• Journal of Power Electronics
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• 제5권4호
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• pp.257-263
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• 2005

This paper describes the development and testing results of a high density High Voltage Power Supply (HVPS) that drives microwave Traveling Wave Tubes (TWTs) of phased array transmitters for airborne EW systems. The HVPS is designed to consist of a number of modules connected in series. Among them, especially, the high-density pulse transformer module including the resonant circuit is newly designed to make the HVPS much more reliable. In addition, this paper describes the development of high voltage solid-state modulation using fast switching devices (FETs) and also represents the test results of a modulator module.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 하계학술대회 논문집 B
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• pp.1229-1231
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• 2004

A resonant type voltage source and power device and a control method using Pulse Density Modulation(PDM) power control and Pulse Width Modulation(PWM) voltage control for plasma sterilization are described. For the stability of discharge in the generating tube

• 한국조명전기설비학회:학술대회논문집
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• 한국조명전기설비학회 2006년도 춘계학술대회 논문집
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• pp.391-394
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• 2006

This paper presents soft switching zero voltage switching high frequency inverter for rare gas fluorescent lamp using dielectric-barrier discharge phenomenon. The simple high-frequency inverter can completely achieve stable zero voltage soft switching (ZVS) commutation for wide its output power regulation ranges and load variations under its constant high frequency pulse density modulation (PDM) scheme. Its transient and steady state operating principle is originally described and discussed for a constant high-frequency PDM control strategy under a stable ZVS operation commutation, together with its output effective power regulation characteristics-based on the high frequency PDM strategy. The experimental operating performances of this high frequency Inverter are illustrated as compared with computer simulation results and experimental ones. Its light dimming characteristics due to power regulation scheme are evaluated and discussed on the basis of simulation and experimental results. The feasible effectiveness of this high frequency inverter appliance implemented here is proven from the practical point of view.

• 전자공학회논문지SC
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• 제41권6호
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• pp.37-42
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• 2004

사람의 체질이 산성화로 변화되는 것을 막고 생체 밸런스를 유지하기위해 알칼리수를 인간의 인체에 공급할 필요가 있다. 알칼리수는 인체에 유익한 칼슘(Ca/sup +/), 칼륨(K/sup +/), 마그네슘(Mg/sup +/), 나트륨(Na/sup +/)등을 포함한 물로 되어있다. 이러한 알칼리수를 생성하기 위해서는 물을 전기분해하여 격막(격리된 특수막)을 통해 - 전극 쪽으로 미네랄들을 모아 생성한다. 물론 반대로 + 전극쪽으로는 염소(Cl), 인(P), 유황(S) 등의 - 이온을 띈 유기물들이 모여 산성수도 발생되어 다른 용도의 물로 사용할 수 있다. 이 전기분해 과정에서 - 극판과 + 극판에 PWM(pulse width modulation)전압을 Microprocessor를 이용하여 4종류의 PWM 전압을 구현하고, 전압별 ph농도 변화를 고찰해 보았다. 이와 같이 PWM제어를 이용하면 필요한 ph농도 값의 알칼리 이온수를 설정 값으로 하면 정확하게 얻을 것으로 예상된다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.472-472
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• 2011

The capacitive coupled plasma (CCP) has been extensively used in the semiconductor industry because it has not only good uniformity, but also low electron temperature. But CCP source has some problems, such as difficulty in varying the ion bombardment energy separately, low plasma density, and high processing pressure, etc. In this reason, dual frequency CCP has been investigated with a separate substrate biasing to control the plasma parameters and to obtain high etch rate with high etch selectivity. Especially, in this study, we studied on the etching of $SiO_2$ by using the pulse-time modulation in the dual-frequency CCP source composed of 60 MHz/ 2 MHz rf power. By using the combination of high /low rf powers, the differences in the gas dissociation, plasma density, and etch characteristics were investigated. Also, as the size of the semiconductor device is decreased to nano-scale, the etching of contact hole which has nano-scale higher aspect ratio is required. For the nano-scale contact hole etching by using continuous plasma, several etch problems such as bowing, sidewall taper, twist, mask faceting, erosion, distortions etc. occurs. To resolve these problems, etching in low process pressure, more sidewall passivation by using fluorocarbon-based plasma with high carbon ratio, low temperature processing, charge effect breaking, power modulation are needed. Therefore, in this study, to resolve these problems, we used the pulse-time modulated dual-frequency CCP system. Pulse plasma is generated by periodical turning the RF power On and Off state. We measured the etch rate, etch selectivity and etch profile by using a step profilometer and SEM. Also the X-ray photoelectron spectroscopic analysis on the surfaces etched by different duty ratio conditions correlate with the results above.

• 전력전자학회:학술대회논문집
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• 전력전자학회 2001년도 Proceedings ICPE 01 2001 International Conference on Power Electronics
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• pp.89-92
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• 2001

Silent gas discharge method has been widely applied for ozone production, ultraviolet light and UV laser generation. Since ozone and ultraviolet applications have tendency to spread widely in industry, the development of efficient and low-cost power supply for such systems is a task of great impotency. This paper introduces high-frequency inverter type mode power supply designed for ozone generation tube and ultraviolet generation excimer lamp and considerations on this inverter and pulse density modulation control strategy applied in it.

• 조명전기설비학회논문지
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• 제22권7호
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• pp.49-57
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• 2008

This paper presents a voltage source type half-bridge series resonant high frequency (HF) inverter for induction heated fixing roller in copy machines. This high-frequency inverter works under zero current soft switching (ZCS) commutation and has wide power regulation range due to employing a pulse density modulation (PDM) scheme. Transient and steady state operating modes of the inverter are presented in this paper together with its PDM-based power regulation system. Experimental operating performances of the developed HF-ZCS inverter as well as power losses and actual efficiency are discussed and compared with computer simulation results.

• Journal of Power Electronics
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• 제15권6호
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• pp.1421-1428
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• 2015

The efficiency and reliability of the dual-buck inverter (DBI) were greatly improved by eliminating the shoot-through problem and optimally designing the freewheeling diode. The traditional DBI suffers from large harmonic components with low output voltage and large capacity output filter inductor. To overcome the aforementioned disadvantages, a modified DBI (MBDI) was proposed by adopting a quasi-resonant link and pulse density modulation (PDM). This paper first introduces the working principle of the MBDI and PDM, and then the selection principle of system parameters is presented. Finally, a mathematical model of the MBDIis built, and an experiment prototype is set up. Simulation and experimental results verify the correctness of the theoretical analysis and the feasibility of the scheme.

• Journal of Power Electronics
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• 제2권3호
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• pp.206-211
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• 2002

Silent gas discharge method has been widely applied fur ozone production, ultraviolet light and UV laser generation. Since ozone and ultraviolet applications have tendency to spread widely in industry, the development of efficient and low - cost power supply for such systems is an important task at present. This paper introduces high-frequency inverter type mode power supply designed fur ozone generation tube and ultraviolet generation excimer lamp and considerations on the design of the inverter and pulse density modulation control strategy applied in it.

• KIEE International Transactions on Electrophysics and Applications
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• 제4C권3호
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• pp.101-105
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• 2004

The efficient power MOSFET inverter applied for a simple and low cost power supply is proposed for driving the dielectric barrier discharge (DBD) lamp load. For decades, the DBD phenomenon has been used for ozone gas production in industry. In this research, the ultraviolet and visible light sources utilizing the DBD lamp is considered as the load for solid-state high frequency power supply. It is found that the simple voltage-source single-ended quasi-resonant ZVS inverter with only one active power switch could effectively drive this load with the output power up to 700 W. The pulse density modulation based control scheme for the single-ended quasi-resonant ZVS inverter using a low voltage and high current power MOSFET switching device is proposed to provide a linear power regulation characteristic in the wide range 0-100％ of the full power as compared with the conventional control based Royer type parallel resonant inverter type power supplies.