al alloy sheets by Nd : YAG laser beam. Considering bead shape and mechanical properties, the laser pulse shapes selected were two kinds of 2-division and 3-division by varying power level and pulse duration. In order to obtain optimum conditions, the factorial design method and central composite design method were applied. Tensile test, optical microscopy, micro hardness test and TEM analysis were performed. Due to the annealing caused by thermal effect during laser welding, precipitates were coarsended. The HAZ was softened and failed during tensile test. The hardness of HAZ was lower than that of base metal, since the heat input relieved the work hardening effect and caused grain growth.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2000.10a
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• pp.568-572
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• 2000

This paper describes the experimental results of a transient impedance characteristics of grounding rods to a square pulse and standard lightning impulse current. The test were performed on single grounding rod($\phi$ 10mm, 1m) and triple-grounding rods( $\phi$ 10mm, 1m) of equilateral triangles with 5m spacing. For measurements of transient impedance, a pulse generator which can produce square wave of 30ns rise time and 20U Pulse duration was designed and fabricated. In the experiment, transient impedance of the grounding systems have been investigated from the recorded potential and current waveforms. The results showed that the value of the transient impedance is quite higher than the stationary resistance, and provide useful information for the value of a grounding system considered transient characteristics under a high frequency condition such as lightning stokes and ground-fault.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.3
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• pp.134-140
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• 2008

Micro electrochemical machining (ECM) is conducted on stainless steel 304 using non-toxic electrolyte of citric acid. Electrochemical dissolution region is minimized by applying a few hundred second duration pulses between the tungsten SPM tip and the work material. ECM characteristics according to citric acid concentration, feeding velocity and electric conditions such as pulse amplitude, pulse frequency, and offset voltage are investigated through a series of experiments. Micro holes of $60{\mu}m$ in diameter with the depth of $50{\mu}m$ and $90{\mu}m$ in diameter with the depth of $100{\mu}m$ are perforated. Square and circular micro cavities are also manufactured by electrochemical milling. This research can contribute to the development of safe and environmentally friendly micro ECM process.

• Steel and Composite Structures
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• v.46 no.2
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• pp.203-210
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• 2023

In the present research, dynamic deflections of a sandwich beam having functionally graded (FG) porous core have been investigated assuming that the sandwich beam is exposed to a pulse load of blast type. The two layers of sandwich beam have been made of a polymeric matrix reinforced by graphene oxide powder (GOP). The micromechanical formulation of the layers has been done via Halpin-Tsai model. The solution method is chosen to be Ritz method which is an efficient method to solve the system of equations of beams modeled based on a higher-order theory. To derive the time history of sandwich beam under pulse load, Laplace method has been used. The porosity content of the core, the GOP content of the layers, thickness of the layer and also duration of the applied load have great influences of the responses of sandwich beam.

• Transactions of Materials Processing
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• v.19 no.8
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• pp.517-522
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• 2010

Selective laser melting (SLM) is emerged as a new manufacturing technique to directly fabricate precise parts using metallic materials. The final characteristics of a component fabricated through the SLM process are strongly dependent upon various parameters such as laser power, scan rate and pulse duration, etc. This paper, therefore, focuses on the dimensional characteristics of melted $20{\mu}m$ Fe-Cr-Ni powder by fiber laser for the selective laser melting process. With energy density decrease, the height and depth were decreased. Although the conditions are of the same energy density, the shape is different by laser power and scan rate. The shapes at various laser parameters were divided into 3 groups based on depth over height. The smooth regular shape is obtained under the conditions of $50{\mu}m$ of powder height and $15-20{\mu}s$ of pulse duration. And the laser power influenced the variation of shape more significantly than the scan rate.

• Journal of the Optical Society of Korea
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• v.12 no.4
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• pp.298-302
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• 2008

We have developed a 270-W 15-kHz MOPA system based on side-pumped rod-type Nd:YAG gain modules. The master oscillator is a 3-W 15-kHz $TEM_{00}$ $Nd:YVO_4$ laser with a pulse duration of 30 ns. To preserve the high beam quality during the amplification, we use image relay and polarization rotation which can simultaneously compensate for thermal lensing and thermal birefringence generated in the rod-type gain modules. After the amplification to 270 W with six rod-type gain modules, the beam quality factor ($M^2$) of the amplified laser beam is 5-10, and the pulse duration is maintained at 30 ns.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.149-150
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• 2006

We describe a novel method of scanning probe nanofabrication using a AFM(atomic force microscopy) tip with assistance of Femtosecond laser pulses to enhance fabrication capability. Illumination of the AFM tip with ultra-short light pulses induces a strong electric field between the tip and the metal surface, which allows removing metal atoms from the surface by means of field evaporation. Quantum simulation reveals that the field evaporation is triggered even en air when the induced electric field reaches the level of a few volts per angstrom, which is low enough to avoid unwanted thermal damages on most metal surfaces. For experimental validation, a Ti: sapphire Femtosecond pulse laser with 10 fs pulse duration at 800 nm center wavelength was used with a tip coated with gold to fabricate nanostructures on a thin film gold surface. Experimental results demonstrate that fine structures with critical dimensions less than ${\sim}10nm$ can be successfully made with precise control of the repetition rate of Femtosecond laser pulses.

• Korean Journal of Optics and Photonics
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• v.20 no.1
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• pp.34-40
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• 2009

In-situ pulse laser (Nd-YAG, 2nd harmonics 532 nm) annealing used in physical vapor deposition of $MgF_2$, $SiO_2$ and ZnS thin films was shown to be effective in improving their surface roughness properties. Total integrated scattering (TIS) measurements of $MgF_2$ and $SiO_2$ samples deposited on glass substrates revealed that the laser irradiation of films at an energy of approximately $140\;mJ/cm^2$ at 532 nm with a repetition frequency of 10 Hz and pulse duration of 5 ns during the deposition resulted in total scatterings that were minimum. But in case of the ZnS samples, measurements revealed minimum total scattering at a laser energy of approximately $62\;mJ/cm^2$. Atomic Force Microscopy (AFM) has been used to evaluate the effect of pulse laser annealing on the surface roughness for thin film samples. The results were similar to the TIS measurements, indicating that surface roughness was decreased when the irradiated annealing pulse laser energy increased. But it also increased when the irradiated annealing pulse laser energy was over some limit that depended on the materials.