• 제목/요약/키워드: Pt(100)

검색결과 611건 처리시간 0.03초

R.F. 마그네트론 스퍼터링에 의한 제조된 $SrBi_2$$Ta_2$$O_9$ 박막의 C축 배향성장에 미치는 Bi양의 영향 (The Effect of Bi Content on the C-axis Oriented Growth of $SrBi_2$$Ta_2$$O_9$ Thin Films Fabricateed by R.F. Magnetron Sputtering)

  • 배철휘;이전국;이시형;정형진
    • 한국세라믹학회지
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    • 제35권10호
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    • pp.1107-1112
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    • 1998
  • We could obtan c-axis oriented $SrBi_2$$Ta_2$$O_9$ thin films on usual Pt(111)/Ti/$SiO_2$/Si(100) substrate using a r. f. magnetron sputtering technique. According to the increase of sputtering pressure from 250 to 300 mTorr the Bi content and degree of the c-a xis preferred orientation of $SrBi_2$$Ta_2$$O_9$ thin films were increased. By controlling Bi(or $Bi_2O_3$) loss from $SrBi_2$$Ta_2$$O_9$ thin films during post annealing and by inserting $Bi_2O_3$ layer in $SrBi_2$$Ta_2$$O_9$ thin films the effect of Bi content on the c-axis oriented growth of $SrBi_2$$Ta_2$$O_9$ thin films could be investigated without the effect of sputtering pressure. The degree of the c-axis preferred orientation of $SrBi_2$$Ta_2$$O_9$ thin films was increased with increasing with increasing Bi content by control of Bi(or $Bi_2O_3$) loss of $SrBi_2$$Ta_2$$O_9$ thin films. But the c-axis oriented growth of $SrBi_2$$Ta_2$$O_9$ thin films disappeared by the inserting of $Bi_2O_3$ lay-er in $SrBi_2$$Ta_2$$O_9$ thin films.

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Effects of Lanthanides-Substitution on the Ferroelectric Properties of Bismuth Titanate Thin Films Prepared by MOCVD Process

  • Kim, Byong-Ho;Kang, Dong-Kyun
    • 한국세라믹학회지
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    • 제43권11호
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    • pp.688-692
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    • 2006
  • Ferroelectric lanthanides-substituted $Bi_4Ti_3O_{12}$ $(Bi_{4-x}Ln_xTi_3O_{12}, BLnT)$ thin films approximately 200 nm in thickness were deposited by metal organic chemical vapor deposition onto Pt(111)/Ti/SiO$_2$/Si(100) substrates. Many researchers reported that the lanthanides substitution for Bi in the pseudo-perovskite layer caused the distortion of TiO$_6$ octahedron in the a-b plane accompanied with a shift of the octahedron along the a-axis. In this study, the effect of lanthanides (Ln=Pr, Eu, Gd, Dy)-substitution and crystallization temperature on their ferroelectric properties of bismuth titanate $(Bi_4Ti_3O_{12}, BIT)$ thin films were investigated. As BLnT thin films were substituted to lanthanide elements (Pr, Eu, Gd, Dy) with a smaller ionic radius, the remnant polarization (2P$_r$) values had a tendency to increase and made an exception of the Eu-substituted case because $Bi_{4-x}Eu_xTi_3O_{12}$ (BET) thin films had the smaller grain sizes than the others. In this study, we confirmed that better ferroelectric properties can be expected for films composed of larger grains in bismuth layered peroskite materials. The crystallinity of the thin films was improved and the average grain size increased as the crystallization temperature,increased from 600 to 720$^{\circ}C$. Moreover, the BLnT thin film capacitor is characterized by well-saturated polarization-electric field (P-E) curves with an increase in annealing temperature. The BLnT thin films exhibited no significant degradation of switching charge for at least up to $1.0\times10^{11}$ switching cycles at a frequency of 1 MHz. From these results, we can suggest that the BLnT thin films are the suitable dielectric materials for ferroelectric random access memory applications.

Properties Optimization for Perovskite Oxide Thin Films by Formation of Desired Microstructure

  • Liu, Xingzhao;Tao, Bowan;Wu, Chuangui;Zhang, Wanli;Li, Yanrong
    • 한국세라믹학회지
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    • 제43권11호
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    • pp.715-723
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    • 2006
  • Perovskite oxide materials are very important for the electronics industry, because they exhibit promising properties. With an interest in the obvious applications, significant effort has been invested in the growth of highly crystalline epitaxial perovskite oxide thin films in our laboratory. And the desired structure of films was formed to achieve excellent properties. $Y_1Ba_2Cu_3O_{7-x}$ (YBCO) superconducting thin films were simultaneously deposited on both sides of 3 inch wafer by inverted cylindrical sputtering. Values of microwave surface resistance R$_2$ (75 K, 145 GHz, 0 T) smaller than 100 m$\Omega$ were reached over the whole area of YBCO thin films by pre-seeded a self-template layer. For implementation of voltage tunable high-quality varactor, A tri-layer structured SrTiO$_3$ (STO) thin films with different tetragonal distortion degree was prepared in order to simultaneously achieve a large relative capacitance change and a small dielectric loss. Highly a-axis textured $Ba_{0.65}Sr_{0.35}TiO_3$ (BST65/35) thin films was grown on Pt/Ti/SiO$_2$/Si substrate for monolithic bolometers by introducing $Ba_{0.65}Sr_{0.35}RuO_3$ (BSR65/35) thin films as buffer layer. With the buffer layer, the leakage current density of BST65/35 thin films were greatly reduced, and the pyroelectric coefficient of $7.6\times10_{-7}$ C $cm^{-2}$ $K^{-1}$ was achieved at 6 V/$\mu$m bias and room temperature.

$Pb_{1-x}La_{x}Ti_{1-x/4}O_3$(x=0.1)(PLT(10)) 강유전체 박막에서 동적 초전특성의 주파수 의존성에 관한 연구 (A study on the Frequency Dependence of Dynamic Pyroelectric Properties for $Pb_{1-x}La_{x}Ti_{1-x/4}O_3$(x=0.1)(PLT(10)) Ferroelectric Thin Film)

  • 차대은;장동훈;강성준;윤영섭
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집
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    • pp.104-107
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    • 2001
  • The fabricated La-modified lead titanate (PLT) thin flirt without poling treatment was investigated for modulation frequency dependence of pyroelectric properties by the dynamic method. $Pb_{1-x}La_{x}Ti_{1-x/4}O_3$PLT (x=0.1) thin film having 10 mol% La content was deposited on a Pt/$TiO_{x}$/$SiO_2$/Si substrate by sol-gel method. The PLT(10) thin film exhibits a relatively excellent dielectric property. The pyroelectric coefficient (p) of the PLT(10) thin film is 6.6 x $10^{-9}$C/$\textrm{cm}^2$.K without frequency dependence. The figure of merits for the voltage responsivity and specific detectivity are 1.03${\times}$$10^{-11}$/C.cm/J and 1.46 x $10^{-9}$C.cm/J, respectively. The PLT(10) thin film has voltage responsivity ($R_{V}$) of 5.15 V/W at 8 Hz. Noise equivalent power (NEP) and specific detectivity (D*) of the PLT(10) thin film are 9.93 x $10^{-8}$W/Hz$^{1/2}$ and 1.81 x $10^{6}$ cmHz$^{1/2}$/W at the same frequency of 100 Hz, respectively. The results means that PLT thin film having 10 mol % La content is suitable for the sensing materials of pyroelectric IR sensors.

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염료감응형 태양전지의 효율향상에 관한 연구 (A Study on the Efficiency Improvement of Dye Sensitized Solar Cell)

  • 김희제;석영국;김민철
    • 한국항해항만학회:학술대회논문집
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    • 한국항해항만학회 2009년도 공동학술대회
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    • pp.467-470
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    • 2009
  • 외부적으로 직렬 및 병렬로 접속된 50개의 DSSC로써 새로운 8 V DC 전원을 만들었다. 한 개의 DSSC는 $5.2{\times}2.6$ cm(유효면적 8 $cm^2$) 약 4.2%의 효율을 보이며, 전기화학적 임피던스 분석법 및 I-V 곡선으로 특성이 분석되었다. 또한 펄스형 Nd:YAG 레이저 빔을 활용하여 투명 도전층을 식각함으로써, 최종효율 약 45%를 달성하였다.

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증착방법을 달리한 $TiO_2$ 박막의 표면처리에 따른 저항변화 특성 연구

  • 성용헌;김상연;도기훈;서동찬;조만호;고대홍
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.206-206
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    • 2010
  • 정보화 기술이 급속히 발전함에 따라서 보다 많은 양의 data를 전송, 처리, 저장 하게 되면서 이를 처리 할 수 있는 대용량, 고속, 비휘발성의 차세대 메모리의 개발이 요구 되고 있다. 이 중 저항 변화 메모리(ReRAM)는 일반적으로 전이금속산화물을 이용한 MIM 구조로서 적당한 전기 신호를 가하면 저항이 높아서 전도되지 않는 상태(Off state)에서 저항이 낮아져 전도가 가능한 상태(On state)로 바뀌는 메모리 특성을 가진다. ReRAM은 비휘발성 메모리이며 종래의 비휘발성 기억소자인 Flash memory 보다 access time이 $10^5$배 이상 빠르며, 2~5V 이하의 낮은 전압에서 동작이 가능하다. 또한 구조가 간단하여 공정상의 결함을 현저히 줄일 수 있다는 점 등 많은 장점들이 있어서 Flash memory를 대체할 수 있는 유력한 후보로 여겨지고 있다. 저항 변화의 특징을 잘 나타내는 물질에는 $TiO_2$, $Al_2O_3$, $NiO_2$, $HfO_2$, $ZrO_2$등의 많은 전이금속산화물들이 있다. 본 연구에서는 Reactive DC-magnetron Sputtering 방법과 DC-magnetron sputter를 이용하여 Ti를 증착한 후 Oxidation 방법으로 각각 증착한 $TiO_2$박막을 사용하여 저항변화특성을 관찰하였다. $TiO_2$상부에 Atomic Layer Deposition (ALD)를 이용하여 $HfO_2$ 박막을 증착하여 표면처리를 하고, 또한 $TiO_2$에 다른 전이 금속박막 층을 추가 증착하여 저항변화 특성에 접합한 조건을 찾는 연구를 진행하였다. 하부 전극과 상부 전극 물질로는 Si 100 wafer 위에 Pt 또는 TiN을 사용하였다. 저항변화 특성을 평가하기 위해 Agilent E5270B를 이용하여 current-voltage (I-V)를 측정하였다. X-ray Diffraction (XRD)를 이용하여 증착 된 전기금속 박막 물질의 결정성을 관찰했으며, Atomic Force Microscopy (AFM)을 이용하여 증착 된 샘플의 표면을 관찰했다. SEM과 TEM을 통해서는 sample의 미세구조를 확인 하였다.

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금속 산화물 나노입자가 포함된 ZnO 박막의 광학적 및 전기적 특성 연구

  • 이동욱;오규진;심성민;김은규
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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    • pp.210.1-210.1
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    • 2013
  • ZnO는 태양전지의 투명전극 및 윈도우 물질로 그 동안 광범위하게 사용되어 왔다. 하지만 태양광의 효율 증가를 위하여서는 가시광 영역뿐만 아니라 자외선 및 적외선 영역을 이용할 필요가 있다. 또한 금속 산화물 반도체 나노 입자는 크기를 조절하여 흡수하는 태양광의 파장 영역을 조절할 수 있고 이를 이용하여 이종구조를 사지는 고효율의 태양전지를 구현할 수 있다. 본 연구에서는 3.4 eV의 에너지 밴드갭을 가지는 ZnO박막내에 밴드갭을 조절 할 수 있는 금속 산화물 나노입자를 삽입하여 광학적, 전기적 특성을 연구하였다. ZnO 박막을 증착하기 전 유리 및 사파이어 기판에 스퍼터를 사용하여 Pt금속전극을 형성한 이후, ZnO 박막을 $1{\times}10^{-10}$ Torr의 기본 진공도를 유지하는 초고진공 스퍼터를 사용하여 100 nm 두께로 증착 하였다. 금속 산화물 나노 입자를 제작 하기 위하여, ZnO 박막에 열증착 장비(thermal evaporator)를 사용하여 In 나노 입자를 10 nm 이하의 크기로 제작 하였다. 그 상부에 초고진공 스퍼터 와 열증착 장비를 사용하여 ZnO 박막 및 In 나노 입자를 순차적으로 증착하여 수백 nm 두께의 ZnO 박막을 제작한다. ZnO 박막 내부에 형성된 In 양자점은 ZnO 증착공정 중에 산화되어 $In_2O_3$ 의 산화물 나노 입자로 형성되며, 내부의 구조는 투과전자 현미경을 사용하여 확인 하였다. 제작된 금속 산화물 나노입자가 포함된 ZnO 박막의 광학적 특성을 photoluminescence, UV-Vis spectroscopy, ellipsometry를 통하여 확인 하였으며, solar simulator와 전류-전압 특정 장비를 사용하여 전기적 특성을 분석 하였다.

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가미보양환오탕(加味補陽還五湯)의 항혈전(抗血栓) 및 항염작용(抗炎作用)에 대한 실험적 연구 (Experimental Study on Anti-thrombotic and Anti-inflammatory Effect of Kami-BoyangHwanoh-Tang)

  • 이정은;유동열
    • 동의생리병리학회지
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    • 제20권4호
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    • pp.957-965
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    • 2006
  • This study was peformed to evaluate antithrombotic activities and anti-inflammatory effects of Kami-BoyangHwanoh-Tang(KBHT). The major findings were summarized as follows. In experiment of anti-thrombotic effect; KBHT inhibited human platelet aggregation induced by ADP and epinephrine as compared with the control group and inhibited pulmonary embolism induced by collagen and epinephrine (inhibitory rate is 50 %). KBHT increased platelet number significantly and also KBHT shortened PT and APTT significantly as compared with the control group in thrombus model induced by dextran. In experiment of anti-inflammatory effect; KBHT inhibited $IL-1{\beta}$, IL-6, $TNF-{\alpha}$, COX-2 and NOS-II mRNA expression as compared with the control group in a concentration-dependent degree, and inhibited NO production significantly at 50, $100\;{\mu}g/^{ml}$, and also inhibited ROS production in a concentration-dependent degree as compared with the control group in RAW 264.7 cell line. KBHT inhibited $IL-1{\beta}$, IL-6 and $TNF-{\alpha}$ production significantly in serum of acute inflammation-induced mice, and decreased $IL-1{\beta}$, IL-6 and $TNF-{\alpha}$ production in spleen tissue, and also decreased IL-6 and $TNF-{\alpha}$ production in liver tissue, but increased $IL-1{\beta}$ production in liver tissue of acute inflammation-induced mice. KBHT increased survival rate at 3rd day in mice with lethal endotoxemia induced by LPS. These results suggest that KBHT can be useful in treating diverse female diseases caused by thrombosis and inflammation such as endometrosis, myoma, pelvic congestion, chronic cervicitis, chronic pelvic inflammatory disease and so on.

새로운 유전자 재조합 기술에 의하여 생산된 Erythropoietin의 일반약리작용 (General Pharmacology of Erythropoietin Produced by a New Recombinant DNA Technique)

  • 김영훈;정성목;임동문;조효진;정재경;김달현;박관하;이동억;김현수
    • Biomolecules & Therapeutics
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    • 제2권4호
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    • pp.336-342
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    • 1994
  • The general pharmacological properties of EPO were investigated in various animals administering intravenously and in vitro system. The results were as follows. 1. Central nervous system: EPO at doses of 70, 700, 7000 U/kg showed no effect In mice on general behavior, on strychnine- and pentetrazol-induced convulsion and on acetic acid-induced writhing syndrome. The hexobarbital-induced sleeping time in mice was slightly reduced by EPO at a dose of 7000 U/kg but did not change at doses of 70, 700 U/kg. The body temperature in rats was slightly decreased by EPO at doses of 700, 7,000 U/kg but the change was in normal physiological range. 2. Respiratory and cardiovascular system: EPO showed no effect on respiratory rate, blood pressure, heart rate, femoral blood flow, and electrocardiogram in anesthetized dogs at doses of 70, 700, 7000 U/kg. 3. Smooth muscle: EPO at concentrations of 70, 700 U/ml had no effect on the contractile response of isolated guinea pig ileum to histamine and acetylcholine. 4. Water and electrolytes excretion: EPO at dose above 700 U/kg increased urine volume in rats but did not affect the concentrations of $Na^{+},\;K^{+},\;Cl^{-}$ in urine. 5. Gastrointestinal system: EPO(70, 700, 7000 U/kg) had no effect on the intestinal charcoal meal propulsion 6. Blood coagulation system: The administration of EPO(70, 700, 7000 U/kg) had no effect on the plasma prothrombin time(PT) and activated partial thromboplastin time(APTT) in mice. Platelet aggregation induced by ADP and collagen was not influenced by EPO(70 U/ml, 700 U/ml). The overall results obtained indicated that EPO exerts almost no serious pharmacological effect even at a 100-fold clinical dose(7000 U/kg).

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도금 공장의 화재 예방을 위한 도금장비 개선에 관한 연구 (A Study on improvement of plating equipment for fire prevention)

  • 김성재;김성곤;유우식
    • 대한안전경영과학회지
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    • 제19권4호
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    • pp.35-42
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    • 2017
  • A number of plating companies have been exposed to the risk of fire due to unexpected temperature increasing of water or other reasons in a plating bath. Since the companies are not able to forecast the unexpected temperature increasing of plating bath and most of raw materials in the bath have low ignition temperature, it is easy to be exposed to the risk of fire. Thus, in previous study, we tried to monitor and notice the dangerous change of temperature of water immediately to prevent the risk of fire from plating process. However, unfortunately previous studies were not able to shut out the fundamental cause of fire since bath temperature sensor can detect air temperature when the level sensor was malfunctioned. In this paper we developed the Teflon heater which contains a built in temperature sensor and improved plating equipment system. Teflon heater is improved using Pt $100{\Omega}$ sensor which can detect until $600^{\circ}C$. When the bath temperature sensor detects over $60^{\circ}C$ or the Teflon heater sensor detects over $240^{\circ}C$ they temporarily shut down the heater to control temperature. Also relay completely shuts down main power when detects instant temperature is detected over 5% of $240^{\circ}C$ by the heater sensor to prevent teflon melting down and fire spreads. Developed plating equipment system can monitor a real time temperature in the teflon tube and bath water. Therefore we think the proposed plating equipment can eliminate the possibility of fire in plating processes fundamentally.